JP5302234B2 - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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- JP5302234B2 JP5302234B2 JP2010025551A JP2010025551A JP5302234B2 JP 5302234 B2 JP5302234 B2 JP 5302234B2 JP 2010025551 A JP2010025551 A JP 2010025551A JP 2010025551 A JP2010025551 A JP 2010025551A JP 5302234 B2 JP5302234 B2 JP 5302234B2
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/93—Batch processes
- H01L24/95—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips
- H01L24/97—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips the devices being connected to a common substrate, e.g. interposer, said common substrate being separable into individual assemblies after connecting
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
- H01L2224/321—Disposition
- H01L2224/32151—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/32225—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/48225—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
- H01L2224/48227—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/48225—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
- H01L2224/48227—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item
- H01L2224/48228—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item the bond pad being disposed in a recess of the surface of the item
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73251—Location after the connecting process on different surfaces
- H01L2224/73265—Layer and wire connectors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/93—Batch processes
- H01L2224/95—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips
- H01L2224/97—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips the devices being connected to a common substrate, e.g. interposer, said common substrate being separable into individual assemblies after connecting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/153—Connection portion
- H01L2924/1531—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface
- H01L2924/15311—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface being a ball array, e.g. BGA
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/181—Encapsulation
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- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
Description
本実施の形態1による半導体装置を図1〜図3を用いて説明する。図1は半導体装置の要部断面図、図2は図1の一部を拡大して示す要部断面図、図3は半導体装置の斜視図である。
前述した図1および図2に示すように、配線基板2は、その厚さ方向と交差する平面形状が四角形になっている。配線基板2は多層配線構造から成り、本実施の形態1では4つの配線層を有している。詳細に説明すると、配線基板2は、コア材2aと、このコア材2aの表面(配線基板2の上面2x側)に形成された配線層2b(配線基板2における上から2番目の配線層)と、この配線層2bを覆うように形成された絶縁層2cと、この絶縁層2cの表面に形成された配線層2d(配線基板2における最上層の配線層)とを有している。配線層2bは主にグランド配線として用いる。ここで、複数のボンディングリード(電極パッド)9は、最上層の配線層2dの一部から成り、この最上層の配線層2dを覆うようにして形成された保護膜10から露出している。
前述した図1に示すように、配線基板2の上面2x側に接着剤(ダイボンド材)7を介して搭載された半導体チップ4は、その厚さ方向と交差する平面形状が四角形になっている。なお、本実施の形態1で使用する接着剤7は、例えばペースト状またはフィルム状の接着剤である。
前述した図1に示すように、配線基板2の下面2yに形成された複数のバンプ・ランド3には、複数の半田ボール6が形成されている。複数のバンプ・ランド3は、配線基板2の下面2y側を被覆する保護膜11にそれぞれのバンプ・ランド3に対応して形成された開口部により露出しており、複数の半田ボール6は、複数のバンプ・ランド3とそれぞれ電気的に、かつ機械的に接続されている。半田ボール6としては、鉛を実質的に含まない鉛フリー半田組成の半田バンプ、例えばSn−3[wt%]Ag−0.5[wt%]Cu組成の半田バンプが用いられる。
本発明の実施の形態2による半導体装置は、前述した実施の形態1と同様に、ダイシングライン15に位置する配線層2gをエッチングした後、ダイシングブレード16を用いて、一括モールド法により樹脂封止された配線基板2Aをダイシングライン15に沿って切断し、1個1個の半導体装置1に切り分けられたものであるが、ダイシングライン15に位置する保護膜11のエッチングされる領域が前述の実施の形態1と異なる。すなわち、前述した実施の形態1では、第1方向と第2方向とが直交する箇所(配線基板2の4つの角部)を除いて、ダイシングライン15に位置する保護膜11をエッチングした。これに対して、本実施の形態2では、完成した半導体装置の輸送中における問題点を解決するために、ダイシングライン15に位置する保護膜11を島状または鋸歯状にエッチングする。
本発明の実施の形態3による半導体装置は、前述した実施の形態1による半導体装置1の変形例である。
本発明の実施の形態4による半導体装置は、前述した実施の形態2による第1半導体装置27の変形例である。
2,2A 配線基板
2a コア材
2b,2d,2e,2g 配線層
2c,2f 絶縁層
2x 上面(表面)
2y 下面(裏面)
3 バンプ・ランド(電極パッド)
4 半導体チップ
5,5A 樹脂封止体(封止体)
6 半田ボール(外部端子)
7 接着剤(ダイボンド材)
8 電極パッド
9 ボンディングリード(電極パッド)
10,11 保護膜
12a 貫通孔(ビア)
12b 接続孔
13,14 導電性部材
15 ダイシングライン
16 ダイシングブレード
21 包装材(ICトレイ)
22 ポケット
23 半導体装置
24 半田ボール
25 配線基板
26 保護膜
27 第1半導体装置
28 第2半導体装置
29,30 半導体装置
50 多層配線基板
51 単位フレーム
52 半田ボール
53 配線
54 メッキ配線
55 ダイシングライン
56 封止樹脂
Claims (6)
- (a)絶縁層、前記絶縁層の上面側に形成された上面側配線層、前記上面側配線層の一部が露出するように前記上面側配線層を覆う上面側保護膜、前記絶縁層の前記上面とは反対側の下面側に形成された下面側配線層、および前記下面側配線層の一部が露出するように前記下面側配線層を覆う下面側保護膜、を有する配線基板と、
(b)前記配線基板の前記上面側に搭載された半導体チップと、
(c)表面、および前記表面と交差する側面を有し、前記半導体チップを封止する樹脂封止体と、
(d)前記下面側配線層の前記一部からそれぞれ成る複数のバンプ・ランドにそれぞれ形成された複数の外部端子と、
を含み、
前記配線基板の平面形状は四角形から成り、
前記複数のバンプ・ランドは、前記配線基板の辺に沿って形成されており、
前記下面側保護膜は、前記複数のバンプ・ランドよりも前記配線基板の前記辺側において、前記配線基板の角部を残して前記配線基板の前記辺に沿って除去されており、
前記下面側保護膜が除去された部分の前記配線基板の前記辺に沿った方向と交差する方向の幅は、0.2mm以下であり、
前記下面側配線層は、前記複数のバンプ・ランドとそれぞれ繋がり、かつ前記配線基板の前記辺に向かってそれぞれ延在する複数の配線を有しており、
前記下面側保護膜が除去された部分において、前記複数の配線のそれぞれの一部も除去され、かつ前記絶縁層の一部が露出しており、
前記樹脂封止体の前記側面は、前記配線基板の側面と面一であることを特徴とする半導体装置。 - 請求項1記載の半導体装置において、前記上面側保護膜および前記下面側保護膜は、エポキシ系またはポリイミド系の熱硬化性絶縁樹脂を主成分とすることを特徴とする半導体装置。
- 請求項1記載の半導体装置において、前記上面側配線層および前記下面側配線層は銅を主成分とする金属膜であることを特徴とする半導体装置。
- 請求項1記載の半導体装置において、前記下面側配線層は信号配線を構成することを特徴とする半導体装置。
- 請求項1記載の半導体装置において、前記半導体チップは、ペースト状の接着剤を介して、前記配線基板の前記上面側に搭載されていることを特徴とする半導体装置。
- 請求項1記載の半導体装置において、前記上面側配線層の前記一部からそれぞれ成る複数のボンディングリードは、複数のワイヤを介して、前記半導体チップの複数の電極パッドとそれぞれ電気的に接続されていることを特徴とする半導体装置。
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JP2010025551A JP5302234B2 (ja) | 2010-02-08 | 2010-02-08 | 半導体装置 |
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JP2010025551A JP5302234B2 (ja) | 2010-02-08 | 2010-02-08 | 半導体装置 |
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JP5302234B2 true JP5302234B2 (ja) | 2013-10-02 |
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JP5968713B2 (ja) * | 2012-07-30 | 2016-08-10 | ルネサスエレクトロニクス株式会社 | 半導体装置 |
JP6254807B2 (ja) * | 2013-09-27 | 2017-12-27 | ローム株式会社 | 半導体装置および電子機器 |
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JP2006294832A (ja) * | 2005-04-11 | 2006-10-26 | Renesas Technology Corp | 半導体装置の製造方法 |
JP2008288400A (ja) * | 2007-05-18 | 2008-11-27 | Panasonic Corp | 回路基板,樹脂封止型半導体装置,樹脂封止型半導体装置の製造方法,トレイおよび検査ソケット |
JP5224784B2 (ja) * | 2007-11-08 | 2013-07-03 | 新光電気工業株式会社 | 配線基板及びその製造方法 |
JP2009267227A (ja) * | 2008-04-28 | 2009-11-12 | Sumitomo Metal Electronics Devices Inc | 半導体素子収納用パッケージとその製造方法 |
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