JP5244396B2 - 固体凝縮ガス層のエネルギー誘導局所除去を用いるリフトオフパターニング方法 - Google Patents
固体凝縮ガス層のエネルギー誘導局所除去を用いるリフトオフパターニング方法 Download PDFInfo
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Description
12 チャンバ
13 ポンプ口
14 配管
15 構造
16 構造ホルダー
18 接続部
20 コールドフィンガー
22 供給源
24 接続管
26 インジェクタ
28 蒸気
30 固体凝縮物層
32 供給源
34 エネルギービーム
36 対象位置
Claims (34)
- 構造上にナノパターン化された材料層を形成する方法において、
前記構造の表面上に蒸気を凝縮させて非晶質固体水凝縮物層とする段階;
選択領域に1keVから30keVの間のエネルギーの集束電子ビームを当てることで前記非晶質固体水凝縮物層の少なくとも一つのナノサイズの選択領域を局所除去し、前記選択領域で前記構造を露出させる段階;
前記非晶質固体水凝縮物層の上面および前記選択領域で露出した前記構造上に材料層を成膜する段階;および
前記非晶質固体水凝縮物層および前記非晶質固体水凝縮物層の上面に成膜された前記材料層の領域を除去して、前記構造上にパターン化された前記材料層を残す段階
を含む前記方法。 - 凝縮して前記非晶質固体水凝縮物層となる蒸気が、前記構造が配置されているプロセスチャンバ中に蒸気として注入される請求項1に記載の方法。
- 凝縮して前記非晶質固体水凝縮物層となる蒸気が、蒸気供給源、液体供給源、固体供給源のうちいずれかから供給される請求項1に記載の方法。
- 凝縮して前記非晶質固体水凝縮物層となる蒸気が、水蒸気を含む請求項1に記載の方法。
- 前記非晶質固体水凝縮物層が、氷を含む請求項1に記載の方法。
- 前記構造の表面に局所的な温度および圧力条件を制御して、前記構造の表面上で蒸気を前記非晶質固体水凝縮物層へ凝縮させる段階をさらに含む請求項1に記載の方法。
- 前記構造の表面に局所的な前記温度条件を制御する段階は、前記構造の温度を制御するように構成された構造ホルダー上に前記構造を配置する段階を含む請求項6に記載の方法。
- 前記構造の表面に局所的な制御された前記圧力条件が、真空条件として特徴付けられる請求項6に記載の方法。
- 凝縮して前記非晶質固体水凝縮物層となる蒸気が水蒸気を含み、前記構造に局所的な圧力が1.3×10−2Pa(10−4T)未満に制御される請求項6に記載の方法。
- 凝縮して前記非晶質固体水凝縮物層となる蒸気が水蒸気を含み、前記構造に局所的な温度が153K未満に制御される請求項6に記載の方法。
- 凝縮して前記非晶質固体水凝縮物層となる蒸気が水蒸気を含み、前記構造に局所的な温度が130K未満に制御される請求項8に記載の方法。
- 前記非晶質固体水凝縮物層が、前記非晶質固体水凝縮物層によるエネルギービームの吸収を最適化するよう選択される添加剤を含有する請求項1に記載の方法。
- 前記非晶質固体水凝縮物層の少なくとも一つの選択領域を局所除去する段階が、前記選択領域における前記非晶質固体水凝縮物の蒸気への局所変換を含む請求項1に記載の方法。
- 前記非晶質固体水凝縮物の蒸気への局所変換が、前記選択領域における前記非晶質固体水凝縮物層の局所昇華を含む請求項13に記載の方法。
- 前記非晶質固体水凝縮物層の少なくとも一つの選択領域を局所除去する段階が、前記材料層における所望のパターンに相当する経路に沿って前記非晶質固体水凝縮物層上を前記集束電子ビームで走査する段階を含む請求項1に記載の方法。
- 前記材料層が、スパッタリング、蒸着、化学蒸着、蒸発、プラズマ成膜のうちいずれかによって成膜される請求項1に記載の方法。
- 前記材料層が、導電性材料を含む請求項1に記載の方法。
- 前記材料層が、クロム、金、アルミニウム、銀、パラジウムのうちいずれかの導電性材料を含む請求項17に記載の方法。
- 前記構造が、シリコン基板を含む請求項1に記載の方法。
- 前記材料層が、前記非晶質固体水凝縮物層および前記選択領域において露出した前記構造の表面上にブランケット層として成膜される請求項1に記載の方法。
- 前記非晶質固体水凝縮物層の局所除去および前記材料層の成膜時に、前記構造に局所的な温度および圧力条件を制御して、前記非晶質固体水凝縮物層の安定性を実質的に維持する段階をさらに含む請求項1に記載の方法。
- 前記非晶質固体水凝縮物層および前記非晶質固体水凝縮物層上に成膜された前記材料層の領域の除去が、前記非晶質固体水凝縮物層の蒸気への変換を含む請求項1に記載の方法。
- 前記非晶質固体水凝縮物層の蒸気への変換が、前記構造を加熱して前記非晶質固体水凝縮物層を蒸気に変換する段階を含む請求項22に記載の方法。
- 前記非晶質固体水凝縮物層の蒸気への変換が、前記非晶質固体水凝縮物層の昇華を含む請求項22に記載の方法。
- 前記非晶質固体水凝縮物層および前記非晶質固体水凝縮物層上に成膜された前記材料層の領域の除去が、前記非晶質固体水凝縮物層を除去する時の前記材料層の領域をリフトオフするプロセスを含む請求項1に記載の方法。
- 前記蒸気の凝縮、前記非晶質固体水凝縮物層の局所除去、前記材料層の成膜および前記非晶質固体水凝縮物層の除去が、共通の加工チャンバユニットで行われる請求項1に記載の方法。
- パターン化された前記材料層が、1μm未満のパターン線幅によって特徴付けられる請求項1に記載の方法。
- パターン化された前記材料層が、25nm未満のパターン線幅によって特徴付けられる請求項27に記載の方法。
- 集束電子ビームを前記選択領域に向けて方向付けるステップは、前記集束電子ビームを前記選択領域に沿ってスキャンするステップを含む、
請求項1記載の方法。 - 前記集束電子ビームは、5keVのビームエネルギーによって特徴付けられる、
請求項1記載の方法。 - 前記集束電子ビームは、5nmのビーム直径によって特徴付けられる、
請求項1記載の方法。 - 前記局所領域の除去の間に、前記構造を電気的に接地することにより、前記構造から電子ビーム電荷を抜き取るステップをさらに有する、
請求項1記載の方法。 - 蒸気を前記非晶質固体水凝縮物層へ凝縮させる段階は、前記構造の表面上に25nm/秒未満の凝縮率で凝縮を実施するステップを含む、
請求項1記載の方法。 - 蒸気を前記非晶質固体水凝縮物層へ凝縮させる段階は、1.3×10−2Pa(10−4T)未満の局所圧力および128K以下の局所温度で凝縮を実施するステップを含む、
請求項1記載の方法。
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