JP5210093B2 - Piezoelectric oscillator - Google Patents

Piezoelectric oscillator Download PDF

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JP5210093B2
JP5210093B2 JP2008222958A JP2008222958A JP5210093B2 JP 5210093 B2 JP5210093 B2 JP 5210093B2 JP 2008222958 A JP2008222958 A JP 2008222958A JP 2008222958 A JP2008222958 A JP 2008222958A JP 5210093 B2 JP5210093 B2 JP 5210093B2
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integrated circuit
circuit element
piezoelectric
substrate
monitor terminal
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JP2010057147A (en
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彰 日迫
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Kyocera Crystal Device Corp
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Kyocera Crystal Device Corp
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本発明は、電子機器に用いられる圧電発振器に関するものである。   The present invention relates to a piezoelectric oscillator used in an electronic device.

従来、携帯用通信機器等の電子機器には、電子部品の一つである圧電発振器が搭載される。この圧電発振器の一例として水晶発振器が使われている。例えば基準信号発生源又はクロック信号発生源などとして用いられている。   2. Description of the Related Art Conventionally, a piezoelectric oscillator that is one of electronic components is mounted on an electronic device such as a portable communication device. A crystal oscillator is used as an example of this piezoelectric oscillator. For example, it is used as a reference signal generation source or a clock signal generation source.

従来の圧電発振器500は、図5に示すように、圧電振動素子520と、発振回路および温度補償回路を構成する集積回路素子530と、複数の絶縁層からなる積層体であって一方の主面に前記圧電振動素子520を収容するための第1のキャビティー部511を備えると共に他方の主面に前記集積回路素子530を収容するための第2のキャビティー部512(図6参照)を備える略矩形状の基板部510と、前記第1のキャビティー部511を気密封止するための蓋体540と、を備えている。
前記第1のキャビティー部511の内底面に形成した圧電振動素子接続用電極パッド513に導電性接着剤(図示せず)を介して前記圧電振動素子520の一方端部で片持ち支持すると共に電気的な接続をした上で前記蓋体540により第1のキャビティー部511を気密封止し、前記第2のキャビティー部512(図6参照)の内底面(天井面)にバンプ(図示せず)を介して前記集積回路素子530をフリップチップ実装した構造を有する。
As shown in FIG. 5, a conventional piezoelectric oscillator 500 is a laminate composed of a piezoelectric vibration element 520, an integrated circuit element 530 constituting an oscillation circuit and a temperature compensation circuit, and a plurality of insulating layers. And a second cavity portion 512 (see FIG. 6) for housing the integrated circuit element 530 on the other main surface. A substantially rectangular substrate part 510 and a lid 540 for hermetically sealing the first cavity part 511 are provided.
The piezoelectric vibration element connecting electrode pad 513 formed on the inner bottom surface of the first cavity portion 511 is cantilevered at one end of the piezoelectric vibration element 520 via a conductive adhesive (not shown). After the electrical connection, the first cavity portion 511 is hermetically sealed by the lid 540, and bumps (see FIG. 6) are formed on the inner bottom surface (ceiling surface) of the second cavity portion 512 (see FIG. 6). The integrated circuit element 530 is flip-chip mounted via a not-shown).

前記第2のキャビティー部512には、図6に示すように、前記基板部510の辺部夫々の隅側に配設する外部接続用電極端子515と、前記圧電振動素子520と電気的に接続するモニター端子518a及び518bが配置されている。また、モニター端子518a、bの周囲には前記集積回路素子530を搭載するための集積回路素子搭載パッド514が配置されている。また、前記集積回路素子搭載パッド514のうちの2つは前記圧電振動素子520に電気的に接続されており水晶端子と呼んでいる。また、前記水晶端子と前記モニター端子518は通常前記基板部510の内部配線で電気的に接続されている。
特開2003−163540号公報
As shown in FIG. 6, the second cavity portion 512 is electrically connected to the external connection electrode terminals 515 disposed on the corners of the side portions of the substrate portion 510 and the piezoelectric vibration element 520. Monitor terminals 518a and 518b to be connected are arranged. Further, an integrated circuit element mounting pad 514 for mounting the integrated circuit element 530 is disposed around the monitor terminals 518a and 518b. Two of the integrated circuit element mounting pads 514 are electrically connected to the piezoelectric vibration element 520 and are called crystal terminals. Further, the crystal terminal and the monitor terminal 518 are usually electrically connected by internal wiring of the substrate portion 510.
JP 2003-163540 A

しかしながら、従来の圧電発振器500では、集積回路素子530搭載後の圧電発振器の電気特性検査で不良となった際に、不良原因特定のために圧電振動素子520の電気特性を測定する必要がある。その測定では圧電振動素子520と電気的に接続された第二のキャビティー部512に配置されたモニター端子518が用いられる。しかしながら、図5に示すように第二のキャビティー部512に集積回路素子530が搭載されると、集積回路素子530にモニター端子518の一部が隠れてしまう。このような場合、圧電振動素子520の電気特性を測定するのに集積回路素子530を搭載した状態では測定用プローブ等をモニター端子518に接触させる必要がある。そのためモニター端子518が集積回路素子530から外部に露出した面積が小さく、さらに基板部510の壁部と集積回路素子530側面の隙間が狭くなっているため、測定用プローブをモニター端子に接触させるのが困難となる。この測定を簡単にするために集積回路素子530を剥がして測定しなければならなかった。さらに、圧電発振器500が小型化されると、集積回路素子530を搭載する第2のキャビティー部512も同様に小さくなる。これにより、第二のキャビティー部512に集積回路素子530を搭載後には圧電振動素子520の電気特性の測定が不可能となる。つまり圧電発振器が小型化されると集積回路素子530を剥がさないと圧電振動素子520の電気特性を測定できないという問題があった。   However, in the case of the conventional piezoelectric oscillator 500, when the electrical characteristics of the piezoelectric oscillator after mounting the integrated circuit element 530 becomes defective, it is necessary to measure the electrical characteristics of the piezoelectric vibration element 520 in order to identify the cause of the failure. In the measurement, a monitor terminal 518 disposed in the second cavity portion 512 electrically connected to the piezoelectric vibration element 520 is used. However, when the integrated circuit element 530 is mounted in the second cavity portion 512 as shown in FIG. 5, a part of the monitor terminal 518 is hidden in the integrated circuit element 530. In such a case, in order to measure the electrical characteristics of the piezoelectric vibration element 520, it is necessary to bring a measurement probe or the like into contact with the monitor terminal 518 in a state where the integrated circuit element 530 is mounted. Therefore, the area where the monitor terminal 518 is exposed to the outside from the integrated circuit element 530 is small, and further, the gap between the wall portion of the substrate portion 510 and the side surface of the integrated circuit element 530 is narrow, so that the measurement probe is brought into contact with the monitor terminal. It becomes difficult. In order to simplify this measurement, the integrated circuit element 530 had to be peeled off and measured. Further, when the piezoelectric oscillator 500 is downsized, the second cavity portion 512 on which the integrated circuit element 530 is mounted is similarly reduced. As a result, the electrical characteristics of the piezoelectric vibration element 520 cannot be measured after the integrated circuit element 530 is mounted in the second cavity portion 512. That is, when the piezoelectric oscillator is downsized, there is a problem that the electrical characteristics of the piezoelectric vibration element 520 cannot be measured unless the integrated circuit element 530 is peeled off.

そこで本発明では、前記した問題を解決し、集積回路素子が搭載された後でも圧電振動素子の電気特性を測定可能なモニター端子配置構造を有し外部ノイズの影響を受けない圧電発振器を提供することを目的とする。   Accordingly, the present invention provides a piezoelectric oscillator that solves the above-described problems and has a monitor terminal arrangement structure that can measure the electrical characteristics of the piezoelectric vibration element even after the integrated circuit element is mounted, and is not affected by external noise. For the purpose.

本発明に係る圧電発振器は、圧電振動素子と、前記圧電振動素子を収容する一方の主面
にキャビティー部を有する基板部と、前記キャビティー部を封止する蓋体と、前記基板部
の他方の主面の辺縁部全周に形成された壁部と、前記基板部の他方の主面に形成された集
積回路素子搭載パッドと前記集積回路素子搭載パッドに搭載される集積回路素子と、前記
集積回路素子搭載パッドと前記基板部の他方の主面に内部配線により前記圧電振動素子と
電気的に接続された水晶端子と、前記水晶端子と内部配線で接続される第一のモニター端
子と、前記第一のモニター端子より接続配線を経由して前記基板部のそれぞれの側面まで
延びる第二のモニター端子と、を備えており、前記接続配線は、外部実装基板への実装状態で切断されていることを特徴とする。
A piezoelectric oscillator according to the present invention includes a piezoelectric resonator element, a substrate portion having a cavity portion on one main surface that accommodates the piezoelectric resonator element, a lid that seals the cavity portion, and the substrate portion. A wall portion formed on the entire periphery of the edge portion of the other main surface, an integrated circuit element mounting pad formed on the other main surface of the substrate portion, and an integrated circuit element mounted on the integrated circuit element mounting pad; A crystal terminal electrically connected to the piezoelectric vibration element by internal wiring on the other main surface of the integrated circuit element mounting pad and the substrate portion; and a first monitor terminal connected to the crystal terminal by internal wiring And a second monitor terminal extending from the first monitor terminal to each side surface of the board portion via a connection wiring, and the connection wiring is cut in a mounted state on an external mounting board. characterized in that it is To.

このように本発明に係る圧電発振器では、圧電発振器を外部実装基板へ実装する前の状態において2つの第一のモニター端子から前記基板部のそれぞれの側面まで延びる第二のモニター端子と、を備えたことから、圧電発振器が小型化され、集積回路素子搭載後に基板部の他方の主面に形成された第一のモニター端子で圧電振動素子の電気特性の測定が困難となった場合でも、基板部の側面に形成された第二のモニター端子で測定することが可能となる。   As described above, the piezoelectric oscillator according to the present invention includes the second monitor terminals extending from the two first monitor terminals to the respective side surfaces of the substrate portion in a state before the piezoelectric oscillator is mounted on the external mounting substrate. Therefore, even when the piezoelectric oscillator is downsized and it becomes difficult to measure the electrical characteristics of the piezoelectric vibration element with the first monitor terminal formed on the other main surface of the substrate portion after the integrated circuit element is mounted, It becomes possible to measure with the second monitor terminal formed on the side surface of the part.

さらに、本発明に係る圧電発振器では、外部実装基板に実装した状態において前記第一のモニター端子と第二のモニター端子を結ぶ接続配線が、外部実装基板への実装状態で切断されていることから、第二のモニター端子から入って圧電発振器の内部に搭載された集積回路素子や圧電振動素子に影響を与える外部ノイズを遮断し、外部ノイズの影響を受けない安定した圧電発振器を得ることが可能となる。   Furthermore, in the piezoelectric oscillator according to the present invention, the connection wiring connecting the first monitor terminal and the second monitor terminal in a state of being mounted on the external mounting board is cut in a state of being mounted on the external mounting board. It is possible to obtain a stable piezoelectric oscillator that is not affected by external noise by blocking external noise that affects integrated circuit elements and piezoelectric vibration elements that are installed inside the piezoelectric oscillator through the second monitor terminal. It becomes.

以下、本発明を添付図面に基づいて詳細に説明する。
図1は、本発明の圧電発振器の一形態を示した概略断面図である。また、図2(a)は圧電発振器を実装側から示した平面図であり、図2(b)はその短辺側からの側面図である。図3は図2の圧電発振器の集積回路素子搭載前の平面図である。図4は圧電発振器の外部実装基板(図示せず)への実装状態を示した概念図である。尚、各図では、説明を明りょうにするため構成要素の一部を図示せず、また図示した構成要素の寸法も一部誇張して示している。
Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.
FIG. 1 is a schematic sectional view showing an embodiment of the piezoelectric oscillator of the present invention. FIG. 2A is a plan view showing the piezoelectric oscillator from the mounting side, and FIG. 2B is a side view from the short side thereof. 3 is a plan view of the piezoelectric oscillator of FIG. 2 before the integrated circuit element is mounted. FIG. 4 is a conceptual diagram showing a state where the piezoelectric oscillator is mounted on an external mounting board (not shown). In each drawing, for clarity of explanation, some of the components are not shown, and the dimensions of the components shown are also exaggerated.

図1、図2に示すように本発明の圧電発振器100は、圧電振動素子120を収容した基板部110と、集積回路素子130、蓋体140、壁部150により主に構成されている。基板部110は、平面視矩形状の基板110aの一方の主面上に枠体110bが設けられることにより構成される。これにより、基板110a一方の主面上にはキャビティー部111が形成される。また、基板110aの他方の主面上には、この主面の辺縁部全周に壁部150が形成されている。尚、この基板110a、枠体110b及び壁部150は、例えば、ガラス−セラミック、アルミナセラミックス等のセラミック材料から成る。   As shown in FIGS. 1 and 2, the piezoelectric oscillator 100 of the present invention is mainly configured by a substrate part 110 containing a piezoelectric vibration element 120, an integrated circuit element 130, a lid body 140, and a wall part 150. The substrate unit 110 is configured by providing a frame 110b on one main surface of a substrate 110a having a rectangular shape in plan view. Thereby, the cavity part 111 is formed on one main surface of the board | substrate 110a. Further, on the other main surface of the substrate 110a, a wall portion 150 is formed around the entire edge of the main surface. The substrate 110a, the frame 110b, and the wall 150 are made of a ceramic material such as glass-ceramic or alumina ceramic.

また、図3に示すように、キャビティー部111内に露出した基板110aの圧電振動素子接続面側主面上には、2個一対の圧電振動素子接続用電極パッド113が設けられており、基板110aの集積回路素子搭載面側主面上には、複数個の集積回路素子搭載パッド114が設けられている。   Further, as shown in FIG. 3, two pairs of piezoelectric vibration element connection electrode pads 113 are provided on the main surface of the substrate 110a exposed in the cavity portion 111 on the piezoelectric vibration element connection surface side. A plurality of integrated circuit element mounting pads 114 are provided on the main surface of the substrate 110a on the integrated circuit element mounting surface side.

壁部150は、基板部110の辺縁部全周に集積回路素子130の周囲を覆うように形成されている。壁部150の四隅部には、圧電発振器100を実装する際に外部実装基板と導通固着する外部接続用電極端子115が設けられている。   The wall part 150 is formed so as to cover the periphery of the integrated circuit element 130 on the entire periphery of the edge part of the substrate part 110. At the four corners of the wall 150, there are provided external connection electrode terminals 115 that are conductively fixed to the external mounting substrate when the piezoelectric oscillator 100 is mounted.

圧電振動素子120は、平面視矩形状の圧電素板と、その圧電素板の両主面中央部に設けられた励振用電極(図示せず)と、その励振用電極から圧電素板の一方の短辺端部にまで延設された引出電極(図示せず)とにより主に構成されている。このような構成の圧電振動素子120は、引出電極と圧電振動素子接続用電極パッド113とを、導電性接着剤121により導通固着することによりキャビティー部111内に搭載されている。   The piezoelectric vibration element 120 includes a piezoelectric element plate having a rectangular shape in plan view, an excitation electrode (not shown) provided at the center of both main surfaces of the piezoelectric element plate, and one of the piezoelectric element plates from the excitation electrode. And an extraction electrode (not shown) extending to the short side end. The piezoelectric vibration element 120 having such a configuration is mounted in the cavity portion 111 by electrically connecting and fixing the extraction electrode and the piezoelectric vibration element connecting electrode pad 113 with the conductive adhesive 121.

蓋体140は、例えば42アロイ、コバール又はリン青銅等の金属から成る平板であり、枠体110bのキャビティー部111開口側頂面上にキャビティー部111の開口部を覆う形態で配置し、枠体110bに接合されている。この蓋体140によりキャビティー部111内は気密封止されている。   The lid 140 is a flat plate made of a metal such as 42 alloy, Kovar, or phosphor bronze, for example, and is arranged in a form covering the opening of the cavity 111 on the cavity 111 opening-side top surface of the frame 110b. It is joined to the frame 110b. The inside of the cavity 111 is hermetically sealed by the lid 140.

集積回路素子130は、基板110aの集積回路素子搭載面側主面上に設けられた複数個の集積回路素子搭載パッド114上に搭載されている。この集積回路素子130内には、発振回路や温度補償回路等により構成される電子回路が設けられている。この電子回路は、圧電振動素子120及び壁部150の四隅部に形成された外部接続用電極端子115と電気的に接続されている。   The integrated circuit element 130 is mounted on a plurality of integrated circuit element mounting pads 114 provided on the integrated circuit element mounting surface main surface of the substrate 110a. In the integrated circuit element 130, an electronic circuit including an oscillation circuit, a temperature compensation circuit, and the like is provided. This electronic circuit is electrically connected to the piezoelectric resonator element 120 and external connection electrode terminals 115 formed at the four corners of the wall 150.

また、壁部150で囲まれた基板部110に配置された集積回路素子搭載パッド114は壁部150に対し2列平行に配置され、1列に3個配置されている。この集積回路素子搭載パッド114の所定の2つが水晶端子117となっている。この水晶端子117の一方は内部配線(図示せず)を介して、圧電振動素子120と接続され、他方は内部配線(図示せず)を介して、第一のモニター端子118と接続されている。   Further, the integrated circuit element mounting pads 114 arranged on the substrate part 110 surrounded by the wall part 150 are arranged in two rows in parallel with the wall part 150, and three pads are arranged in one line. Two predetermined ones of the integrated circuit element mounting pads 114 are crystal terminals 117. One of the crystal terminals 117 is connected to the piezoelectric vibration element 120 via an internal wiring (not shown), and the other is connected to the first monitor terminal 118 via an internal wiring (not shown). .

図3に示すように第一のモニター端子118は、基板部110の他方の主面の中央領域に2つ並んで配置されている。この第一のモニター端子118のそれぞれの端子から接続配線116を経由して基板110aの側面には、第二のモニター端子119が配置されている。また、第一のモニター端子118と第二のモニター端子119は接続配線116を介して電気的に接続されており、接続配線116の一部は、基板110aと壁部150の間を通過している。これにより圧電発振器を外部実装基板へ実装する前には基板部110の側面に形成された第二のモニター端子119により、集積回路素子130搭載後に基板部110の他方の主面に形成された第一のモニター端子118で圧電振動素子120の電気特性の測定が困難となった場合でも、第二のモニター端子119で測定することが可能となる。   As shown in FIG. 3, two first monitor terminals 118 are arranged side by side in the central region of the other main surface of the substrate unit 110. A second monitor terminal 119 is disposed on the side surface of the substrate 110 a from each terminal of the first monitor terminal 118 via the connection wiring 116. The first monitor terminal 118 and the second monitor terminal 119 are electrically connected via the connection wiring 116, and part of the connection wiring 116 passes between the substrate 110 a and the wall portion 150. Yes. Thus, before mounting the piezoelectric oscillator on the external mounting substrate, the second monitor terminal 119 formed on the side surface of the substrate unit 110 causes the second main terminal formed on the other main surface of the substrate unit 110 after the integrated circuit element 130 is mounted. Even when it becomes difficult to measure the electrical characteristics of the piezoelectric vibrating element 120 with one monitor terminal 118, it is possible to measure with the second monitor terminal 119.

また、図4に示すように、第一のモニター端子118と第二のモニター端子119を結ぶ接続配線116は、外部実装基板(図示せず)への実装状態では切断されている。この接続配線116の切断は、圧電発振器を外部実装基板(図示せず)に実装する前にレーザー光を接続配線116に照射することで行っている。これにより第二のモニター端子119から入って圧電発振器の内部に搭載された集積回路素子130や圧電振動素子120に影響を与える外部ノイズを遮断し、外部ノイズの影響を受けない安定した圧電発振器を得ることが可能となる。   Further, as shown in FIG. 4, the connection wiring 116 connecting the first monitor terminal 118 and the second monitor terminal 119 is cut off when mounted on an external mounting board (not shown). The connection wiring 116 is cut by irradiating the connection wiring 116 with laser light before mounting the piezoelectric oscillator on an external mounting substrate (not shown). As a result, the external noise that enters the second monitor terminal 119 and affects the integrated circuit element 130 and the piezoelectric vibration element 120 mounted inside the piezoelectric oscillator is blocked, and a stable piezoelectric oscillator that is not affected by the external noise is obtained. Can be obtained.

なお、前記した実施形態以外にも、本発明の要旨を逸脱しない範囲において種々の変更、改良等が可能である。例えば、前記実施形態に示した圧電発振器では、内部に搭載する圧電振動素子として、平面視矩形状の圧電素板の表面に励振用電極や引出電極を設けた形態の圧電振動素子を示したが、これに限定することなく、例えば、平面視形状が円形や音叉形の圧電素板に各種電極を設けた形態の圧電振動素子でもよく、又圧電振動素子に変えて弾性表面波素子を用いても構わない。   In addition to the above-described embodiments, various changes and improvements can be made without departing from the scope of the present invention. For example, in the piezoelectric oscillator shown in the above-described embodiment, a piezoelectric vibration element having an excitation electrode and an extraction electrode provided on the surface of a rectangular piezoelectric element plate in a plan view is shown as a piezoelectric vibration element mounted inside. Without being limited thereto, for example, a piezoelectric vibration element in which various electrodes are provided on a piezoelectric base plate having a circular or tuning fork shape in plan view may be used, or a surface acoustic wave element may be used instead of the piezoelectric vibration element. It doesn't matter.

本発明の圧電発振器の一形態を示した概略断面図である。It is the schematic sectional drawing which showed one form of the piezoelectric oscillator of this invention. (a)は本発明の圧電発振器を実装側から示した平面図であり、(b)は短辺側からの側面図である。(A) is the top view which showed the piezoelectric oscillator of this invention from the mounting side, (b) is the side view from the short side. 本発明の圧電発振器を集積回路素子搭載前に実装側から示した平面図である。It is the top view which showed the piezoelectric oscillator of this invention from the mounting side before mounting an integrated circuit element. 本発明の圧電発振器を外部実装基板へ実装した状態を示す概念図である。It is a conceptual diagram which shows the state which mounted the piezoelectric oscillator of this invention on the external mounting board | substrate. 従来の圧電発振器の一形態を示す分解斜視図である。It is a disassembled perspective view which shows one form of the conventional piezoelectric oscillator. 従来の圧電発振器を集積回路素子搭載前に実装側から示した平面図である。It is the top view which showed the conventional piezoelectric oscillator from the mounting side before mounting an integrated circuit element.

符号の説明Explanation of symbols

100・・・圧電発振器
110・・・基板部
110a・・・基板
110b・・・枠体
111・・・キャビティー部
113・・・圧電振動素子接続用電極パッド
114・・・集積回路素子搭載パッド
115・・・外部接続用電極端子
116・・・接続配線
117・・・水晶端子
118・・・第一のモニター端子
119・・・第二のモニター端子
120・・・圧電振動素子
121・・・導電性接着剤
130・・・集積回路素子
131・・・バンプ
140・・・蓋体
150・・・壁部
DESCRIPTION OF SYMBOLS 100 ... Piezoelectric oscillator 110 ... Substrate part 110a ... Substrate 110b ... Frame body 111 ... Cavity part 113 ... Electrode pad for connecting a piezoelectric vibration element 114 ... Integrated circuit element mounting pad DESCRIPTION OF SYMBOLS 115 ... External connection electrode terminal 116 ... Connection wiring 117 ... Crystal terminal 118 ... First monitor terminal 119 ... Second monitor terminal 120 ... Piezoelectric vibration element 121 ... Conductive adhesive 130 ... Integrated circuit element 131 ... Bump 140 ... Lid 150 ... Wall

Claims (1)

圧電振動素子と、前記圧電振動素子を収容する一方の主面にキャビティー部を有する基板部と、前記キャビティー部を封止する蓋体と、前記基板部の他方の主面の辺縁部全周に形成された壁部と、前記基板部の他方の主面に形成された集積回路素子搭載パッドと前記集積回路素子搭載パッドに搭載される集積回路素子と、前記集積回路素子搭載パッドと前記基板部の他方の主面に内部配線により前記圧電振動素子と電気的に接続された水晶端子と、前記水晶端子と内部配線で接続される第一のモニター端子と、前記第一のモニター端子より接続配線を経由して前記基板部のそれぞれの側面まで延びる第二のモニター端子と、を備えており、
前記接続配線は、外部実装基板への実装状態で切断されている
ことを特徴とする圧電発振器。
Piezoelectric vibration element, substrate portion having a cavity portion on one main surface that accommodates the piezoelectric vibration element, lid body sealing the cavity portion, and edge portion of the other main surface of the substrate portion A wall portion formed on the entire circumference, an integrated circuit element mounting pad formed on the other main surface of the substrate portion, an integrated circuit element mounted on the integrated circuit element mounting pad, and the integrated circuit element mounting pad; A crystal terminal electrically connected to the piezoelectric vibration element by internal wiring on the other main surface of the substrate portion, a first monitor terminal connected to the crystal terminal by internal wiring, and the first monitor terminal A second monitor terminal extending to each side surface of the substrate portion via a connection wiring , and
The piezoelectric oscillator , wherein the connection wiring is cut in a mounted state on an external mounting board .
JP2008222958A 2008-08-30 2008-08-30 Piezoelectric oscillator Expired - Fee Related JP5210093B2 (en)

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