JP5233466B2 - 振動子及び発振器、振動子の製造方法 - Google Patents
振動子及び発振器、振動子の製造方法 Download PDFInfo
- Publication number
- JP5233466B2 JP5233466B2 JP2008188662A JP2008188662A JP5233466B2 JP 5233466 B2 JP5233466 B2 JP 5233466B2 JP 2008188662 A JP2008188662 A JP 2008188662A JP 2008188662 A JP2008188662 A JP 2008188662A JP 5233466 B2 JP5233466 B2 JP 5233466B2
- Authority
- JP
- Japan
- Prior art keywords
- film
- vibrator
- base
- piezoelectric
- oxide film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 41
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 41
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 30
- 229910052710 silicon Inorganic materials 0.000 claims description 30
- 239000010703 silicon Substances 0.000 claims description 30
- 239000000758 substrate Substances 0.000 claims description 15
- 238000005530 etching Methods 0.000 claims description 9
- 229910013641 LiNbO 3 Inorganic materials 0.000 claims description 3
- 230000001590 oxidative effect Effects 0.000 claims description 3
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 claims description 2
- 229910052451 lead zirconate titanate Inorganic materials 0.000 claims description 2
- 229910017083 AlN Inorganic materials 0.000 claims 1
- XLOMVQKBTHCTTD-UHFFFAOYSA-N zinc oxide Inorganic materials [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims 1
- 239000010408 film Substances 0.000 description 159
- 239000000463 material Substances 0.000 description 50
- 229910004298 SiO 2 Inorganic materials 0.000 description 7
- 239000010409 thin film Substances 0.000 description 7
- 230000005684 electric field Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 239000003990 capacitor Substances 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000006185 dispersion Substances 0.000 description 2
- 238000001312 dry etching Methods 0.000 description 2
- 230000002349 favourable effect Effects 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 238000000059 patterning Methods 0.000 description 2
- 229910052726 zirconium Inorganic materials 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- -1 shape Substances 0.000 description 1
Images
Landscapes
- Oscillators With Electromechanical Resonators (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008188662A JP5233466B2 (ja) | 2008-07-22 | 2008-07-22 | 振動子及び発振器、振動子の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008188662A JP5233466B2 (ja) | 2008-07-22 | 2008-07-22 | 振動子及び発振器、振動子の製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2010028535A JP2010028535A (ja) | 2010-02-04 |
| JP2010028535A5 JP2010028535A5 (enrdf_load_stackoverflow) | 2011-09-01 |
| JP5233466B2 true JP5233466B2 (ja) | 2013-07-10 |
Family
ID=41733924
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008188662A Expired - Fee Related JP5233466B2 (ja) | 2008-07-22 | 2008-07-22 | 振動子及び発振器、振動子の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5233466B2 (enrdf_load_stackoverflow) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5685962B2 (ja) | 2011-02-02 | 2015-03-18 | セイコーエプソン株式会社 | 振動片、振動子、発振器及び電子機器 |
| US8581669B2 (en) | 2011-02-02 | 2013-11-12 | Seiko Epson Corporation | Vibrator element, vibrator, oscillator, and electronic apparatus |
| WO2014185282A1 (ja) | 2013-05-13 | 2014-11-20 | 株式会社村田製作所 | 振動装置 |
| CN105210295B (zh) | 2013-05-13 | 2017-10-03 | 株式会社村田制作所 | 振动装置 |
| JP6482169B2 (ja) | 2013-07-19 | 2019-03-13 | セイコーエプソン株式会社 | 振動片、振動子、発振器、電子機器及び移動体 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH085382A (ja) * | 1994-06-23 | 1996-01-12 | Nippondenso Co Ltd | 角速度センサ |
| JP3972790B2 (ja) * | 2001-11-27 | 2007-09-05 | 松下電器産業株式会社 | 薄膜微小機械式共振子および薄膜微小機械式共振子ジャイロ |
| JP4328980B2 (ja) * | 2006-12-18 | 2009-09-09 | セイコーエプソン株式会社 | 圧電振動子およびその製造方法、並びに、ｍｅｍｓデバイスおよびその製造方法 |
-
2008
- 2008-07-22 JP JP2008188662A patent/JP5233466B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2010028535A (ja) | 2010-02-04 |
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