JP2008305157A5 - - Google Patents
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- Publication number
- JP2008305157A5 JP2008305157A5 JP2007151617A JP2007151617A JP2008305157A5 JP 2008305157 A5 JP2008305157 A5 JP 2008305157A5 JP 2007151617 A JP2007151617 A JP 2007151617A JP 2007151617 A JP2007151617 A JP 2007151617A JP 2008305157 A5 JP2008305157 A5 JP 2008305157A5
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- JP
- Japan
- Prior art keywords
- function
- output
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- control
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000006243 chemical reaction Methods 0.000 claims 87
- 230000000875 corresponding effect Effects 0.000 claims 9
- 230000004069 differentiation Effects 0.000 claims 7
- 238000001514 detection method Methods 0.000 claims 4
- 230000002596 correlated effect Effects 0.000 claims 3
- 230000010354 integration Effects 0.000 claims 3
- 230000006641 stabilisation Effects 0.000 claims 1
- 238000011105 stabilization Methods 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007151617A JP5250215B2 (ja) | 2007-06-07 | 2007-06-07 | 偏差補償プログラム |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007151617A JP5250215B2 (ja) | 2007-06-07 | 2007-06-07 | 偏差補償プログラム |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2008305157A JP2008305157A (ja) | 2008-12-18 |
| JP2008305157A5 true JP2008305157A5 (enExample) | 2011-09-08 |
| JP5250215B2 JP5250215B2 (ja) | 2013-07-31 |
Family
ID=40233835
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007151617A Expired - Fee Related JP5250215B2 (ja) | 2007-06-07 | 2007-06-07 | 偏差補償プログラム |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5250215B2 (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102411309B (zh) * | 2011-12-26 | 2013-06-19 | 常州大学 | 一种微偏差区自修正模糊控制方法 |
| CN103309270B (zh) * | 2013-07-03 | 2015-05-20 | 哈尔滨工业大学 | 一种基于fpga的可变参数pi控制器 |
| WO2020004974A1 (en) * | 2018-06-27 | 2020-01-02 | Lg Electronics Inc. | Automatic control artificial intelligence device and method for updating control function |
| US11514358B2 (en) | 2018-06-27 | 2022-11-29 | Lg Electronics Inc. | Automatic control artificial intelligence device and method for updating a control function |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61112202A (ja) * | 1984-11-06 | 1986-05-30 | Mitsubishi Heavy Ind Ltd | 制御偏差補償装置 |
| JPH09134886A (ja) * | 1995-11-08 | 1997-05-20 | Kokusai Electric Co Ltd | 半導体製造装置のランピング温度制御方法 |
| JP4274046B2 (ja) * | 2004-05-25 | 2009-06-03 | オムロン株式会社 | 制御装置、制御パラメータの調整装置、制御パラメータの調整方法、プログラムおよび記録媒体 |
-
2007
- 2007-06-07 JP JP2007151617A patent/JP5250215B2/ja not_active Expired - Fee Related
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