JP5186053B2 - Substrate transfer apparatus and transfer method - Google Patents

Description

  The present invention relates to a substrate transport apparatus and a transport method for transporting and positioning a substrate along a pair of guide rails.

  For example, when an electronic component such as an IC chip is mounted on a substrate, the substrate is transported along a guide rail to a mounting position where a mounting stage is provided, and the lower surface of the substrate is mounted on the stage at the mounting position. If supported, the electronic component is mounted on the upper surface of the substrate by a mounting tool.

  The substrate is supported at both ends in the width direction by a pair of guide rails that are spaced apart from each other in parallel, and is intermittently transported along the guide rail by a predetermined distance, for example, by a feeding mechanism such as a chuck mechanism. ing.

  When mounting the electronic components on the substrate, recently, the electronic components are spaced at a predetermined interval in the width direction of the substrate, which is the separation direction of a pair of guide rails, in order to increase the mounting density of the electronic components on the substrate. Is implemented in multiple columns. That is, the electronic component is mounted so that a useless space is not generated in the width direction of the substrate.

  Therefore, the stage having a width dimension that can support a substantially full length portion of the substrate excluding the portion supported by the guide rail is used. That is, a stage having a width dimension slightly smaller than the distance between the pair of guide rails is used.

  When electronic components are mounted on the board in this way, the size of the board may change from the previous time when the product type is changed. That is, the substrate may be resized to a different width dimension.

  When the size of the substrate is changed, the interval between the pair of guide rails is set according to the size change. At the same time, the stage that supports the lower surface of the substrate is also replaced with a different size according to the size change of the substrate. In other words, the stage is replaced with one having a width dimension slightly smaller than the width dimension of the resized substrate.

  When changing the stage to one with a different width according to the size change of the board, this stage is positioned in the center between a pair of guide rails set at a predetermined interval according to the size change of the board. It must be ensured that the lower surface of the supported substrate can be supported substantially over the entire length in the width direction.

  The stage is detachably attached to the movable body. The movable body is driven in the horizontal direction and the vertical direction by a drive source. Then, a stage having a size corresponding to the size change of the substrate is attached to the movable body.

  Conventionally, when the interval between a pair of guide rails is set, first, the pair of guide rails are separated from each other by a sufficiently large interval, and the resized stage is attached to the movable body positioned between the guide rails.

  Next, the stage is positioned so as to be positioned at the center of the pair of guide rails while positioning the stage with respect to the horizontal direction so that one side surface in the width direction is at a predetermined interval with respect to one guide rail. Is done.

Japanese Patent Laid-Open No. 5-55787

  By the way, conventionally, when the size of the substrate is changed as described above, the distance between the pair of guide rails is adjusted and the stage is positioned and adjusted with respect to the guide rails.

  However, when adjusting the distance between the pair of guide rails and adjusting the positioning of the stage with respect to the pair of guide rails, an operation error may occur or a stage with an incorrect size may be attached. .

  If the stage is wrong with a size larger than the one to be replaced, the stage and the guide rail may interfere. Conversely, if the stage is mistaken for a small one, the end of the stage in the width direction and the guide rail Since the distance between the two and the substrate becomes too large and the entire width direction of the substrate cannot be reliably supported, a plurality of electronic components cannot be reliably mounted at a predetermined interval in the width direction of the substrate. is there.

  Note that the above-described work mistakes at the time of adjusting the distance between the guide rails may occur not only when the size of the substrate is changed but also at the time of adjustment for transporting the first substrate.

The present invention, depending on the size of the substrate for conveying, when setting the spacing of the pair of guide rails, the size of the stage supporting the substrate, those of can be performed reliably and quickly work, yet the stage It is an object of the present invention to provide a substrate transport apparatus and a transport method that can detect when the size is wrong.

The present invention is a substrate transport apparatus for supporting and transporting both ends in the width direction of a substrate by a pair of guide rails arranged to face each other in parallel,
Driving means for driving at least one of the pair of guide rails in a direction approaching each other;
A stage that is provided between the pair of guide rails and supports a lower surface of the substrate supported at both ends in the width direction by the pair of guide rails;
A nozzle body that is provided on at least one guide rail driven by the driving means and that applies a positive or negative gas pressure to an end surface in the width direction of the stage located between a pair of guide rails;
At least one guide rail provided with the nozzle body is driven in a direction approaching the side surface of the stage by the driving means while applying a positive or negative gas pressure from the nozzle body to the side surface of the stage. A pressure sensor that detects a change in pressure of the gas flowing in the nozzle body caused by a change in the interval between the nozzle body and the side surface of the stage;
And a control means for controlling the driving of the driving means by the pressure change of the gas flowing through the nozzle body detected by the pressure sensor to set the distance between the pair of guide rails. In the device.

This invention is a substrate transport method for supporting and transporting both ends in the width direction of a substrate by a pair of guide rails arranged to face each other in parallel,
Driving at least one of the pair of guide rails by a driving means to set a distance between the pair of guide rails;
A step of supporting a lower surface of the substrate whose both ends in the width direction are supported by the pair of guide rails by a stage provided between the pair of guide rails;
A step of applying a positive or negative gas pressure to the end surface in the width direction of the stage located between a pair of guide rails from a nozzle body provided on at least one guide rail driven by the driving means. When,
Driving at least one guide rail provided with the nozzle body in a direction approaching the side surface of the stage by the driving means while applying a positive or negative gas pressure from the nozzle body to the side surface of the stage. And detecting a pressure change of the gas flowing in the nozzle body caused by a change in the distance between the nozzle body and the side surface of the stage by a pressure sensor,
In the step of setting the distance between the pair of guide rails, the distance between the pair of guide rails is set by drivingly controlling the driving means by a change in pressure of the gas flowing through the nozzle body detected by the pressure sensor. In the substrate transport method.

  According to the present invention, not only can the guide rail interval and the stage be set according to the size of the board easily and reliably, but also if the stage size is wrong, this is reliably detected. can do.

FIG. 1 is a plan view of a schematic configuration of a transport apparatus showing a first embodiment of the present invention. FIG. 2 is a side view of the transport apparatus shown in FIG. FIG. 3 is a plan view of a substrate on which electronic components are mounted in a matrix. FIG. 4 is a block diagram of a control system of the transport apparatus shown in FIG. FIG. 5 is a side view of the transport device showing a state in which the stage is removed from the movable body and the pair of guide rails are separated at the maximum interval. FIG. 6 is a side view of the transport device showing a state in which a new stage is attached to the movable body and the pair of guide rails are driven in the approach direction from the state where the pair of guide rails are separated at the maximum interval. FIG. 7 is a plan view of a schematic configuration of a transport apparatus showing a second embodiment of the present invention. FIG. 8 is a plan view of a schematic configuration of a transport apparatus showing a third embodiment of the present invention.

Embodiments of the present invention will be described below with reference to the drawings.
1 to 6 show a first embodiment of the present invention. The transport apparatus shown in FIG. 1 includes a rectangular base board 11. A pair of guide rails 1 are provided in the width direction of the upper surface of the base board 11 and spaced apart by a predetermined distance. The separation direction of the pair of guide rails 1 is the Y direction of the X and Y directions shown in FIG. At the upper ends of the pair of guide rails 1, as shown in FIG. 2, stepped portions 2 that engage and support both end portions in the width direction of the substrate W on which electronic components P such as IC chips are mounted are formed on the upper surface. .

  A substrate W placed with both end portions in the width direction engaged with the stepped portion 2 is pitch-fed by a predetermined distance along the guide rail 1 by a chuck mechanism or the like (not shown).

  Then, when the substrate W is positioned at a predetermined position, for example, a mounting position, the substrate W is set by the stage 3 having a rectangular shape in which the planar shape is set to a width dimension smaller than the facing distance between the pair of guide rails 1. After the lower surface is supported, the electronic components P are mounted on the upper surface at a predetermined interval in the width direction and in a row in the longitudinal direction perpendicular to the width direction. That is, on the upper surface of the substrate W, as shown in FIG. 3, a plurality of electronic components P are mounted in a matrix over substantially the entire surface in the width direction and the direction orthogonal to the width direction.

  Engaging members 5 are provided on the lower end surfaces of both ends of the pair of guide rails 1 in the longitudinal direction. Each pair of engaging members 5 of each guide rail 1 is connected to a pair of linear guides 6 disposed at both ends in the X direction orthogonal to the Y direction which is the opposing direction of the pair of guide rails 1 of the base board 11. It is movably engaged.

  A female threaded body 7 is provided at each of the pair of guide rails 1 in the center in the longitudinal direction. The screw body 7 provided on one guide rail 1 and the screw body 7 provided on the other guide rail 1 are formed in reverse threads, and each female screw body 7 has the above-mentioned pair of female shafts 8. The first male threaded portion 8a and the second male threaded portion 8b formed on the reverse screw in the direction corresponding to the screw body 7 are screwed together.

  As shown in FIG. 1, the screw shaft 8 is rotationally driven by a rotational drive source 9. When the screw shaft 8 is driven, for example, in the clockwise direction by the rotational drive source 9, the pair of guide rails 1 are formed with a first male screw portion 8a and a second male screw formed in opposite directions to the screw shaft 8. When the screw shaft 8 is driven in the counterclockwise direction, it is driven in synchronization with the separating direction.

That is, the pair of guide rails 1 is moved in a direction approaching or separating from the center line in the opposing direction of the guide rails 1, that is, the center line O in the width direction (shown in FIG. 1). The screw shaft 8 is driven at the same distance with respect to the rotation of the screw shaft 8 so that the distance along the Y direction can be adjusted.
The rotary drive source 9 and the screw shaft 8 constitute drive means for setting the distance between the pair of guide rails 1.

  The stage 3 is disposed between the pair of guide rails 1. This stage 3 is detachably provided on the upper surface of the movable body 13 driven in the X, Y and Z directions. As shown in FIG. 2, the movable body 13 is provided so as to be driven in the horizontal direction and the vertical direction via an XY table 14 and a Z table 15. These tables 14 and 15 are driven in the XY and Z directions, respectively, by an XY drive source 16 and a Z drive source 17 shown in FIG.

  The movable body 13 is positioned such that the center in the width direction along the Y direction, which is the separation direction of the pair of guide rails 1, coincides with the center line O in the separation direction of the pair of guide rails 1. The movable body 13 is detachably attached so that the center in the width direction of the stage 3 coincides with the center in the width direction of the movable body 13.

  Therefore, the center in the width direction of the stage 3 attached to the movable body 13 coincides with the center in the separation direction of the pair of guide rails 1, that is, the center line O.

  A nozzle body 19 has a tip at the center in one longitudinal direction of the pair of guide rails 1 toward the inner surface of the guide rail 1, that is, one side in the width direction of the stage 3 provided between the pair of guide rails 1. Is provided.

  The nozzle body 19 is connected to a tip end of a supply pipe 21 for pressurized gas such as compressed air. The proximal end of the air supply pipe 21 is connected to an air supply source 22 via a pressure adjustment valve 23. Further, as shown in FIGS. 1 and 4, the air supply pipe 21 is provided with a pressure sensor 24 that detects a change in the pressure of the gas in the air supply pipe 21 on the downstream side of the pressure regulating valve 23.

  The pressure of the gas in the air supply pipe 21 detected by the pressure sensor 24 is determined between the tip of the nozzle body 19 provided on one guide rail 1 and one side surface in the width direction of the stage 3 facing the tip. The smaller the interval, the larger.

  When the pressure sensor 24 detects the pressure change of the pressurized gas downstream of the pressure regulating valve 23 in the air supply pipe 21, the detection signal is sent to the control device 25 constituting the control means as shown in FIG. Is output.

  The control device 25 compares the detection signal of the pressure sensor 24 with a set value S set in advance by the setting unit 27 shown in FIG. This set value S is, for example, an output of a detection signal output from the pressure sensor 24 when the distance between the tip of the nozzle body 19 and the side surface of the stage 3 becomes a predetermined distance of about several millimeters, for example, Nmm. Is set to the equivalent value.

  As shown in FIG. 4, the control device 25 controls the driving of the rotary drive source 9, the XY drive source 16 and the Z drive source 17. In addition to the set value S, the setting unit 27 connected to the control device 25 includes a pair corresponding to the width dimension of the substrate W supported and transported by the pair of guide rails 1. Various settings such as the interval between the guide rails 1 can be made.

  A buzzer 28 (shown in FIG. 4) for outputting an alarm when the pressure detected by the pressure sensor 24 becomes larger than the set value S set in the control device 25 is connected to the control device 25. Yes. Further, as shown in FIG. 4, the control device 25 receives a detection signal from an encoder 29 that detects the rotational speed of the screw shaft 8 by the rotary drive source 9. The control device 25 can detect the rotation speed of the screw shaft 8, that is, the distance between the pair of guide rails 1 corresponding to the width dimension of the substrate W, based on a detection signal from the encoder 29.

  The detection signal of the encoder 29 is compared with the distance between the pair of guide rails 1 corresponding to the width dimension of the substrate W set by the setting unit 27 by the control device 25, and the difference is almost zero, that is, a pair of guides. When the distance between the rails 1 is optimum for supporting the set substrate W, the driving of the rotary drive source 9 by the control device 25 is stopped, and the distance between the pair of guide rails 1 is set. It has become.

Next, the alignment of the guide rail 1 and the stage 3A according to the size change of the substrate W in the transport apparatus having the above configuration will be described with reference to FIGS.
First, as shown in FIG. 5, after the pair of guide rails 1 of the transport apparatus are automatically opened at a preset maximum interval, the width dimension of the substrate W to be transported, that is, the distance between the pair of guide rails 1 is set. Then, input is set to the control device 25, and the stage 3 is detached from the movable body 13.

  Next, as shown in FIG. 6, a stage 3 </ b> A having a width corresponding to the width of the substrate W supplied to the transfer apparatus is attached to the movable body 13. In this embodiment, the stage 3A is larger in width than the stage 3A before replacement.

  When the replacement of the stage 3A is completed in this way, the control device 25 transfers the conveying device while supplying the pressurized gas set to a predetermined pressure by the pressure adjusting valve 23 from the air supply source 22 to the nozzle body 19. The automatic setting of the interval between the pair of guide rails 1 is started.

  When the automatic setting is started, the rotation drive source 9 is operated to rotate the screw shaft 8 in the clockwise direction, for example. As a result, the pair of guide rails 1 spaced apart at the maximum interval as shown in FIG. 5 are driven along the linear guide 6 in directions approaching each other as indicated by arrows + Y and −Y in FIG.

  Then, as shown in FIG. 6, when the distance between the tip of the nozzle body 19 provided on the one linear guide 6 and the side surface 3a of the stage 3A opposite to the tip of the nozzle body 19 is gradually reduced, the nozzle Since the resistance of the pressure gas injected from the front end opening of the body 19 increases, the pressure of the gas flowing downstream from the pressure regulating valve 23 in the air supply pipe 21 connected to the nozzle body 19 increases.

  The pressure of the gas flowing through the air supply pipe 21 is detected by the pressure sensor 24, and the detection signal is output to the control device 25, and the detected value of the detection signal and the set value S set in the control device 25 by the control device 25. Are compared.

  The detected value, which is the pressure detected by the pressure sensor 24, is equivalent to the set value set in the control device 25, and the rotational speed of the screw shaft 8 by the rotary drive source 9 detected by the encoder 29, that is, a pair When the distance between the guide rails 1 becomes substantially the same as the distance between the pair of guide rails corresponding to the width dimension of the substrate W preset in the control device 25, the driving of the rotary drive source 9 by the control device 25 is stopped. The That is, the interval setting between the pair of guide rails 1 is completed.

  In such a configuration, for example, when the width of the stage 3 exchanged according to the width of the substrate W is mistakenly changed to a small one, for example, even if the pair of guide rails 1 are set at a set interval, the pressure is reduced. The pressure detected by the sensor 24 is lower than the set value S.

  In such a case, the control device 25 detects that the stage 3 is abnormal, and the buzzer 28 sounds based on the detection to notify the operator of the abnormality, and at the same time, the driving of the pair of guide rails 1 is stopped. Is done.

  On the contrary, when the stage 3A to be exchanged in accordance with the width dimension of the substrate W is mistakenly replaced with a larger one, for example, the pressure sensor 24 detects the pair of guide rails 1 before the set interval is reached. The pressure to be applied is higher than the set value S.

  Even in such a case, the control device 25 detects that the width dimension of the stage 3A is abnormal, and on the basis of the detection, the buzzer 28 sounds to notify the operator of the abnormality, and at the same time, the pair of guide rails 1 Driving is stopped.

  That is, according to the transport apparatus having the above-described configuration, the stage 3 supporting the lower surface of the substrate W having a different width dimension slightly smaller than the width dimension of the substrate W according to the change in the width dimension of the substrate W. When the distance between the pair of guide rails 1 is positioned according to the width dimension of the substrate W, the pair of guide rails 1 can be positioned automatically and accurately. .

  Furthermore, if the width dimension of the stage 3 to be replaced with respect to the width dimension of the substrate W is mistakenly replaced with a small or large one, the nozzle body 19 and the stage 3 detected by the pressure sensor 24 Of the pair of guide rails 1 detected by the encoder 29 and the distance between the pair of guide rails 1 with respect to the width dimension of the substrate W set in the control device 25. Only when the width dimension of 3A is adapted to the width dimension of the substrate W, the pair of guide rails 1 are positioned so as to have a predetermined interval. Otherwise, the drive of the guide rails 1 is performed when this is detected. The operation is stopped and an abnormality is warned by the buzzer 28.

  Accordingly, if the stage 3A is replaced with a stage 3A having an inappropriate width dimension with respect to the width dimension of the substrate W, this can be detected with certainty. The electronic components are mounted in a state where the entire length in the width direction of the substrate W cannot be reliably supported when the stage 3A having a small width dimension is mistaken, or the mounting of the electronic components is caused. This can be reliably prevented.

  In the first embodiment, the configuration in which the stage 3 can be driven and positioned in the horizontal direction and the vertical direction has been described as an example. However, when the stage 3 is attached to the movable body 13, the center in the width direction of the stage 3 is a pair. The stage 3 may be configured to be driven only in the Z direction without being driven in the X and Y directions as long as it coincides with the center line O in the opposing direction of the guide rail 1.

  FIG. 7 shows a second embodiment of the present invention. In the second embodiment, there are a plurality of stages between the pair of guide rails 1, and in this embodiment, at least three stages having the same size in the width direction (Y direction), that is, the first to third stages 3X to 3Z. Is provided. Each stage 3X-3Z can be positioned and driven in at least the vertical direction of the horizontal direction and the vertical direction.

  The substrate W transported along the pair of guide rails 1 is preheated at a position corresponding to the first stage 3X, and the electronic component P is mounted on the substrate W preheated at a position corresponding to the second stage 3Y. . At the position corresponding to the third stage 3Z, the substrate W on which the electronic component P is mounted is gradually cooled.

  A nozzle body 19 is provided at one of the pair of guide rails 1, for example, at a location corresponding to the side surface of the second stage 3Y. The distance between the pair of guide rails 1 is set in the same manner as in the first embodiment by changing the pressure of the gas detected by the nozzle body 19.

  That is, if the distance between the pair of guide rails 1 is set using the nozzle body 19, even if the transport apparatus has three stages 3X to 3Z, the nozzle stage 19 can be used to move the second stage 3Y. An interval between the pair of guide rails 1 can be set by a detection signal of one pressure sensor 24 that detects a pressure change of the gas injected toward the side surface. That is, since it is not necessary to use the number of pressure sensors 24 corresponding to the number of stages 3X to 3Z, the configuration can be simplified and the cost can be reduced.

  In the second embodiment, an example in which one nozzle body is provided for three stages has been described. However, nozzle bodies are provided at locations corresponding to the side surfaces of each stage of the guide rail. Also good.

  In this way, at least one of the three nozzle bodies is provided even when one or more stages, that is, a stage having a different size is attached to at least one stage. If the pressure of the gas flowing through one nozzle body changes, this can be detected by one pressure sensor provided in the supply pipe.

  In other words, when there are multiple stages, if the number of nozzle bodies corresponding to the number of stages is provided, it is easy to position the stage with one pressure sensor and reliably detect the stage mounted with the wrong size. Can be performed.

  For example, when an optical sensor is provided instead of a nozzle body, a control amplifier is required for each optical sensor, but only one pressure sensor is used because gas is injected from the nozzle body. Therefore, the entire configuration can be simplified.

  In the second embodiment, the same parts as those in the first embodiment are denoted by the same reference numerals and description thereof is omitted.

  FIG. 8 shows a third embodiment of the present invention. In this embodiment, of the pair of guide rails 1, one guide rail 1 is provided so as to be movable in the Y direction by a linear guide 6, and the other guide rail 1 is fixed to a base board 11.

  A female screw body 7 is provided at one end of the one guide rail 1, and a first screw shaft 31 that is rotationally driven by a rotational drive source 9 is screwed into the female screw body 7. As a result, one guide rail 1 is driven in a direction in which it is in contact with or separated from the other guide rail 1 that is fixed to the base board 11.

  On the other hand, the movable body 13 on which the stage 3 is replaceably mounted is provided on the Z table 15 as in the first embodiment, and the Z table 15 is driven in the vertical direction by the Z drive source 17. It has become. In FIG. 8, the movable body 13 and the Z table 15 are omitted.

The Z table 15 is placed on a Y table 18 that is movable along the Y direction, which is the opposing direction of the pair of guide rails 1. One end side of a second screw shaft 32 arranged in parallel with the first screw shaft 31 is screwed into the Y table 18. The other end of the second screw shaft 32 is rotatably supported by a bearing 30 provided on the base board 11, and a midway portion is inserted into a through hole 37 formed in one guide rail 1.

  Similar to the first screw shaft 31, the second screw shaft 32 is rotationally driven by the rotational drive source 9. That is, a drive sprocket 33 is fitted to one end of the first screw shaft 31, and a driven sprocket 34 having the same diameter as the drive sprocket 33 is fitted to the other end of the second screw shaft 32. Yes. A chain 35 is stretched between the sprockets 33 and 34. Therefore, when the first screw shaft 31 is rotated, the second screw shaft 32 is interlocked with the rotation.

  The pitch of the first screw shaft 31 is set to be twice the pitch of the second screw shaft 32. Therefore, when the first and second screw shafts 31 and 32 are rotationally driven, one guide rail 1 into which the first screw shaft 31 is screwed is more than the movable body 13 provided with the stage 3. It is driven in a direction approaching or separating from the other guide rail 1 at a double distance.

  As in the first embodiment, the one guide rail 1 is provided with the nozzle body 19, and the rotation of the rotary drive source 9 that rotates the first and second screw shafts 31 and 32 is rotated by the encoder 29. And output to the control device 25.

  In the third embodiment, the same parts as those in the first embodiment are denoted by the same reference numerals and description thereof is omitted.

  In an initial state in which one guide rail 1 is moved to the maximum in the opening direction with respect to the other guide rail 1, the center line of the stage 3 coincides with the center line of the interval between the pair of guide rails 1. It is set as follows.

  That is, in the initial state, when the distance between the other guide rail 1 and the one side surface 3a of the stage 3 is d1, the distance between the one guide rail 1 and the other side surface 3b of the stage 3 is d1 = d2. The position of the stage 3 in the Y direction is set so that

  According to such a configuration, one guide rail 1 provided with the nozzle body 19 is driven in a direction approaching the stage 3 by the rotation of the first screw shaft 31 that is rotationally driven by the rotational drive source 9 from the fully open position. Then, the stage 3 moves in the direction approaching the other guide rail 1 by the rotation of the second screw shaft 32 with a movement amount that is half the movement amount of the one guide rail 1.

  Gas is ejected from a nozzle body 19 provided on one guide rail 1. When the nozzle body 19 approaches one side surface of the stage 3, the pressure in the air supply pipe 21 that supplies gas to the nozzle body 19 rises, and this is detected by the pressure sensor 24.

  The pressure detected by the pressure sensor 24 becomes the set value S set in the control device 25, and the movement amount of one guide rail 1 detected by the encoder 29 is the movement amount set in the control device 25, that is, a pair of When the distance between the guide rails 1 becomes the amount of movement corresponding to the width dimension of the substrate W to be resized, the driving of one guide rail 1 by the rotary drive source 9 is stopped. This is the same as in the first embodiment.

  That is, according to the transport apparatus having the above-described configuration, the drive amount of the stage 3 is halved with respect to the drive amount of the one guide rail 1, so that only the one guide rail 1 is driven. Even if it exists, according to the size change of the board | substrate W, it can position so that the center of the width direction of the said stage 3 may correspond with the center of the opposing direction between a pair of guide rails 1. FIG.

  In each of the above embodiments, the case where gas is injected from the nozzle body toward the side surface of the stage, that is, a case where a positive pressure is applied, has been described as an example, but instead of injecting gas from the nozzle body, negative pressure is applied to the nozzle body. The pressure sensor may be actuated by applying a pressure and changing the negative pressure that changes in accordance with the distance between the nozzle body and the side surface of the stage.

  In this case, if the guide rail is driven in the closing direction and the tip of the nozzle body approaches the side surface of the stage, the negative pressure acting on the nozzle body increases. Can be detected.

  In addition, when the stage is changed to a smaller one than the one having the width dimension determined in error, even if the interval between the pair of guide rails becomes the set interval, there is almost no change in the negative pressure acting on the nozzle body. Therefore, this can be detected as in the case of applying a positive pressure to the nozzle body.

  On the other hand, if the stage is replaced with one that is larger than the one with the wrong width, the negative pressure acting on the nozzle body will increase before the distance between the pair of guide rails reaches the set interval. Is detected by the pressure sensor, it is detected that the stage is larger than the set width dimension.

  Further, in each of the above embodiments, only when the interval between the pair of guide rails is set, positive pressure or negative pressure is applied to the nozzle body. The substrate can be transferred without applying a positive pressure or a negative pressure to the substrate.

  Therefore, after the interval between the pair of guide rails is set, the positive pressure or negative pressure acting on the nozzle body does not affect the surroundings. For example, when three stages are provided in the second embodiment, the preheating temperature of the first stage, the mounting temperature of the second stage, or the slow cooling temperature of the third stage is prevented from fluctuating. Can do. Further, since the dust does not soar around the stage, it is possible to prevent the substrate and the electronic component from becoming dirty.

  In the above embodiment, the nozzle body is incorporated only in one guide rail, but may be incorporated in the other guide rail. In this way, even when the stage is not symmetrical with respect to the pair of guide rails, it is possible to cope with it.

  Further, in the above embodiment, the adjustment of the guide rail when the size of the substrate is changed has been described. However, the present invention can also be applied at the time of adjustment for transporting the first substrate.

  DESCRIPTION OF SYMBOLS 1 ... Guide rail, 3 ... Stage, 8 ... Screw shaft, 9 ... Rotary drive source, 13 ... Movable body, 19 ... Nozzle body, 21 ... Supply pipe, 24 ... Pressure sensor, 25 ... Control apparatus, 27 ... Setting part, 28 ... Buzzer, 29 ... Encoder.

Claims (6)

A substrate transport apparatus that supports and transports both ends in the width direction of a substrate by a pair of guide rails arranged in parallel and facing each other,
Driving means for driving at least one of the pair of guide rails in a direction approaching each other;
A stage that is provided between the pair of guide rails and supports a lower surface of the substrate supported at both ends in the width direction by the pair of guide rails;
A nozzle body that is provided on at least one guide rail driven by the driving means and that applies a positive or negative gas pressure to an end surface in the width direction of the stage located between a pair of guide rails;
At least one guide rail provided with the nozzle body is driven in a direction approaching the side surface of the stage by the driving means while applying a positive or negative gas pressure from the nozzle body to the side surface of the stage. A pressure sensor that detects a change in pressure of the gas flowing in the nozzle body caused by a change in the interval between the nozzle body and the side surface of the stage;
And a control means for controlling the driving of the driving means by the pressure change of the gas flowing through the nozzle body detected by the pressure sensor to set the distance between the pair of guide rails. apparatus.   When the pressure sensor detects that the pressure of the gas flowing through the nozzle body has reached a predetermined value, the control unit stops driving the guide rail by the driving unit. The substrate transfer apparatus according to claim 1. The control means includes
A setting unit for setting the size of the substrate;
When the guide rail provided with at least one of the nozzle bodies is driven by the driving means to set the distance between the pair of guide rails, the distance between the pair of guide rails is equal to the distance between the substrates set by the setting unit. When the pressure of the gas detected by the pressure sensor reaches the set value before the signal is detected, the stage size is larger than the size corresponding to the substrate, and the distance between the pair of guide rails is set. If the gas pressure detected by the pressure sensor does not reach the set value even when the interval corresponding to the substrate set in the section is set, the width of the stage is smaller than the size corresponding to the substrate. The substrate transfer apparatus according to claim 1, further comprising: an alarm means for informing.   2. The substrate transfer apparatus according to claim 1, wherein when the driving means drives the pair of guide rails, the pair of guide rails are driven in synchronization with a direction approaching the stage.   When the driving means drives only one of the pair of guide rails, the stage is moved in the same direction as the one guide rail by a half distance of the one guide rail with respect to the driving of the guide rail. The substrate transfer apparatus according to claim 1, wherein the substrate transfer device is driven by the following. A substrate transport method for supporting and transporting both ends in the width direction of a substrate by a pair of guide rails arranged to face each other in parallel,
Driving at least one of the pair of guide rails by a driving means to set a distance between the pair of guide rails;
A step of supporting a lower surface of the substrate whose both ends in the width direction are supported by the pair of guide rails by a stage provided between the pair of guide rails;
A step of applying a positive or negative gas pressure to the end surface in the width direction of the stage located between a pair of guide rails from a nozzle body provided on at least one guide rail driven by the driving means. When,
Driving at least one guide rail provided with the nozzle body in a direction approaching the side surface of the stage by the driving means while applying a positive or negative gas pressure from the nozzle body to the side surface of the stage. And detecting a pressure change of the gas flowing in the nozzle body caused by a change in the distance between the nozzle body and the side surface of the stage by a pressure sensor,
In the step of setting the distance between the pair of guide rails, the distance between the pair of guide rails is set by drivingly controlling the driving means by a change in pressure of the gas flowing through the nozzle body detected by the pressure sensor. A substrate transport method.

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