JP5250215B2 - 偏差補償プログラム - Google Patents

偏差補償プログラム Download PDF

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JP5250215B2
JP5250215B2 JP2007151617A JP2007151617A JP5250215B2 JP 5250215 B2 JP5250215 B2 JP 5250215B2 JP 2007151617 A JP2007151617 A JP 2007151617A JP 2007151617 A JP2007151617 A JP 2007151617A JP 5250215 B2 JP5250215 B2 JP 5250215B2
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control
signal
subtraction
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JP2008305157A (ja
JP2008305157A5 (enExample
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功 四郎丸
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JP2007151617A 2007-06-07 2007-06-07 偏差補償プログラム Expired - Fee Related JP5250215B2 (ja)

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JP2007151617A JP5250215B2 (ja) 2007-06-07 2007-06-07 偏差補償プログラム

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JP2007151617A JP5250215B2 (ja) 2007-06-07 2007-06-07 偏差補償プログラム

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JP2008305157A JP2008305157A (ja) 2008-12-18
JP2008305157A5 JP2008305157A5 (enExample) 2011-09-08
JP5250215B2 true JP5250215B2 (ja) 2013-07-31

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Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102411309B (zh) * 2011-12-26 2013-06-19 常州大学 一种微偏差区自修正模糊控制方法
CN103309270B (zh) * 2013-07-03 2015-05-20 哈尔滨工业大学 一种基于fpga的可变参数pi控制器
WO2020004974A1 (en) * 2018-06-27 2020-01-02 Lg Electronics Inc. Automatic control artificial intelligence device and method for updating control function
US11514358B2 (en) 2018-06-27 2022-11-29 Lg Electronics Inc. Automatic control artificial intelligence device and method for updating a control function

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* Cited by examiner, † Cited by third party
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JPS61112202A (ja) * 1984-11-06 1986-05-30 Mitsubishi Heavy Ind Ltd 制御偏差補償装置
JPH09134886A (ja) * 1995-11-08 1997-05-20 Kokusai Electric Co Ltd 半導体製造装置のランピング温度制御方法
JP4274046B2 (ja) * 2004-05-25 2009-06-03 オムロン株式会社 制御装置、制御パラメータの調整装置、制御パラメータの調整方法、プログラムおよび記録媒体

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