JP5267470B2 - アクチュエータ - Google Patents

アクチュエータ Download PDF

Info

Publication number
JP5267470B2
JP5267470B2 JP2010007014A JP2010007014A JP5267470B2 JP 5267470 B2 JP5267470 B2 JP 5267470B2 JP 2010007014 A JP2010007014 A JP 2010007014A JP 2010007014 A JP2010007014 A JP 2010007014A JP 5267470 B2 JP5267470 B2 JP 5267470B2
Authority
JP
Japan
Prior art keywords
bearing
endless belt
guide rail
main bearing
counter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2010007014A
Other languages
English (en)
Japanese (ja)
Other versions
JP2011144895A (ja
JP2011144895A5 (enExample
Inventor
俊徳 佐藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NSK Ltd
Original Assignee
NSK Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NSK Ltd filed Critical NSK Ltd
Priority to JP2010007014A priority Critical patent/JP5267470B2/ja
Publication of JP2011144895A publication Critical patent/JP2011144895A/ja
Publication of JP2011144895A5 publication Critical patent/JP2011144895A5/ja
Application granted granted Critical
Publication of JP5267470B2 publication Critical patent/JP5267470B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Transmission Devices (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
  • Bearings For Parts Moving Linearly (AREA)
JP2010007014A 2010-01-15 2010-01-15 アクチュエータ Active JP5267470B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2010007014A JP5267470B2 (ja) 2010-01-15 2010-01-15 アクチュエータ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010007014A JP5267470B2 (ja) 2010-01-15 2010-01-15 アクチュエータ

Publications (3)

Publication Number Publication Date
JP2011144895A JP2011144895A (ja) 2011-07-28
JP2011144895A5 JP2011144895A5 (enExample) 2012-07-26
JP5267470B2 true JP5267470B2 (ja) 2013-08-21

Family

ID=44459925

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010007014A Active JP5267470B2 (ja) 2010-01-15 2010-01-15 アクチュエータ

Country Status (1)

Country Link
JP (1) JP5267470B2 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5974449B2 (ja) * 2011-10-26 2016-08-23 日本精工株式会社 アクチュエータ
JP5741515B2 (ja) * 2012-04-18 2015-07-01 日本精工株式会社 アクチュエータ、製造装置、及び検査装置
JP5776709B2 (ja) * 2013-03-04 2015-09-09 日本精工株式会社 アクチュエータおよびこれを備えた精密機械
JP6065999B2 (ja) * 2016-02-22 2017-01-25 日本精工株式会社 アクチュエータ

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62100887U (enExample) * 1985-12-16 1987-06-26
JP2001234996A (ja) * 2000-02-23 2001-08-31 Nsk Ltd 直進運動装置
JP2008101642A (ja) * 2006-10-17 2008-05-01 Nsk Ltd アクチュエータ
JP4922864B2 (ja) * 2007-08-10 2012-04-25 佐藤工業株式会社 移動台車装置及び移動方法

Also Published As

Publication number Publication date
JP2011144895A (ja) 2011-07-28

Similar Documents

Publication Publication Date Title
KR102714607B1 (ko) 충격 시험 장치
EP2472141B1 (en) Base isolation table with damping mechanism and base isolation table unit using the same
JP5267470B2 (ja) アクチュエータ
JP2011079099A (ja) 工作機械
CN103339403A (zh) 质量阻尼器
US4671127A (en) Vibration suppressing device in a feed screw mechanism
JP2019035705A (ja) 衝撃試験装置
EP2674995A1 (en) Moving mechanism, electronic component transport device, electronic component inspection device
EP2100695B1 (en) Processing machine with reciprocation device
JP4509774B2 (ja) 反力移動システム
JP7182505B2 (ja) 制振ダンパの加振試験装置及び制振ダンパの加振試験方法
JP2008101642A (ja) アクチュエータ
JP5974449B2 (ja) アクチュエータ
JP6065999B2 (ja) アクチュエータ
CN112984044B (zh) 精密设备搭载用除振装置
JP2006161898A (ja) エアスライド装置
JP5741515B2 (ja) アクチュエータ、製造装置、及び検査装置
JP2012232354A (ja) 位置決めテーブル装置
JP2013113367A (ja) アクチュエータ
JP2013194822A (ja) アクチュエータ
CN105006907B (zh) 一种电动机
JPH06262583A (ja) マニピュレータ用振動防止装置
JP4415519B2 (ja) アクチュエータ
JP4632569B2 (ja) ステージ装置
JP2001248703A (ja) アクチュエータ

Legal Events

Date Code Title Description
A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20120608

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20120608

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20121011

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20130409

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20130422

R150 Certificate of patent or registration of utility model

Ref document number: 5267470

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

Free format text: JAPANESE INTERMEDIATE CODE: R150