JP5216669B2 - Lift pin mechanism, member processing device - Google Patents

Description

  The present invention relates to a lift pin mechanism that supports a plate-like processing target member at a plurality of locations by a plurality of groups of movable pins that reciprocate in the vertical direction at different timings, and a member processing apparatus that uses the lift pin mechanism.

  Conventionally, when a glass substrate or the like as a processing target member is heat-treated by a heat treatment apparatus or the like as a member processing apparatus, the glass substrate is supported by a stationary pin and a movable pin of a lift pin mechanism. In some lift pin mechanisms, the movable pin moves not only in the vertical direction but also in the horizontal direction.

  Therefore, the processing target member is supported by the raised movable pin and moved in the horizontal direction, and the movable pin is lowered and supported by the stationary pin. By repeating this operation, the position where the movable pin and the non-moving pin come into contact with the processing target member is constantly changed, so that temperature unevenness of the processing target member due to the pin contact can be suppressed (for example, Patent Documents 1 to 3). 3).

JP-A-10-76211 JP 2006-61755 A WO2008 / 029943

  However, in the above-described lift pin mechanism, the processing target member is alternately supported by the movable pin and the non-moving pin. Therefore, it is necessary to always move the processing substrate in the horizontal direction. However, the movement range of the processing substrate is limited. Moreover, in the conventional lift pin mechanism, the movable pin is linearly moved in the horizontal direction by a solenoid or the like.

  For this reason, it is difficult to move the processing substrate many times so that the movable pin and the non-moving pin do not contact the same portion. Therefore, when the processing substrate is moved several times, there is a high possibility that the movable pin or the non-moving pin will come into contact with the same portion, resulting in pin marks.

  Further, the lift pin mechanism as described above requires a dedicated mechanism such as a solenoid for moving the movable pin in the vertical direction and the horizontal direction. For this reason, the structure is complicated.

  Further, in the lift pin mechanism as described above, the processing target member is generally supported by the comb-shaped target support member and moved to the external standby position and the internal processing position. However, when a complicated mechanism is used to move the movable pin that supports the processing target member at the internal processing position, the mechanism may interfere with the target supporting member, and smooth removal may be difficult.

  The present invention has been made in view of the above-described problems, and has a structure in which a processing target member is supported by movable pins at both ends of a plurality of rotatable rotating rods, and is processed by a comb-like target supporting member. The present invention provides a lift pin mechanism that can smoothly move a target member between an external standby position and an internal processing position without hindrance, and a member processing apparatus that uses this lift pin mechanism.

  The lift pin mechanism of the present invention is a lift pin mechanism that supports a plate-like processing target member at a plurality of locations by a plurality of groups of movable pins that reciprocate up and down at different timings. The movable pins are individually formed and are divided into a plurality of rotating rods arranged in the front, rear, left and right, and the plurality of rotating rods arranged in the front, rear, left, and right, and moved up and down in the vertical direction. A vertical reciprocating mechanism for supporting the processing target member with a movable pin, a horizontal displacement mechanism for horizontally rotating the position of the movable pin spaced from the processing target member by rotating a plurality of lowered rotating rods in the horizontal direction, The object support arm that is elongated in the direction is formed in a comb-like shape arranged in the left-right direction, and the processing target member is not supported at least by the movable pin A target support member supported at the machine position, a member moving mechanism for moving the target support member supporting the processing target member back and forth between the external standby position and the internal processing position supported by the movable pin, and the member moving mechanism as the target supporting member A rotation control mechanism for holding a plurality of rotating rods whose rotation centers are located below the gaps of the plurality of target support arms at a rotation angle whose longitudinal direction is the front-rear direction.

  Therefore, in the lift pin mechanism of the present invention, a plurality of rotating rods that are elongated in the horizontal direction and in which movable pins are individually formed at least in the vicinity of both ends are arranged in the front-rear and left-right directions. A plurality of rotating rods arranged in the front, rear, left, and right directions are divided into a plurality of groups by a vertical reciprocating mechanism and reciprocated in the vertical direction to support the processing target member with a movable pin that is lifted. At this time, the horizontal displacement mechanism rotates the plurality of lowered rotating rods in the horizontal direction to displace the position of the movable pin separated from the processing target member in the horizontal direction. A target support member formed in a comb-like shape in which target support arms elongated in the front-rear direction are arranged in the left-right direction supports the processing target member at least at an external standby position that is not supported by the movable pin. The member moving mechanism moves the target support member supporting the processing target member back and forth between the external standby position and the internal processing position supported by the movable pin. Thus, when the member moving mechanism moves the target support member back and forth, at least a plurality of rotating rods whose rotation centers are positioned below the gaps of the plurality of target support arms are rotated at a rotation angle whose longitudinal direction is the front-rear direction. Hold. For this reason, since the position of the movable pin that supports the processing target member is appropriately displaced, processing defects such as heating of the processing target member due to the support of the movable pin can be satisfactorily prevented. The displacement of the movable pin is performed by the rotation of the elongated rotary rod. When the member moving mechanism moves the processing target member back and forth between the external standby position and the internal processing position, the movable pin is moved between the plurality of target support arms. The rotation control mechanism positions the plurality of rotating rods positioned in the front-rear direction. Therefore, when the processing target member supported by the target support member is moved from the external standby position to the internal processing position and supported by the movable pin, or the processing target member supported by the movable pin becomes the target support member. When supported and moved from the internal processing position to the external standby position, a plurality of target support arms do not collide with a plurality of rotating rods or a plurality of movable pins.

  Further, in the lift pin mechanism as described above, at least a pair of movable pins may be arranged at positions where the distance from the rotation center is different in the vicinity of both ends of the rotating rod.

  In the lift pin mechanism as described above, the horizontal displacement mechanism may have a magnetic force rotating mechanism that rotates the drive shaft that supports the rotating rod in a non-contact manner by magnetic force.

  The member processing apparatus of the present invention is a member processing apparatus that performs a predetermined process on a flat processing target member, the lift pin mechanism of the present invention that supports the processing target member, and the processing target member supported by the lift pin mechanism. And a member processing unit for executing a predetermined process.

  In the member processing apparatus as described above, the member processing section includes a main body housing that seals the processing target member implemented by the lift pin mechanism in a sealed chamber, and a chamber decompression mechanism that decompresses at least the sealed chamber. Also good.

  The various components of the present invention do not necessarily have to be independent of each other. A plurality of components are formed as a single member, and a single component is formed of a plurality of members. It may be that a certain component is a part of another component, a part of a certain component overlaps with a part of another component, or the like.

  Furthermore, in the present invention, the front / rear, left / right, and upper / lower directions are defined, but this is defined for convenience in order to briefly explain the relative relationship of the components of the present invention. The direction at the time of manufacture and use is not limited.

  In the lift pin mechanism of the present invention, since the position of the movable pin that supports the processing target member is appropriately displaced, it is possible to satisfactorily prevent processing defects such as heating of the processing target member due to the support of the movable pin. The displacement of the movable pin is performed by the rotation of the elongated rotary rod. When the member moving mechanism moves the processing target member back and forth between the external standby position and the internal processing position, the gap between the target support arms is not limited. The rotation control mechanism positions the plurality of rotating rods positioned in the front-rear direction. Therefore, when the processing target member supported by the target support member is moved from the external standby position to the internal processing position and supported by the movable pin, or the processing target member supported by the movable pin becomes the target support member. When supported and moved from the internal processing position to the external standby position, it is possible to satisfactorily prevent a plurality of target support arms from colliding with a plurality of rotating rods and a plurality of movable pins. Accordingly, the processing target member can be smoothly moved to the external standby position and the internal processing position by the comb-shaped target support member while the structure is such that the processing target member is supported by the movable pins of the plurality of rotating rods.

It is a typical top view which shows operation | movement of the object support member of the lift pin mechanism of embodiment of this invention. It is a top view which shows the principal part of a lift pin mechanism. It is a schematic diagram which shows the group structure of a movable pin. It is a vertical side view which shows CC cross section of FIG. 2 and FIG. It is a typical side view which shows operation | movement of the object support member of a lift pin mechanism. It is process drawing which shows operation | movement of the rotating rod of a lift pin mechanism. It is a schematic diagram which shows the support position of the movable pin corresponding to FIG. It is a top view which shows the principal part of the lift pin mechanism of one modification. It is a side view which shows the principal part of a lift pin mechanism. It is a side view which shows the principal part of the lift pin mechanism of another modification. It is a cross-sectional top view which shows DD cross section of FIG. It is a top view which shows the principal part of the lift pin mechanism of another modification.

  An embodiment of the present invention will be described below with reference to FIGS. In the present embodiment, description will be made by defining the front-rear, left-right, up-down directions as shown. However, this is provided for the sake of convenience in order to briefly explain the relative relationship between the components. Therefore, the direction at the time of manufacture and use of the product which implements the present invention is not limited.

  As will be described in detail later, the lift pin mechanism 100 of the present embodiment, as shown in FIGS. 6 and 7, has a plate-like process by a plurality of groups of movable pins 110 and 120 that reciprocate in the vertical direction at different timings. The glass substrate GB that is the target member is supported at a plurality of locations.

  Therefore, as shown in FIGS. 1 to 5, the lift pin mechanism 100 according to the present embodiment has an elongated shape in the horizontal direction, and movable pins 110 and 120 are individually formed at least near both ends, and are arranged in the front, rear, left and right directions. A plurality of rotating rods 111, 121 and a plurality of rotating rods 111, 121 arranged in front, rear, left, and right are divided into a plurality of groups and reciprocated up and down to raise and lower the movable pins 110, 120 to raise the glass substrate GB. A vertical reciprocating mechanism 130 for supporting the horizontal axis, a horizontal displacement mechanism 131 for horizontally rotating the positions of the movable pins 110 and 120 separated from the glass substrate GB by rotating the plurality of lowered rotating rods 111 and 121 in the horizontal direction, and The object supporting arm 141 elongated in the front-rear direction is formed in a comb-like shape arranged in the left-right direction, and at least the glass substrate GB is acceptable. The target support member 140 supported at the external standby position not supported by the pins 110 and 120, and the target support member 140 supporting the glass substrate GB are moved back and forth between the external standby position and the internal processing position supported by the movable pins 110 and 120. A member moving mechanism 142 to be moved, and a plurality of rotating rods 111 and 121 whose rotation centers are positioned at least below the gaps of the plurality of target supporting arms 141 when the member moving mechanism 142 moves the target supporting member 140 back and forth. A rotation control mechanism (not shown) that holds the rotation angle in the front-rear direction.

  More specifically, the lift pin mechanism 100 of the present embodiment is formed as a part of a heat treatment apparatus (not shown), for example. This heat treatment apparatus includes a lift pin mechanism 100 that supports the glass substrate GB described above, and a heater board 101 that is a target heating unit that heat-treats the glass substrate GB supported by the lift pin mechanism 100.

  As shown in FIGS. 1 to 3, the lift pin mechanism 100 according to the present embodiment has a plurality of fixing pins 150 arranged in a rectangular shape at a position where the glass substrate GB is supported near the outer periphery. The movable pins 110 and 120 supported by the rotating rods 111 and 121 are reciprocated to a position above and below the fixed pin 150 by the vertical reciprocating mechanism 130.

  As shown in FIGS. 1 and 2, the rotating rods 111 and 121 in which the movable pins 110 and 120 are erected in the vicinity of both ends are arranged in a matrix form in the front-rear and left-right directions. The movable pins 110 and 120 and the rotating rods 111 and 121 arranged in this way are divided into A group and B group in a staggered arrangement as shown in FIG.

  Therefore, the vertical reciprocating mechanism 130 includes a first vertical mechanism 160 that moves the rotary rod 111 of the A group up and down, and a second vertical mechanism 170 that moves the rotary rod 121 of the B group up and down.

  In the lift pin mechanism 100 of the present embodiment, the vertical reciprocating mechanism 130 also includes a third vertical mechanism 180 that moves the fixed pin 150 up and down to bring the glass substrate GB close to the heater board 101.

  As shown in FIG. 4, the third vertical mechanism 180 includes four servo motors 181 that are individually installed near the four corners of the main body base 102, and four that are individually rotated by the four servo motors 181. Screw shafts 182, four ball nuts 183 into which the four screw shafts 182 are individually screwed, and a third base 184 in which the four ball nuts 183 are fixed in the vicinity of the four corners. Fixed pins 150 are fixed in the vicinity of the outer periphery of the third base 184, and these fixed pins 150 penetrate the heater board 101 so as to be slidable in the vertical direction.

  The second up-and-down mechanism 170 includes four servo motors 171 individually installed near the four corners of the third base 184, four screw shafts 172 that are individually driven to rotate by the four servo motors 171, and these There are four ball nuts 173 into which four screw shafts 172 are individually screwed, and a second base 174 to which these four ball nuts 173 are fixed in the vicinity of the four corners.

  Servo motors 175 serving as a horizontal displacement mechanism 131 are fixed in a staggered arrangement on the upper surface of the second base 174, and each group of drive shafts 176 of the servo motors 175 allows the rotation rods 121 of the group B to rotate individually. It is pivotally supported.

  The first up-and-down mechanism 160 includes four servo motors 161 individually installed near the four corners of the third base 184, four screw shafts 162 that are individually driven to rotate by the four servo motors 161, and these There are four ball nuts 163 into which four screw shafts 162 are individually screwed, and a first base 164 to which these four ball nuts 163 are fixed in the vicinity of the four corners.

  Servo motors 165 serving as horizontal displacement mechanisms 131 are fixed on the upper surface of the first base 164 in a staggered arrangement, and each group of drive shafts 166 of the servo motors 165 allows the A group rotary rods 121 to rotate individually. It is pivotally supported.

  In the configuration as described above, when the glass substrate GB is heat-treated with the heat treatment apparatus of the present embodiment, first, as shown in FIG. 5, the fixing pin 150 is moved to the uppermost position by the third vertical mechanism 180. In addition, all the movable pins 110 and 120 are arranged at the same position as the fixed pin 150 by the first vertical mechanism 160 and the second vertical mechanism 170.

  In this state, the target support member 140 that supports the glass substrate GB at the external standby position outside the upper side of the heater board 101 is disposed above the fixed pin 150 and the movable pins 110 and 120 by the member moving mechanism 142. .

  At this time, the servo motors 165 and 175 of the horizontal displacement mechanism 131 are controlled so that all the rotating rods 111 and 121 are arranged in parallel with the front-rear direction as shown in FIG.

  In this state, as shown in FIG. 5, the target support member 140 that supports the glass substrate GB is advanced from the external standby position to the internal processing position above the heater board 101 by the member moving mechanism 142.

  Then, when the member moving mechanism 142 lowers the target support member 140, the glass substrate GB is supported by the fixed pin 150 and the movable pins 110 and 120. At this time, as shown in FIG. 1, all the rotating rods 111 and 121 parallel to the front-rear direction are located in the gap between the target support arms 141 of the target support member 140.

  In this state, the member moving mechanism 142 moves the target support member 140 backward so that the glass substrate GB is supported by the fixed pin 150 and the movable pins 110 and 120 and faces the heater board 101.

  In the heat treatment apparatus of the present embodiment, the internal treatment position is sealed as a heat chamber in the state as described above (not shown). Then, the fixed pin 150 and the movable pins 110 and 120 supporting the glass substrate GB are lowered by the third vertical mechanism 180 and are brought close to the heater board 101.

  In such a state, the heater board 101 generates heat and heats the glass substrate GB. At this time, as shown in FIGS. 6 and 7, the first vertical mechanism 160 raises the rotary rod 111 of the A group and the movable pin 110 supports the glass substrate GB, and the second vertical mechanism 170 sets the B The state in which the rotating rod 121 of the group is raised and the glass substrate GB is supported by the movable pin 120 is executed alternately.

  Then, when the above support state is executed alternately, the rotating rods 111 and 121 of the movable pins 110 and 120 that are lowered and separated from the glass substrate GB are, for example, 15 ° each as shown in FIG. It is rotated by servo motors 165 and 175 of the horizontal displacement mechanism 131.

  For this reason, as shown in FIG. 7, the positions of the movable pins 110 and 120 that support the glass substrate GB are slightly displaced. 6 and 7 exemplify a method of supporting the glass substrate GB together with the fixed pin 150 by the movable pins 110 and 120, but the glass substrate is formed only by the movable pins 110 and 120 without using the fixed pin 150. GB can also be supported.

  When the glass substrate GB is heated while being supported by the movable pins 110 and 120 whose positions are slightly displaced as described above, the temperature deviation due to the support positions of the movable pins 110 and 120 is minimized, and the glass substrate GB is entirely removed. Heat treatment can be performed homogeneously.

  Therefore, when this heat treatment is completed, the glass substrate GB is unloaded from the internal processing position to the external standby position by the target support member 140 driven by the member moving mechanism 142 by the procedure opposite to that described above.

  In the lift pin mechanism 100 of the present embodiment, since the positions of the movable pins 110 and 120 that support the glass substrate GB are appropriately displaced as described above, such as heating of the glass substrate GB due to the support of the movable pins 110 and 120. Processing failure can be prevented satisfactorily.

  The displacement of the movable pins 110 and 120 is executed by the rotation of the elongated rotary rods 111 and 121. When the member moving mechanism 142 moves the glass substrate GB back and forth between the external standby position and the internal processing position, The rotation control mechanism positions the plurality of rotating rods 111 and 121 positioned in the gaps between the plurality of target support arms 141 in the front-rear direction.

  Therefore, when the glass substrate GB supported by the target support member 140 is moved from the external standby position to the internal processing position and supported by the movable pins 110 and 120, or the glass supported by the movable pins 110 and 120. When the substrate GB is supported by the target support member 140 and moves from the internal processing position to the external standby position, the multiple target support arms 141 collide with the multiple rotary rods 111 and 121 and the multiple movable pins 110 and 120. Can be prevented satisfactorily.

  Accordingly, while the glass substrate GB is supported by the movable pins 110 and 120 of the plurality of rotating rods 111 and 121, the glass substrate GB is smoothly held by the comb-like target support member 140 between the external standby position and the internal processing position. Can be moved to.

  The present invention is not limited to the present embodiment, and various modifications are allowed without departing from the scope of the present invention. For example, in the said form, it illustrated that the process target member consists of glass substrate GB. However, the processing target member may be a semiconductor substrate or a ceramic substrate (not shown).

  Furthermore, in the said form, utilizing the lift pin mechanism 100 for the heat processing apparatus was illustrated. However, such a lift pin mechanism 100 may be used in a vacuum drying apparatus (not shown).

  Such a vacuum drying apparatus includes a main body housing that seals the glass substrate GB in a sealed chamber, a lift pin mechanism 100 that supports the glass substrate GB sealed in the sealed chamber, and a chamber pressure reducing mechanism that decompresses the sealed chamber. (Not shown).

  Moreover, in the said form, it has fixed pin 150 with movable pin 110,120, and illustrated using this fixed pin 150 also for supporting glass substrate GB. However, a lift pin mechanism (not shown) that supports the glass substrate GB with only the movable pins 110 and 120 without using the fixed pin 150 is also possible.

  Furthermore, in the said form, it assumed that the movable pins 110 and 120 were located in the vicinity of the both ends of the rotating rods 111 and 121 at the same distance from the rotation center. However, in this case, the movable pins 110 and 120 at both ends support the glass substrate GB at the same position.

  Therefore, like the lift pin mechanism 200 illustrated in FIGS. 8 and 9, at least a pair of movable pins 110 and 120 may be arranged at positions where the distance from the rotation center is different in the vicinity of both ends of the rotating rods 111 and 121. .

  In this case, even if the rotating rods 111 and 121 rotate, the pair of movable pins 110 and 120 positioned near both ends do not support the same position of the glass substrate GB. For this reason, since the number of supporting positions of the glass substrate GB increases, the glass substrate GB can be processed more uniformly.

  Further, in the above embodiment, in order to individually rotate the plurality of rotating rods 111 and 121, it is exemplified that each of them is supported by the drive shafts 166 and 176 of the servo motors 165 and 175.

  However, this requires a large number of servo motors 165 and 175, which lowers the productivity of the lift pin mechanism 100. Therefore, like the lift pin mechanism 210 illustrated in FIGS. 10 and 11, the horizontal displacement mechanism 131 rotates the drive shafts 166 and 176 supporting the rotating rods 111 and 121 in a non-contact manner by a magnetic force. 211 may be included.

  Such a magnetic rotating mechanism 211 includes, for example, a pair of cylindrical bodies magnetized in multiple poles, and is sold as a product called Magtran (registered trademark). Such a magnetic force rotating mechanism 211 transmits the rotation in a non-contact manner, so that there is no problem that particles are generated.

  In addition, even if the hole position of the rotating rod 111 is displaced due to expansion or contraction of the heater board 101 or the cooling board (not shown), the rotation can be transmitted smoothly without any trouble.

  Moreover, in the said form, it illustrated that the some movable pin 110,120 was divided into two of A group and B group. However, such a plurality of movable pins are divided into three or more groups. For example, the movable pins of the group that descends one by one may be displaced.

  For example, like the lift pin mechanism 220 illustrated in FIG. 12, three groups of rotating rods 221 to 223 of the A group, the B group, and the C group may be arranged in a triangular dense arrangement on the heater board 201. . Even in this case, as shown in the figure, the target support arm 141 of the target support member 140 can move without any problem.

  Needless to say, the above-described embodiment and a plurality of modifications can be combined within a range in which the contents do not conflict with each other. Further, in the above-described embodiments and modifications, the structure of each part has been specifically described, but the structure and the like can be changed in various ways within a range that satisfies the present invention.

DESCRIPTION OF SYMBOLS 100 Lift pin mechanism 101 Heater board 102 Main body base 110 Movable pin 111 Rotating rod 120 Movable pin 121 Rotating rod 130 Vertical reciprocating mechanism 131 Horizontal displacement mechanism 140 Target support member 141 Target support arm 142 Member moving mechanism 150 Fixed pin 160 First vertical mechanism 161 Servo motor 162 Screw shaft 163 Ball nut 164 First base 165 Servo motor 166 Drive shaft 170 Second vertical mechanism 171 Servo motor 172 Screw shaft 173 Ball nut 174 Second base 175 Servo motor 176 Drive shaft 180 Third vertical mechanism 181 Servo motor 182 Screw shaft 183 Ball nut 184 Third base 200 Lift pin mechanism 201 Heater board 210 Lift pin mechanism 211 Magnetic rotation mechanism 22 Lift pin mechanism 221 rotates the rod 222 rotates the rod 223 rotating rod GB glass substrate

Claims (5)

A lift pin mechanism that supports a plate-like processing target member at a plurality of locations by a plurality of groups of movable pins that reciprocate in the vertical direction at different timings,
A plurality of rotating rods that are elongated in the horizontal direction and are individually formed at least in the vicinity of both ends and arranged in the front-rear and left-right directions;
A vertical reciprocating mechanism for supporting the processing target member with the movable pin that is raised by reciprocating vertically by dividing the plurality of rotating rods arranged in front, rear, left, and right into a plurality of groups;
A horizontal displacement mechanism that horizontally rotates the plurality of lowered rotating rods to displace the position of the movable pin separated from the processing target member in a horizontal direction;
A target support member that is formed in a comb-teeth shape in which front and rear elongated target support arms are arranged in the left-right direction and supports the processing target member at least at an external standby position that is not supported by the movable pin;
A member moving mechanism for moving the target support member supporting the processing target member back and forth between the external standby position and an internal processing position supported by the movable pin;
When the member moving mechanism moves the target support member back and forth, at least the plurality of rotating rods whose rotation centers are located below the gaps of the target support arms are held at a rotation angle whose longitudinal direction is the front-rear direction. A rotation control mechanism;
Lift pin mechanism having   2. The lift pin mechanism according to claim 1, wherein at least a pair of the movable pins are arranged at positions at different distances from the rotation center in the vicinity of both ends of the rotating rod.   3. The lift pin mechanism according to claim 1, wherein the horizontal displacement mechanism has a magnetic force rotating mechanism that rotates a drive shaft supporting the rotating rod in a non-contact manner by a magnetic force. A member processing apparatus that performs a predetermined process on a plate-shaped processing target member,
The lift pin mechanism according to any one of claims 1 to 3, which supports the processing target member;
A member processing unit that performs a predetermined process on the processing target member supported by the lift pin mechanism;
A member processing apparatus. The member processing unit
A main body housing for sealing the processing object member implemented by the lift pin mechanism in a sealed chamber;
A chamber decompression mechanism for decompressing at least the sealed chamber;
The member processing apparatus of Claim 4 which has these.

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