JP2016080436A - Surface property measurement device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a surface property measurement device having a movement mechanism which is suitable for performing positional adjustment for center alignment.SOLUTION: A measuring instrument 2 of a surface property measurement 1 includes a Y-axis movement mechanism 10 for positional adjustment for center alignment. The Y-axis movement mechanism 10 includes: a first guide plate 11 having a first guide rail part 11b extending in the Y-axis direction; and a first mounting plate 12 which is constituted so that a detector 100 is fixedly supported and guided to the first guide rail part 11b to be moved in the Y-axis direction.SELECTED DRAWING: Figure 1

Description

  The present invention relates to an apparatus for measuring the surface properties of a measurement object.

Conventionally, for example, as a device for measuring the surface property of a measurement object having a circular cross section such as a component part of a rolling bearing, there are techniques described in Patent Documents 1 and 2, for example.
The evaluation apparatus of Patent Document 1 rotates a measurement object with power generated by a drive source to generate a predetermined relative motion between the measurement object and a detector, and has a certain physical quantity detected by the detector. The output signal is collected and analyzed by the information processing means, and the measurement object is evaluated.

  In addition, the measuring apparatus of Patent Document 2 holds a measuring object having a circular cross section on a rotating unit, and rotates the measuring object by the rotating unit while detecting the roundness and the waveness of the measuring object via a detector. Shape data such as (surface waviness) is measured. Such a measuring apparatus includes, as a detector, a contact-type measuring element and a displacement sensor that detects the position of the measuring element.

Japanese Patent No. 4129623 JP 2013-152195 A

However, the prior art disclosed in Patent Document 1 has no description of the moving means for centering the detector with respect to the measurement object and no description of the moving means for moving the detector relative to the measurement object.
In addition, the prior art of Patent Document 2 includes a moving means in the stroke direction of the detector and a moving means in the axial direction. However, the moving means in the direction orthogonal to the stroke direction and the axial direction is I do not have. That is, the moving means for centering the measuring object of the detector (measuring element) is not provided. Therefore, the position of the detector in the orthogonal direction is fixedly determined when the detector is attached.

  Such a detector is generally fixedly mounted on the moving stage 661 using screws 620 to 622 and a mounting plate 610 in accordance with the centering position as shown in FIGS. 17A and 17B, for example. The Here, the screw holes 612 to 614 provided in the detector 611 are provided with a margin for centering.

For example, when the detector 611 is changed due to a change in the size of the measurement object 700 or the like, the positional relationship between the detector 611 and the measurement object 700 changes, so that centering is necessary. The centering operation is performed by slightly moving the detector 611 in the orthogonal direction within the range of the mounting allowance while the screws 620 to 622 are loosened (in FIG. 17A). The position of the measurement object 700 passing through the circle center 710 (hereinafter referred to as “center position”) is visually searched, and the screws 620 to 622 are tightened at the found center position. Since this operation is performed manually, when the screw 620 to 622 is tightened, if the detector 611 slightly moves and the measuring element 615 is displaced from the centering position, the screw 620 to 622 is loosened again to adjust the position. Such a complicated work was necessary.
Therefore, the present invention has been made paying attention to such an unsolved problem of the conventional technique, and is a surface property measurement provided with a moving mechanism suitable for position adjustment for centering. The object is to provide a device.

  [Mode 1] In order to achieve the above object, the surface texture measuring apparatus according to mode 1 is a rotational drive that rotationally drives a measurement object by rotating a measurement object support portion on which the measurement object is supported by a rotational drive source. A detector having a mechanism, a contact-type measuring element, and detecting a physical quantity caused by a relative movement between the measuring object to be rotated and the measuring element in contact with the surface of the measuring object; and a detection result of the detector A surface texture measuring unit for measuring the surface texture of the measurement object, and the detector in the position adjustment direction for the centering of the detector with respect to the measurement object supported by the measurement object support unit. And a centering movement mechanism that is movable in a state where the container is fixedly supported by the support member.

With such a configuration, the detector can be centered while the detector is fixedly supported by the support member without a complicated operation such as manually loosening the screw by the centering moving mechanism. Therefore, it is possible to move in the position adjustment direction.
As a result, an effect that the position adjustment for centering can be performed easily and accurately is obtained.

[Embodiment 2] Furthermore, the surface texture measuring device of Embodiment 2 is different from the configuration of Embodiment 1 in that the centering moving mechanism includes a first guide member extending in the position adjustment direction, and the detector. A detector support member that is fixedly supported and that is guided by the first guide member and moves in the position adjustment direction.
With such a configuration, the detector can be moved in the position adjustment direction by the centering moving mechanism with the detector fixedly supported by the detector support member.
As a result, an effect that the position adjustment for centering can be performed easily and accurately is obtained.

  [Mode 3] Furthermore, the surface texture measuring device according to mode 3 detects in the first direction approaching and moving away from the measurement object supported by the measurement object support unit with respect to the configuration of form 1 or 2. A first moving mechanism that enables the detector to move, and a detector that allows the detector to move in a second direction that is the rotational axis direction of the measurement object support unit with respect to the measurement object supported by the measurement object support unit. The centering moving mechanism is configured to be able to move the detector in a third direction orthogonal to the first direction and the second direction as the position adjusting direction.

With such a configuration, the first moving mechanism and the second moving mechanism cause the detector to approach and move away from the measurement object in the first direction and the second direction that is the rotation axis direction of the measurement object support unit. It becomes possible to move. In addition, the centering moving mechanism can move the detector in a third direction orthogonal to the first direction and the second direction as a position adjustment direction for centering.
Thereby, the effect that the position adjustment for centering with respect to the measurement object having a circular cross section can be easily and accurately performed is obtained.

  [Mode 4] Furthermore, the surface texture measuring device according to mode 4 can be measured by the first moving mechanism when the position adjustment mode for adjusting the position for centering is set in the configuration of mode 3. If the detector moves in the direction approaching the contact point and the probe has contacted the measurement object, a reference position setting unit that sets the contact position as a reference position, and a centering movement mechanism after setting the reference position A displacement amount calculation unit that calculates a displacement amount from the reference position of the probe when the contact position is changed in the position adjustment direction by using a displacement amount display unit that displays the displacement amount calculated by the displacement amount calculation unit. .

In such a configuration, when the reference position setting unit first sets the position where the probe contacts the measurement object as the reference position, and the displacement calculation unit changes the contact position in the position adjustment direction. The displacement amount with respect to the reference position is calculated, and the calculated displacement amount can be displayed on the displacement amount display unit.
Here, in the centering with respect to the measuring object having a circular cross section, the centering position is a position where the contact position of the measuring element becomes the maximum in the direction away from the measuring object with respect to the reference position. That is, the extension line extending in the first direction (direction approaching the measurement object) of the tip (contact part) of the measuring element is a position passing through the circular center of the cross section of the measurement object.
Therefore, with the configuration of the fourth aspect, it is possible to adjust the position in the third direction in which the displacement amount is maximum while observing the displayed displacement amount, which is simpler and more accurate. The effect that position adjustment for centering can be performed is obtained.

[Embodiment 5] Further, in the surface texture measuring device of Embodiment 5, the centering moving mechanism is fixed to the first guide member extending in the position adjusting direction and the detector in contrast to the configuration of Embodiment 3 or 4. A detector support member that is supported and guided by the first guide member to move in the position adjustment direction, and a first drive source that drives the detector support member.
With such a configuration, the detector support member is guided by the first guide member and moved in the position adjustment direction by the driving force of the first drive source, so that the detector is detected by the detector. It is possible to move in the position adjustment direction while being fixedly supported by the support member.
As a result, the movement for position adjustment can be performed finely, and the effect that the position adjustment for centering can be performed more accurately is obtained.

[Mode 6] Further, the surface texture measuring device of mode 6 is different from the configuration of mode 5 in that the first moving mechanism includes a second guide member extending in the first direction and a centering moving mechanism. A centering moving mechanism supporting member that is fixedly supported and is guided by the second guide member to move in the first direction, and a second drive source that drives the centering moving mechanism supporting member.
With such a configuration, the detector is detected by the centering moving mechanism support member being guided by the second guide member and moving in the first direction by the driving force of the second driving source. It is possible to move in the first direction while the container is fixedly supported.
Thereby, for example, by controlling the driving speed of the second driving source, the effect that the detector can be finely moved in the first direction is obtained. Further, the position adjustment for centering can be automated by controlling the driving of the first driving source and the second driving source.

  [Mode 7] Furthermore, the surface texture measuring device according to mode 7 has the first drive source when the automatic centering mode for automatically adjusting the position for centering is set for the configuration of mode 6. And a position information recording unit for controlling the second drive source to move the detector in the position adjustment direction and record the position information of the detector when the measuring element is brought into contact with the measurement object at each moving position; Based on the position information recorded by the position information recording unit, the centering position setting unit for setting the centering position, the first driving source and the second driving source are controlled, and the centering position setting unit sets A centering position moving unit that moves the detector to the centering position.

With such a configuration, the position adjustment operation for centering can be automated by the position information recording unit, the centering position setting unit, and the centering position moving unit.
As a result, it is possible to obtain an effect that the position adjustment for centering can be performed more easily and accurately as compared with the configuration in which the position adjustment is performed manually.

  [Embodiment 8] Further, in the surface texture measuring device of Embodiment 8, the measurement object is an object having a circular cross section, and the rotational drive mechanism is concentric with the circular center of the circular cross section in the configuration of Embodiment 7. The measurement object is rotationally driven around the rotation axis, and the position information recording unit controls the first drive source to move the detector from the initial position to a position where the probe contacts the measurement object, and A first position information recording process for recording position information is performed, and after the first position information recording process, the first drive source is driven and controlled so that a minute distance is set in a direction in which the detector is separated from the measurement object. A second position information recording process for moving and recording the position information of the detector by moving the detector to a position where the measuring element contacts the object to be measured by driving and controlling the second drive source after the movement; Repeat until the probe is in the separated position where it does not come into contact with the object to be measured. Position setting unit and determines that became separated position which no longer the contact, sets a position corresponding to the latest position information position information recording unit is recorded in the centering position.

With this configuration, the position information recording unit can perform the first position information recording process for recording the position information of the detector when the probe first contacts the surface of the measurement object. Become. Further, after the first position information recording process, the position information recording unit moves the detector in the position adjustment direction while moving a minute distance in the separation direction, so that the probe contacts the surface of the measurement object. In addition, the second position information recording process for recording the position information of the detector at the time of contact can be performed until the measurement object is not contacted. When the centering position setting unit determines that the object to be measured is no longer in contact, the position corresponding to the latest recorded position information can be set as the centering position.
As a result, it is possible to obtain an effect that the position adjustment for centering can be performed more easily and accurately as compared with the configuration in which the position adjustment is performed manually.

It is a front view which shows the structure of the surface texture measuring apparatus 1 of 1st Embodiment. It is a side view which shows the structure of the surface texture measuring apparatus 1 of 1st Embodiment. (A) is the top view which looked at the 1st mounting plate 12 from the X-axis direction, (b) looked at the Y-axis moving mechanism 10 of the state which removed the 1st mounting plate 12 from the X-axis direction. (C) is a plan view of the Z-axis moving mechanism 20 with the second mounting plate 22 removed, as viewed from the X-axis direction. (A) is sectional drawing seen from the AA direction of FIG. 1, (b) is sectional drawing seen from the BB direction of FIG. It is a figure which shows the structural example of the locking mechanism 14 of 1st Embodiment. It is a block diagram which shows an example of a function structure of the control apparatus 3 of 1st Embodiment. It is a flowchart which shows an example of the process sequence of a position adjustment assistance process. (A) is a figure which shows an example in which the centering position has shifted | deviated, (b) is a figure which shows an example of the movement operation | movement of the detector 100 in the Z-axis direction by the Z-axis moving mechanism 20. FIG. (A)-(d) is a figure which shows an example of the movement operation | movement of the Y-axis direction for the centering operation | work by the Y-axis moving mechanism 10. FIG. It is a front view which shows the structure of the surface texture measuring apparatus 301 of 2nd Embodiment. It is a block diagram which shows an example of a function structure of the control apparatus 3 of 2nd Embodiment. It is a front view which shows the structure of the surface texture measuring apparatus 401 of 3rd Embodiment. It is a block diagram which shows an example of a function structure of the control apparatus 3 of 3rd Embodiment. It is a block diagram which shows the detailed structure of the motor control part 521 of 3rd Embodiment. It is a flowchart which shows an example of the process sequence of an automatic centering process. (A)-(f) is a figure which shows an example of the centering operation | work of the detector 100 by an automatic centering process. (A)-(c) is a figure which shows an example of the attachment structure of the detector of the conventional surface texture measuring apparatus.

(First embodiment)
(Constitution)
The surface texture measuring device 1 according to the first embodiment is a device for measuring the surface texture of a measurement object such as an outer ring, an inner ring, and a rolling element (ball or roller) of a bearing.
As shown in FIGS. 1 and 2, the surface texture measuring apparatus 1 includes a measuring device 2 that detects a physical quantity caused by relative movement between a measuring object and a measuring element, and a measuring object by arithmetic processing based on the detected physical quantity. A control device 3 for measuring the surface property of the display and a display device 4 for displaying information such as the measurement results.

The measuring instrument 2 includes a Y-axis moving mechanism 10, a Z-axis moving mechanism 20, an X-axis moving mechanism 30, a rotation drive mechanism 40, a housing 50, and a detector 100.
The Y-axis moving mechanism 10 is a moving mechanism for moving the detector 100 in the Y-axis direction shown in FIGS. The Y-axis moving mechanism 10 includes a first guide plate 11, a first mounting plate 12, and a Y-axis moving handle 13.

As shown in FIG. 1, the first guide plate 11 has a first base plate portion 11a and a substantially inverted trapezoidal cross section in the Z-axis direction along the longitudinal direction from the first base plate portion 11a. The first guide rail portion 11b is formed so as to protrude in this manner.
As shown in FIG. 2, the first mounting plate 12 includes a second base plate portion 12a having a support surface for fixing and supporting the detector 100, and a support surface opposite to the support surface of the second base plate portion 12a. A first guide rail receiving portion 12b and a second guide rail receiving portion 12c are formed on the surface so as to protrude along the longitudinal direction.

  The first guide rail receiving portion 12b protrudes to the lower end side of the surface opposite to the second base plate portion 12a when viewed from the Y-axis direction with the Z-axis direction in FIGS. 1 and 2 as the vertical direction. It is formed and has an inclined surface having the same inclination angle as the lower inclined surface of the first guide rail portion 11b. The first guide rail receiving portion 12b is slidable along the lower inclined surface of the first guide rail portion 11b with the inclined surface being incorporated in the first guide rail portion 11b. It is comprised so that it may contact | abut on this lower side inclined surface.

  The second guide rail receiving portion 12c is formed so as to project from the upper end side of the surface on the opposite side of the second base plate portion 12a when viewed from the front in the Y-axis direction, and is part of the Y-axis moving handle 13 side. However, it has the inclined surface of the same inclination angle as the upper inclined surface of the 1st guide rail part 11b. Further, the second guide rail receiving portion 12c is viewed from the front in the Y-axis direction, and the remaining portion different from a portion on the Y-axis moving handle 13 side is the upper inclined surface of the first guide rail portion 11b. A Z-axis direction cross section protrudes in a substantially rectangular shape with a housing portion for accommodating a fixing member 14c (described later) having a slanted surface along the slanted surface in between and a trapezoidal shape. Is formed. A part of the second guide rail receiving portion 12c on the Y-axis moving handle 13 side is fitted into the first guide rail portion 11b, and the inclined surface of the second guide rail receiving portion 12c is the first guide rail portion 11b. The upper side inclined surface is configured to be slidable along the upper side inclined surface.

The Y-axis moving handle 13 is rotated manually to move the first mounting plate 12 in the Y-axis direction (left-right direction when viewed from the front in FIG. 1).
Further, as shown in FIG. 1, the detector 100 has screws 104a to 104c screwed into screw holes 103a to 103c having a counterbore portion and penetrating in the X-axis direction. In addition, the first mounting plate 12 is screwed by screwing into screw holes 120a to 120c (described later) provided in the support surface of the second base plate portion 12a of the first mounting plate 12. Is fixedly supported.

With the above configuration, the detector 100 supported by the first mounting plate 12 is driven by rotating the Y-axis moving handle 13 and moving the first mounting plate 12 along the first guide rail portion 11b. Can be moved in the Y-axis direction.
Here, the Y-axis moving handle 13 of the first embodiment moves the detector 100 to the left when rotated clockwise, and moves the detector 100 to the right when rotated counterclockwise. It is configured as follows. Not limited to this configuration, the Y-axis moving handle 13 may be configured to move the detector 100 counterclockwise to the right and clockwise to the left.

  The lock mechanism 14 allows the first mounting plate 12 to move in the Y-axis direction and the fixed state that prevents the first mounting plate 12 from moving in the Y-axis direction by manually operating the lock lever 14a. This is a mechanism capable of switching between the released state and the released state. That is, the first mounting plate 12 is released and the position of the detector 100 in the Y-axis direction is adjusted to determine the centering position of the detector 100 with respect to the measurement object. Thereafter, the first mounting plate 12 is set in a fixed state, thereby preventing the occurrence of misalignment of the detector 100 from the centering position. The detailed configuration of the lock mechanism 14 will be described later.

The Z-axis moving mechanism 20 is a moving mechanism for moving the detector 100 in the Z-axis direction shown in FIGS. 1 and 2 (vertical direction when FIGS. 1 and 2 are viewed from the front). The Z-axis moving mechanism 20 includes a second guide plate 21, a second mounting plate 22, and a Z-axis moving handle 23.
The second guide plate 21 has a second base plate portion 21a and a second base plate portion 21a formed so as to protrude from the second base plate portion 21a along the longitudinal direction thereof so that the Z-axis direction cross section has an inverted trapezoidal shape. It comprises a guide rail portion 21b and a mounting plate portion 21c formed to project from the surface of the second base plate portion 21a opposite to the surface on which the second guide rail portion 21b is formed.

  The second mounting plate 22 has a support surface for fixing and supporting the Y-axis moving mechanism 10, and is formed to protrude at both ends in the Y-axis direction on the surface opposite to the support surface. It has the 3rd and 4th guide rail receiving part which has the inclined surface along the inverted trapezoid-shaped inclined surface of 21b. With the Y-axis direction as the left-right direction, the third and fourth guide rail receiving portions are incorporated in the second guide rail portion 21b, and the inclined surface is the left inclined surface of the second guide rail portion 21b. And it is comprised so that these left side inclined surface and right side inclined surface may contact | abut so that sliding is possible along a right side inclined surface.

The Z-axis moving handle 23 is driven to rotate manually to move the second mounting plate 22 in the Z-axis direction (vertical direction).
Further, the Y-axis moving mechanism 10 is attached to the second attachment plate 22 by being fixedly supported on the support surface of the second attachment plate 22 with, for example, screws.
With the above configuration, the Z-axis movement handle 23 is rotationally driven to move the second mounting plate 22 along the second guide rail portion 21b, so that the Y-axis movement supported by the second mounting plate 22 is achieved. It is possible to move the detector 100 supported by the mechanism 10 and the Y-axis moving mechanism 10 in the Z-axis direction.

As with the Y-axis movement mechanism 10, the Z-axis movement mechanism 20 is also in a fixed state that prevents the movement of the second attachment plate 22 and a release state that allows the movement of the second attachment plate 22. It is good also as a structure which provides the lock mechanism which switches.
The X-axis moving mechanism 30 is a moving mechanism for moving the detector 100 in the X-axis direction shown in FIGS. 1 and 2 (the left-right direction in FIG. 2). The X-axis moving mechanism 30 includes a third guide plate 31 and an X-axis moving lever 32.

As shown in FIG. 2, the third guide plate 31 is opposite to the third base plate portion 31a having a support surface for fixing and supporting the Z-axis moving mechanism 20, and the support surface of the third base plate portion 31a. A third guide rail portion 31b is formed on the side surface so as to protrude along the longitudinal direction so that the cross section in the Z-axis direction has an inverted trapezoidal shape.
Here, the Z-axis movement mechanism 20 is fixed to the third guide plate 31 by fixing and attaching the mounting plate portion 21c of the second guide plate 21 to the support surface of the third base plate portion 31a with, for example, screws. It is attached.

The third guide rail portion 31b is slidably attached along a guide groove provided in the upper portion of the housing 50 and extending in the X-axis direction. This guide groove has an inclined surface that abuts the inverted trapezoidal inclined surface of the third guide rail portion 31b at both ends in the Y-axis direction when the third guide rail portion 31b is inserted into the groove from the X-axis direction. have.
The X-axis moving lever 32 is operated manually to move the third guide plate 31 in the X-axis direction (left-right direction in FIG. 2).

  With the above configuration, the Z-axis moving mechanism 20 supported by the third guide plate 31 can be moved to the left in FIG. 2 by tilting the X-axis moving lever 32 in the left direction in FIG. 2 (frontward in FIG. 1). It is possible to move in the direction (front direction in FIG. 1). On the other hand, the Z-axis moving mechanism 20 supported by the third guide plate 31 is moved to the right in FIG. 2 (by moving the X-axis moving lever 32 to the right in FIG. 2 (depth direction in FIG. 1). It can be moved in the depth direction in FIG.

That is, the Y-axis movement mechanism 10 supported by the Z-axis movement mechanism 20 and the detector 100 supported by the Y-axis movement mechanism 10 can be moved in the X-axis direction.
Note that, similarly to the Y-axis moving mechanism 10 and the Z-axis moving mechanism 20, the X-axis moving mechanism 30 is also in a fixed state that prevents the movement of the third guide rail portion 31b and the third guide rail portion 31b. It is good also as a structure which provides the lock mechanism which switches the cancellation | release state which enables a movement.

The rotation drive mechanism 40 includes a spindle 41, a spindle support portion 42, a measured object support portion 43, and a first spindle motor device 44.
The spindle 41 is a cylindrical rotating shaft that fixedly supports the measurement object support portion 43 and rotates the measurement object support portion 43 by rotating itself.
The spindle support portion 42 has a cylindrical shape having an inner diameter larger than the outer diameter of the spindle 41, and rotatably supports the spindle 41 via a bearing (not shown) inside.

The measured object support portion 43 has a cylindrical shape with an outer diameter smaller than the inner diameter of the spindle 41, has a support portion for the measurement object 200 on one end side, and is inserted into the cylinder of the spindle 41 from the other end side. This is supported by the spindle 41. The measurement object support part of the measurement object support part 43 is configured by, for example, a magnet chuck that supports the measurement object 200 by magnetic force.
The first spindle motor device 44 includes a first motor (for example, a direct drive motor) that generates a rotational driving force that rotates the spindle 41 around the X axis, and a first motor that drives the first motor. And a first motor rotation angle sensor for detecting the rotation angle of the first motor. The first spindle motor device 44 is connected to the control device 3 via an electric cable (not shown), and the first motor rotation angle detected by the first motor rotation angle sensor is detected via this electric cable. It transmits to the control apparatus 3. Further, the first motor control signal is received from the control device 3 via the electric cable, and the first motor driving circuit is driven in accordance with the received first motor control signal to rotate the first motor. To drive.

The housing 50 is a base of the measuring machine 2 and houses a part of the spindle 41, a part of the spindle support part 42, a control circuit for the magnet chuck, and the like.
In the first embodiment, the detector 100 includes a measuring element 101 having a telescopic stylus and a detection unit 102 that detects a physical quantity (for example, a voltage value indicating the magnitude of displacement) according to the expansion / contraction operation of the stylus. It is comprised including.

When the tip of the stylus is pushed, it is retracted inward and its exposed part is shortened, and when the tip is not pushed, for example, the elastic part such as a spring jumps out and the exposed part is the longest. It is comprised so that it may be in a state. In addition, it is good also as other structures, such as a structure which becomes not only an elastic member but a self-weight and the longest state by gravity.
That is, the tip of the stylus of the probe 101 is brought into contact with the surface of the measuring object 200 and the measuring object 200 is rotationally driven by the rotation driving mechanism 40, so that the stylus expands and contracts according to the surface irregularities. . The detection unit 102 detects a physical quantity corresponding to the expansion / contraction operation.

The detector 100 is connected to the control device 3 via an electric cable (not shown), and transmits a detection signal indicating the physical quantity detected by the detection unit 102 to the control device 3 via the electric cable.
The control device 3 controls the operation of the spindle motor device 44 in accordance with an instruction input input via the operation unit, or performs an arithmetic process on the physical quantity input from the detector 100 to expand / contract the stylus. Is converted into a displacement amount, or the displacement amount is displayed on the display device 4 as the surface property of the measurement object.

The control device 3 further has a position adjustment mode for adjusting the position for centering. When the position adjustment mode is set, the position where the probe 101 first contacts is set as the reference position, and thereafter A displacement amount of the probe 101 with respect to the reference position is calculated from the detected physical quantity and the reference position. Then, information such as the calculated displacement amount is displayed on the display device 4.
That is, when the measuring object 200 has a circular cross-sectional shape, a position corresponding to the maximum value of the displacement amount (the maximum value in the direction away from the measuring object 200) corresponds to the centering position. Accordingly, the user can easily center by searching the displacement amount displayed on the display device 4 and operating the Y-axis moving handle 13 of the Y-axis moving mechanism 10 to find the position where the displacement amount is maximum. Can be done.

  Although not shown, the control device 3 includes a storage medium storing a program for performing operation control of various components such as the spindle motor device 44 and various arithmetic processes, and a processor for executing the program. And a computer system including a RAM for temporarily storing data necessary for program execution. Further, the control device 3 includes an operation unit such as a keyboard and a switch, an A / D converter for A / D converting the detection signal of the detector 100, and the like.

The display device 4 is a known display device such as a liquid crystal display, a CRT display, a plasma display, or an organic EL display, and displays various images in response to an image signal input from the control device 3.
Next, based on FIG.3 and FIG.4, the detailed structure of the Y-axis moving mechanism 10 and the Z-axis moving mechanism 20 is demonstrated.

As shown in FIG. 3A, the Y-axis moving mechanism 10 is provided with screw holes 120 a to 120 c for attaching the detector 100 to the first attachment plate 12. Further, as shown in FIG. 3B, the Y-axis moving mechanism 10 includes a first ball screw shaft 15 and a first ball screw nut 16.
As shown in FIG. 3A, the first mounting plate 12 is further attached to the first ball screw nut 16 shown in FIG. 3B by screwing. Counterbore portions 121a to 121d and screw holes 122a to 122d penetrating the first mounting plate 12 at the central portions of the counterbore portions 121a to 121d.

Further, as shown in FIG. 3B, one end of the first ball screw shaft 15 is arranged so that the first ball screw shaft 15 rotates in the same direction as the Y-axis moving handle 13 rotates. The shaft moving handle 13 is connected through a coupling or the like. Further, the other end side of the first ball screw shaft 15 is screwed into the first ball screw nut 16.
Further, the first guide rail portion 11b of the first guide plate 11 is provided with a first guide groove portion 11c extending in the Y-axis direction. As the first ball screw shaft 15 rotates, One ball screw nut 15 is configured to be movable in the Y-axis direction along the first guide groove 11c.

Furthermore, screw holes 160 a to 160 d are provided on the mounting surface of the first mounting plate 12 of the first ball screw nut 16.
With the above configuration, the first mounting plate 12 is assembled to the first guide rail portion 11b of the first guide plate 11 via the first and second guide rail receiving portions 12b and 12c. ), The screw shafts of the screws indicated by dotted lines in the drawing (only screws 123b and 123d are shown in FIG. 4A) are screwed into the screw holes 122a to 122d of the first mounting plate 12, respectively. . Further, the first mounting plate 12 is attached to the first ball screw nut 16 by screwing the screw shafts penetrating the screw holes 122 a to 122 d into the screw holes 160 a to 160 d of the first ball screw nut 16.

Accordingly, when the Y-axis moving handle 13 is rotationally driven, the first ball screw shaft 15 is rotated, and the first ball screw nut 16 is moved along the first guide groove portion 11c in the Y-axis direction. As a result, the first attachment plate 12 attached to the first ball screw nut 16 moves in the Y-axis direction along the first guide rail portion 11b.
Note that the Z-axis moving mechanism 20 has the same configuration as the Y-axis moving mechanism 10.

  That is, the Z-axis moving mechanism 20 includes a second ball screw shaft 25 and a second ball screw nut 26 as shown in FIG. One end of the second ball screw shaft 25 is coupled to the Z axis moving handle 23 via a coupling or the like so that the second ball screw shaft 25 rotates in the same direction as the Z axis moving handle 23 rotates. The other end side of the second ball screw shaft 25 is screwed to the second ball screw nut 26.

Further, the second guide rail portion 21b of the second guide plate 21 is provided with a second guide groove portion 21d extending in the Z-axis direction. As the second ball screw shaft 25 rotates, The second ball screw nut 26 is configured to be movable in the Z-axis direction along the second guide groove 21d.
With the above configuration, the second mounting plate 22 is assembled to the second guide rail portion 21b of the second guide plate 21 via the third and fourth guide rail receiving portions, and then shown in FIG. In this manner, the screw shaft of the screw indicated by the dotted line in the figure is screwed into the screw hole (not shown) of the second mounting plate 22, and the screw shaft penetrating the screw hole is connected to the second ball screw nut 26. The second mounting plate 22 is attached to the second ball screw nut 26 by being screwed into the screw holes 260a to 260d.

Accordingly, when the Z-axis moving handle 23 is rotationally driven, the second ball screw shaft 25 rotates and the second ball screw nut 26 moves along the second guide groove portion 21d in the Z-axis direction. As a result, the second attachment plate 22 attached to the second ball screw nut 26 moves in the Z-axis direction along the second guide rail portion 22b.
Next, a detailed configuration of the lock mechanism 14 will be described with reference to FIG.

As shown in FIG. 5, the lock mechanism 14 includes a lock lever 14a, a screw shaft 14b, and a fixing member 14c.
The screw shaft 14b is screwed into a screw hole that penetrates the second guide rail receiving portion 12c of the first mounting plate 12 and penetrates in the Z-axis direction. One end on the upper side of the screw shaft 14b is fixed to the lock lever 14a, and the other end on the lower side passing through the screw hole is screwed into a screw hole provided in the fixing member 14c.

  With this configuration, when the lock lever 14a is operated in the rotational direction in which the screw shaft 14b is screwed into the screw hole, a force pressing the fixing member 14c from above is generated, and the inclined surface of the fixing member 14c becomes the first guide rail portion. It is pressed against the inclined surface of 11b. This pressing force prevents the detector 100 supported by the first mounting plate 12 from moving in the Y-axis direction. That is, the Y-axis moving mechanism 10 is in a fixed state.

  On the other hand, when the lock lever 14a is operated in a rotation direction opposite to the rotation direction in which the screw shaft 14b is screwed into the screw hole, the force pressing the fixing member 14c is weakened, and the inclined surface of the fixing member 14c has a relatively small pressing force ( It is in a state of being in contact with the inclined surface of the first guide rail portion 11b with a slidable pressing force). As a result, the detector 100 supported by the first mounting plate 12 can be moved in the Y-axis direction. That is, the Y-axis moving mechanism 10 is released.

(Functional configuration of the control device 3)
Next, the functional configuration of the control device 3 will be described with reference to FIG.
As shown in FIG. 6, the functional configuration unit 500 of the control device 3 includes a mode setting unit 501, a reference position setting unit 502, a displacement amount calculation unit 503, a display control unit 504, and a motor control unit 505. Consists of.
The mode setting unit 501 is one of a measurement mode for measuring the surface property of the measurement object 200 and a position adjustment mode for assisting position adjustment for centering according to an input instruction via the operation unit. Set the mode. The mode setting unit 501 outputs the set mode information to the reference position setting unit 502 and the displacement amount calculation unit 503, respectively.

When the reference position setting unit 502 detects that the setting mode has been switched from the measurement mode to the position adjustment mode, the reference position setting unit 502 first sets the position where the probe 101 of the detector 100 contacts the measurement object 200 as the reference position. . The reference position setting unit 502 outputs the set reference position to the displacement amount calculation unit 503.
The displacement amount calculation unit 503 performs normal displacement amount calculation processing when the measurement mode is set, and uses the reference position input from the reference position setting unit 502 when the position adjustment mode is set. The displacement amount is calculated.

Specifically, the reference position is set to “0”, the displacement in the direction in which the tip position of the stylus of the probe 101 is separated from the measurement object 200 is a positive displacement, and the displacement in the approaching direction is a negative displacement. Do. Therefore, when the measuring object 200 has a circular cross section, the tip position where the displacement in the plus direction is the maximum is the centering position.
The displacement amount calculation unit 503 outputs the calculated displacement amount to the display control unit 504 in association with the setting mode information set during the calculation.

  The display control unit 504 generates image information for display based on the displacement amount input from the displacement amount calculation unit 503. Further, an image signal for displaying the generated image information is generated, and the generated image signal is output to the display device 4. At this time, when a displacement amount corresponding to the measurement mode is input, for example, based on the input displacement amount, a roundness of the measurement object 200 is calculated, or a graph representing the surface property of the measurement object 200 is displayed. Or generate. Then, an image signal for displaying the image information of the surface property information including the calculated roundness and the generated graph is generated, and the generated image signal is output to the display device 4. Thereby, the display apparatus 4 displays surface property information based on the input image signal.

  On the other hand, when a displacement amount corresponding to the position adjustment mode is input, the display control unit 504 records the maximum value of the positive displacement amount so far, for example, and records the current displacement amount and the maximum displacement so far. An image signal for displaying the quantity is generated, and the generated image signal is output to the display device 4. Thereby, the display device 4 displays image information including the current value of the displacement amount and the maximum value so far.

  The motor control unit 505 generates a first motor control signal for controlling the first motor drive circuit of the spindle motor device 44 in response to a drive instruction for the spindle motor device 44 from the user via the operation unit. . Then, the generated first motor control signal is output to the spindle motor device 44 via the electric cable. As a result, the spindle motor device 44 drives and controls the first motor drive circuit based on the received first motor control signal to rotationally drive the first motor.

(Position adjustment assisting process)
Next, based on FIG. 7, a processing procedure of the position adjustment assisting process executed when the position adjustment mode is set will be described.
When the program is executed by the processor of the control device 3 and the position adjustment assisting process is started, the process first proceeds to step S100 as shown in FIG.
In step S100, the reference position setting unit 502 determines whether or not the position adjustment mode is set based on the mode information from the mode setting unit 501. If it is determined that the position adjustment mode is set (Yes), the process proceeds to step S102. If it is determined that this is not the case (No), the determination is repeated until the position adjustment mode is set.

  When the process proceeds to step S <b> 102, the stylus of the probe 101 is moved to the surface of the measurement object 200 based on the physical quantity digital data input from the detector 100 via the A / D converter in the reference position setting unit 502. It is determined whether or not it touched. And when it determines with having contacted (Yes), it transfers to step S104, and when it determines with it not being so (No), a determination process is repeatedly performed until a contact is detected.

Here, the contact of the stylus is determined based on, for example, a change in the input physical quantity. In addition, when the detector 100 is provided with the touch sensor, it is good also as a structure determined from the detected value.
When the process proceeds to step S104, the reference position setting unit 502 sets the tip position of the stylus at the time of contact to the reference position “0”. Thereafter, the reference position information is output to the displacement amount calculation unit 503, and the process proceeds to step S106.

In step S106, in the displacement amount calculation unit 503, based on the reference position information from the reference position setting unit 502 and the physical quantity input from the detector 100 via the A / D converter, the displacement of the stylus with respect to the reference position is determined. Calculate the amount of displacement of the tip position. Thereafter, the calculation result in which the position adjustment mode information is associated is output to the display control unit 504, and the process proceeds to step S108.
In step S <b> 108, the display control unit 504 generates an image signal for displaying the input displacement amount information on the display device 4, and outputs the generated image signal to the display device 4. Thereafter, the process proceeds to step S110.
In step S110, the mode setting unit 501 determines whether or not the position adjustment mode has ended by determining whether or not the measurement mode has been set. If it is determined that the position adjustment mode has ended (Yes), the series of processing ends, and if not (No), the process proceeds to step S106.

(Operation)
Next, based on FIGS. 8-9, the operation example of the surface texture measuring apparatus 1 of 1st Embodiment is demonstrated.
Now, as shown in FIG. 8A, the tip position (position in the Y-axis direction) of the probe 101 of the detector 100 is indicated by a dotted line in FIG. Suppose that the centering position (center position of the measuring object 200) is shifted to the position indicated by the one-dot chain line in FIG.
In this case, when using the auxiliary function of the centering operation, first, the operation unit of the control device 3 is operated to input the setting instruction of the position adjustment mode, and the operation shifts to the position adjustment mode.

Next, it is confirmed whether or not the lock lever 14a is in an operation state (release state) in which the detector 100 can move in the Y-axis direction. At this time, in the fixed state, the lock lever 14a is operated to switch to the released state.
Subsequently, as shown in FIG. 8B, it is assumed that the Z-axis moving handle 23 is rotated counterclockwise. As a result, the second ball screw shaft 25 is driven to rotate counterclockwise, and the second mounting plate 22 supporting the Y-axis moving mechanism 10 moves downward along the second guide rail portion 21b. That is, as shown in FIG. 8B, the detector 100 moves downward.

  When the tip of the stylus of the probe 101 comes into contact with the surface of the measuring object 200 due to the downward movement, the contact causes the stylus to slightly retract inward, so that the physical quantity detected by the detection unit 102 varies. Occur. Due to this change, the control device 3 detects that the stylus is in contact (Yes in Step S102), and sets the contact position to the reference position “0” as shown in FIG. 9A (Step S104). ).

  When the reference position is set, the control device 3 calculates the current displacement amount with respect to the reference position while the position adjustment mode is set, and compares the current displacement amount with the maximum displacement amount so far. Do. The display control unit 504 displays the current displacement amount and the maximum displacement amount thus far (the larger displacement amount between the current displacement amount and the maximum displacement amount thus far (for example, the initial value “0”)). Output (step S106). The display control unit 504 generates an image signal that displays “current displacement amount” and “maximum displacement amount so far” based on the input current displacement amount and maximum displacement amount, and the generated image signal. Is output to the display device 4 (step S108).

The display device 4 displays an image including the “current displacement amount” and the “maximum displacement amount so far” based on the image signal input from the display control unit 504.
Subsequently, as shown in FIG. 9B, it is assumed that the Y-axis moving handle 13 is rotated clockwise in the direction in which the tip of the stylus of the probe 101 approaches the centering position (dotted line position in the figure). To do. Accordingly, the first ball screw shaft 15 is driven to rotate clockwise, and the first mounting plate 12 supporting the detector 100 (measuring element 101) moves to the left along the first guide rail portion 11b. To do. That is, as shown in FIG. 9B, the detector 100 moves leftward. Thereby, the display device 4 displays the displacement amount based on the displacement amount after the movement as the “current displacement amount” and the “maximum displacement amount so far”.

  Subsequently, as shown in FIG. 9C, it is assumed that the Y-axis moving handle 13 is rotated clockwise. As a result, the detector 100 moves further to the left, and the stylus expands and contracts. In accordance with this expansion / contraction operation, the “current displacement amount” and the “maximum displacement amount so far” displayed on the display device 4 change. Further, when the stylus reaches the centering position indicated by the dotted line in FIG. 9C, the displacement amount at this time (broken line in FIG. 9C) becomes the maximum displacement amount. Therefore, the “maximum displacement amount so far” displayed on the display device 4 does not change with respect to the subsequent movement in the Y-axis direction.

  When the maximum displacement does not change in this way, next, as shown in FIG. 9D, the Y-axis moving handle 13 is rotated counterclockwise. As a result, the first ball screw shaft 15 is rotationally driven counterclockwise, and the first mounting plate 12 supporting the detector 100 (measuring element 101) moves along the first guide rail portion 11b. That is, the detector 100 moves in the right direction.

In this way, by moving the detector 100 to the right until the “current displacement amount” becomes the same displacement amount as the “maximum displacement amount so far”, the tip position of the stylus of the probe 101 To match the centering position.
Then, after matching the centering position, the position of the detector 100 in the Y-axis direction is fixed by operating the lock lever 14a to place the Y-axis moving mechanism 10 in a fixed state. Thereby, the centering operation is completed.

When the centering operation is completed, the operation unit of the control device 3 is operated to input a measurement mode setting instruction, and the currently set position adjustment mode is switched to the measurement mode.
After switching to the measurement mode, the Z-axis moving handle 23 of the Z-axis moving mechanism 20 and the X-axis moving lever 32 of the X-axis moving mechanism 30 are operated to measure the measurement object 200 (in the example of FIG. The X-axis coordinate position and Z-axis coordinate position of the probe 101 with respect to () are set. That is, the position of the detector 100 is set so that the tip of the probe 101 is in the Z-axis coordinate position in contact with the measuring object 200 at the desired X-axis coordinate position.

Thereafter, by operating the operation unit of the control device 3 to rotate the spindle 41, the measurement object 200 supported by the measurement object support unit 43 is rotationally driven. The physical quantity is detected by the detection unit 102, and a detection signal indicating the detected physical quantity is transmitted to the control device 3 via the electric cable.
The control device 3 performs A / D conversion on the input sensor signal to obtain a digital physical quantity. Then, this physical quantity is converted into a displacement quantity by a calculation process using a preset function or the like. The control device 3 displays the calculated displacement amount as, for example, a graph on the display device 4 as the surface property of the measurement object 200.

In addition, although the operation | movement at the time of utilizing the auxiliary function by position adjustment mode was demonstrated, it is also possible to perform a centering operation | work manually, without using an auxiliary function.
As described above, the surface texture measuring apparatus 1 according to the first embodiment manually aligns the Y-axis moving handle 13 of the Y-axis moving mechanism 10 to center the detector 100 with respect to the measuring object 200 of the measuring element 101. It is possible to move in the position adjustment direction (Y-axis direction).

This makes it possible to perform the centering position setting operation easily and accurately as compared with the conventional position adjustment based on the mounting allowance.
Further, by setting the position adjustment mode, the first contact position of the probe 101 is set as the reference position, and the subsequent change in the physical quantity according to the movement in the Y-axis direction is the displacement amount with reference to the reference position. And the calculation result can be displayed on the display device 4.

As a result, when the measurement object 200 has a circular cross-sectional shape, the Y-axis coordinate position where the displacement amount is maximum corresponds to the centering position, so that the centering position setting operation can be performed more easily and accurately. It becomes possible.
In the first embodiment, the display control unit 504 corresponds to a surface texture measurement unit and a displacement amount display unit, and the Y-axis movement mechanism 10 corresponds to a centering movement mechanism. The Z-axis moving mechanism 20 corresponds to the first moving mechanism, and the X-axis moving mechanism 30 corresponds to the second moving mechanism. The displacement amount calculation unit 503 corresponds to a displacement amount measurement unit.

(Second Embodiment)
Next, a second embodiment of the present invention will be described.
(Constitution)
In the second embodiment, in place of the Y-axis moving handle 13 in the first embodiment described above, a drive source for rotationally driving the first ball screw shaft 15 is provided, and a first motor operation unit is provided. The driving source is driven in response to the user operating the first motor operation unit, and the detector 100 is moved in the Y-axis direction by the driving force of the driving source.

Hereinafter, the same components as those in the first embodiment are denoted by the same reference numerals, description thereof will be omitted as appropriate, and different portions will be described in detail.
As shown in FIG. 10, the surface texture measuring apparatus 301 of the second embodiment includes a measuring machine 302 instead of the measuring machine 2 of the first embodiment. The measuring instrument 302 has the same configuration as the measuring instrument 2 of the first embodiment except that the measuring instrument 302 includes the Y-axis moving motor device 17 instead of the Y-axis moving handle 13.

  The Y-axis moving motor device 17 includes a second motor (for example, a direct drive motor) that generates the rotational driving force of the first ball screw shaft 15 and a second motor that drives the second motor. A drive circuit and a second motor rotation angle sensor for detecting the rotation angle of the second motor are provided. The Y-axis moving motor device 17 is connected to the control device 3 via an electric cable (not shown), and controls the second motor rotation angle detected by the second motor rotation angle sensor via this electric cable. Transmit to device 3. In addition, the second motor control signal is received from the control device 3 via the electric cable, and the second motor driving circuit is driven in accordance with the received second motor control signal to thereby generate the second motor. Is driven to rotate.

In the second embodiment, the user operates a first motor operation unit (not shown) included in the control device 3 so that the detector 100 moves in the moving direction (the left-right direction in FIG. 10) designated by the user. The second motor is rotationally driven clockwise or counterclockwise, and the first ball screw shaft 15 is rotationally driven in the same direction as the rotational direction of the second motor.
The first motor operation unit includes a leftward movement button (hereinafter referred to as a “leftward movement button”) and a rightward movement button (hereinafter referred to as a “rightward movement button”). ing.

The first motor operation unit inputs a signal indicating that the left movement button has been pressed to the control device 3 when the user presses the left movement button, and when the user presses the right movement button, A signal indicating that the move button has been pressed is input to the control device 3. Hereinafter, these signals are referred to as button press signals.
Moreover, the control apparatus 3 of 2nd Embodiment is provided with the function structure part 510 instead of the function structure part 500 of the said 1st Embodiment, as shown in FIG. The functional configuration unit 510 has the same configuration as that of the functional configuration unit 500 of the first embodiment except that a motor control unit 511 is provided instead of the motor control unit 505.

  In addition to the function of the motor control unit 505 of the first embodiment, the motor control unit 511 of the second embodiment is based on a button press signal input via the first motor operation unit, and moves the Y-axis movement motor. A second motor control signal for controlling the second motor drive circuit of the device 17 is generated. Then, the generated second motor control signal is transmitted to the Y-axis moving motor device 17 via the electric cable.

  Specifically, when a button pressing signal indicating that the left moving button has been pressed is input, the motor control unit 511 rotates the first ball screw shaft 15 clockwise as viewed from the Y-axis moving motor device 17 side. A second motor control signal for driving the second motor to rotate at a preset rotation speed is generated. On the other hand, when a button pressing signal indicating that the right movement button has been pressed is input, the motor control unit 511 causes the first ball screw shaft 15 to rotate counterclockwise as viewed from the Y-axis moving motor device 17 side. A second motor control signal for rotating the second motor to rotate at a preset rotational speed is generated.

(Operation)
Next, based on FIGS. 8-9, the operation example of the surface texture measuring apparatus 301 of 2nd Embodiment is demonstrated.
Here, in the first embodiment, the detector 100 is moved in the Y-axis direction by the driving force generated by the user manually operating the Y-axis moving handle 13. On the other hand, in the second embodiment, the second motor of the Y-axis movement motor device 17 is driven and controlled according to the operation of the first motor operation unit by the user, and the driving force generated by the second motor. To move the detector 100 in the Y-axis direction. That is, the second embodiment is the same as the first embodiment except that the detector 100 is moved in the Y-axis direction by the rotational driving force of the second motor. Therefore, the procedure of the centering operation in the position adjustment mode is the same as that in the first embodiment.

Now, after setting the position adjustment mode, the user rotates the Z-axis moving handle 23 counterclockwise to bring the tip of the stylus of the measuring element 101 into contact with the surface of the measuring object 200, and this contact position is the reference position. It is assumed that the position is set to “0” (step S104).
When the reference position is set, the user operates the first motor operation unit with reference to the “current displacement amount” displayed on the display device 4 and the “maximum displacement amount so far” to detect the reference position. The tip position of the stylus of the instrument 100 is moved toward the center position (centering position) of the measurement object 200.

For example, as shown in FIG. 9B, the user moves the first motor operation unit so that the tip of the stylus of the probe 101 moves in a direction approaching the centering position (dotted line position in the figure). Press the left button. As a result, the first ball screw shaft 15 is driven to rotate clockwise by the rotational driving force of the motor, and the detector 100 (measuring element 101) moves in the left direction.
Subsequently, when the left movement button is continuously pressed and the detector 100 further moves leftward and passes the centering position as shown in FIG. 9C, the display is displayed for the subsequent movement in the Y-axis direction. The “maximum displacement so far” displayed on the device 4 does not change.

As described above, when the user who has confirmed that the maximum displacement amount has not changed, presses the right movement button of the first motor operation unit, this time, the ball screw shaft 15 is rotated counterclockwise by the rotational driving force of the motor. As shown in FIG. 9D, the detector 100 (measuring element 101) moves to the right.
In this way, the measurement is performed by moving the detector 100 in the right direction by continuously pressing the right movement button to a position where the “current displacement amount” becomes the same displacement amount as the “maximum displacement amount so far”. The tip position of the stylus of the child 101 is matched with the centering position.

Then, after matching the centering position, the position of the detector 100 in the Y-axis direction is fixed by operating the lock lever 14a to place the Y-axis moving mechanism 10 in a fixed state. Thereby, the centering operation is completed.
Subsequent operations are the same as those in the first embodiment, and a description thereof will be omitted.
As described above, the surface texture measuring apparatus 1 according to the second embodiment operates the first motor operation unit of the control device 3 to operate the Y-axis moving motor device 17 of the Y-axis moving mechanism 10 via the control device 3. The detector 100 can be moved in the adjustment direction (Y-axis direction) of the centering position of the probe 101 with respect to the measurement object 200 by driving control.

This makes it possible to perform the centering position setting operation easily and accurately as compared with the conventional position adjustment based on the mounting allowance. In addition, since the movement mechanism in the Y-axis direction is configured by a motor such as a direct drive motor, it is possible to perform fine movement control and to perform highly accurate positioning in the centering operation.
Further, by setting the position adjustment mode, the first contact position of the probe 101 is set as the reference position, and the subsequent change in the physical quantity according to the movement in the Y-axis direction is the displacement amount with reference to the reference position. And the calculation result can be displayed on the display device 4.

As a result, when the measurement object 200 has a circular cross-sectional shape, the Y-axis coordinate position where the displacement amount is maximum corresponds to the centering position, so that the centering position setting operation can be performed more easily and accurately. It becomes possible.
In the second embodiment, the first guide plate 11 corresponds to the first guide member, the first mounting plate 12 corresponds to the detector support member, and the Y-axis moving motor device 17 is the first guide member. Corresponds to the driving source.

(Third embodiment)
Next, a third embodiment of the present invention will be described.
(Constitution)
In the third embodiment, in place of the Z-axis moving handle 23 in the second embodiment described above, a drive source for rotationally driving the second ball screw shaft 25 and a second motor operation unit are provided. . In addition, the driving source is driven by the user operating the second motor operation unit, and the detector 100 is moved in the Z-axis direction by the driving force of the driving source. Further, the control device 3 has a function of driving and controlling the second motor of the Y-axis moving motor device 17 and a drive source for rotationally driving the second ball screw shaft 25 to automate the centering operation. It is a thing.

Hereinafter, the same components as those in the second embodiment are denoted by the same reference numerals, description thereof will be omitted as appropriate, and different portions will be described in detail.
As shown in FIG. 12, a surface texture measuring apparatus 401 according to the third embodiment includes a measuring instrument 402 instead of the measuring instrument 302 according to the second embodiment. The measuring instrument 402 has the same configuration as the measuring instrument 302 of the second embodiment except that the measuring instrument 402 includes a Z-axis moving motor device 27 instead of the Z-axis moving handle 23.

  The Z-axis moving motor device 27 includes a third motor (for example, a direct drive motor) that generates the rotational driving force of the second ball screw shaft 25 and a third motor that drives the third motor. A drive circuit and a third motor rotation angle sensor for detecting the rotation angle of the third motor are provided. The Z-axis movement motor device 27 is connected to the control device 3 via an electric cable (not shown), and controls the third motor rotation angle detected by the third motor rotation angle sensor via this electric cable. Transmit to device 3. In addition, the third motor control signal is received from the control device 3 via the electric cable, and the third motor driving circuit is driven in accordance with the received third motor control signal to thereby generate the third motor. Is driven to rotate.

In the third embodiment, the user operates a second motor operation unit (not shown) included in the control device 3 so that the detector 100 moves in the moving direction (vertical direction in FIG. 12) designated by the user. The third motor is rotated clockwise or counterclockwise, and the second ball screw shaft 25 is rotationally driven in the same direction as the rotation direction of the third motor.
The second motor operation unit includes an upward movement button (hereinafter referred to as “upward movement button”) and a downward movement button (hereinafter referred to as “downward movement button”). ing.

When the user presses the up button, the second motor operation unit inputs a button press signal indicating that the up button has been pressed to the control device 3, and the user presses the down button. Then, a button pressing signal indicating that the down button has been pressed is input to the control device 3.
Moreover, the control apparatus 3 of 3rd Embodiment is provided with the function structure part 520 instead of the function structure part 510 of the said 2nd Embodiment, as shown in FIG. The functional configuration unit 520 has the same configuration as that of the functional configuration unit 510 of the second embodiment except that a motor control unit 521 is provided instead of the motor control unit 511.

In addition to the function of the motor control unit 511 of the second embodiment, the motor control unit 521 of the third embodiment is based on a signal input via the second motor operation unit 27 and the Z-axis movement motor device 27. A third motor control signal for controlling the third motor drive circuit is generated, and the generated third motor control signal is transmitted to the Z-axis movement motor device 27 via an electric cable.
In addition, the control device 3 of the third embodiment further includes an automatic centering mode in which the detector 100 is automatically moved to the centering position.

That is, when the automatic centering mode is set in the mode setting unit 501, the second motor control unit 521 b controls the Y-axis movement motor device 17 and the Z-axis movement motor device 27 to detect the detector 100. Is moved in the Y-axis direction and the Z-axis direction, and the centering operation is automatically performed.
Hereinafter, based on FIG. 14, the detailed structure of the motor control part 521 is demonstrated.

As shown in FIG. 14, the motor control unit 521 includes a first motor control unit 521a, a second motor control unit 521b, a position information recording unit 521c, and a centering position setting unit 521d. The
The first motor control unit 521a drives and controls the spindle motor device 44 in accordance with a motor drive instruction input via the operation unit of the control device 3.

  When the second motor control unit 521b receives a button pressing signal indicating that the left moving button has been pressed, the first ball screw shaft 15 rotates clockwise as viewed from the Y-axis moving motor device 17 side. A second motor control signal for rotating the second motor to rotate at a preset rotational speed is generated. Then, the generated second motor control signal is transmitted to the Y-axis moving motor device 17 via the electric cable. On the other hand, when a button pressing signal indicating that the right movement button has been pressed is input to the second motor control unit 521b, the first ball screw shaft 15 is opposite from the Y-axis moving motor device 17 side. A second motor control signal for driving the second motor to rotate at a preset rotation speed in the clockwise direction is generated. Then, the generated second motor control signal is transmitted to the Y-axis moving motor device 17 via the electric cable.

  In addition, when a button pressing signal indicating that the up button is pressed is input to the second motor control unit 521b, the second ball screw shaft 25 is watched when viewed from the Z-axis moving motor device 27 side. A third motor control signal for rotating the third motor so as to rotate around at a preset rotation speed is generated. Then, the generated third motor control signal is transmitted to the Z-axis movement motor device 27 via the electric cable. On the other hand, when the second motor control unit 521b receives a signal indicating that the downward movement button has been pressed, the second ball screw shaft 25 rotates counterclockwise as viewed from the Z-axis movement motor device 27 side. A third motor control signal for driving the third motor to rotate at a preset rotation speed is generated. Then, the generated third motor control signal is transmitted to the Z-axis movement motor device 27 via the electric cable.

In addition, when the automatic centering mode is set, the second motor control unit 521b controls the Y-axis movement motor device 17 and the Z-axis movement motor device 27 to perform movement control for automatic centering processing. carry out. Details of the automatic centering process will be described later.
The position information recording unit 521c stores the position information of the detector 100 when the tip of the stylus of the measuring element 101 comes into contact with the surface of the measuring object 200 in accordance with the recording instruction from the second motor control unit 521b. It memorize | stores in storage media, such as.

  Specifically, the position information recording unit 521c, based on the second rotation angle sensor and the third rotation angle sensor from the second rotation angle sensor and the third motor rotation angle, according to the recording instruction, The position information of the detector 100 when the tip of the stylus 101 contacts the surface of the measuring object 200 is obtained by calculation. In the third embodiment, the position information of the first ball screw nut 16 and the second ball screw nut 26 is obtained as the position information of the detector 100. Then, the obtained position information is stored in a storage medium.

Each time the recording instruction from the second motor control unit 521b is input, the position information recording unit 521c executes position information calculation processing and calculates the previous position information stored in the storage medium this time. Update to location information.
The centering position setting unit 521d determines based on the non-contact information from the second motor control unit 521b that the tip of the stylus of the probe 101 has reached a separation position that does not contact the surface of the measurement object 200. Then, the previous position information is set to the centering position. Specifically, the previous position information is read from the storage medium, and the read position information is output to the second motor control unit 521b.

(Automatic centering process)
Next, a processing procedure of automatic centering processing executed in the control device 3 will be described based on FIG.
When the program is executed by the processor of the control device 3 and the automatic centering process is started, first, the process proceeds to step S200 as shown in FIG.
In step S200, the second motor control unit 521b determines whether or not the automatic centering mode is set based on the mode information from the mode setting unit 501. If it is determined that the automatic centering mode is set (Yes), the process proceeds to step S202. If it is determined that this is not the case (No), the determination is repeated until the automatic centering mode is set. .

  When the process proceeds to step S <b> 202, the second motor control unit 521 b controls the Z-axis movement motor device 27 so that the stylus of the probe 101 is brought to the surface of the measurement object 200 by the Z-axis movement mechanism 20. The detector 100 is moved downward (in a direction approaching the measurement object 200) until it comes into contact. Thereafter, when it is determined that the surface is touched, a recording instruction is output to the position information recording unit 521c, and the process proceeds to step S204.

  In step S204, in the position information recording unit 521c, the second motor rotation angle and the third rotation angle from the second rotation angle sensor and the third rotation angle sensor according to the recording instruction from the second motor control unit 521b. Based on the motor rotation angle, the position of the detector 100 (Y-axis coordinates and Z-axis coordinates) is obtained by arithmetic processing. Then, the position information is stored in a storage medium such as a RAM, and the process proceeds to step S206. Note that the position information is always calculated and stored in a storage medium such as a RAM, and the position information stored at the time when a recording instruction is input is acquired and stored separately in a dedicated memory area or the like. Also good.

In step S206, the second motor control unit 521b controls the Z-axis movement motor device 27 to move the detector 100 upward (a direction away from the measurement object 200) by a predetermined distance (a minute distance). ) Thereafter, the process proceeds to step S208.
In step S208, the second motor control unit 521b controls the Y-axis moving motor device 17 so that the detector 100 is moved in the Y-axis direction until the stylus of the probe 101 contacts the surface of the measurement object 200. Move to the left and right. Thereafter, the process proceeds to step S210.

Here, for example, if the stylus does not contact the surface of the measurement object 200 even if the motor control unit 521 is moved by a predetermined amount of movement in one direction in the left-right direction, the original position is used as a reference. This time, it is moved by a preset amount of movement in the other direction of the left-right direction.
In step S210, the second motor control unit 521b determines whether or not the stylus has contacted the measurement object 200. And when it determines with having contacted (Yes), a recording instruction | indication is output to the positional information recording part 521c, and it transfers to step S212. On the other hand, when it determines with having not contacted (No), the noncontact information which shows that there was no contact is output to the centering position setting part 521d, and it transfers to step S214.

  Here, even if the second motor control unit 521b moves the stylus by a predetermined amount of movement in the left-right direction for the first movement in the Y-axis direction, the stylus contacts the surface of the measurement object 200. If not, it is determined that there was no contact. On the other hand, when it is determined that there was contact in the previous movement, it is determined that there was no contact when there was no contact due to movement in the same movement direction as the previous movement.

  When the process proceeds to step S212, the position information recording unit 521c receives the second motor rotation angle sensor and the second motor rotation angle sensor from the second motor rotation angle sensor in response to the recording instruction from the second motor control unit 521b. Based on the motor rotation angle and the third motor rotation angle, the position of the detector 100 is obtained by arithmetic processing. Then, the previous position information stored in the storage medium is updated to the current position information, and the process proceeds to step S206.

On the other hand, when the process proceeds to step S214, the centering position setting unit 521d reads the previous position information from the storage medium according to the non-contact information from the second motor control unit 521b. Then, the read previous position information is output to the second motor control unit 521b, and the process proceeds to step S216.
In step S216, the second motor control unit 521b controls the Y-axis movement motor device 17 and the Z-axis movement motor device 27 on the basis of the position information from the centering position setting unit 521d, and thereby detects the detector 100. Move to the position indicated by the previous position information. Thereafter, the series of processing is terminated.

Here, in the case of a measurement object having a circular cross section, the centering position (the center position of the measurement object) is the Y-axis where the distance in the Z-axis direction from the tip of the stylus to the surface of the measurement object 200 is the shortest. It becomes the position of the direction.
Therefore, in the third embodiment, the stylus is moved even if the detector 100 is moved upward by a fixed distance (a minute distance) from the initial contact position or the previous contact position and moved in the Y-axis direction after this movement. When there is no contact, it is determined that there is no contact. The previous contact position is set as a position in the Y-axis direction (centering position) where the distance in the Z-axis direction between the stylus and the surface of the measurement object is the shortest distance.

(Operation)
Next, based on FIG. 16, the operation example of the surface texture measuring apparatus 401 of 3rd Embodiment is demonstrated.
Here, in the second embodiment, the second motor of the Y-axis movement motor device 17 is driven and controlled according to the operation of the first motor operation unit by the user, and the driving force generated by the second motor is used. The detector 100 was moved in the Y-axis direction. In addition, in the third embodiment, the third motor of the Z-axis movement motor device 27 is driven and controlled according to the operation of the second motor operation unit by the user, and the driving force generated by the third motor is controlled. Thus, the detector 100 is moved in the Z-axis direction.

  In the third embodiment, by setting the automatic centering mode, the motor control unit 521 controls the operations of the Y-axis movement motor device 17 and the Z-axis movement motor device 27 to thereby make the detector 100 It automatically moves to the centering position. That is, with respect to position adjustment using the first motor operation unit and the second motor operation unit, the second embodiment described above except that the detector 100 is moved in the Z-axis direction by the rotational driving force of the third motor. It will be the same. Accordingly, the procedure of the centering operation in the position adjustment mode is the same as that in the second embodiment.

First, the operation when the position adjustment mode is set will be described.
Now, assume that the user operates the operation unit to set the position adjustment mode, and then presses the down button of the second motor operation unit. As a result, the third motor rotates counterclockwise and the second ball screw shaft 25 rotates counterclockwise to move the detector 100 downward. When the tip of the stylus of the probe 101 contacts the surface of the measuring object 200 due to the downward movement, the contact position is set to the reference position “0” (step S104).

Subsequent operations of the first motor operation unit to move the detector 100 in the Y-axis direction so that the detector 100 matches the centering position, and the lock lever 14a is operated to operate the Y-axis moving mechanism 10. Since the operation to set the is in the fixed state is the same as in the second embodiment, the description thereof is omitted.
Next, the operation when the automatic centering mode is set will be described.

Now, assume that the user operates the operation unit of the control device 3 to input an instruction for setting the automatic centering mode, and shifts to the automatic centering mode.
When the automatic centering mode is set (Yes in step S200), the motor control unit 521 of the control device 3 first controls the Z-axis movement motor device 27, as shown in FIG. The detector 100 is moved downward until the tip of the stylus of the probe 101 contacts the surface of the measuring object 200 (step S202).

  When the motor control unit 521 detects that the tip of the stylus of the probe 101 is in contact with the surface of the measurement object 200 based on the change in the physical quantity received from the detector 100, the second and third motor rotation angle sensors The position information of the detector 100 is obtained by calculation processing based on the second and third motor rotation angles from. Then, the obtained position information is stored in a storage medium such as a RAM (step S204).

  Next, the motor control unit 521 controls the Z-axis movement motor device 27 to move the detector 100 upward by a predetermined distance as shown in FIG. 16B (step S206). ). Subsequently, the motor control unit 521 controls the Y-axis moving motor device 17 to move the detector 100 in the left-right direction (step S208). Here, as shown in FIG. 16C, it is assumed that the tip of the stylus is in contact with the surface of the measurement object 200 by moving the detector 100 leftward (Yes in step S210).

When the motor control unit 521 detects the contact of the stylus, the position of the detector 100 when the stylus contacts based on the second and third motor rotation angles from the second and third motor rotation angle sensors. Information is obtained by arithmetic processing. Then, the previous position information stored in the storage medium is updated to the current position information (step S212).
Subsequently, the motor control unit 521 controls the Z-axis moving motor device 27 to move the detector 100 upward by a predetermined distance as shown in FIG. 16D (step S206). . Subsequently, the motor control unit 521 controls the Y-axis moving motor device 17 to move the detector 100 leftward (step S208). Here, as shown in FIG. 16D, it is assumed that the tip of the stylus is in contact with the surface of the measurement object 200 by moving the detector 100 leftward (Yes in step S210).

When the motor control unit 521 detects the contact of the stylus, the position of the detector 100 when the stylus contacts based on the second and third motor rotation angles from the second and third motor rotation angle sensors. Information is obtained by arithmetic processing. Then, the previous position information stored in the storage medium is updated to the current position information (step S212).
Subsequently, the motor control unit 521 controls the Z-axis moving motor device 27 to move the detector 100 upward by a predetermined distance as shown in FIG. 16F (step S206). . Subsequently, the motor control unit 521 controls the Y-axis moving motor device 17 to move the detector 100 leftward (step S208). Here, as shown in FIG. 16F, it is assumed that the tip of the stylus does not contact the surface of the measuring object 200 even if the detector 100 is moved to the left (No in step S210).

  If the motor control unit 521 determines that the tip of the stylus has not contacted the surface of the measurement object 200, the motor control unit 521 reads the previously stored position information from the storage medium (step S214). Then, based on the read previous position information, the Y-axis movement motor device 17 and the Z-axis movement motor device 27 are controlled to move the detector 100 to the previous contact position (position shown in FIG. 16 (e)). Move (step S216).

In this way, the tip position of the stylus of the probe 101 of the detector 100 is automatically matched with the centering position.
Then, after matching the centering position, the position of the detector 100 in the Y-axis direction is fixed by operating the lock lever 14a to place the Y-axis moving mechanism 10 in a fixed state. Thereby, the centering operation is completed.

Subsequent operations are the same as those in the first embodiment, and a description thereof will be omitted.
As described above, the surface texture measuring device 1 according to the third embodiment operates the first motor operation unit of the control device 3 to operate the Y-axis moving motor device 17 of the Y-axis moving mechanism 10 via the control device 3. The detector 100 can be moved in the adjustment direction (Y-axis direction) of the centering position of the probe 101 with respect to the measurement object 200 by driving control.

Further, by operating the second motor operation unit of the control device 3, the Z-axis movement motor device 27 of the Z-axis movement mechanism 20 is driven and controlled via the control device 3, and the detector 100 is controlled in the Z-axis direction. It is possible to move to.
This makes it possible to perform the centering position setting operation easily and accurately as compared with the conventional position adjustment based on the mounting allowance. In addition, since the movement mechanism in the Y-axis direction and Z-axis direction is configured by a motor such as a direct drive motor, it is possible to perform fine movement control and perform highly accurate positioning in the centering operation. It becomes possible.

Further, by setting the position adjustment mode, the first contact position of the probe 101 is set as the reference position, and the subsequent change in the physical quantity according to the movement in the Y-axis direction is the displacement amount with reference to the reference position. And the calculation result can be displayed on the display device 4.
As a result, when the measurement object 200 has a circular cross-sectional shape, the Y-axis coordinate position where the displacement amount is maximum corresponds to the centering position, so that the centering position setting operation can be performed more easily and accurately. It becomes possible.

Further, by setting the automatic centering mode, drive control of the Y-axis moving motor device 17 of the Y-axis moving mechanism 10 and the Z-axis moving motor device 27 of the Z-axis moving mechanism 20 is performed via the control device 3. In addition, the setting operation of the centering position of the detector 100 can be automatically performed.
This makes it possible to perform the centering position setting operation more easily and accurately.
In the third embodiment, the second guide plate 21 corresponds to a second guide member, the second mounting plate 22 corresponds to a centering moving mechanism support member, and the Z-axis moving motor device 27 is , Corresponding to the second drive source.
The second motor control unit 521b and the position information recording unit 521c correspond to the position information recording unit, the centering position setting unit 521d corresponds to the centering position setting unit, and the second motor control unit 521b This corresponds to the centering position moving unit.

(Modification)
(1) In the third embodiment, by setting the automatic centering mode, the centering operation is automated by the processing procedure shown in the flowchart of FIG. 15, but the present invention is not limited to this configuration. For example, in the first embodiment, the position adjustment mode is set, and the processing procedure of the centering operation performed by manually adjusting the position while viewing the information of the displacement amount displayed on the display device 4 may be automated. Good. In this case, the control device 3 drives and controls the Y-axis movement motor device 17 and the Z-axis movement motor device 27 to automate the movement of the detector, and the displacement amount comparison process is performed to obtain the maximum displacement amount. Detect position.

(2) In each of the above embodiments, the configuration in which the voltage value indicating the magnitude of the displacement according to the expansion / contraction operation of the stylus is taken as an example of the physical quantity detected by the detector 100 is not limited to this configuration. A configuration may be adopted in which the vibration speed corresponding to the expansion and contraction operation of the stylus is detected. In this case, when the displacement amount is calculated, for example, the vibration speed is integrated into a displacement amount by performing an integration process.
Each of the above embodiments is a preferable specific example of the present invention, and various technically preferable limitations are given. However, the scope of the present invention is particularly limited in the above description. As long as there is no description, it is not restricted to these forms. In the drawings used in the above description, for convenience of illustration, the vertical and horizontal scales of members or parts are schematic views different from actual ones.
Further, the present invention is not limited to the above-described embodiments, and modifications, improvements, and the like within the scope that can achieve the object of the present invention are included in the present invention.

1, 301, 401 Surface texture measuring device, 2, 302, 402 measuring machine, 3 control device, 4 display device, 10 Y-axis moving mechanism, 11 first guide plate, 11a first base plate portion, 11b first Guide rail portion, 11c first guide groove portion, 12 first mounting plate, 13 Y-axis moving handle, 15 first ball screw shaft, 16 first ball screw nut, 17 Y-axis moving motor device, 20 Z-axis movement mechanism, 21 2nd guide plate, 21a 2nd base plate part, 21b 2nd guide rail part, 21c 2nd guide groove part, 22 2nd mounting plate, 23 Z-axis movement handle, 25 Second ball screw shaft, 26 Second ball screw nut, 27 Z-axis moving motor device, 100 detector, 101 probe, 501 mode setting unit, 502 reference position setting unit, 503 displacement amount calculation 504, display control unit, 505, 511, 521 motor control unit, 521b second motor control unit, 521c position information recording unit, 521d centering position setting unit

Claims (3)

A rotational drive mechanism for rotationally driving the measurement object by rotationally driving a measurement object support unit on which the measurement object is supported by a rotational drive source;
A detector that has a contact-type measuring element and detects a physical quantity generated by relative movement between the measuring object to be rotationally driven and the measuring element in contact with the surface of the measuring object;
A surface texture measuring unit for measuring the surface texture of the measurement object based on the detection result of the detector;
A core that allows the detector to move in a position adjustment direction for centering the detector with respect to the measurement object supported by the measurement object support portion while the detector is fixedly supported by a support member. A surface texture measuring device comprising: a moving mechanism for feeding.   The centering moving mechanism includes a first guide member extending in the position adjustment direction, and a detector fixedly supported by the detector and moved in the position adjustment direction while being guided by the first guide member. The surface texture measuring device according to claim 1, further comprising: a vessel support member. A first moving mechanism capable of moving the detector in a first direction approaching and separating from the measurement object supported by the measurement object support;
A second moving mechanism that allows the detector to move in a second direction that is a rotation axis direction of the measurement object support section with respect to the measurement object supported by the measurement object support section;
The centering moving mechanism is configured to be able to move the detector in the third direction orthogonal to the first direction and the second direction as the position adjusting direction. Item 3. The surface texture measuring device according to Item 1 or 2.

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