JP5288987B2 - Laser processing equipment - Google Patents

Description

  The present invention relates to a laser processing apparatus that performs laser processing of a workpiece while correcting a displacement of a processing position.

  A laser processing apparatus that performs laser processing by irradiating a workpiece (workpiece) that is an object to be processed with a laser beam needs to drill a hole at a predetermined position on the workpiece with high positional accuracy. For this reason, the laser processing apparatus performs laser processing of the workpiece while correcting the displacement of the processing position by a galvano scanner mirror or the like.

  For example, in the deviation correction method (laser machining positioning method) described in Patent Document 1, a reference mark and a positioning hole are provided on an XY table. Furthermore, in the correction at the time of starting work, the workpiece is irradiated with laser light to form a machining hole, and the relative coordinates of the machining hole with the positioning hole as a base point are calculated. Then, laser processing is performed by correcting the table movement amount of the XY table so that the relative coordinates become design values. Further, when a plurality of workpieces are processed simultaneously, an offset is added to the control amount of the galvano scanner to eliminate the deviation between the workpieces.

JP 2003-202483 A

  However, in the above conventional technique, the relative coordinate between the reference mark and the processing hole on the fixed table is defined as the reference scale of the entire table, so that depending on the table position where laser processing is performed, the table There was a problem that an error occurred in the positioning and the position of the machining hole was displaced. This is because the reference scale set as the reference for the position when moving the table does not necessarily match the actual table.

  For example, as a scale setting method for an XY table, a method is generally known in which an error when a single axis is moved from a fixed measurement position is corrected for each axis. However, the XY table has a squareness and a straightness that depend on the processing accuracy of the XY table itself. For this reason, when the XY table is moved, there is always a two-dimensional (rotational) deviation, not limited to a one-dimensional deviation for each axis. Therefore, the positioning error when moving to the table position differs for each table position of the XY table. Based on this, even if the table is moved based on the general scale setting, the command value and the actual measurement value do not match at most table positions, so that the deviation appears as the position deviation of the machining hole. This has hindered the realization of stable and high machining position accuracy. For this reason, in the conventional technique, high-precision laser processing can be performed around the processing hole paired with the reference mark, but for example, it is necessary to move the table over a long distance from the processing hole paired with the reference mark. When the corner of the workpiece is machined, there is a problem that the machining position accuracy deteriorates by the amount of deviation caused by the table position (movement).

  The present invention has been made in view of the above, and an object thereof is to obtain a laser processing apparatus that performs laser processing with high positional accuracy.

In order to solve the above-described problems and achieve the object, the present invention provides a laser processing apparatus that performs laser processing on a workpiece by irradiating the workpiece placed on an XY table with laser light.
For a workpiece with a plurality of scan areas set, an error of a galvano scanner that positions the irradiation position of the laser beam in each scan area and a reference scale error set as a position reference when the XY table moves As a positional deviation amount of a corresponding machining position, a positional deviation between a machining command position when laser machining is performed at a predetermined position on the first workpiece and an actual machining position when laser machining is performed at the command position. A positional deviation amount calculation unit for calculating the amount, and positional deviation correction information used when performing positional correction at the time of laser processing so that the actual processing position after laser processing does not shift is calculated based on the positional deviation amount. When performing laser processing on the calculation unit and the second workpiece, position correction corresponding to the processing target position on the second workpiece is performed based on the positional deviation correction information. A correction command section for outputting a position correction command, and a laser processing unit that performs laser processing while performing the position correction command to follow the position correction, the positional deviation amount calculating section, on the first workpiece A positional deviation amount is calculated in each of a plurality of scan areas, and the correction information calculation unit calculates the positional deviation correction information based on the plurality of positional deviation amounts calculated by the positional deviation amount calculation unit. To do.

  According to the present invention, the positional deviation amounts are calculated for a plurality of positions on the workpiece, and the positional deviation correction information is calculated based on the calculated plural positional deviation amounts. Therefore, laser processing with high positional accuracy is performed. There is an effect that it becomes possible.

  Embodiments of a laser processing apparatus according to the present invention will be described below in detail with reference to the drawings. Note that the present invention is not limited to the embodiments.

Embodiment 1 FIG.
FIG. 1 is a diagram showing a configuration of a laser processing apparatus according to Embodiment 1 of the present invention. FIG. 1 illustrates a configuration of a mechanism (a laser processing mechanism 4 described later) that performs laser processing on a workpiece (workpiece) W in the laser processing apparatus 1.

  When the laser processing apparatus 1 performs drilling at a predetermined position on the workpiece W, a positional deviation between a processing target position (a command point B described later) and a position of a hole that is actually processed (a processing point A described later). Based on the (error) amount, it is a laser processing apparatus that corrects a positional shift (such as a table position at a laser beam irradiation position) when drilling a real product or the like.

  The laser processing apparatus 1 of the present embodiment measures the amount of positional deviation between the command point B and the processing point A at a plurality of positions on the workpiece (first workpiece) W in advance, and based on the measured value, A correction coefficient (hereinafter referred to as a positional deviation correction coefficient) for correcting the positional deviation in the drilling process is calculated. Then, when drilling a real product or the like, the machining position on the workpiece (second workpiece) W is corrected using the calculated misalignment correction coefficient (misalignment correction information).

  The laser processing apparatus 1 includes a galvano scanner 11, an fθ lens 12, an XY table (processing table) 13, a vision sensor 14, a height sensor (not shown), a laser oscillator (laser light source) (not shown), and the like.

  The galvano scanner 11 is a servo motor that scans the laser beam from the laser oscillator, and oscillates the laser beam with a galvanometer mirror, thereby positioning the irradiation position of the laser beam at the processing target position of the workpiece W at high speed. The galvano scanner 11 operates within a range of a predetermined swing angle, for example. The galvano scanner 11 receives a command from the laser processing apparatus 1 and moves the laser light irradiation position to stop so that the target processing position is irradiated with the laser light. The galvano scanner 11 repeats the operation of moving and stopping the irradiation position of the laser beam to the next target position after the laser beam is irradiated. The laser processing apparatus 1 includes two galvano scanners 11. One galvano scanner 11 moves the irradiation position of the laser beam on the workpiece W in the X direction, and the other galvano scanner 11 transmits the laser beam to the workpiece W. The irradiation position is moved in the Y direction.

  The XY table 13 places the workpiece W and moves the workpiece W in the XY direction. The XY table 13 fixes the workpiece W on the XY table 13 by sucking the bottom surface of the workpiece W, and adjusts the laser irradiation position on the workpiece W by moving in the X-axis and Y-axis directions.

  The fθ lens 12 focuses the laser beam on the workpiece W on the XY table 13. The vision sensor 14 detects the position (coordinates) of the processed hole after laser processing. The laser processing apparatus 1 detects and measures the coordinates on the XY table 13 of a processing hole that has been drilled to calculate a positional deviation correction coefficient.

  Laser light (beam) from the laser oscillator is irradiated to a workpiece W in a predetermined scan area via a galvano scanner 11 attached to each axis and an fθ lens 12. In the laser processing apparatus 1, since the area of the workpiece W is larger than the scan area, the XY table 13 is moved for each scan area to process the entire workpiece W.

  Next, the optical path configuration after the laser beam emitted from the laser oscillator passes through the transfer mask will be described. FIG. 2 is a diagram showing an optical path configuration after passing through the transfer mask of the laser processing apparatus according to the first embodiment. The laser beam Bx emitted from the laser oscillator is sent to the galvano scanner 11 through the mirror 17 and the retarder 16 after passing through a transfer mask having a pinhole having substantially the same shape as the processed hole shape. The laser beam Bx sent to the galvano scanner 11 is reflected by a galvano mirror that is swung to a predetermined position by the galvano scanner 11 and sent to the fθ lens 12. The laser beam Bx sent to the fθ lens 12 is condensed on the work W by the fθ lens 12.

  FIG. 3 is a block diagram showing a functional configuration of the laser processing apparatus according to the first embodiment. The laser processing apparatus 1 includes a positional deviation correction unit 3, a laser processing mechanism (laser processing unit) 4, and a control device 5. Here, only the vision sensor 14, the galvano scanner 11, and the XY table 13 are shown as components of the laser processing mechanism 4, and the other components are not shown.

  The misregistration correction unit 3 includes a misregistration amount calculation unit 31, a measurement data storage unit 32, a correction coefficient calculation unit (correction information calculation unit) 33, and a correction command unit 34. The positional deviation amount calculation unit 31 is connected to the laser processing mechanism 4 and inputs the position of the actual processing hole (the coordinates on the XY table 13) sent from the vision sensor 14 of the laser processing mechanism 4. The positional deviation amount calculation unit 31 is connected to the control device 5 and inputs a target position (command coordinate) of the machining hole sent from the control device 5. The actual machining hole position sent from the vision sensor 14 to the positional deviation amount calculation unit 31 corresponds to the target position of the machining hole sent from the control device 5 to the positional deviation amount calculation unit 31. When calculating the misregistration correction coefficient, the control device 5 according to the present embodiment sends an instruction to the laser machining mechanism 4 to make a machining hole at a predetermined position on the XY table 13, and sets the coordinates of the predetermined position. This is sent to the deviation amount calculation unit 31. The positional deviation amount calculation unit 31 includes the actual machining hole position (coordinates of the machining point A) sent from the vision sensor 14 and the machining hole position (coordinates of the command point B) sent from the control device 5. , And a positional deviation amount (position error) of the machining point A with respect to the command point B is calculated.

  The laser processing apparatus 1 according to the present embodiment forms a plurality of processing holes for calculating a misregistration correction coefficient with the work W on the XY table 13. For this reason, the control device 5 sends an instruction to the laser machining mechanism 4 so as to form machining holes at a plurality of command points B, and the plurality of B coordinates are sent to the positional deviation amount calculation unit 31. Further, the vision sensor 14 detects a plurality of machining holes formed in the work W on the XY table 13 and sends the coordinates of the machining point A in each machining hole to the positional deviation amount calculation unit 31. Therefore, a plurality of sets of coordinates (hereinafter referred to as coordinate sets) including the coordinates of the command point B and the coordinates of the machining point A corresponding to the command point B are input to the positional deviation amount calculation unit 31. The positional deviation amount calculation unit 31 calculates the positional deviation amount of the machining point A with respect to the command point B for each command point B, and associates the calculated positional deviation amount with the coordinates on the XY table 13 of the command point B. . The positional deviation amount calculation unit 31 sends information associating the positional deviation amount and the coordinates of the command point B to the measurement data storage unit 32 as measurement data. The measurement data storage unit 32 is a memory or the like that stores measurement data sent from the positional deviation amount calculation unit 31.

  The correction coefficient calculation unit 33 calculates a positional deviation correction coefficient for correcting the positional deviation amount between the command point B and the machining point A using the measurement data in the measurement data storage unit 32. This misalignment correction coefficient is information for correcting the operation of the XY table 13 and the galvano scanner 11 to cancel the misalignment, and corrects the operation of the XY table 13 and the galvano scanner 11 using the misalignment correction coefficient. As a result, the processing position of the hole is corrected. The correction coefficient calculation unit 33 according to the present embodiment calculates a misalignment correction coefficient corresponding to each position on the XY table 13. The correction coefficient calculation unit 33 calculates, for example, the coefficient of the correction formula obtained by the least square approximation as a positional deviation correction coefficient. The correction coefficient calculation unit 33 stores the calculated misregistration correction coefficient in a memory (not shown) in the correction coefficient calculation unit 33 or the like.

  When processing an actual product or the like, the correction command unit 34 uses the coordinates of the command point B sent from the control device 5 and the positional deviation correction coefficient calculated by the correction coefficient calculation unit 33. Create a correction command to correct the position. The correction command unit 34 sends the created correction command to the control device 5.

  When calculating the misregistration correction coefficient, the control device 5 sends the coordinates of the command point B to the misregistration amount calculation unit 31 and causes the laser machining mechanism 4 to perform hole machining on the command point B. In addition, when processing the actual product or the like, the control device 5 sends the coordinates of the command point B to the correction command unit 34 and corrects the hole processing position using the correction command from the correction command unit 34. Then, an operation instruction is transmitted to the XY table 13 and the galvano scanner 11 so that a hole is drilled at the corrected machining position. The laser processing mechanism 4 operates the XY table 13 and the galvano scanner 11 in accordance with an operation instruction from the control device 5.

  Next, the position of the machining hole on the workpiece W (XY table 13) will be described. Here, a case where the workpiece W is placed on the stage Sx of the XY table 13 will be described. FIG. 4 is a diagram for explaining the positions of the processing holes on the stage of the laser processing apparatus according to the first embodiment.

  The workpiece W placed on the stage Sx is drilled at various positions. The position of this hole is the machining point A, and the reference scale set as the position reference when moving the table changes depending on the position of the machining point A. For example, drilling is performed at various positions such as a machining position 21xL that is the left end on the stage Sx and a machining position 21xR that is the right end on the stage Sx. Since the reference scale is different between the machining point A when the drilling is performed at the machining position 21xL and the machining point A when the drilling is performed at the machining position 21xR, the position of each machining point A was measured. In this case, the amount of misalignment varies depending on the position of the processing point A. This is because the reference scale set as the reference for the position when the XY table 13 moves does not necessarily match the actual position of the XY table 13. Therefore, in the present embodiment, the positional deviation amount between the command point B and the machining point A is measured in advance at a plurality of positions on the workpiece W, and the position when machining each hole based on this measured value. Correct the deviation.

  Next, as an operation procedure of the laser processing apparatus 1, each processing procedure of calculation processing of a positional deviation correction coefficient and laser processing using the positional deviation correction coefficient will be described. FIG. 5 is a flowchart showing a calculation process procedure of the misregistration correction coefficient.

  The laser processing apparatus 1 performs a process for calculating a misalignment correction coefficient when the reference scale of the XY table 13 is measured again or when the XY table 13 or the drive system of the XY table 13 is changed (exchange or adjustment). Do.

  When the laser processing apparatus 1 starts the calculation process of the misregistration correction coefficient, if there is a misregistration correction coefficient calculated and set in the past (when correction is valid), the misregistration correction coefficient is invalidated (correction invalid). (Step S110).

  The control device 5 moves the XY table 13 so that the machining head comes to an arbitrary position on the workpiece W placed on the XY table 13 (step S120). Thereafter, the laser processing mechanism 4 detects the height (Z-axis height) from the processing position to the processing head by a height sensor. Then, the laser processing mechanism 4 adjusts the height from the processing position to the processing head based on the detected height (step S130).

  In the laser processing apparatus 1, a plurality of target positions (command points B) to be drilled when calculating the positional deviation correction coefficient are registered in advance. FIG. 6 is a diagram for explaining a plurality of command points set on the XY table. As shown in the figure, in the present embodiment, a plurality of command points (command positions) B are set on the coordinates set on the XY table 13. The command points B are arranged at regular intervals on the XY table 13, for example. The laser processing apparatus 1 places on the XY table 13 a workpiece W that can be drilled at each of the registered command points B (a workpiece W that can arrange all the command points B).

  The control device 5 controls the laser processing mechanism 4 so as to perform drilling at a plurality of registered drilling positions. At this time, the control device 5 selects the first drilling position (first command point B) from the plurality of registered drilling positions, and the machining head is positioned on the selected position (laser beam irradiation position). The laser processing mechanism 4 is controlled so as to be formed. Thereby, the laser processing mechanism 4 moves the XY table 13 so that the processing head comes to the first drilling position in a state where the galvano scanner 11 is set to the origin position (galvano origin position). Then, the laser processing mechanism 4 performs laser processing at the first drilling position (step S140). When the XY table 13 is moved so that the drilling position becomes the first command point B, the control device 5 sends the coordinates of the first command point B to the positional deviation amount calculation unit 31.

  Thereafter, the laser processing mechanism 4 moves the XY table 13 so that the first drilling position is on the vision sensor 14 (camera measurement position). The vision sensor 14 detects and measures the position of the first machining hole on the XY table 13 (the coordinates of the first machining point A) (step S150). The vision sensor 14 sends the measured position of the machining hole to the positional deviation amount calculation unit 31.

  The positional deviation amount calculation unit 31 compares the coordinates of the machining point A sent from the vision sensor 14 with the coordinates of the command point B sent from the control device 5, and processes the machining point A for the command point B. Is calculated. The positional deviation amount calculation unit 31 associates the calculated positional deviation amount with the coordinates on the XY table 13 of the command point B, and sends the associated information to the measurement data storage unit 32 as measurement data. As a result, the measurement data is backed up in the measurement data storage unit 32 (step S160).

  The laser processing apparatus 1 determines whether or not the position measurement of the processing holes has been completed for all the processing points A (step S170). If the machining hole position measurement has not been completed for all machining points A (No in step S170), the laser machining apparatus 1 repeats the processes in steps S120 to S170. Thereby, the laser processing apparatus 1 measures the amount of positional deviation between the command point B and the processing point A at a plurality of positions on the workpiece W. In other words, the processing in steps S120 to S170 (processing for measuring the positional deviation amount between the command point B and the machining point A) is repeated at a plurality of points on the entire surface of the XY table 13, and the positional deviation correction amount on the entire surface of the XY table 13 is measured. .

  After the measurement data is backed up in the measurement data storage unit 32, the laser processing apparatus 1 determines whether or not the processing of the position of the processing hole has been completed for all the processing points A (for example, 360 locations) (step) S170). If the machining hole position measurement has been completed for all machining points A (step S170, Yes), the correction coefficient calculation unit 33 uses the measurement data in the measurement data storage unit 32 to process the command point B and machining. A misregistration correction coefficient for correcting the misregistration amount with respect to the point A is calculated.

  FIG. 7 is a diagram for explaining the amount of positional deviation between the command point and the machining point. As shown in the figure, the command point B (command position) and the machining point A (actual machining position) have various displacement amounts depending on the position of the command point B. The correction coefficient calculation unit 33 according to the present embodiment calculates a misalignment correction coefficient corresponding to each position on the XY table 13, and for example, calculates a coefficient of a correction formula obtained by least square approximation as a misalignment correction coefficient. To do. The correction coefficient calculation unit 33 calculates the positional deviation correction coefficient using, for example, Expressions (1) to (5). Expressions (1) to (5) are obtained by using the nine coordinate groups (the coordinates of the command point B and the coordinates of the machining point A) shown in FIG. The relationship between coordinates and positional deviation correction coefficients is shown.

  Here, Y is a measurement value matrix, and is the coordinates (actual machining position) of the machining point A measured on the XY table 13. A is a matrix of target values (command point B), and Θ is a correction coefficient matrix. Further, ε is an error matrix and indicates a deviation amount between the command point B and the machining point A.

  The correction coefficient calculation unit 33 inputs the coordinates of the machining point A and the coordinates of the command point B to Y and A in the equations (1) to (5), respectively, so that ε is minimized using the least square approximation. Θ is calculated. Specifically, the correction coefficient calculation unit 33 calculates Θ using equations (6) and (7). Here, T is an arrangement matrix, and P here is a weight matrix.

  The correction coefficient calculation unit 33 may apply the formulas (1) to (7) to the coordinates of all the command points B and the coordinates of the machining points A set on the XY table 13, or 9 shown in FIG. You may apply Formula (1)-(7) for every coordinate group of a group. In addition, the XY table 13 (work W) is divided into a predetermined number of areas (for example, an area constituted by 4 sets of coordinates, an area constituted by 12 sets of coordinates, etc.), and positional deviation is caused for each divided area. A correction coefficient may be calculated. In this case, the correction coefficient calculation unit 33 applies formulas (1) to (7) to the coordinate groups included in each divided area.

  FIG. 8 is a diagram for explaining the calculation target area of the positional deviation correction coefficient. FIG. 8 shows a case where the area on the XY table 13 is divided into 8 areas w1 to w8. The correction coefficient calculation unit 33 calculates a positional deviation correction coefficient for each of the areas w1 to w8 divided in this way. The area on the XY table 13 is divided so that, for example, the processing points A having similar positional deviation tend to be the same area. As a result, it is possible to calculate a misregistration correction coefficient that enables accurate position correction. Each area w1 to w8 may overlap with an adjacent area. Thereby, even if it is the boundary part of an area, the position shift correction coefficient which can correct | amend the position shift of a processing hole correctly can be calculated.

  The correction coefficient calculation unit 33 stores the calculated Θ as a displacement correction coefficient in the memory in the correction coefficient calculation unit 33 (step S180). The calculated misregistration correction coefficient may be stored in a memory or the like arranged outside the correction coefficient calculation unit 33.

  Next, a laser processing procedure using the positional deviation correction coefficient will be described. FIG. 9 is a flowchart showing a laser processing procedure using the positional deviation correction coefficient. When the laser processing apparatus 1 starts laser processing for an actual product or the like, the misalignment correction coefficient is validated (correction valid), and the calculated misalignment correction coefficient is set in the laser processing apparatus 1 (step S210). ).

  The control device 5 moves the XY table 13 so that the machining head comes to an arbitrary position on the workpiece W placed on the XY table 13 (step S220). Thereafter, the laser processing mechanism 4 detects the height (Z-axis height) from the processing position to the processing head by a height sensor. Then, the laser processing mechanism 4 adjusts the height from the processing position to the processing head based on the detected height (step S230).

  Based on a control program used for laser processing, the control device 5 moves the XY table 13 and the galvano scanner 11 so that the processing head comes to a predetermined processing position (product processing hole) on the workpiece W that is an actual product ( Step S240).

  At this time, the correction command unit 34 of the positional deviation correction unit 3 determines the galvano based on the position of the product machining hole on the XY table 13 (coordinates of the command point B) and the stored positional deviation correction coefficient. The offset amount of the scanner 11 (galvano mirror position correction amount for correcting the processing position) or the offset amount of the XY table 13 (position correction amount of the XY table 13 for correcting the processing position) is calculated (step S250). . In the case where the area on the XY table 13 is divided into a plurality of areas and the positional deviation correction coefficient is calculated for each area, the correction command unit 34 displays the area corresponding to the coordinates of the command point B (the command point B is The offset amount of the galvano scanner 11 or the XY table 13 is calculated using the misalignment correction coefficient of the included area.

  The correction command unit 34 sends an instruction to the control device 5 to drive the galvano scanner 11 or the XY table 13 by the calculated offset amount. The control device 5 drives the galvano scanner 11 or the XY table 13 by the offset amount from the correction command unit 34. As a result, the machining position is corrected by an offset amount to the galvano scanner 11 or the XY table 13, and the laser machining mechanism 4 performs laser machining (step S260). In addition, when the position correction of the drilling process using the position shift correction coefficient is performed only by the XY table 13, the laser processing apparatus 1 may not include the galvano scanner 11.

  Thus, in this embodiment, the positional deviation between the machining point A and the command point B on the XY table 13 is calculated at a plurality of locations, and the positional deviation correction coefficient is calculated using the calculation result. As a result, a reference scale for moving the XY table 13 is set based on the positional deviation amounts at a plurality of locations. Therefore, it is possible to perform hole machining with stable and high machining accuracy (for example, an error in units of μm) on the entire surface of the XY table 13 (any table position).

  Further, by combining the position correction of the machining position used in the present embodiment and the workpiece correction for the workpiece W, it is possible to realize highly accurate hole machining at an arbitrary table position.

  Note that the correction algorithm described in this embodiment (calculation processing of a positional deviation correction coefficient by least square approximation) is an example of a positional deviation correction coefficient calculation process, and the positional deviation correction coefficient may be calculated by another method. Good.

  Further, in this embodiment, when calculating the misalignment correction coefficient, laser processing and position measurement are performed for each hole. However, after processing a plurality of holes continuously, a plurality of processing holes are continuously performed. Then, the position may be measured. For example, the positions of all processed holes may be measured after laser processing of all the holes.

  In the present embodiment, the case where one workpiece W is placed on one XY table 13 and laser processing is performed has been described. However, a plurality of workpieces W are placed on one XY table 13 and laser processing is performed. May be performed. Alternatively, a plurality of XY tables 13 may be attached to one table drive system, and the workpiece W on each XY table 13 may be laser processed.

  In addition, although this Embodiment demonstrated the case where the laser processing apparatus 1 performs drilling, the laser processing apparatus 1 may perform laser processing other than drilling. Further, in the present embodiment, the case where the positional deviation correction coefficient is calculated using the workpiece W for calculating the positional deviation correction coefficient has been described. However, the positional deviation correction coefficient is calculated using the workpiece W for an actual product. May be.

  As described above, according to the first embodiment, the positional deviation correction coefficient is calculated based on the positional deviation amount of the hole machining measured at a plurality of positions on the XY table 13, and the position of the hole machining is calculated using the positional deviation correction coefficient. Since the deviation is corrected, laser processing with high positional accuracy can be performed.

  In addition, since the misalignment of the machining position is corrected by the galvano scanner 11, accurate misalignment correction can be performed. Further, since the displacement of the machining position is corrected by the XY table 13, it is possible to easily perform the displacement correction. In addition, since the area on the XY table 13 is divided into a plurality of areas and the misregistration correction coefficient is calculated for each area, accurate misregistration correction can be performed.

Embodiment 2. FIG.
Next, a second embodiment of the present invention will be described with reference to FIGS. In the second embodiment, the laser beam from the laser oscillator is separated into two, and two workpieces W on the XY table 13 are laser processed simultaneously.

  FIG. 10 is a diagram showing the configuration of the laser processing apparatus according to Embodiment 2 of the present invention. Of the constituent elements shown in FIG. 10, the constituent elements that achieve the same functions as those of the laser processing apparatus 1 of the first embodiment shown in FIG. FIG. 10 illustrates the configuration of the laser processing mechanism 4 in the laser processing apparatus 51.

  A laser processing apparatus 51 shown in FIG. 10 has the same function as the laser processing apparatus 1. That is, the laser processing device 51 uses the positional deviation amount between the command point B and the machining point A when drilling is performed at a predetermined position on the workpiece W, so that the positional deviation when performing drilling of an actual product or the like is performed. Correct. The laser processing apparatus 51 measures the amount of positional deviation between the command point B and the machining point A at a plurality of positions on each workpiece W in advance, and calculates a positional deviation correction coefficient based on the measured value. Then, when drilling a real product or the like, the machining position is corrected using the calculated positional deviation correction coefficient for each workpiece W.

  The laser processing apparatus 51 has two optical path configurations after passing through the transfer mask of the laser processing mechanism 4 described in the first embodiment. Specifically, the laser processing apparatus 51 has two fθ lenses 12, two vision sensors 14, and two height sensors (not shown), and two galvano scanners 11 (four in total). The laser processing apparatus 51 has a laser oscillator and an XY table 13 (not shown), respectively, and two workpieces W are placed on the XY table 13 and laser processing of each workpiece W is performed simultaneously. .

  The laser light after passing through the transfer mask is separated into a left optical path (L stage SL side described later) and a right optical path (R stage SR side described later), and is irradiated to each workpiece W at the end of each optical path. Since the workpiece W on the L stage SL side and the workpiece W on the R stage SR side are both placed on the XY table 13, when the XY table 13 moves, the workpieces W are moved in substantially the same direction by substantially the same distance. Moving.

  Next, the optical path configuration after the laser beam emitted from the laser oscillator passes through the transfer mask will be described. FIG. 11 is a diagram showing an optical path configuration after passing through the transfer mask of the laser processing apparatus according to the second embodiment. Among the constituent elements in FIG. 11, constituent elements that achieve the same function as the optical path configuration described in the first embodiment shown in FIG. 2 are given the same numbers, and redundant descriptions are omitted.

  The laser light emitted from the laser light source passes through the transfer mask and is sent to the spectroscopic means (polarizing means) 15 through one to a plurality of mirrors. The laser beam sent to the spectroscopic means 15 is separated by the spectroscopic means 15 into the L stage SL (the left stage of the XY table 13) side and the R stage SR (the right stage of the XY table 13) side.

  The laser beam split to the L stage SL side is sent as a laser beam BL to the galvano scanner 11 on the L stage SL side via the mirror 17 and the retarder 16. Further, the laser beam that has been split to the R stage SR side is sent as a laser beam BR to the galvano scanner 11 on the R stage SR side via the mirror 17 and the retarder 16.

  The laser beam BL sent to the galvano scanner 11 on the L stage SL side is sent to the fθ lens 12 by the galvano scanner 11 and is condensed on the work W of the L stage SL by the fθ lens 12. The laser beam BR sent to the galvano scanner 11 on the R stage SR side is sent to the fθ lens 12 by the galvano scanner 11, and is condensed on the work W of the R stage SR by the fθ lens 12.

  Next, the position of the machining hole on the workpiece W (XY table 13) will be described. FIG. 12 is a diagram for explaining the positions of the processing holes on the stage of the laser processing apparatus according to the second embodiment. In the present embodiment, the workpiece W is placed on the L stage SL and the R stage SR of the XY table 13.

  For example, the drilling is a processing position 22L that is the left end on the L stage SL, a processing position 22R that is the right end on the L stage SL, a processing position 23L that is the left end on the R stage SR, and a right end on the R stage SR. It is performed at various positions such as the processing position 23R. Since the drilling is performed simultaneously on the workpiece W on the L stage SL and the workpiece W on the R stage SR, for example, the machining position 22L that is the left end on the L stage SL and the machining position that is the left end on the R stage SR. 23L is drilled at the same time. Further, drilling is simultaneously performed at the machining position 22R which is the right end on the L stage SL and the machining position 23R which is the right end on the R stage SR.

  In the present embodiment, drilling for calculating the misregistration correction coefficient is simultaneously performed on the L stage SL and the R stage SR, and the simultaneously drilled holes are simultaneously performed on the L stage SL and the R stage SR. Measure the position. Then, the positional deviation correction unit 3 calculates the positional deviation correction coefficient on the L stage SL and the positional deviation correction coefficient on the R stage SR by the same method as in the first embodiment.

  Thereafter, the positional deviation correction on the L stage SL and the positional deviation correction on the R stage SR are performed by the same method as in the first embodiment. The laser processing apparatus 51 of the present embodiment corrects the position of at least one of the L stage SL side or the R stage SR side by the galvano scanner 11 when drilling. Then, the other of the L stage SL side or the R stage SR side is subjected to position correction by the galvano scanner 11 or the XY table 13.

  Note that the position correction of the processing position on the L stage SL side and the processing position on the R stage SR side may be performed using both the XY table 13 and the galvano scanner 11, respectively. In this case, the XY table 13 corrects the position of the machining position on the L stage SL side and the machining position on the R stage SR side by a predetermined amount. Thereafter, the processing position on the L stage SL side is corrected by the galvano scanner 11 on the L stage SL side, and the processing position on the R stage SR side is corrected by the galvano scanner 11 on the R stage SR side.

  For example, the laser processing device 51 corrects the position of processing on the L stage SL side with the XY table 13 and corrects the position of processing on the R stage SR side with the galvano scanner 11. In this case, the laser processing apparatus 51 corrects the processing position on the L stage SL side using the positional deviation correction coefficient calculated for the processing hole on the L stage SL. At this time, the laser processing apparatus 51 corrects the position of the processing position on the L stage SL side by moving the XY table 13. As a result, the position of the hole on the R stage SR side is displaced by the amount of position correction performed on the L stage SL side. Therefore, thereafter, the laser processing apparatus 51 uses the positional deviation correction coefficient calculated for the processing hole on the R stage SR side and the position correction amount performed on the L stage SL side to determine the processing position on the R stage SR side. Correct the position. At this time, the laser processing apparatus 51 corrects the position of the processing position on the R stage RL side by moving the galvano scanner 11. The misregistration correction unit 3 uses the misregistration correction coefficient calculated for the machining hole on the L stage SL side and the misregistration correction coefficient calculated for the machining hole on the R stage SR side. A correction command to 5 may be created.

  As described above, even when the workpiece W on the L stage SL and the workpiece W on the R stage RL are simultaneously drilled, measurement is performed at a plurality of locations on each workpiece W, as in the case of the first embodiment. The misalignment correction coefficient is calculated based on the misalignment amount of the drilled hole.

  Here, the amount of misalignment when the position of the machining hole is corrected by the misalignment correction coefficient calculated by the laser processing apparatus 51 of the present embodiment will be described. FIG. 13 is a diagram showing the deviation amount of the hole position when drilling is performed on the R stage, and FIG. 14 is a diagram showing the deviation amount of the hole position when drilling is performed on the L stage.

  In FIGS. 13 and 14, the distribution of the positional deviation amount (after correction) when the position of the machining hole is corrected by the positional deviation correction coefficient, and the positional deviation amount (before correction) when drilling without correcting the positional deviation. Is shown. A positional deviation amount C shown in the figure is a positional deviation amount before correction, and a positional deviation amount D shown in the figure is a positional deviation amount after correction. The coordinates of the positional deviation amount C and the positional deviation amount D indicate the positional deviation amount in the X direction and the positional deviation amount in the Y direction, respectively.

  As shown in FIGS. 13 and 14, the actual machining hole after the correction by the misregistration correction coefficient has a smaller positional deviation amount than the actual machining hole without the misalignment correction. Specifically, the maximum value of the positional deviation amount in the X direction and the Y direction is smaller in the positional deviation amount D after the correction than in the positional deviation amount C before the correction, and the positional deviation amount in the X direction and the Y direction. The average value of is also small. Further, the positional deviation amount D after the correction is smaller in the X direction and the Y direction than the positional deviation amount C before the correction.

  In the present embodiment, the case where the laser processing apparatus 51 processes two workpieces W at the same time has been described. However, the laser processing apparatus 51 may process three or more workpieces W simultaneously. In this case, the laser processing apparatus 51 has three or more optical path configurations after passing through the transfer mask of the laser processing mechanism 4 described in the first embodiment.

  As described above, according to the second embodiment, even when the workpiece W on the L stage SL and the workpiece W on the R stage RL are simultaneously drilled, the hole machining measured at a plurality of locations on each workpiece W is performed. Since the misregistration correction coefficient is calculated based on the misregistration amount, it is possible to perform laser processing with high positional accuracy.

  Further, the laser processing apparatus 51 according to the present embodiment only needs to correct the position of the L stage SL side or the R stage SR side by the galvano scanner 11 when drilling, so that the position correction of the other is XY. When only the table 13 is used, position correction can be performed with a simple configuration.

  As described above, the laser processing apparatus according to the present invention is suitable for correcting the displacement of the processing position of the workpiece.

It is a figure which shows the structure of the laser processing apparatus which concerns on Embodiment 1. FIG. It is a figure which shows the optical path structure after the transfer mask of the laser processing apparatus which concerns on Embodiment 1. FIG. 2 is a block diagram showing a functional configuration of the laser processing apparatus according to Embodiment 1. FIG. It is a figure for demonstrating the position of the processing hole on the stage of the laser processing apparatus which concerns on Embodiment 1. FIG. It is a flowchart which shows the calculation processing procedure of a position shift correction coefficient. It is a figure for demonstrating the several command point set on an XY table. It is a figure for demonstrating the positional offset amount of a command point and a process point. It is a figure for demonstrating the calculation object area of a position shift correction coefficient. It is a flowchart which shows the laser processing procedure using a position shift correction coefficient. It is a figure which shows the structure of the laser processing apparatus which concerns on Embodiment 2. FIG. It is a figure which shows the optical path structure after the transfer mask of the laser processing apparatus which concerns on Embodiment 2. FIG. It is a figure for demonstrating the position of the processing hole on the stage of the laser processing apparatus which concerns on Embodiment 2. FIG. It is a figure which shows the deviation | shift amount of the hole position at the time of drilling on an R stage. It is a figure which shows the deviation | shift amount of the hole position at the time of drilling on an L stage.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1,51 Laser processing apparatus 3 Position shift correction part 4 Laser processing mechanism 5 Control apparatus 11 Galvano scanner 13 XY table 14 Vision sensor 15 Spectroscopic means 31 Position shift amount calculation part 32 Measurement data storage part 33 Correction coefficient calculation part 34 Correction command part A Machining point B Command point W Workpiece

Claims (5)

In a laser processing apparatus that performs laser processing on a workpiece by irradiating the workpiece placed on the XY table with laser light,
A galvano scanner that positions the irradiation position of the laser beam in each scan area for a workpiece in which a plurality of scan areas are set,
The machining command position when laser machining is performed at a predetermined position on the first workpiece , as a displacement amount of the machining position corresponding to the error of the reference scale set as the reference of the position when the XY table moves. A positional deviation amount calculation unit for calculating a positional deviation amount between the actual machining position when laser processing is performed on the command position;
A correction information calculation unit for calculating position shift correction information used when performing position correction at the time of laser processing so that an actual processing position after laser processing does not shift, based on the amount of position shift;
A correction command unit that outputs a position correction command so as to perform position correction according to a processing target position for the second workpiece based on the positional deviation correction information when performing laser processing on the second workpiece;
A laser processing unit that performs laser processing while performing position correction in accordance with the position correction command;
With
The misregistration amount calculation unit calculates misregistration amounts in a plurality of scan areas on the first workpiece, and the correction information calculation unit calculates a plurality of misregistration amounts calculated by the misregistration amount calculation unit. The laser processing apparatus characterized in that the positional deviation correction information is calculated based on The laser processing unit simultaneously laser-processes a plurality of the first workpiece or the second workpiece placed on the XY table, and the correction information calculation unit corrects the displacement for each first workpiece. The laser processing apparatus according to claim 1, wherein the correction command unit outputs the correction command for each second workpiece while calculating information. The laser processing apparatus according to claim 1 , wherein the correction command unit outputs a correction command to the galvano scanner to cause the galvano scanner to correct the processing position. The laser processing apparatus according to claim 1, wherein the correction command unit outputs a correction command to the XY table to cause the XY table to correct the processing position. . The correction information calculation unit sets a plurality of areas in the first work surface, calculates the positional deviation correction information for each set area,
The said correction instruction | command part outputs the said position correction instruction | command based on the positional offset correction information of the area according to the process target position of the said 2nd workpiece | work, The any one of Claims 1-4 characterized by the above-mentioned. The laser processing apparatus as described.

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