JP2004325159A - Micro-shape measuring probe and micro-shape measuring method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a micro-shape measuring probe capable of measuring safely with high reliability even a micro-shape difficult to be viewed such as a micro-hole H on a measuring object W, and a micro-shape measuring method using the micro-shape measuring probe. <P>SOLUTION: This probe equipped with a gage head for measuring the micro-shape of the measuring object is equipped with an observation means capable of instant visual observation of the periphery of a measuring point where the gage head is concerned with the measuring object. Especially, the observation means is equipped with an imaging means for imaging an image near the measuring point, and a display for displaying the imaged result by the imaging means on a separated position. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a fine shape measuring probe and a fine shape measuring method using the probe, particularly using a fine stylus that is difficult to visually observe, and using the fine shape measuring probe for measuring the fine shape of an object to be measured and the probe. Related to the measurement method.
[0002]
[Prior art]
Means for measuring the surface properties and surface shape such as roughness, waviness, and shape of the object to be measured include surface roughness measuring instruments, contour shape measuring instruments, roundness measuring instruments, image measuring instruments, and three-dimensional measuring instruments. Is used, when the shape of the measurement target portion is a fine shape of, for example, about 0.5 mm or less, in addition to performing measurement by scanning the surface of the object to be measured with a surface roughness measuring device, and measuring the image with a microscope The measurement is performed by adding a function to obtain an enlarged image.
[0003]
The detector of the surface roughness measuring instrument is measured by holding the lever with a stylus at the tip rotatably and scanning the detector in the surface direction with the stylus in contact with the surface of the object to be measured. In general, a stylus is displaced in accordance with irregularities on the surface of an object, and measurement is performed by detecting rotation of a lever accompanying the displacement. However, in the case where the measurement is performed by scanning the surface of the object to be measured by such a surface roughness measuring device, for example, it is a problem whether or not the stylus can scan according to the shape of the object to be measured. With the detector having this structure, it is possible to detect irregularities on the surface of the object to be measured, but it is difficult to measure a portion orthogonal to the surface of the object to be measured, such as a side wall inside a hole, or inside a fine hole. .
[0004]
In addition, in the case of performing measurement by obtaining an enlarged image by adding an image measurement function to a microscope, since it is a non-contact measurement, there are many advantages, but basically only two-dimensional measurement on the XY plane can be performed. Although it is possible to measure the dimension in the Z-axis direction by extending the focus adjustment function when performing image measurement, measurement accuracy is generally low.
In any case, it is difficult to measure the side wall of the hole in the Z-axis direction perpendicular to the surface of the workpiece and directly determine the shape of the side wall and the inner diameter of the hole. It will be difficult.
As a sensor capable of measuring such a fine shape, for example, there is a vibration-type contact detection sensor (for example, Patent Document 1).
[0005]
The basic structure of this sensor is composed of an elongated stylus having a contact portion at the tip, a piezoelectric element, and supporting means for supporting them. The piezoelectric element is composed of a piezoelectric element for vibration, which is connected to the transmission circuit and vibrates the stylus in its axial direction, and a piezoelectric element for detection, which detects vibration of the stylus. The output of the piezoelectric element for detection is input to the detection circuit. Then, the amplitude and phase of the vibration are detected.
When the contact portion of the stylus comes into contact with the object to be measured, the vibration of the stylus is restricted, and the vibration amplitude decreases. The decrease in the vibration amplitude is detected, and the coordinates of the contact portion are obtained from the relative positional relationship between the sensor and the object under measurement at that time, and are used as measurement data.
[0006]
In principle, a sensor having this structure can constitute a fine sensor. For example, a sensor having a stylus diameter of 50 μm and a protruding portion of the stylus of about 1 mm can be manufactured. For example, it becomes possible to measure the inner wall surface of a fine hole having a diameter of 0.1 mm, for example.
However, when such a sensor is used, the stylus and the measurement location are minute, so that it is difficult to visually confirm it, and it is not easy to perform mutual alignment and setting of the sensor coordinate system.
In order to solve this problem, there is a micro-machined shape measuring apparatus in which a microscope is juxtaposed to a vibration-type contact detection sensor and a coordinate system can be easily set (for example, Patent Document 2).
[0007]
[Patent Document 1]
JP 2002-39737 A
[Patent Document 2]
JP 2001-174221 A
[0008]
[Problems to be solved by the invention]
The probe of the micromachined shape measuring apparatus has, for example, the configuration shown in FIG.
In the probe 7, a fine probe 72 having a stylus 73 is attached to a holder base 70 via a probe spacer 71, and a microscope 81 is juxtaposed at an adjacent position. The distance L between the center of the microscope focal point and the stylus 73 has been accurately measured in advance and is known.
[0009]
In using the probe 7, first, a measurement target portion (for example, a fine hole H) of the measured object W is observed with the microscope 81, and the probe 7 is positioned so that the focal center position coincides with the measurement target portion. Then, for example, a position where the center position of the minute hole H coincides with the focal center position is set as the origin of the coordinate system. Since the distance L between the center of the focal point and the stylus 73 is known, it is easy to move the probe 7 and the workpiece W relative to each other to accurately position the stylus 73 in the minute hole H as shown in FIG. Can be done. Therefore, it is possible to easily measure even a fine hole which is difficult to visually confirm.
[0010]
However, since the stylus 73 has a diameter of, for example, about 50 μm or less, it is extremely difficult to visually confirm the stylus itself. For example, in the measurement process, it is difficult to confirm whether the stylus 73 collides with the object to be measured W and loses or an accident such as buckling occurs. If such an accident occurs in the measurement process, the measurement is performed. Abnormal results. In the measurement using such a fine stylus, there are always such anxiety factors, and it is difficult to ensure the reliability of the measurement result.If an accident should occur, it is necessary to restart the measurement from the beginning. , Efficiency is reduced. For example, when there are hundreds of micro holes to be measured, the time and cost required for re-measurement become enormous, and there has been a problem that it is extremely inefficient.
[0011]
In order to solve such a problem, the present invention provides a fine shape measurement probe and a measurement method that enable the tip of the stylus 73 to observe the vicinity of a measurement point for measuring the object W to be measured.
[0012]
[Means for Solving the Problems]
In order to achieve the above object, the fine shape measuring probe according to claim 1 according to the present invention is a probe including a measuring element for measuring a fine shape of an object to be measured, wherein the measuring element is the measuring object. An observation means capable of observing the vicinity of a measurement point related to an object is provided.
[0013]
Here, the fine shape is a shape having a size that is difficult to visually confirm, and refers to a shape having a size of about 0.5 mm or less. In addition, in the case of a stylus of a stylus type, for example, in the case of a stylus of a stylus type, the vicinity of a tip of a stylus that performs measurement by contacting with the object to be measured is referred to as the vicinity of the stylus tip. When it is close to the tip of the stylus, it includes the object to be measured in the vicinity. Further, the observation means refers to a means including a means for collecting data and a means for displaying the collected data and outputting the collected data by printing or the like. The data collection and the output of the collected data can be performed within a predetermined time.
[0014]
According to the present invention, the measuring point for measuring the fine shape of the object to be measured and the measurement point for measuring the object to be measured, and the surface of the object to be measured close to the measurement point can be observed. At any time, the state of the stylus and the surface of the object to be measured can be checked very easily and immediately. For example, it is possible to easily check for breakage or buckling of the stylus, and to check the fine measurement target portion of the object to be measured, improving the reliability of the measurement and thereby dramatically increasing the measurement efficiency. improves.
[0015]
In the fine shape measurement probe according to claim 2 of the present invention, the observation unit includes an imaging unit that captures an image near the measurement point, and an output unit that outputs an imaging result obtained by the imaging unit. Is preferred.
Here, the imaging means means for collecting data near the measurement point in the form of image data, and the output means means for printing or displaying the image data.
[0016]
According to the present invention, data in the vicinity of the measurement point is collected as image data and displayed so as to be visually recognizable, so that visual observation becomes easy even in a fine shape. In addition, since the image data is printed or displayed at a position separated from the measurement point by the output means, observation can be easily performed even when the measurement point is narrow.
[0017]
Further, in the fine shape measuring probe according to claim 3 of the present invention, it is preferable that the imaging means is a CCD camera.
According to the present invention, since the imaging means can be constituted by a compact, low heat generation, lightweight, and inexpensive CCD camera, the fine shape measuring probe can be constituted to be small and lightweight. In addition, since heat generation is small, deterioration of measurement accuracy due to heat generation can be prevented.
[0018]
In the fine shape measuring probe according to claim 4 of the present invention, it is preferable that the imaging means is a fiberscope.
Here, a fiber scope refers to a device that collects data near a measurement point as image data and transmits the image data to a separated position by an optical fiber.
[0019]
According to the present invention, the data in the vicinity of the measurement point is collected as image data, the image data is transmitted to the separated position by the optical fiber, and the image data is output at the separated position. In addition, since there is no heat generation, deterioration of measurement accuracy due to heat generation can be prevented.
[0020]
Further, in the fine shape measurement probe according to claim 5 of the present invention, it is preferable that the imaging means is a telescope capable of imaging from a position separated from the measurement point.
According to the present invention, the vicinity of the measuring point can be observed from a position distant from the measuring point, so that there is no need to arrange an observation means near the measuring element, and the visibility and workability around the measuring element are improved. This facilitates attachment and replacement of the tracing stylus.
[0021]
In the fine shape measuring probe according to claim 6 of the present invention, it is preferable that the probe is a vibrating probe for detecting contact with the object to be measured while the measuring element is vibrated.
According to the present invention, the vibrating probe having high sensitivity can be configured to be extremely small, so that the measurement of a fine shape can be performed with high accuracy.
[0022]
8. The fine shape measurement probe according to claim 7, wherein the observation means in the vibrating probe is configured to perform the measurement based on a sound pressure phenomenon that occurs when the measurement element approaches the object to be measured. It is preferable to observe the vicinity of the point.
[0023]
Here, the sound pressure phenomenon refers to a squeeze effect based on the viscosity of a medium (for example, air) interposed between the tracing stylus and the DUT when the vibrating stylus approaches the DUT (more than several μm). (Compression effect) is a phenomenon in which the sound pressure between the stylus and the DUT changes. When the sound pressure changes, the vibration of the tracing stylus is suppressed, and the vibration amplitude decreases even when the tracing stylus is not in contact with the object to be measured. Since the distance to the object to be measured can be estimated by the decrease in the amplitude, the shape of the surface of the object to be measured can be roughly estimated by scanning the tracing stylus along the surface of the object to be measured in this state. Thereby, the vicinity of the measuring point of the tracing stylus can be observed.
[0024]
According to the invention, in the excitation type probe, it is determined whether or not the vibration amplitude of the tracing stylus is within a predetermined range to determine that it is in the sound pressure phenomenon area, and based on the change state of the vibration amplitude. As a result, the observation means for observing the vicinity of the measurement point can be configured, so that the configuration of the probe is simplified. Further, since no special additional means is required as the data collecting means, the size and weight can be reduced.
[0025]
The fine shape measuring method according to claim 8 of the present invention is a method for measuring the fine shape of the object to be measured using the fine shape measuring probe according to any one of claims 1 to 7. There is an observation step of observing the surface of the object to be measured by the observation means, a confirmation step of confirming a measurement point of the object to be measured based on a result obtained in the observation step, and after the confirmation step. And a measurement step of measuring the measurement location by the fine shape measurement probe.
[0026]
According to the present invention, the measuring element observes the vicinity of the measuring point related to the object to be measured, thereby confirming the measuring object location on the surface of the measuring object, and based on the result, the measuring location is determined by the fine shape measuring probe. Since the measurement can be performed, highly reliable measurement can be performed even if it is difficult to visually confirm the measurement target portion.
[0027]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings.
(1st Embodiment)
FIG. 1 shows a three-dimensional measuring machine main body 100 equipped with a fine shape measuring probe according to a first embodiment of the present invention.
The three-dimensional coordinate measuring machine 100 includes an X-axis beam 4 spanned between a column 2 erected at both ends of a measurement table 1 and a supporter 3. An X-axis slider 6 (X-axis moving mechanism) supported by an air bearing and movable in the X-axis direction with respect to the X-axis beam 4, and moved in the Z-axis direction supported by the air bearing on the X-axis slider 6 And a possible Z-axis spindle (Z-axis moving mechanism). A probe 7 (fine shape measurement probe) is mounted on the lower end of the Z-axis spindle.
[0028]
The column 2 and the supporter 3 are also floated and supported from the measurement table 1 by an air bearing, and the column 2 is guided by the air bearing in the Y-axis direction by a Y-axis guide mechanism 5 provided at one end of the measurement table 1. Therefore, the column 2 and the supporter 3 are integrally movable in the Y-axis direction (Y-axis moving mechanism).
[0029]
In the X-axis moving mechanism, the Y-axis moving mechanism, and the Z-axis moving mechanism, the amount of movement of each slider or column can be detected by a linear scale. Here, the X axis, the Y axis, and the Z axis are orthogonal to each other.
The probe 7 outputs a touch signal by bringing the lower end portion (measurement point) of the stylus 73 of the fine probe 72 into contact with the measurement location of the object to be measured placed on the measurement table 1, and each movement at that moment The movement amount of the mechanism is read and output as a measured value. The lower end portion of the stylus 73 is formed in a spherical shape, and can contact a measurement target portion from various directions.
[0030]
Since each moving mechanism is supported by the air bearing in a non-contact manner, there is almost no contact resistance, and when the probe 7 is moved, it is only necessary to move the probe 7 while supporting it by hand, and it can be moved very lightly. is there. However, when the main body of the probe 7 is moved while being supported by hand, fine movement of 1 mm or less is not always easy.
Therefore, an operation panel 11 is provided on the column 2, and an X-axis fine movement knob 8, a Y-axis fine movement knob 9, and a Z-axis fine movement knob 10 are closely arranged on the same surface of the operation panel 11.
[0031]
The CMM main body 100 can automatically control movements in the X-axis, Y-axis, and Z-axis directions by driving means (not shown), and operate a joystick (not shown) at any speed in each axis direction. Can be moved. Furthermore, it is also possible to use a computer (not shown) to decode the measurement part program and perform automatic measurement according to the instruction.
A display 95 provided on the operation panel 11 is a liquid crystal display for displaying image data near a measurement point collected by an imaging unit described later.
[0032]
FIG. 2 shows a schematic configuration of the probe 7. The probe 7 has a microscope 81 installed at one end of a holder base 70, and a fine probe 72 provided with a stylus 73 via a probe spacer 71 at the other end of the holder base 70.
Further, two observation microscopes 90 that can observe the vicinity of the measurement point of the stylus 73 are installed on the probe spacer 71. Here, the measurement point is a portion of the stylus 73 that comes into contact with the workpiece W, more specifically, a lower spherical tip portion of the stylus 73. When the spherical tip is close to the workpiece W, the proximity portion of the workpiece W can also be observed.
[0033]
The observation microscope 90 has a built-in CCD camera (not shown), and captured image data is immediately (real-time) displayed on a display 95 (output means) via a cable (not shown). The observation means is constituted by the observation microscope 90 and the display 95.
The diameter of the stylus 73 is 50 μm, and the length protruding downward is 1 mm.
[0034]
The fine probe 72 measures the fine hole H of the workpiece W, and can be measured if the inner diameter of the fine hole H is approximately 0.1 mm or more.
The method of setting the origin of the coordinate system using the probe 7 is the same as the method described with reference to FIGS. 8 and 9, and a description thereof will be omitted.
[0035]
According to the first embodiment, the following effects can be obtained.
(1) Since the stylus 73 for measuring the fine shape of the workpiece W can measure the measurement point (the spherical portion at the lower end of the stylus) for measuring the workpiece and the surface of the workpiece close to the measurement point immediately. In the measurement process, the state of the stylus 73 and the surface of the workpiece W can be checked very easily at any time. Therefore, it is possible to easily check whether the stylus 73 is broken or buckled, and to check whether there is an abnormality in a minute measurement target portion (for example, a minute hole H) of the measured object W, thereby improving the reliability of the measurement. As a result, the measurement efficiency is dramatically improved.
[0036]
(2) Since data near the measurement point is collected as image data by the observation microscope 90 and the result is displayed on the liquid crystal display 95, visual observation of the fine area near the measurement point of the stylus 73 is facilitated.
(3) By providing the plurality of observation microscopes 90, the vicinity of the measurement point can be observed from each direction, so that it is easy to confirm whether the stylus 73 or the measurement target is abnormal.
[0037]
(2nd Embodiment)
Next, a second embodiment of the present invention will be described with reference to FIG. In the second embodiment, a CCD camera 91 as an image pickup means is incorporated in a fine probe 72, and the other configuration is the same as that of the first embodiment.
As shown in FIG. 3, a fine probe holder 721 of the fine probe 72 is attached to a lower portion of the probe spacer 71, and two fine probe arms 722 protrude downward from the fine probe holder 721. A beam is bridged over the lower ends of the two fine probe arms 722, and a piezoelectric element 723 is attached to a center position of the beam, and a vertically elongated stylus 73 is fixed to the center of the piezoelectric element 723. .
[0038]
The piezoelectric element 723 includes a vibrating piezoelectric element that is connected to a transmitting circuit (not shown) and vibrates the stylus 73 in the axial direction thereof, and a detecting piezoelectric element that detects the vibration of the stylus 73. Is input to a detection circuit (not shown) to detect the amplitude and phase of the vibration.
When the spherical contact portion (measurement point) at the lower end of the stylus 73 comes into contact with the workpiece W, the vibration of the stylus 73 is restrained and the vibration amplitude decreases. The decrease in the vibration amplitude is detected, and the coordinates of the measurement point are obtained from the relative positional relationship between the probe 7 and the DUT at that time to obtain measurement data.
[0039]
In the fine probe holder 721, a CCD camera 91 composed of a lens 911 and a CCD sensor 912 is attached to an upper position of the stylus 73, and the optical axis formed by the lens 911 and the CCD sensor 912 is The positional relationship has been adjusted to match. A lens 911 is formed on the CCD sensor 912 so that an image near the measurement point of the stylus 73 is formed. The output of the CCD sensor 912 is connected to a liquid crystal display 95 via a cable (not shown) so that image data near the measurement point can be easily visually observed on the liquid crystal display.
[0040]
Since the CCD camera 91 (imaging means) of the observation device according to the second embodiment is provided right above the stylus 73, the measurement point itself of the stylus 73 cannot be observed, but the measurement including the measurement location of the workpiece W is performed. The vicinity of the point is observable. For example, when the stylus 73 buckles, it can be observed.
[0041]
According to the second embodiment, the following effects are obtained in addition to the effects (1) and (2) of the first embodiment.
(4) Since the imaging means is composed of the small, low heat generation, lightweight, and inexpensive CCD camera 91 and is incorporated in the fine probe 72, the fine shape measurement probe can be configured to be small and lightweight.
(5) Since the heat generation of the CCD camera 91 is small, it is possible to prevent the measurement accuracy from deteriorating due to the heat generation.
[0042]
(Third embodiment)
Next, a third embodiment of the present invention will be described with reference to FIG. In the third embodiment, a fiber scope 92 is incorporated in a fine probe 72 instead of the CCD camera 91 in the second embodiment as an image pickup means, and the other configuration is the same as that of the second embodiment.
As shown in FIG. 4, the fiber scope 92 includes a lens 921 and an optical fiber 922, and an image near the measurement point of the stylus 73 is displayed on the liquid crystal display 95.
[0043]
In the third embodiment, since the output of the optical fiber 922 cannot be directly connected to the liquid crystal display 95, the output of the optical fiber 922 is once formed into an image on a CCD device (not shown) to generate image data. The data is displayed on the liquid crystal display 95.
[0044]
According to the third embodiment, the following effects are obtained in addition to the effects (1) and (2) of the first embodiment.
(6) Since the imaging means is constituted by the fiber scope 92 and incorporated in the fine probe 72, the fine shape measuring probe can be made small and lightweight.
(7) Since there is no heat generation in the fiber scope 92, there is no deterioration in measurement accuracy due to heat generation.
[0045]
(Fourth embodiment)
Next, a fourth embodiment of the present invention will be described with reference to FIG. In the fourth embodiment, a remote observation means 93 is provided on the probe spacer 71 instead of the observation microscope 90 as the imaging means in the first embodiment, and the other configuration is the same as that of the first embodiment.
[0046]
As shown in FIG. 5, the remote observation means 93 includes a mirror 931 and a telescope 932 supported by support means (not shown) on the probe spacer 71. Since the optical path of the telescope 932 is refracted by the mirror 931, the vicinity of the measurement point of the stylus 73 can be enlarged and observed.
The telescope 932 has a built-in CCD camera (not shown), and the captured image data in the vicinity of the measurement point is immediately (real-time) displayed on a display 95 (output means) via a cable (not shown).
Here, a flat mirror is used as the mirror 931, but a concave mirror may be used so that the vicinity of the measurement point can be further enlarged.
[0047]
According to the fourth embodiment, the following effects are obtained in addition to the effects (1) and (2) of the first embodiment.
(8) Since the vicinity of the measurement point can be observed by the telescope 932 from a position distant from the measurement point, there is no need to arrange an observation means near the stylus 73, and the visibility around the stylus and workability are improved. Thus, the stylus 73 and the fine probe 72 can be easily attached and exchanged.
[0048]
(Fifth embodiment)
Next, a fifth embodiment will be described with reference to FIG. Unlike the first to fourth embodiments, the observation unit in the fifth embodiment does not optically collect image data.
FIG. 6 shows the stylus 73 and the piezoelectric element 723 of the excitation type fine probe 72. The spherical portion at the lower end of the stylus 73 is a contact portion 731 (measurement point) that comes into contact with the workpiece W and performs measurement.
[0049]
The piezoelectric element 723 is connected to a vibration circuit VC and vibrates the stylus 73 in the axial direction. The vibration piezoelectric element 723v and the detection piezoelectric element 723d that detects the vibration of the stylus 73 and outputs the vibration to the detection circuit DC. Be composed. The detection circuit DC outputs the vibration amplitude OUT of the stylus 73.
When the lower end or the side end of the contact portion 731 comes into contact with the measured object W when measuring the measured object W, the vibration of the stylus 73 is restrained, so that the signal level of the detection output OUT from the detection circuit DC decreases. A position at which the detection output OUT becomes a predetermined value or less is set as a measurement position of the contact portion 731 and the object W, and measurement data is obtained from a relative positional relationship between the fine probe 72 and the object W at that position.
[0050]
The measurement principle of the vibrating microprobe 72 is the same as that of the first to fourth embodiments, but the observation means in the fifth embodiment is configured such that the vibrating stylus 73 and the object W are in a non-contact state. Observation is performed based on the sound pressure phenomenon caused by the squeeze effect (compression effect) based on the viscosity of air interposed between the two.
As shown in FIG. 7, when the gap G between the vibrating stylus 73 and the workpiece W becomes about several μm, the air interposed between the stylus 73 and the workpiece W is compressed, and as a result, the stylus 73 Starts to be restrained. In FIG. 7, when the gap G is in the range of SQ, the detection output OUT decreases due to the sound pressure phenomenon. As described above, when the gap G between the stylus 73 and the device under test W changes, the detection output OUT changes. Therefore, if this property is used, the detection output OUT is displayed on a voltmeter or a computer display so that the vicinity of the measurement point can be obtained. Can be observed.
[0051]
For example, in FIG. 6, the stylus 73 is scanned rightward in the figure while maintaining the gap G in the state of G1 where a sound pressure phenomenon occurs. When the stylus 73 reaches the position of the minute hole H, the gap G becomes larger than G1, and the detection output OUT increases. Thereafter, when the stylus 73 passes through the minute hole H and the gap G returns to G1, the detection output OUT also decreases to the original value. From this, the approximate position of the fine hole H can be observed.
[0052]
It is possible to detect an abnormality of the stylus 73 by this observation. For example, when the stylus 73 is broken, even if the stylus 73 is positioned at a position where the gap G has a predetermined value, the vibration amplitude of the stylus 73 does not change due to the sound pressure phenomenon. When the stylus 73 is slightly bent or the like, the vibration amplitude is small because the contact portion 731 and the minute hole H are displaced even when the stylus 73 is positioned at the position of the minute hole H. Does not increase. From these facts, an abnormality of the stylus 73 can be detected.
[0053]
Further, even when the minute hole H is clogged with dust or the like, the sound pressure phenomenon changes from the normal value, so that an abnormality of the measured object can be detected.
Note that the observation unit in the fifth embodiment may be used together with the observation units in the first to fourth embodiments, or may be used alone as the observation unit.
[0054]
According to the fifth embodiment, the following effects can be obtained.
(9) In the excitation type probe, it is determined whether or not the vibration amplitude of the tracing stylus is within a predetermined range to determine that it is in the sound pressure phenomenon area, and the vicinity of the measurement point is determined based on the change state of the vibration amplitude. Since the observation means for observing can be configured, the configuration of the probe is simplified. Further, since no special additional means is required as the data collecting means, the size and weight can be reduced.
(10) Since it can be used together with the optical observation means, it is possible to observe a fine gap between the measurement point and the object to be measured.
[0055]
Next, a method for reliably measuring the fine shape of the device under test W using the fine probe 72 of the present invention will be described.
First, prior to the measurement, the stylus 73 of the fine probe 72 is brought close to the measurement target portion of the workpiece W, and the measurement point of the stylus 73 and the surface of the workpiece W are observed by the observation means.
Next, based on this observation result, it is confirmed whether or not there is an abnormality in the measurement target portion of the workpiece W and the measurement point of the stylus 73.
Thereafter, the measurement target portion is measured by the fine probe 72.
[0056]
According to this method, the stylus 73 observes the vicinity of the measurement point related to the workpiece W to confirm the location to be measured on the surface of the workpiece, and based on the result, the location to be measured is determined by the fine probe 72. Since this measurement is performed, highly reliable measurement can be performed even if it is difficult to visually confirm the measurement target portion.
The present invention is not limited to these embodiments.
[0057]
For example, an example has been shown in which the fine probe 72 according to the present invention is mounted on the tip of the Z-axis spindle of the coordinate measuring machine 100 to measure the fine shape of the workpiece W. However, the present invention is not limited to this. The fine probe 72 of the invention may be used. In this case, since the imaging means originally provided in the image measuring device can be used as the microscope 81, the configuration of the fine probe 72 can be simplified.
Further, the fine probe 72 may be used for a surface texture measuring device such as a roundness measuring device and a contour shape measuring device.
[0058]
Further, the example in which the liquid crystal display 95 provided in the operation panel 11 of the coordinate measuring machine 100 is used as the output means has been described, but it may be displayed on a display of a computer. However, operability is better if a display (output means) is provided near the fine probe as in this embodiment.
Further, the optical observation means and the observation means using the sound pressure phenomenon have been described as examples of the observation means, but the observation means is not limited thereto, and may be any observation means based on any principle such as electrostatic or electromagnetic.
[0059]
Further, an example of a vibrating probe has been described as a measurement principle of a fine probe, but any probe that can measure a fine shape, regardless of a contact type or a non-contact type, may be used.
Further, the fine probe has been described as an example of the touch signal probe, but may be a scanning fine probe.
[0060]
Further, although the fine probe is shown as being fixed to the probe holder, the fine probe or stylus may be replaceable.
Also, an example has been described in which the imaging output of the imaging unit is sent to the output unit via a cable, but the transmission unit is not limited to this transmission unit, but may be any transmission unit such as wireless transmission.
[0061]
【The invention's effect】
As described above, according to the fine shape measuring probe and the fine shape measuring method according to the present invention, there is an effect that the fine shape of the object to be measured can be measured with high reliability.
[Brief description of the drawings]
FIG. 1 is an external view of a CMM equipped with a fine shape measurement probe according to a first embodiment of the present invention.
FIG. 2 is a diagram showing a configuration of a fine shape measurement probe according to the first embodiment of the present invention.
FIG. 3 is a diagram showing a configuration of a fine shape measurement probe according to a second embodiment of the present invention.
FIG. 4 is a diagram showing a configuration of a fine shape measurement probe according to a third embodiment of the present invention.
FIG. 5 is a diagram showing a configuration of a fine shape measurement probe according to a fourth embodiment of the present invention.
FIG. 6 is a diagram showing a configuration of a fine shape measurement probe according to a fifth embodiment of the present invention.
FIG. 7 is a diagram illustrating an observation principle of a fine shape measurement probe according to a fifth embodiment of the present invention.
FIG. 8 is a diagram showing a fine shape measurement probe according to the related art.
FIG. 9 is another view showing a fine shape measurement probe according to the related art.
[Explanation of symbols]
72 Fine Probe
73 stylus
90 Observation microscope
91 CCD camera
92 Fiberscope
93 Remote observation means
95 Liquid crystal display
100 CMM
731 Contact part (measurement point)
H micro hole

Claims (8)

A probe provided with a probe for measuring a fine shape of an object to be measured,
A fine shape measuring probe, comprising: an observing means capable of observing a vicinity of a measuring point where the tracing stylus relates to the object to be measured. 2. The probe according to claim 1, wherein the observation unit includes an imaging unit that captures an image near the measurement point, and an output unit that outputs an imaging result obtained by the imaging unit. 3. The probe according to claim 2, wherein the imaging means is a CCD camera. The probe according to claim 2, wherein the imaging unit is a fiberscope. The microscopic shape measurement probe according to claim 2, wherein the imaging unit is a telescope capable of imaging from a position separated from the measurement point. The fine shape measurement probe according to any one of claims 1 to 5, wherein the probe is a vibrating probe that detects contact with the object under measurement while the probe is vibrated. . The fine shape measurement probe according to claim 6, wherein the observation unit observes the vicinity of the measurement point based on a sound pressure phenomenon that occurs when the measurement element approaches the object to be measured. A method for measuring a fine shape of the object to be measured using the fine shape measuring probe according to any one of claims 1 to 7,
An observation step of observing the surface of the measured object by the observation means,
A confirmation step of confirming a measurement location of the object to be measured based on the result obtained in the observation step,
A measurement step of measuring the measurement location by the fine shape measurement probe after the confirmation step,
A method for measuring a fine shape, comprising:

Images