JP5268502B2 - 溶液の塗布装置及び塗布方法 - Google Patents

溶液の塗布装置及び塗布方法 Download PDF

Info

Publication number
JP5268502B2
JP5268502B2 JP2008222083A JP2008222083A JP5268502B2 JP 5268502 B2 JP5268502 B2 JP 5268502B2 JP 2008222083 A JP2008222083 A JP 2008222083A JP 2008222083 A JP2008222083 A JP 2008222083A JP 5268502 B2 JP5268502 B2 JP 5268502B2
Authority
JP
Japan
Prior art keywords
solution
nozzle
droplet
imaging
magnification
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2008222083A
Other languages
English (en)
Japanese (ja)
Other versions
JP2010051924A5 (enExample
JP2010051924A (ja
Inventor
司 川上
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shibaura Mechatronics Corp
Original Assignee
Shibaura Mechatronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shibaura Mechatronics Corp filed Critical Shibaura Mechatronics Corp
Priority to JP2008222083A priority Critical patent/JP5268502B2/ja
Publication of JP2010051924A publication Critical patent/JP2010051924A/ja
Publication of JP2010051924A5 publication Critical patent/JP2010051924A5/ja
Application granted granted Critical
Publication of JP5268502B2 publication Critical patent/JP5268502B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Coating Apparatus (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
JP2008222083A 2008-08-29 2008-08-29 溶液の塗布装置及び塗布方法 Expired - Fee Related JP5268502B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2008222083A JP5268502B2 (ja) 2008-08-29 2008-08-29 溶液の塗布装置及び塗布方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008222083A JP5268502B2 (ja) 2008-08-29 2008-08-29 溶液の塗布装置及び塗布方法

Publications (3)

Publication Number Publication Date
JP2010051924A JP2010051924A (ja) 2010-03-11
JP2010051924A5 JP2010051924A5 (enExample) 2011-10-20
JP5268502B2 true JP5268502B2 (ja) 2013-08-21

Family

ID=42068415

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008222083A Expired - Fee Related JP5268502B2 (ja) 2008-08-29 2008-08-29 溶液の塗布装置及び塗布方法

Country Status (1)

Country Link
JP (1) JP5268502B2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110646327A (zh) * 2019-10-17 2020-01-03 上海睿度光电科技有限公司 一种双通道微滴发生撞击观测装置
CN114964066B (zh) * 2022-08-02 2022-11-25 深圳市海清视讯科技有限公司 测量装置及筛选系统

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04203912A (ja) * 1990-11-29 1992-07-24 Matsushita Electric Ind Co Ltd 三次元画像入力装置
JP4659345B2 (ja) * 2003-07-25 2011-03-30 芝浦メカトロニクス株式会社 塗布装置および塗布方法

Also Published As

Publication number Publication date
JP2010051924A (ja) 2010-03-11

Similar Documents

Publication Publication Date Title
US8974037B2 (en) Film coating device having an inkjet head, and a method of forming a film
CN100470326C (zh) 喷墨微滴显示
CN101622134B (zh) 液滴分析系统
KR100952380B1 (ko) 착탄 도트 측정 방법 및 착탄 도트 측정 장치, 및 액적토출 장치, 전기 광학 장치의 제조 방법, 전기 광학 장치및 전자 기기
JP2007090888A (ja) インクジェット液滴の位置決め方法及びシステム
JP2009113040A (ja) マイクロデポジション装置
CN106687297A (zh) 工业打印系统的液滴参数的快速测量
TW201902586A (zh) 工件加工裝置、工件加工方法及電腦記憶媒體
JP6695237B2 (ja) 液滴吐出装置及び液滴吐出条件補正方法
CN101460257A (zh) 液滴涂布装置
JP2007256449A (ja) 液滴噴射検査装置、液滴噴射装置及び塗布体の製造方法
JP5586299B2 (ja) インクジェット塗布装置
JP2009239155A (ja) 位置決め装置および位置決め装置の制御方法
JP5268502B2 (ja) 溶液の塗布装置及び塗布方法
KR20220034279A (ko) 기판 처리 장치, 잉크젯 장치 및 메인터넌스 방법
JP2005022222A (ja) 液滴飛行状態観測方法および液滴飛行状態観測装置
JP2006130383A (ja) ドットずれ検出方法およびドットずれ検出装置
KR20080067773A (ko) 잉크젯 프린팅 시스템의 액적량 조정 장치 및 방법
JP4914708B2 (ja) 溶液の塗布装置及び塗布方法
KR102619966B1 (ko) 기판 처리 제어 방법, 기판 처리 장치, 기판 처리 방법 및 컴퓨터 판독가능 매체에 저장된 컴퓨터 프로그램
KR20210004381A (ko) 액적 토출 장치
JP4228910B2 (ja) 機能液滴吐出検査方法、機能液滴吐出検査装置およびこれを備えた液滴吐出装置
JP2009148754A (ja) 液滴質量偏差測定装置、その液滴質量偏差測定方法、これを用いるパターン形成システム、及びこれを用いるパターン形成システムの制御方法
CN101746131B (zh) 膜形成方法及膜形成装置
CN101746130B (zh) 喷墨头的喷出异常检测装置及检测方法

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20110829

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20110905

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20121128

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20121211

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20130308

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20130405

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20130426

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20130507

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

Ref document number: 5268502

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

LAPS Cancellation because of no payment of annual fees