JP5301778B2 - Surface shape measuring device - Google Patents

Surface shape measuring device Download PDF

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JP5301778B2
JP5301778B2 JP2007000062A JP2007000062A JP5301778B2 JP 5301778 B2 JP5301778 B2 JP 5301778B2 JP 2007000062 A JP2007000062 A JP 2007000062A JP 2007000062 A JP2007000062 A JP 2007000062A JP 5301778 B2 JP5301778 B2 JP 5301778B2
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stylus
test object
surface shape
frequency
state
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JP2008164558A (en
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康成 長池
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Olympus Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a surface shape measuring device capable of detecting quickly and precisely a contact abnormality of a probe generated during measurement of the surface shape of a specimen. <P>SOLUTION: The device 1 for measuring the surface shape of the specimen 13 by scanning relatively horizontally in the state where the probe 2 is brought into contact with the specimen 13, is characterized by being equipped with an operation part for determining a frequency equivalent to fluctuation of displacement of the probe 2 during a prescribed time, and a determination part for determining the contact state between the probe 2 and the specimen 13 based on a relative time variation of the frequency. <P>COPYRIGHT: (C)2008,JPO&amp;INPIT

Description

本発明は、光学関連素子等の表面形状測定装置に関する。   The present invention relates to a surface shape measuring apparatus such as an optical related element.

従来、レンズや金型等の光学関連素子の表面形状評価を行う装置として、触針子を光学関連素子等の被検物の面上に追従させる接触走査式の測定方法を採用した表面形状測定装置が用いられている（例えば、特許文献１参照。）。以下、図７を参照して、本装置の測定原理について説明する。   Conventionally, as a device for evaluating the surface shape of optical-related elements such as lenses and molds, surface shape measurement that employs a contact scanning measurement method in which the stylus follows the surface of the test object such as optical-related elements An apparatus is used (for example, refer to Patent Document 1). Hereinafter, the measurement principle of the present apparatus will be described with reference to FIG.

触針子１０１を先端に有する触針軸１０２は、静圧軸受１０３により滑らかに摺動可能な状態で保持されている。触針軸１０２の摺動する距離は変位計１０４によって測定可能であり、静圧軸受１０３及び変位計１０４は平板部材１０５上に載置され、触針ユニットとして構成されている。   A stylus shaft 102 having a stylus 101 at its tip is held by a hydrostatic bearing 103 in a state in which it can slide smoothly. The sliding distance of the stylus shaft 102 can be measured by a displacement meter 104, and the hydrostatic bearing 103 and the displacement meter 104 are placed on a flat plate member 105 and configured as a stylus unit.

角度調整部材１０６の後部をＹ軸正方向に上昇させると、触針ユニット全体が水平方向に対して傾斜した状態となる。このとき、触針軸１０２は静圧軸受１０３によって滑らかに摺動可能に保持されているので、自らの重力により傾斜方向（Ｚ軸負方向）へ進もうとする力が作用する。この結果、触針子１０１は前方に位置する被検物１０７に向かって摺動し、その表面に接触する。   When the rear part of the angle adjusting member 106 is raised in the positive Y-axis direction, the entire stylus unit is inclined with respect to the horizontal direction. At this time, since the stylus shaft 102 is slidably held by the hydrostatic bearing 103, a force to advance in the tilt direction (Z-axis negative direction) acts by its own gravity. As a result, the stylus 101 slides toward the test object 107 located in front and contacts the surface thereof.

触針子１０１が被検物１０７に接触している状態で、駆動機構１０８により被検物１０７をＸ軸方向に走査すると、被検物１０７の形状に沿って触針子１０１が追従し、これに従って触針軸１０２が変位する。変位する触針軸１０２の位置座標を変位計１０４により、また、走査される被検物１０７の位置座標を変位計１０９により時系列的に取得することで被検物１０７の形状が得られる。本装置においては、触針子１０１を被検物１０７の表面に接触させる力（以下、測定力と称する。）を発生させるために、バネによる弾性力やエアによる圧力によらず、触針軸１０２自身の重力を利用する自重傾斜方式が採用されている。本装置によれば、例えば５ｍｇｆといった非常に小さな測定力を得ることが可能であり、かつ角度調整部材１０６により容易に測定力を調整することができる。
特表２００５−５０２８７６号公報 When the test object 107 is scanned in the X-axis direction by the drive mechanism 108 in a state where the stylus 101 is in contact with the test object 107, the stylus 101 follows the shape of the test object 107, Accordingly, the stylus shaft 102 is displaced. The shape of the test object 107 is obtained by acquiring the position coordinates of the stylus shaft 102 to be displaced by the displacement meter 104 and the position coordinates of the scanned test object 107 by the displacement meter 109 in time series. In this apparatus, in order to generate a force (hereinafter referred to as a measuring force) for bringing the stylus 101 into contact with the surface of the test object 107, a stylus shaft is used regardless of the elastic force of a spring or the pressure of air. A self-weight tilt method using the gravity of 102 is adopted. According to this apparatus, it is possible to obtain a very small measuring force, for example, 5 mgf, and the measuring force can be easily adjusted by the angle adjusting member 106.
JP 2005-502876 gazette

しかしながら、本装置においては、触針軸１０２と静圧軸受１０３の間隙が数μｍ程度と非常に狭くなっていること、測定力を重力のみに頼っていること等の理由から、埃や微粒子といった異物が上記間隙に混入したり、上記間隙内で結露を生じたりした場合に、触針軸１０２が静圧軸受１０３内で滑らかに摺動せず、被検物１０７の表面を正確に追従しなくなることがある。さらに、異物の混入や結露の程度と状態によっては、摺動が停止してしまうこともあり得る。   However, in this device, the gap between the stylus shaft 102 and the hydrostatic bearing 103 is very narrow, about several μm, and the measurement force depends only on gravity. When foreign matter enters the gap or condensation occurs in the gap, the stylus shaft 102 does not slide smoothly in the hydrostatic bearing 103 and accurately follows the surface of the test object 107. It may disappear. Furthermore, the sliding may stop depending on the degree of contamination and the state of contamination.

測定中にこのような状態が発生すると、得られる測定データは被検物の形状を反映せず、無意味なものとなってしまう。また、測定中にこのような状態の発生に気づいたとしても、再測定が必要となるため、余計な時間がかかる。   When such a state occurs during measurement, the obtained measurement data does not reflect the shape of the test object and becomes meaningless. In addition, even if the occurrence of such a state is noticed during the measurement, it takes extra time because re-measurement is required.

本発明は上記事情に鑑みて成されたものであり、被検物の表面形状測定中に発生する触針子の接触異常(測定中であるにもかかわらず被検物に接触していない状態等)を迅速かつ的確に検知することができる表面形状測定装置を提供することを目的とする。   The present invention has been made in view of the above circumstances, contact abnormality of the stylus generated during the measurement of the surface shape of the test object (state that is not in contact with the test object despite being measured) It is an object of the present invention to provide a surface shape measuring apparatus capable of detecting a swift and accurate detection.

本発明の表面形状測定装置は、触針子を被検物に接触させた状態で相対的に水平走査させて、前記被検物の表面形状を測定する表面形状測定装置であって、所定時間内の前記触針子の変位量の変動に相当する周波数を求める演算部と、前記周波数の相対的時間変化量に基づいて、前記触針子と前記被検物の接触状態を判定する判定部とを備え、前記判定部は、前記演算部によって求められた前記周波数の時間推移を観測し、前記周波数の前記相対的時間変化量の不連続点の有無を検出することによって前記接触状態を判定することを特徴とする。 The surface shape measuring device of the present invention is a surface shape measuring device for measuring the surface shape of the test object by relatively horizontally scanning the stylus in contact with the test object, for a predetermined time. And a determination unit for determining a contact state between the stylus and the test object based on a relative time change amount of the frequency. And the determination unit determines the contact state by observing the time transition of the frequency obtained by the calculation unit and detecting the presence or absence of a discontinuous point of the relative time change amount of the frequency. characterized in that it.

本発明の表面形状測定装置によれば、被検物の表面形状測定中に、触針子と被検物の接触状態を判定することが可能であり、触針子が被検物表面上を追従していない等の異常状態の発生を迅速に検知することができる。   According to the surface shape measuring apparatus of the present invention, it is possible to determine the contact state between the stylus and the test object during the measurement of the surface shape of the test object. The occurrence of an abnormal condition such as not following can be detected quickly.

前記演算部は、フーリエ変換又はウェーブレット変換を用いて、前記周波数を求めてもよい。この場合、測定中における触針子の変位量の変動を適切に周波数に変換することができる。   The computing unit may obtain the frequency using Fourier transform or wavelet transform. In this case, the fluctuation of the displacement amount of the stylus during measurement can be appropriately converted into a frequency.

本発明によれば、被検物の表面形状測定中に発生する触針子の接触異常を、迅速かつ的確に検知することができる。   ADVANTAGE OF THE INVENTION According to this invention, the contact abnormality of the stylus which generate | occur | produces during the surface shape measurement of a test object can be detected rapidly and accurately.

本発明の第１の実施形態について、図１から図４を参照して説明する。なお、特に説明のない限り、「前方」および「後方」とは、それぞれＺ軸の負方向及び正方向を指すものとする。本実施形態の表面形状測定装置１は、触針子２と、Ｙ軸駆動機構３と、Ｘ軸駆動機構４と、コンピュータ５とを備えて構成されている。   A first embodiment of the present invention will be described with reference to FIGS. Unless otherwise specified, “front” and “rear” refer to the negative and positive directions of the Z-axis, respectively. The surface shape measuring apparatus 1 according to the present embodiment includes a stylus 2, a Y-axis drive mechanism 3, an X-axis drive mechanism 4, and a computer 5.

触針子２は静圧軸受６を貫通した状態で静圧軸受６内を滑らかに摺動可能に配置され、静圧軸受６は触針子２を前方に向けてベース平板８上に固定される。
Ｙ軸駆動機構３は、モータ等の公知の機構からなり、基台１１上に固定される。Ｙ軸駆動機構３の上部後方には、静圧軸受６の傾斜角度を調整する傾斜角度調整機構９が設けられ、傾斜角度調整機構９の前方には、静圧軸受６が傾斜角度調整機構９によって傾斜する際の支点となる支柱１０が設けられる。傾斜角度調整機構９は、例えばＹ軸方向に伸縮可能なアクチュエータで構成されるが、これに代えて上述の特許文献１に記載されているような、ねじと角度調整部材とを用いて構成された機構を用いてもよい。またＹ軸駆動機構３の後方には、触針子２のＹ軸方向位置を検出する変位計１２が設けられる。
傾斜角度調整機構９および支柱１０の上にはベース平板８が載置されている。したがって、静圧軸受６および触針子２は、Ｙ軸駆動機構３によってＹ軸方向（図１における上下方向）に移動可能に構成されている。 The stylus 2 is slidably disposed in the hydrostatic bearing 6 while passing through the hydrostatic bearing 6, and the hydrostatic bearing 6 is fixed on the base plate 8 with the stylus 2 facing forward. The
The Y-axis drive mechanism 3 is a known mechanism such as a motor and is fixed on the base 11. A tilt angle adjusting mechanism 9 for adjusting the tilt angle of the hydrostatic bearing 6 is provided at the upper rear of the Y-axis drive mechanism 3, and the hydrostatic bearing 6 is tilted at the tilt angle adjusting mechanism 9 in front of the tilt angle adjusting mechanism 9. A support column 10 is provided as a fulcrum when tilting. The tilt angle adjusting mechanism 9 is configured by an actuator that can be expanded and contracted in the Y-axis direction, for example, but instead is configured by using a screw and an angle adjusting member as described in Patent Document 1 described above. Other mechanisms may be used. A displacement meter 12 that detects the position of the stylus 2 in the Y-axis direction is provided behind the Y-axis drive mechanism 3.
A base flat plate 8 is placed on the tilt angle adjusting mechanism 9 and the column 10. Therefore, the hydrostatic bearing 6 and the stylus 2 are configured to be movable in the Y-axis direction (vertical direction in FIG. 1) by the Y-axis drive mechanism 3.

Ｘ軸駆動機構４は、例えばモータや圧電アクチュエータ等で構成され、基台１１上であってＹ軸駆動機構３の前方に設けられる。Ｘ軸駆動機構４の上には、レンズ、金型又は光学素子等の被検物１３を支持固定する保持部材１４が設けられる。保持部材１４に支持固定された被検物１３は、Ｘ軸駆動機構４によってＸ軸方向（図１における紙面に垂直な方向）に移動可能に構成されている。Ｘ軸駆動機構４の前方には、被検物１３のＸ軸方向の変位を検出する変位計１５が設けられる。   The X-axis drive mechanism 4 is composed of, for example, a motor or a piezoelectric actuator, and is provided on the base 11 and in front of the Y-axis drive mechanism 3. On the X-axis drive mechanism 4, a holding member 14 that supports and fixes a test object 13 such as a lens, a mold, or an optical element is provided. The test object 13 supported and fixed to the holding member 14 is configured to be movable in the X-axis direction (direction perpendicular to the paper surface in FIG. 1) by the X-axis drive mechanism 4. A displacement meter 15 for detecting the displacement of the test object 13 in the X-axis direction is provided in front of the X-axis drive mechanism 4.

図２はコンピュータ５の構成を示すブロック図である。コンピュータは、制御部１６と、演算部１７と、判定部１８とを備えて構成されている。制御部１６は、Ｙ軸駆動機構３およびＸ軸駆動機構４と接続されており、表面形状測定装置１全体の動作制御を行う。演算部１７および判定部１８は、被検物１３の形状測定及び後述する触針子２の状態判定を行う。各変位計７、１２および１５は、制御部１６に接続されており、それぞれの検出値が制御部１６に入力される。   FIG. 2 is a block diagram showing the configuration of the computer 5. The computer includes a control unit 16, a calculation unit 17, and a determination unit 18. The control unit 16 is connected to the Y-axis drive mechanism 3 and the X-axis drive mechanism 4 and controls the operation of the entire surface shape measuring apparatus 1. The calculation unit 17 and the determination unit 18 measure the shape of the test object 13 and determine the state of the stylus 2 described later. Each displacement meter 7, 12 and 15 is connected to the control unit 16, and each detected value is input to the control unit 16.

上記の構成を備えた表面形状測定装置１の動作について、以下に説明する。
まず、被検物１３を、形状測定を行う面が触針子２に対向するように、保持部材１４に支持固定する。次に、傾斜角度調整機構９を操作して、ベース平板８の後部を上方に移動させると、ベース平板８は支柱１０を支点として傾斜する。静圧軸受６で保持された触針子２は、自身の重力によって、静圧軸受６内を滑らかに摺動し、その先端は前方に向かって移動し、被検物１３の表面に接触して停止する。 The operation of the surface shape measuring apparatus 1 having the above configuration will be described below.
First, the test object 13 is supported and fixed to the holding member 14 such that the surface on which the shape measurement is performed faces the stylus 2. Next, when the inclination angle adjusting mechanism 9 is operated to move the rear portion of the base flat plate 8 upward, the base flat plate 8 is inclined with the support column 10 as a fulcrum. The stylus 2 held by the hydrostatic bearing 6 slides smoothly in the hydrostatic bearing 6 due to its own gravity, and its tip moves forward and contacts the surface of the test object 13. And stop.

この状態で、制御部１６によってＸ軸駆動機構４とＹ軸駆動機構３とを駆動し、被検物１３と触針子２を相対的に動かすことにより、被検物１３の表面を触針子２によって走査させる。各変位計７、１２及び１５の検出値は制御部１６に入力され、演算部１７によって解析、再構成が行われ、被検物１３の表面形状が測定される。このとき、並行して変位計７の検出値を解析することにより、被検物１３と触針子２との接触状態および触針子２の異常の有無の判定が行われる。   In this state, the control unit 16 drives the X-axis drive mechanism 4 and the Y-axis drive mechanism 3 to move the test object 13 and the stylus element 2 relatively, so that the surface of the test object 13 is touched. Scan by child 2. The detection values of the displacement meters 7, 12, and 15 are input to the control unit 16, analyzed and reconstructed by the calculation unit 17, and the surface shape of the test object 13 is measured. At this time, by analyzing the detection value of the displacement meter 7 in parallel, the contact state between the test object 13 and the stylus 2 and the presence / absence of abnormality of the stylus 2 are determined.

上記接触状態等の判定について、図３および図４を参照して説明する。図３はコンピュータ５内で行われる接触状態等判定のフローチャートである。   The determination of the contact state and the like will be described with reference to FIGS. FIG. 3 is a flowchart for determining the contact state and the like performed in the computer 5.

まず、ステップＳ１において、制御部１６が、測定が完了したかどうかを判定する。判定結果が「ＹＥＳ」の場合は一連の処理を終了し、判定結果が「ＮＯ」の場合はステップＳ２に進む。
ステップＳ２において、制御部１６が変位計７の出力値Ｚを所定のサンプリング周波数で取得し、点群データとして蓄積する。サンプリング周波数は例えば１ＭＨｚに設定されるが、これに限らず、他の周波数でもよい。 First, in step S1, the control unit 16 determines whether the measurement is completed. If the determination result is “YES”, the series of processing is terminated, and if the determination result is “NO”, the process proceeds to step S2.
In step S2, the control unit 16 acquires the output value Z of the displacement meter 7 at a predetermined sampling frequency and accumulates it as point cloud data. The sampling frequency is set to 1 MHz, for example, but is not limited to this and may be another frequency.

次にステップＳ３において、ステップＳ２で例えば０．１秒間に蓄積した点群データに対し、図４に示すように、演算部１７がフーリエ変換を行う。   Next, in step S3, as shown in FIG. 4, the arithmetic unit 17 performs a Fourier transform on the point cloud data accumulated in, for example, 0.1 second in step S2.

ステップＳ４において、演算部１７は変換後に得られるパワースペクトルから１次ピーク周波数ftを求めて判定部１８に送信し、被検物１３の表面形状測定中、ftの監視を継続する。 In step S4, the arithmetic unit 17 is transmitted to the determining unit 18 obtains a first-order peak frequency f t from the power spectrum obtained after conversion, in the surface shape measurement of the test object 13, to continue monitoring the f t.

ステップＳ５において、判定部１８は、取得した周波数ftの値とその直前のタイミングで取得した周波数ft−1の値との差が所定範囲内の量であるかどうかを判定する。この判定結果が「ＹＥＳ」の場合は、処理はステップＳ１に戻り、ftの監視が継続される。判定結果が「ＮＯ」の場合、周波数ftの変化量が所定範囲を超えており、周波数ftの変化が不連続であると判定する。このとき、触針子２と被検物１３との接触状態あるいは触針子２自体に何らかの変化が発生している可能性があるので、判定部１８は、当該判定結果を制御部１６に送信する。 In step S5, the determination unit 18 determines whether or not the difference between the acquired value of the frequency ft and the value of the frequency ft−1 acquired at the immediately preceding timing is an amount within a predetermined range. If the determination result is "YES", the process returns to step S1, the monitoring of f t is continued. If the result is "NO", the variation of the frequency f t is above the predetermined range, determines that the change in the frequency f t is discontinuous. At this time, since there may be some change in the contact state between the stylus 2 and the test object 13 or the stylus 2 itself, the determination unit 18 transmits the determination result to the control unit 16. To do.

ステップＳ６において、制御部１６は、異常発生を知らせる或いは触針子２の状態の確認を促す旨を、図示しないディスプレイに表示したり、図示しないスピーカーから音声として出力する等の処理を行い、装置の操作者に告知を行って、一連の処理を終了する。   In step S6, the control unit 16 performs a process of notifying the occurrence of abnormality or prompting the confirmation of the state of the stylus 2 on a display (not shown) or outputting as a sound from a speaker (not shown). The operator is notified, and the series of processing ends.

本実施形態の表面形状測定装置１によれば、測定中の周波数ftの値の変化について継続的に監視するので、測定中に触針子２が被検物１３の表面から離れた場合や、触針子２自体が破損した場合など、何らかの変化が触針子２に生じたことを自動的に検知することができる。よって、これらの問題に対して、測定を一旦中止して再測定を行うなど、迅速かつ柔軟に対応することができる。 According to the surface shape measuring apparatus 1 of the present embodiment, since continually monitored for change in the value of the frequency f t being measured, Ya if Hariko 2 catalyst during the measurement is separated from the surface of the test object 13 When the stylus 2 itself is damaged, it is possible to automatically detect that some change has occurred in the stylus 2. Therefore, it is possible to quickly and flexibly cope with these problems, for example, by suspending measurement and performing remeasurement.

次に、本発明の第２の実施形態について図５および図６を参照しながら説明する。本実施形態と上述の第１実施形態の異なる点は、被検物１３と触針子２との接触状態及び触針子２の異常の有無の判定を、あらかじめ設定した表を参照することによって行う点である。
本実施形態の表面形状測定装置は、コンピュータ５に代えて、図５に示すコンピュータ２５を備えている。コンピュータ２５は判定部１８に代えて、判定部２８を備えている。コンピュータ２５以外の構成要素は第１実施形態と同一である。 Next, a second embodiment of the present invention will be described with reference to FIGS. The difference between the present embodiment and the first embodiment described above is that the contact state between the test object 13 and the stylus 2 and the determination of the presence or absence of abnormality of the stylus 2 are referred to a preset table. It is a point to do.
The surface shape measuring apparatus of this embodiment includes a computer 25 shown in FIG. The computer 25 includes a determination unit 28 instead of the determination unit 18. Components other than the computer 25 are the same as those in the first embodiment.

以下、本実施形態の表面形状測定装置の動作を、図６を参照して説明する。図６は、本実施形態における、被検物１３と触針子２との接触状態および触針子２の異常の有無の判定のフローチャートである。   Hereinafter, the operation of the surface shape measuring apparatus of the present embodiment will be described with reference to FIG. FIG. 6 is a flowchart for determining the contact state between the test object 13 and the stylus 2 and the presence or absence of abnormality of the stylus 2 in the present embodiment.

まずステップＳ１からステップＳ４において、第１実施形態と同様の手順で周波数ftの値を算出し、判定部１８に送信する。 First, in step S <b> 1 to step S <b> 4, the value of the frequency f t is calculated by the same procedure as in the first embodiment and transmitted to the determination unit 18.

ステップＳ１５において、ステップＳ４で得られたftに対応する状態を識別するため、判定部２８があらかじめ用意された表１を参照して、触針子２の状態を判定する。 In step S15, in order to identify the state corresponding to f t obtained in step S4, with reference to Table 1, the determination unit 28 is prepared in advance, it determines the state of the touch Hariko 2.

Figure 0005301778
Figure 0005301778

表１にはある時間tにおける周波数ftの帯域と、それに対応する触針子２と被検物１３との接触状態あるいは触針子２自体の状態と、この状態に対応する戻り値dtとが格納されている。例えばftが所定の値f1未満である場合は、触針子２と被検物１３とが接触状態にあること（接触）を示す戻り値d1が判定部２８に返される。同様に、触針子２が何ものにも接触していない状態（非接触）と判定されたときは戻り値d2が判定部２８に返され、触針子２先端の破損もしくは異物が付着した状態（異常）と判定されたときは戻り値d3が判定部２８に返される。 Table 1 shows the frequency f t band at a certain time t, the contact state between the stylus 2 and the test object 13 or the state of the stylus 2 itself, and the return value d t corresponding to this state. And are stored. For example, when f t is less than a predetermined value f 1 , a return value d 1 indicating that the stylus 2 and the test object 13 are in contact (contact) is returned to the determination unit 28. Similarly, when it is determined that the stylus 2 is not in contact with anything (non-contact), the return value d 2 is returned to the determination unit 28, and the tip of the stylus 2 is damaged or foreign matter is attached. When it is determined that the state is abnormal (abnormal), the return value d 3 is returned to the determination unit 28.

ステップＳ１６において、戻り値としてd2およびd3のいずれかが返されたかどうかを判定部２８が判定する。判定結果が「ＮＯ」の場合は、処理はステップＳ１に戻り、ftの監視が継続される。判定結果が「ＹＥＳ」の場合、触針子２と被検物１３との接触状態あるいは触針子２自体に何らかの変化が発生している可能性があるので、判定部２８は当該判定結果を制御部１６に送信する。 In step S16, whether any of d 2 and d 3 is returned as a return value determining unit 28 determines. If the determination result is "NO", the process returns to step S1, the monitoring of f t is continued. When the determination result is “YES”, since there is a possibility that some change has occurred in the contact state between the stylus 2 and the test object 13 or the stylus 2 itself, the determination unit 28 displays the determination result. It transmits to the control part 16.

ステップＳ１７において、制御部１６は、戻り値に応じて、異常発生を知らせるあるいは触針子２の状態の確認を促す旨を、図示しないディスプレイに表示したり、図示しないスピーカーから音声として出力する等の処理を行い、装置の操作者に告知を行って、一連の処理を終了する。   In step S17, the control unit 16 displays on the display (not shown) or informs a speaker (not shown) as a sound to notify the occurrence of an abnormality or prompt the confirmation of the state of the stylus 2 according to the return value. This process is performed to notify the operator of the apparatus, and a series of processes is completed.

本実施形態の表面形状測定装置によれば、表１を参照することによって、触針子２の状態を周波数ftの値に応じて具体的に識別するため、測定中何らかの変化が触針子２に生じたことに加えて、具体的な状態まで自動的に検知することができる。したがって、操作者はより迅速かつ適切に、触針子２のトラブルに対応することができる。 According to the surface shape measuring apparatus of the present embodiment, by referring to Table 1, in order to specifically identify in accordance with the state of the touch Hariko 2 to the value of the frequency f t, any change in the measured touch Hariko In addition to what happened in step 2, it is possible to automatically detect a specific state. Therefore, the operator can deal with the trouble of the stylus 2 more quickly and appropriately.

さらに、検知された各状態に応じた処置を自動的に施すように装置全体を構成および制御すれば、異常の検知のみならず、トラブル処理まで自動的に行う表面形状測定装置とすることも可能である。   Furthermore, if the entire device is configured and controlled to automatically perform treatments according to each detected state, it is possible to provide a surface shape measuring device that not only detects abnormalities but also automatically handles troubles. It is.

以上、本発明の実施形態を説明したが、本発明の技術範囲は上記実施形態に限定されるものではなく、本発明の趣旨を逸脱しない範囲において種々の変更を加えることが可能である。
例えば上述した各実施形態においては、変位計７の出力値Ｚに対して、フーリエ変換を行っているが、これに代えて、ウェーブレット変換等の他の変換を行ってから判定処理を行ってもよい。また、上述の第２実施形態においては、触針子２の状態が「接触」、「非接触」、「異常」の３つに分類されているが、これに限らず、周波数ftの帯域によってユーザがさらに細かく定義した状態およびパラメータを格納した表を判定部２８に参照させることによって、より詳細な状態検知を自動的に行うようにすることも可能である。 Although the embodiments of the present invention have been described above, the technical scope of the present invention is not limited to the above-described embodiments, and various modifications can be made without departing from the spirit of the present invention.
For example, in each of the embodiments described above, the Fourier transform is performed on the output value Z of the displacement meter 7, but instead of this, the determination process may be performed after performing other transformations such as wavelet transformation. Good. In the second embodiment described above, the "contact" state of Hariko 2 tactile, "non-contact" are classified into three "abnormal", but not limited to, the bandwidth of the frequency f t It is also possible to automatically perform more detailed state detection by causing the determination unit 28 to refer to a table storing states and parameters defined more finely by the user.

本発明は光学関連素子等の表面形状測定装置に利用することができる。   The present invention can be used for a surface shape measuring apparatus such as an optical related element.

本発明の第１実施形態の表面形状測定装置の左側面図である。It is a left view of the surface shape measuring apparatus of 1st Embodiment of this invention. 同実施形態におけるコンピュータの構成を示すブロック図である。It is a block diagram which shows the structure of the computer in the same embodiment. 同実施形態における触針子状態判定のフローチャートである。It is a flowchart of stylus state judgment in the embodiment. 同実施形態の変位計の出力値とフーリエ変換後のパワースペクトルを示す図である。It is a figure which shows the output spectrum of the displacement meter of the embodiment, and the power spectrum after a Fourier transform. 本発明の第２実施形態の表面形状測定装置におけるコンピュータの構成を示すブロック図である。It is a block diagram which shows the structure of the computer in the surface shape measuring apparatus of 2nd Embodiment of this invention. 同実施形態における触針子状態判定のフローチャートである。It is a flowchart of stylus state judgment in the embodiment. 従来の表面形状測定装置の構成を示す図である。It is a figure which shows the structure of the conventional surface shape measuring apparatus.

符号の説明Explanation of symbols

１…表面形状測定装置、２…触針子、１３…被検物、１７…演算部、１８、２８…判定部 DESCRIPTION OF SYMBOLS 1 ... Surface shape measuring apparatus, 2 ... Stylus, 13 ... Test object, 17 ... Calculation part, 18, 28 ... Determination part

Claims (3)

触針子を被検物に接触させ、相対的に水平走査させて前記被検物の表面形状を測定する表面形状測定装置であって、
所定時間内の前記触針子の変位量の変動に相当する周波数を求める演算部と、
前記周波数の相対的時間変化量に基づいて、前記触針子と前記被検物の接触状態を判定する判定部と、
を備え、
前記判定部は、前記演算部によって求められた前記周波数の時間推移を観測し、前記周波数の前記相対的時間変化量の不連続点の有無を検出することによって前記接触状態を判定することを特徴とする表面形状測定装置。 A surface shape measuring apparatus for measuring the surface shape of the test object by bringing the stylus into contact with the test object and relatively horizontally scanning the test object,
A calculation unit for obtaining a frequency corresponding to a variation in the displacement of the stylus within a predetermined time;
A determination unit that determines a contact state between the stylus and the test object based on a relative time change amount of the frequency;
Equipped with a,
The determination unit determines the contact state by observing a time transition of the frequency obtained by the calculation unit and detecting the presence or absence of a discontinuous point of the relative time change amount of the frequency. Surface shape measuring device. 触針子を被検物に接触させ、相対的に水平走査させて前記被検物の表面形状を測定する表面形状測定装置であって、  A surface shape measuring apparatus for measuring the surface shape of the test object by bringing the stylus into contact with the test object and relatively horizontally scanning the test object,
所定時間内の前記触針子の変位量の変動に相当する周波数を求める演算部と、  A calculation unit for obtaining a frequency corresponding to a variation in the displacement of the stylus within a predetermined time;
前記周波数に基づいて、前記触針子と前記被検物の接触状態を判定する判定部と、  A determination unit for determining a contact state between the stylus and the test object based on the frequency;
を備え、  With
前記判定部は、前記演算部によって求められた前記周波数の値と前記接触状態または前記触針子の状態とが関連付けられ、これら各状態に対応する戻り値が格納された表を有し、  The determination unit has a table in which the value of the frequency obtained by the calculation unit is associated with the contact state or the state of the stylus, and return values corresponding to these states are stored,
前記表における前記接触状態または前記触針子の状態は、前記触針子と前記被検物とが非接触の状態を含むことを特徴とする表面形状測定装置。  The contact state or the state of the stylus in the table includes a state in which the stylus and the test object are not in contact with each other. 前記演算部は、フーリエ変換又はウェーブレット変換を用いて、前記周波数を求めることを特徴とする請求項１または２に記載の表面形状測定装置。 The surface shape measuring apparatus according to claim 1 , wherein the calculation unit obtains the frequency using Fourier transform or wavelet transform.
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