JP2008305157A5 - - Google Patents

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Publication number
JP2008305157A5
JP2008305157A5 JP2007151617A JP2007151617A JP2008305157A5 JP 2008305157 A5 JP2008305157 A5 JP 2008305157A5 JP 2007151617 A JP2007151617 A JP 2007151617A JP 2007151617 A JP2007151617 A JP 2007151617A JP 2008305157 A5 JP2008305157 A5 JP 2008305157A5
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JP
Japan
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function
output
signal
control
deviation amount
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JP2007151617A
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English (en)
Japanese (ja)
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JP2008305157A (ja
JP5250215B2 (ja
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Priority to JP2007151617A priority Critical patent/JP5250215B2/ja
Priority claimed from JP2007151617A external-priority patent/JP5250215B2/ja
Publication of JP2008305157A publication Critical patent/JP2008305157A/ja
Publication of JP2008305157A5 publication Critical patent/JP2008305157A5/ja
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Publication of JP5250215B2 publication Critical patent/JP5250215B2/ja
Expired - Fee Related legal-status Critical Current
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JP2007151617A 2007-06-07 2007-06-07 偏差補償プログラム Expired - Fee Related JP5250215B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007151617A JP5250215B2 (ja) 2007-06-07 2007-06-07 偏差補償プログラム

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007151617A JP5250215B2 (ja) 2007-06-07 2007-06-07 偏差補償プログラム

Publications (3)

Publication Number Publication Date
JP2008305157A JP2008305157A (ja) 2008-12-18
JP2008305157A5 true JP2008305157A5 (enExample) 2011-09-08
JP5250215B2 JP5250215B2 (ja) 2013-07-31

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Family Applications (1)

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JP2007151617A Expired - Fee Related JP5250215B2 (ja) 2007-06-07 2007-06-07 偏差補償プログラム

Country Status (1)

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JP (1) JP5250215B2 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102411309B (zh) * 2011-12-26 2013-06-19 常州大学 一种微偏差区自修正模糊控制方法
CN103309270B (zh) * 2013-07-03 2015-05-20 哈尔滨工业大学 一种基于fpga的可变参数pi控制器
WO2020004974A1 (en) * 2018-06-27 2020-01-02 Lg Electronics Inc. Automatic control artificial intelligence device and method for updating control function
US11514358B2 (en) 2018-06-27 2022-11-29 Lg Electronics Inc. Automatic control artificial intelligence device and method for updating a control function

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61112202A (ja) * 1984-11-06 1986-05-30 Mitsubishi Heavy Ind Ltd 制御偏差補償装置
JPH09134886A (ja) * 1995-11-08 1997-05-20 Kokusai Electric Co Ltd 半導体製造装置のランピング温度制御方法
JP4274046B2 (ja) * 2004-05-25 2009-06-03 オムロン株式会社 制御装置、制御パラメータの調整装置、制御パラメータの調整方法、プログラムおよび記録媒体

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