JP5217251B2 - 固体撮像装置、その製造方法および撮像装置 - Google Patents
固体撮像装置、その製造方法および撮像装置 Download PDFInfo
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- JP5217251B2 JP5217251B2 JP2007141306A JP2007141306A JP5217251B2 JP 5217251 B2 JP5217251 B2 JP 5217251B2 JP 2007141306 A JP2007141306 A JP 2007141306A JP 2007141306 A JP2007141306 A JP 2007141306A JP 5217251 B2 JP5217251 B2 JP 5217251B2
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- 238000004519 manufacturing process Methods 0.000 title claims description 31
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- 229910052710 silicon Inorganic materials 0.000 claims description 38
- 239000010703 silicon Substances 0.000 claims description 38
- 238000000034 method Methods 0.000 claims description 37
- 229910052757 nitrogen Inorganic materials 0.000 claims description 31
- 239000004065 semiconductor Substances 0.000 claims description 30
- CMIHHWBVHJVIGI-UHFFFAOYSA-N gadolinium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[Gd+3].[Gd+3] CMIHHWBVHJVIGI-UHFFFAOYSA-N 0.000 claims description 7
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 4
- GEZAXHSNIQTPMM-UHFFFAOYSA-N dysprosium(3+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Dy+3].[Dy+3] GEZAXHSNIQTPMM-UHFFFAOYSA-N 0.000 claims description 4
- ZXGIFJXRQHZCGJ-UHFFFAOYSA-N erbium(3+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Er+3].[Er+3] ZXGIFJXRQHZCGJ-UHFFFAOYSA-N 0.000 claims description 4
- AEBZCFFCDTZXHP-UHFFFAOYSA-N europium(3+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Eu+3].[Eu+3] AEBZCFFCDTZXHP-UHFFFAOYSA-N 0.000 claims description 4
- MRELNEQAGSRDBK-UHFFFAOYSA-N lanthanum(3+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[La+3].[La+3] MRELNEQAGSRDBK-UHFFFAOYSA-N 0.000 claims description 4
- PLDDOISOJJCEMH-UHFFFAOYSA-N neodymium(3+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Nd+3].[Nd+3] PLDDOISOJJCEMH-UHFFFAOYSA-N 0.000 claims description 4
- 230000003287 optical effect Effects 0.000 claims description 4
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 claims description 4
- UZLYXNNZYFBAQO-UHFFFAOYSA-N oxygen(2-);ytterbium(3+) Chemical compound [O-2].[O-2].[O-2].[Yb+3].[Yb+3] UZLYXNNZYFBAQO-UHFFFAOYSA-N 0.000 claims description 4
- RUDFQVOCFDJEEF-UHFFFAOYSA-N oxygen(2-);yttrium(3+) Chemical compound [O-2].[O-2].[O-2].[Y+3].[Y+3] RUDFQVOCFDJEEF-UHFFFAOYSA-N 0.000 claims description 4
- FKTOIHSPIPYAPE-UHFFFAOYSA-N samarium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[Sm+3].[Sm+3] FKTOIHSPIPYAPE-UHFFFAOYSA-N 0.000 claims description 4
- PBCFLUZVCVVTBY-UHFFFAOYSA-N tantalum pentoxide Inorganic materials O=[Ta](=O)O[Ta](=O)=O PBCFLUZVCVVTBY-UHFFFAOYSA-N 0.000 claims description 4
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 3
- CJNBYAVZURUTKZ-UHFFFAOYSA-N hafnium(iv) oxide Chemical compound O=[Hf]=O CJNBYAVZURUTKZ-UHFFFAOYSA-N 0.000 claims description 3
- MMKQUGHLEMYQSG-UHFFFAOYSA-N oxygen(2-);praseodymium(3+) Chemical compound [O-2].[O-2].[O-2].[Pr+3].[Pr+3] MMKQUGHLEMYQSG-UHFFFAOYSA-N 0.000 claims description 3
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 claims 2
- 229910052726 zirconium Inorganic materials 0.000 claims 2
- 229910052593 corundum Inorganic materials 0.000 claims 1
- JYTUFVYWTIKZGR-UHFFFAOYSA-N holmium oxide Inorganic materials [O][Ho]O[Ho][O] JYTUFVYWTIKZGR-UHFFFAOYSA-N 0.000 claims 1
- OWCYYNSBGXMRQN-UHFFFAOYSA-N holmium(3+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Ho+3].[Ho+3] OWCYYNSBGXMRQN-UHFFFAOYSA-N 0.000 claims 1
- 229910003443 lutetium oxide Inorganic materials 0.000 claims 1
- KTUFCUMIWABKDW-UHFFFAOYSA-N oxo(oxolanthaniooxy)lanthanum Chemical compound O=[La]O[La]=O KTUFCUMIWABKDW-UHFFFAOYSA-N 0.000 claims 1
- 229910001845 yogo sapphire Inorganic materials 0.000 claims 1
- 239000011229 interlayer Substances 0.000 description 51
- 102000004129 N-Type Calcium Channels Human genes 0.000 description 40
- 108090000699 N-Type Calcium Channels Proteins 0.000 description 40
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 37
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 21
- 229910052814 silicon oxide Inorganic materials 0.000 description 21
- 230000000694 effects Effects 0.000 description 20
- 230000001771 impaired effect Effects 0.000 description 20
- 239000010410 layer Substances 0.000 description 20
- 238000009825 accumulation Methods 0.000 description 12
- 230000007257 malfunction Effects 0.000 description 12
- 150000002500 ions Chemical class 0.000 description 10
- 239000000463 material Substances 0.000 description 8
- 230000015572 biosynthetic process Effects 0.000 description 7
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 4
- 229910021417 amorphous silicon Inorganic materials 0.000 description 4
- 238000000231 atomic layer deposition Methods 0.000 description 4
- 239000012535 impurity Substances 0.000 description 4
- 238000005468 ion implantation Methods 0.000 description 4
- 230000003647 oxidation Effects 0.000 description 4
- 238000007254 oxidation reaction Methods 0.000 description 4
- 229910052698 phosphorus Inorganic materials 0.000 description 4
- 239000011574 phosphorus Substances 0.000 description 4
- 230000003247 decreasing effect Effects 0.000 description 3
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 2
- 108091006146 Channels Proteins 0.000 description 2
- 229910017493 Nd 2 O 3 Inorganic materials 0.000 description 2
- 229910052773 Promethium Inorganic materials 0.000 description 2
- MCMNRKCIXSYSNV-UHFFFAOYSA-N ZrO2 Inorganic materials O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 description 2
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 2
- VQMWBBYLQSCNPO-UHFFFAOYSA-N promethium atom Chemical compound [Pm] VQMWBBYLQSCNPO-UHFFFAOYSA-N 0.000 description 2
- SCRZPWWVSXWCMC-UHFFFAOYSA-N terbium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[Tb+3].[Tb+3] SCRZPWWVSXWCMC-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 229910000449 hafnium oxide Inorganic materials 0.000 description 1
- WIHZLLGSGQNAGK-UHFFFAOYSA-N hafnium(4+);oxygen(2-) Chemical compound [O-2].[O-2].[Hf+4] WIHZLLGSGQNAGK-UHFFFAOYSA-N 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 238000002230 thermal chemical vapour deposition Methods 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14643—Photodiode arrays; MOS imagers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14625—Optical elements or arrangements associated with the device
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Electromagnetism (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
Description
Claims (10)
- 入射光を光電変換する受光部と、前記受光部で光電変換された信号電荷を転送するnチャネル絶縁ゲート型の電荷転送部とを有する固体撮像装置において、
前記電荷転送部の転送電極を直接覆って形成された負の固定電荷を有する絶縁膜を有する
固体撮像装置。 - 前記負の固定電荷を有する絶縁膜は、前記転送電極上とともに前記転送電極間に形成されている
請求項1記載の固体撮像装置。 - 前記負の固定電荷を有する絶縁膜は、前記転送電極上とともに前記転送電極間を埋め込むように形成されている
請求項1または2記載の固体撮像装置。 - 前記受光部を覆うと共に前記転送電極下に延設されたゲート絶縁膜を備え、
前記負の固定電荷を有する絶縁膜は、前記ゲート絶縁膜を介して前記受光部を覆っている
請求項1〜3の何れかに記載の固体撮像装置。 - 前記負の固定電荷を有する絶縁膜と、前記負の固定電荷を有する絶縁膜とは別の少なくとも一の絶縁膜とによって積層膜が形成され、
前記積層膜は、前記受光部上に延長形成されていて、前記受光部上で反射防止膜となる
請求項1〜4の何れかに記載の固体撮像装置。 - 前記負の固定電荷を有する絶縁膜は、二酸化ハフニウム(HfO2)、三酸化二アルミニウム(Al2O3)、五酸化二タンタル(Ta2O5)、三酸化二ランタン(La2O3)、三酸化二イットリウム(Y2O3)、二酸化ジルコニウム(ZrO2)、三酸化二プラセオジム(Pr2O3)、三酸化二ネオジム(Nd2O3)、三酸化二プロメチウム(Pm2O3)、三酸化二サマリウム(Sm2O3)、三酸化二ユウロピウム(Eu2O3)、三酸化二ガドリニウム(Gd2O3)、三酸化二テルビウム(Tb2O3)、三酸化二ジスプロシウム(Dy2O3)、三酸化二ホルミウム(Ho2O3)、三酸化二エルビウム(Er2O3)、三酸化二ツリウム(Tm2O3)、三酸化二イッテルビウム(Yb2O3)、三酸化二ルテチウム(Lu2O3)もしくは二酸化チタン(TiO2)からなる
請求項1〜5の何れかに記載の固体撮像装置。 - 前記負の固定電荷を有する絶縁膜は窒素が含まれている
請求項1〜6の何れかに記載の固体撮像装置。 - 前記負の固定電荷を有する絶縁膜はシリコンが含まれている
請求項1〜7の何れかに記載の固体撮像装置。 - 入射光を光電変換する受光部と、前記受光部で光電変換された信号電荷を転送するnチャネル絶縁ゲート型の電荷転送部とを有する固体撮像装置の製造方法において、
半導体基板に前記電荷転送部を形成した後、前記電荷転送部の転送電極を直接覆って負の固定電荷を有する絶縁膜を形成する
固体撮像装置の製造方法。 - 入射光を集光する集光光学部と、
入射光を光電変換して電気信号を出力する複数のセンサ部のそれぞれに該入射光を集光する集光レンズを備えた固体撮像装置と、
前記固体撮像装置で光電変換された信号を処理する信号処理部とを備え、
前記固体撮像装置は、
入射光を光電変換する受光部と、前記受光部で光電変換された信号電荷を転送するnチャネル絶縁ゲート型の電荷転送部とを有する固体撮像装置であって、
前記電荷転送部の転送電極を直接覆って形成された負の固定電荷を有する絶縁膜を有する
撮像装置。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007141306A JP5217251B2 (ja) | 2007-05-29 | 2007-05-29 | 固体撮像装置、その製造方法および撮像装置 |
US12/128,102 US7863076B2 (en) | 2007-05-29 | 2008-05-28 | Solid-state image pickup device, method for making same, and image pickup apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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JP2007141306A JP5217251B2 (ja) | 2007-05-29 | 2007-05-29 | 固体撮像装置、その製造方法および撮像装置 |
Publications (2)
Publication Number | Publication Date |
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JP2008300377A JP2008300377A (ja) | 2008-12-11 |
JP5217251B2 true JP5217251B2 (ja) | 2013-06-19 |
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JP2007141306A Expired - Fee Related JP5217251B2 (ja) | 2007-05-29 | 2007-05-29 | 固体撮像装置、その製造方法および撮像装置 |
Country Status (2)
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US (1) | US7863076B2 (ja) |
JP (1) | JP5217251B2 (ja) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
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JP5151375B2 (ja) * | 2007-10-03 | 2013-02-27 | ソニー株式会社 | 固体撮像装置およびその製造方法および撮像装置 |
JP5374980B2 (ja) * | 2008-09-10 | 2013-12-25 | ソニー株式会社 | 固体撮像装置 |
JP5306141B2 (ja) * | 2009-10-19 | 2013-10-02 | 株式会社東芝 | 固体撮像装置 |
US8697474B2 (en) * | 2010-01-13 | 2014-04-15 | California Institute Of Technology | Methods to fabricate and improve stand-alone and integrated filters |
JP2012182377A (ja) * | 2011-03-02 | 2012-09-20 | Sony Corp | 固体撮像装置 |
US9379275B2 (en) | 2012-01-31 | 2016-06-28 | Taiwan Semiconductor Manufacturing Company, Ltd. | Apparatus and method for reducing dark current in image sensors |
JP2015012126A (ja) * | 2013-06-28 | 2015-01-19 | ソニー株式会社 | 固体撮像素子および駆動方法、並びに電子機器 |
JP6163511B2 (ja) * | 2015-04-16 | 2017-07-12 | ソニー株式会社 | 固体撮像装置、及び電子機器 |
WO2020047801A1 (zh) * | 2018-09-06 | 2020-03-12 | 深圳市汇顶科技股份有限公司 | 光学图像采集单元、光学图像采集系统和电子设备 |
Family Cites Families (8)
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JPH07107928B2 (ja) * | 1986-03-25 | 1995-11-15 | ソニー株式会社 | 固体撮像装置 |
JP3057801B2 (ja) * | 1991-05-08 | 2000-07-04 | 日本電気株式会社 | 固体撮像装置 |
JPH0697207A (ja) * | 1992-09-14 | 1994-04-08 | Mitsubishi Electric Corp | 半導体装置 |
JP3077608B2 (ja) | 1996-11-15 | 2000-08-14 | 日本電気株式会社 | 電荷転送装置およびその製造方法 |
JP3011137B2 (ja) * | 1997-06-27 | 2000-02-21 | 日本電気株式会社 | 電荷転送装置およびその製造方法 |
US7276760B2 (en) * | 2005-02-25 | 2007-10-02 | Micron Technology, Inc. | Low power memory subsystem with progressive non-volatility |
JP4940607B2 (ja) * | 2005-09-22 | 2012-05-30 | ソニー株式会社 | 固体撮像装置およびその製造方法、並びにカメラ |
JP4992446B2 (ja) * | 2006-02-24 | 2012-08-08 | ソニー株式会社 | 固体撮像装置及びその製造方法、並びにカメラ |
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2007
- 2007-05-29 JP JP2007141306A patent/JP5217251B2/ja not_active Expired - Fee Related
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2008
- 2008-05-28 US US12/128,102 patent/US7863076B2/en not_active Expired - Fee Related
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US7863076B2 (en) | 2011-01-04 |
US20080296640A1 (en) | 2008-12-04 |
JP2008300377A (ja) | 2008-12-11 |
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