JP5303028B2 - マイクロ流体センサの製造方法 - Google Patents

マイクロ流体センサの製造方法 Download PDF

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Publication number
JP5303028B2
JP5303028B2 JP2011503986A JP2011503986A JP5303028B2 JP 5303028 B2 JP5303028 B2 JP 5303028B2 JP 2011503986 A JP2011503986 A JP 2011503986A JP 2011503986 A JP2011503986 A JP 2011503986A JP 5303028 B2 JP5303028 B2 JP 5303028B2
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Japan
Prior art keywords
electrode
layer
channel
interrogation
tunnel
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Expired - Fee Related
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JP2011503986A
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English (en)
Japanese (ja)
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JP2011516884A5 (enExample
JP2011516884A (ja
Inventor
アイリフェ，ハロルド・イー
キング，カーティス・エス
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イーアイ・スペクトラ・エルエルシー
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/502707—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the manufacture of the container or its components
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2200/00—Solutions for specific problems relating to chemical or physical laboratory apparatus
    • B01L2200/06—Fluid handling related problems
    • B01L2200/0647—Handling flowable solids, e.g. microscopic beads, cells, particles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2200/00—Solutions for specific problems relating to chemical or physical laboratory apparatus
    • B01L2200/10—Integrating sample preparation and analysis in single entity, e.g. lab-on-a-chip concept
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/06—Auxiliary integrated devices, integrated components
    • B01L2300/0627—Sensor or part of a sensor is integrated
    • B01L2300/0645—Electrodes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/06—Auxiliary integrated devices, integrated components
    • B01L2300/0681—Filter
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/08—Geometry, shape and general structure
    • B01L2300/0861—Configuration of multiple channels and/or chambers in a single devices
    • B01L2300/0874—Three dimensional network
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/08—Geometry, shape and general structure
    • B01L2300/0887—Laminated structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/12—Specific details about materials
    • B01L2300/123—Flexible; Elastomeric
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
    • Y10T156/10—Methods of surface bonding and/or assembly therefor
    • Y10T156/1052—Methods of surface bonding and/or assembly therefor with cutting, punching, tearing or severing
    • Y10T156/1056—Perforating lamina
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
    • Y10T156/10—Methods of surface bonding and/or assembly therefor
    • Y10T156/1052—Methods of surface bonding and/or assembly therefor with cutting, punching, tearing or severing
    • Y10T156/1062—Prior to assembly
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing
    • Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/49155—Manufacturing circuit on or in base

Landscapes

  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Analytical Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Hematology (AREA)
  • Clinical Laboratory Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
JP2011503986A 2008-04-07 2009-04-07 マイクロ流体センサの製造方法 Expired - Fee Related JP5303028B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US12324808P 2008-04-07 2008-04-07
US61/123,248 2008-04-07
US12412108P 2008-04-14 2008-04-14
US61/124,121 2008-04-14
PCT/US2009/002172 WO2009126257A1 (en) 2008-04-07 2009-04-07 Method for manufactiring a microfluidic sensor

Publications (3)

Publication Number Publication Date
JP2011516884A JP2011516884A (ja) 2011-05-26
JP2011516884A5 JP2011516884A5 (enExample) 2012-09-06
JP5303028B2 true JP5303028B2 (ja) 2013-10-02

Family

ID=41162160

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011503986A Expired - Fee Related JP5303028B2 (ja) 2008-04-07 2009-04-07 マイクロ流体センサの製造方法

Country Status (5)

Country Link
US (2) US8182635B2 (enExample)
EP (1) EP2265923A4 (enExample)
JP (1) JP5303028B2 (enExample)
CN (1) CN101999071B (enExample)
WO (1) WO2009126257A1 (enExample)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9452429B2 (en) * 2006-02-02 2016-09-27 E. I. Spectra, Llc Method for mutiplexed microfluidic bead-based immunoassay
EP2595753A1 (en) 2010-07-22 2013-05-29 Stichting voor de Technische Wetenschappen Lab-on-a-chip device, for instance for use of the analysis of semen
JP5579537B2 (ja) * 2010-08-23 2014-08-27 株式会社堀場製作所 細胞分析用カートリッジ
DE112011104891B4 (de) 2011-02-15 2018-01-25 National Research Council Of Canada 3D-Mikrofluid-Vorrichtungen auf der Grundlage von durchbrochenen thermoplastischen Elastomer-Membranen
CN102522342A (zh) * 2011-12-27 2012-06-27 日月光半导体制造股份有限公司 半导体结构及其制造方法
JP5870716B2 (ja) * 2012-01-31 2016-03-01 コニカミノルタ株式会社 生化学検査装置
US9333502B1 (en) 2012-09-13 2016-05-10 E. I. Spectra, Llc Sample-acquiring microfluidic tester
US10261073B2 (en) 2012-10-10 2019-04-16 The Board Of Trustees Of The Leland Stanford Junior University Compartmentalized integrated biochips
JP5904958B2 (ja) 2013-03-07 2016-04-20 株式会社東芝 半導体マイクロ分析チップ及びその製造方法
JP5951527B2 (ja) 2013-03-07 2016-07-13 株式会社東芝 検体検出装置及び検出方法
JP6151128B2 (ja) * 2013-08-12 2017-06-21 株式会社東芝 半導体マイクロ分析チップ及びその製造方法
JP2015099031A (ja) * 2013-11-18 2015-05-28 株式会社東芝 半導体マイクロ分析チップ及びその製造方法
JP6189231B2 (ja) * 2014-02-26 2017-08-30 株式会社東芝 微粒子検査装置と微粒子検査システム及び微粒子検査方法
CN110982689A (zh) 2014-03-11 2020-04-10 伊鲁米那股份有限公司 一次性的集成微流体盒及其制备和使用的方法
KR101527768B1 (ko) * 2014-09-10 2015-06-12 주식회사 엑세스바이오코리아 미세유체 칩 및 진단기기
KR101724499B1 (ko) * 2015-12-11 2017-04-07 현대자동차 주식회사 입자상 물질 센서 및 이를 이용한 측정방법
EP3592695A1 (en) 2017-03-09 2020-01-15 Ecole Polytechnique Federale de Lausanne (EPFL) Microfluidic sensor and method for obtaining such a sensor
CN109682878B (zh) * 2019-03-01 2024-07-05 南京岚煜生物科技有限公司 一种具有五层结构的多通道微流体凝血检测芯片
US11434747B2 (en) * 2020-07-24 2022-09-06 Baker Hughes Oilfield Operations Llc Down-hole tools comprising layers of materials and related methods
EP4462122A1 (en) * 2023-05-08 2024-11-13 Roche Diagnostics GmbH Method of manufacturing a plurality of analytical test elements
CN117511739B (zh) * 2024-01-04 2024-03-12 中日友好医院(中日友好临床医学研究所) 微流体骨类器官芯片的构建方法及装置

Family Cites Families (45)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2656508A (en) 1949-08-27 1953-10-20 Wallace H Coulter Means for counting particles suspended in a fluid
US3910702A (en) 1974-02-12 1975-10-07 Particle Technology Inc Apparatus for detecting particles employing apertured light emitting device
US4130754A (en) 1977-06-16 1978-12-19 Cortex Research Corporation Particle counting
US4164870A (en) 1978-04-10 1979-08-21 Medical Laboratory Automation, Inc. Pipettes
US4488814A (en) 1981-09-28 1984-12-18 Miles Laboratories, Inc. Apparatus for and method of optical absorbance and fluorescent radiation measurement
US4873875A (en) 1986-06-27 1989-10-17 Prism Technology, Inc. System for optically interrogating liquid samples and for withdrawing selected sample portions
US5376878A (en) 1991-12-12 1994-12-27 Fisher; Timothy C. Multiple-aperture particle counting sizing and deformability-measuring apparatus
US5516564A (en) 1993-04-28 1996-05-14 Costar Corporation Sterile irradiated hydrophobic pipette tip
US6454945B1 (en) 1995-06-16 2002-09-24 University Of Washington Microfabricated devices and methods
US5695092A (en) 1996-01-03 1997-12-09 Betzdearborn Inc. Fluid flow measuring system
CA2306126A1 (en) * 1997-10-15 1999-04-22 Aclara Biosciences, Inc. Laminate microstructure device and method for making same
EP1179585B1 (en) 1997-12-24 2008-07-09 Cepheid Device and method for lysis
CA2229528A1 (en) 1998-02-13 1999-08-13 Shailesh Mehta Apparatus and method for analyzing particles
US20080076997A1 (en) * 1998-04-30 2008-03-27 Abbott Diabetes Care, Inc. Analyte monitoring device and methods of use
CA2320296A1 (en) 1998-05-18 1999-11-25 University Of Washington Liquid analysis cartridge
US6169394B1 (en) 1998-09-18 2001-01-02 University Of The Utah Research Foundation Electrical detector for micro-analysis systems
US6338790B1 (en) * 1998-10-08 2002-01-15 Therasense, Inc. Small volume in vitro analyte sensor with diffusible or non-leachable redox mediator
US6285807B1 (en) 1998-11-16 2001-09-04 Trustees Of Tufts College Fiber optic sensor for long-term analyte measurements in fluids
DE60000386T2 (de) 1999-01-25 2003-01-09 Hamamatsu Photonics K.K., Hamamatsu Adapter für eine pipette, pipette zur absorptionsmessung, verfahren und vorrichtung zur absorptionsmessung
DE19933458B4 (de) 1999-07-15 2015-08-20 Eppendorf Ag Einrichtungen und Systeme zum Handhaben von Flüssigkeitsproben
US6437551B1 (en) 1999-11-02 2002-08-20 The Regents Of The University Of California Microfabricated AC impedance sensor
JP2001221824A (ja) 2000-02-10 2001-08-17 Oht Inc 検査装置及び検査方法、検査ユニット
CA2399181C (en) 2000-02-29 2011-02-22 Gen-Probe Incorporated Fluid dispense and liquid surface verification system and method
JP4733331B2 (ja) 2000-03-14 2011-07-27 マイクロニックス、インコーポレーテッド マイクロ流動体分析用デバイス
US6382228B1 (en) 2000-08-02 2002-05-07 Honeywell International Inc. Fluid driving system for flow cytometry
EP1345698A4 (en) 2000-11-16 2006-05-17 Fluidigm Corp MICROFLUID DEVICES FOR THE INTRODUCTION AND DISPOSAL OF FLUIDS FROM MICROFLUID SYSTEMS
US6703819B2 (en) 2001-12-03 2004-03-09 Board Of Regents, The University Of Texas System Particle impedance sensor
US7223371B2 (en) 2002-03-14 2007-05-29 Micronics, Inc. Microfluidic channel network device
US20030180965A1 (en) 2002-03-25 2003-09-25 Levent Yobas Micro-fluidic device and method of manufacturing and using the same
US6794877B2 (en) * 2002-07-31 2004-09-21 International Technidyne Corporation Apparatus and method for analytical determinations
AU2003278365B2 (en) * 2002-10-30 2010-07-01 Lifescan Scotland Limited Cooling stations for use in a web printing process for the manufacture of electrochemical sensors
US20080047836A1 (en) * 2002-12-05 2008-02-28 David Strand Configurable Microfluidic Substrate Assembly
US7338637B2 (en) 2003-01-31 2008-03-04 Hewlett-Packard Development Company, L.P. Microfluidic device with thin-film electronic devices
JP2004257766A (ja) * 2003-02-24 2004-09-16 Horiba Ltd マイクロ血球カウンタ
US8679853B2 (en) * 2003-06-20 2014-03-25 Roche Diagnostics Operations, Inc. Biosensor with laser-sealed capillary space and method of making
US7682833B2 (en) 2003-09-10 2010-03-23 Abbott Point Of Care Inc. Immunoassay device with improved sample closure
US7357851B2 (en) * 2003-09-30 2008-04-15 Abbott Laboratories Electrochemical cell
US20050118705A1 (en) 2003-11-07 2005-06-02 Rabbitt Richard D. Electrical detectors for microanalysis
JP4277104B2 (ja) * 2004-02-20 2009-06-10 独立行政法人産業技術総合研究所 バイオセンサ連接シートの製造方法
JP2006071388A (ja) * 2004-09-01 2006-03-16 Horiba Ltd マイクロチップおよびマイクロチップ中における流体制御方法
EP1643254A3 (en) 2004-10-04 2006-09-13 Fuji Photo Film Co., Ltd. Sample supplying method and device
CN100385208C (zh) * 2005-05-11 2008-04-30 浙江大学 一种电化学微流量测量方法及电化学微流量传感器
JP4567540B2 (ja) * 2005-07-07 2010-10-20 株式会社堀場製作所 細胞数計測装置および細胞数計測用カートリッジ
US7520164B1 (en) * 2006-05-05 2009-04-21 E.I. Spectra, Llc Thin film particle sensor
JP2009543058A (ja) 2006-06-30 2009-12-03 アプライド バイオシステムズ， エルエルシー 結合相互作用を分析する方法

Also Published As

Publication number Publication date
CN101999071A (zh) 2011-03-30
WO2009126257A1 (en) 2009-10-15
EP2265923A1 (en) 2010-12-29
US20110030888A1 (en) 2011-02-10
US8182635B2 (en) 2012-05-22
JP2011516884A (ja) 2011-05-26
EP2265923A4 (en) 2016-05-04
CN101999071B (zh) 2013-05-01
US20120261067A1 (en) 2012-10-18
US8608891B2 (en) 2013-12-17

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