JP5297329B2 - 光半導体装置の製造方法 - Google Patents

光半導体装置の製造方法 Download PDF

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Publication number
JP5297329B2
JP5297329B2 JP2009239186A JP2009239186A JP5297329B2 JP 5297329 B2 JP5297329 B2 JP 5297329B2 JP 2009239186 A JP2009239186 A JP 2009239186A JP 2009239186 A JP2009239186 A JP 2009239186A JP 5297329 B2 JP5297329 B2 JP 5297329B2
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Prior art keywords
layer
dry etching
semiconductor device
manufacturing
optical semiconductor
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JP2009239186A
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Japanese (ja)
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JP2010153792A (ja
JP2010153792A5 (enExample
Inventor
静一郎 小林
拓也 風間
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Stanley Electric Co Ltd
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Stanley Electric Co Ltd
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JP2009239186A 2008-11-20 2009-10-16 光半導体装置の製造方法 Expired - Fee Related JP5297329B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009239186A JP5297329B2 (ja) 2008-11-20 2009-10-16 光半導体装置の製造方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2008296495 2008-11-20
JP2008296495 2008-11-20
JP2009239186A JP5297329B2 (ja) 2008-11-20 2009-10-16 光半導体装置の製造方法

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JP2010153792A JP2010153792A (ja) 2010-07-08
JP2010153792A5 JP2010153792A5 (enExample) 2012-01-19
JP5297329B2 true JP5297329B2 (ja) 2013-09-25

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JP2009239186A Expired - Fee Related JP5297329B2 (ja) 2008-11-20 2009-10-16 光半導体装置の製造方法

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Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101125025B1 (ko) * 2010-07-23 2012-03-27 엘지이노텍 주식회사 발광소자 및 그 제조방법
KR101871503B1 (ko) * 2011-09-06 2018-06-27 엘지이노텍 주식회사 발광 소자 및 그 제조방법
EP2600389B1 (en) * 2011-11-29 2020-01-15 IMEC vzw Method for bonding semiconductor substrates
JP2016092235A (ja) * 2014-11-05 2016-05-23 ウシオ電機株式会社 半導体発光素子

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2883918B2 (ja) * 1989-06-27 1999-04-19 光技術研究開発株式会社 化合物半導体のパターン形成方法
JPH06104218A (ja) * 1991-01-08 1994-04-15 Nec Corp ドライエッチング方法
JP2006135266A (ja) * 2004-11-09 2006-05-25 Sharp Corp 半導体レーザ素子の製造方法および該方法により製造される半導体レーザ素子
JP5089215B2 (ja) * 2007-03-28 2012-12-05 古河電気工業株式会社 窒化物化合物半導体層のエッチング方法及びその方法を用いて製造された半導体デバイス

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JP2010153792A (ja) 2010-07-08

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