JP5183097B2 - Ventilator for automated guided vehicles - Google Patents

Description

  The present invention relates to a ventilator for an automatic guided vehicle that accommodates and transports a transporter such as a cassette in which a plurality of plate-like works are stacked in a clean room with a predetermined gap.

Dust generated from sliding parts of the shutter that opens and closes the storage chamber when a flat panel display or a glass substrate that dislikes dust is stored and transported in the storage room by an automated guided vehicle in a clean room. However, in order to prevent adhesion to the plate-like workpiece, Patent Document 1 discloses that the inlet / outlet is opened and the air taken in from the clean room is moved rearward from the front in the traveling direction along the opening / closing surface of the inlet / outlet. It has been proposed that the air curtain is discharged.
JP 2001-153420 A

  However, in the vicinity of the entrance / exit, there is little stagnation of air due to the air flow by the air curtain, but air tends to stay in the vicinity of the plate-shaped workpiece, and if there is dust that has entered the storage chamber, it tends to adhere to the plate-shaped workpiece. There was a problem of being easily contaminated.

  An object of this invention is to provide the ventilation apparatus of the automatic guided vehicle which solves the said problem and can prevent the contamination of the plate-shaped workpiece | work accommodated in the storage chamber effectively.

The invention of claim 1 is a ventilator for an automatic guided vehicle for transporting a transporter that holds a plurality of plate-like workpieces in a stacked state with a predetermined gap in a clean room,
The carriage body having the traveling wheels is provided with a storage chamber for a carrier for holding the plate-like workpiece so that the stacking gap of the plate-like workpiece is opened at least on the symmetrical side surface,
One of the opposing side surfaces facing the symmetrical side surface where the stacking gap of the plate-like workpieces is opened in the storage chamber is the air supply surface, and the other is the exhaust surface,
At least one of a pair of opposing side surfaces of the other pair of storage chambers is formed with a doorway having an opening and closing door,
The air supply surface is provided with a distributed air supply unit that uniformly discharges clean air sucked from a clean room to the entire surface of the stack of plate-like workpieces,
The exhaust surface is provided with a distributed exhaust part that uniformly exhausts clean air discharged from the stacking gap of the plate-like workpieces,
Provided at the bottom of the main body of the carriage is an exhaust port for discharging clean air discharged from the distributed exhaust part toward the floor for traveling,
The distributed air supply unit holds an intake port that is opened on an outer surface of the carriage main body, an intake fan that sucks and pressurizes clean air filtered from the intake port through a filter, and maintains the air pressure of the clean air A supply air pressurizing chamber, and a supply air dispersion plate having a large number of ventilation holes for uniformly discharging clean air in the supply air pressurization chamber into the storage chamber,
The dispersion exhaust section includes an exhaust dispersion plate that uniformly discharges clean air from a large number of vent holes, and an exhaust pressure adjustment chamber that adjusts the air pressure of the clean air discharged from the exhaust dispersion plate.

The invention of claim 2 is a ventilator for an automatic guided vehicle for transporting a transporter that holds a plurality of plate-like workpieces in a stacked state with a predetermined gap in a clean room,
The carriage body having the traveling wheels is provided with a storage chamber for a carrier for holding the plate-like workpiece so that the stacking gap of the plate-like workpiece is opened at least on the symmetrical side surface,
One of the opposing side surfaces facing the symmetrical side surface where the stacking gap of the plate-like workpieces is opened in the storage chamber is the air supply surface, and the other is the exhaust surface,
At least one of a pair of opposing side surfaces of the other pair of storage chambers is formed with a doorway having an opening and closing door,
The air supply surface is provided with a distributed air supply unit that uniformly discharges clean air sucked from a clean room to the entire surface of the stack of plate-like workpieces,
The exhaust surface is provided with a distributed exhaust part that uniformly exhausts clean air discharged from the stacking gap of the plate-like workpieces,
Provided at the bottom of the main body of the carriage is an exhaust port for discharging clean air discharged from the distributed exhaust part toward the floor for traveling,
A movable rectifying plate that can be raised and lowered, and a rectifying gap that can flow clean air between the movable rectifying plate and the uppermost plate-like work are formed on the ceiling of the storage room. A rectifying plate lifting and lowering device is provided.

The invention according to claim 3 is the configuration according to claim 1 or 2 ,
A plurality of transfer rollers for guiding the transporter are provided in a plurality of roller openings formed in the bottom plate of the storage chamber,
The roller opening and the exhaust port are communicated with each other so that part of the clean air in the storage chamber is discharged from the exhaust port.

  According to the first aspect of the present invention, in the storage chamber, clean air is uniformly blown from the distributed air supply portion provided on the air supply surface over the entire stack gap of the plate workpieces, Clean air is sent along the back surface, and the clean air after passing is uniformly discharged from the distributed exhaust section provided on the exhaust surface, so clean air swirls and stagnation may occur around the plate workpiece It is possible to effectively prevent the plate-like workpiece from being contaminated.

In the distributed air supply unit, clean air sucked in by the intake fan is temporarily stored in the air supply pressurizing chamber to increase the air pressure, so that clean air can be discharged uniformly from the air distribution plate vent holes. Can do. Furthermore , clean air that has passed through the stacking gap between the plate-shaped workpieces flows into the exhaust pressure regulation chamber from the vent holes of the exhaust dispersion plate, so that clean air is smoothly exhausted from the storage chamber without stagnation, and the plate-shaped workpiece is There is no contamination.

According to the configuration of the second aspect, when a large space where clean air is likely to stay is formed above the uppermost plate-like workpiece, the movable rectifier plate is lowered by the rectifier plate lifting device, and the uppermost plate-like workpiece is lowered. By forming a rectifying gap for flowing clean air above the workpiece, contamination of the uppermost plate-like workpiece can be effectively prevented.

According to the configuration of the third aspect, since a part of the clean air in the storage chamber is discharged from the roller opening to the exhaust port, the sliding contact portion between the transfer roller and the transporter and the sliding contact portion of the opening / closing door are used. The generated dust can be discharged smoothly, and contamination of the plate-like workpiece can be prevented.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
[Embodiment 1]
A ventilation device for an automatic guided vehicle according to the present invention will be described with reference to FIGS.

  The automatic guided vehicle 1 is a delivery gate such as a manufacturing room or a storage in a clean room CR, and a transporter 2 such as a cassette holding a plate-like work W is transferred to a storage room 21, and an aeration floor (travel floor) in a passageway. Surface) It travels on F and transports the transporter 2 to a warehousing gate such as a manufacturing room or storage.

  As shown in FIG. 3, the transporter 2 holds dozens of plate-like workpieces W such as a flat panel display and a glass substrate, for example, in a horizontal posture with a certain gap (hereinafter referred to as a stacking gap Wd). Therefore, at least the front surface and the rear surface, which are symmetrical side surfaces of the stacked plate-like workpiece W, are opened, and the entire front and rear surfaces of the stacking gap Wd of the plate-like workpiece W are opened.

  Detection at the bottom of the cart body 3 of the automatic guided vehicle 1 detects a position identification portion of a guide path composed of a plurality of steering wheels 4 for driving and driving and a magnetic tape laid on the ventilated floor F. A sensor 5 is provided, and the traveling wheel 4 is steered by a steering device and a traveling drive device (not shown) based on the input conveyance command and the position data detected by the detection sensor 5 from the position identification unit. And it rotates to drive the automatic guided vehicle 1 from the exit gate to the target entrance gate.

  A storage chamber 21 that can accommodate the transporter 2 is provided on the cart body 3. And the entrance / exit 13 which has the shutter (opening-closing door) 12 is formed in the left-right side surface (opposite side surface) of the trolley | bogie main body 3, respectively. In addition, the right and left entrance / exit 13 may be only one of the left and right side surfaces. The shutter 12 includes a divided door 12a that is divided into a plurality of stages in the vertical direction and can move up and down in conjunction with each other. Although not shown, the shutter 12 is opened and closed by an opening / closing drive device including a dust-proof pulley and a timing belt, for example. It is configured to move up and down in conjunction with each other to open and close the entrance / exit 13.

  The storage chamber 21 has a surface facing the front surface (one of the opposite side surfaces) of the stacking gap Wd of the plate-like workpiece W of the accommodated carrier 2 as an air supply surface 21F, and the rear surface (the other of the opposite side surfaces) of the stacking gap Wd. The facing surface is an exhaust surface 21R, and the ventilation device 22 according to the present invention uniformly cleans air from the distributed air supply portion 24 provided on the air supply surface 21F to the entire opening surface of the stacking gap Wd of the plate-like workpieces W. A is discharged, and clean air A is flowed along all the stacking gaps Wd. Then, the clean air A after passing is uniformly discharged to the distributed exhaust part 25 of the exhaust surface 21R, and the exhausted clean air A is further exhausted from the distributed exhaust part 25 through the exhaust space part 26 to the bottom of the cart body 3. Drain into the mouth 23. The clean air A exhausted from the exhaust port 23 is exhausted to the ventilation floor (floor surface) F that sucks air in the passage of the clean room CR.

  As a result, in the storage chamber 21, the clean air A is uniformly fed along the stacking gap Wd, thereby preventing the clean air A from staying and effectively preventing the plate-like workpiece W from being contaminated. it can.

Note that the air supply surface 21F and the exhaust surface 21R of the storage chamber 21 may be reversed. The distributed air supply unit 24 includes an intake port 31 opened on the front surface of the carriage body 3, a high-efficiency particle removal filter 32 attached to the intake port 31, and the intake port 31 in the passage of the clean room CR. An intake fan 33 that sucks and pressurizes the air, a supply air pressurization chamber 34 that holds the clean air A at a predetermined air pressure P1, and clean air A in the supply air pressurization chamber 34 from a number of vent holes. An air supply dispersion plate 35 that uniformly discharges into the storage chamber 21 is provided. The air supply distribution plate 35 is formed in a size that spread across the entire surface of the stacked gap Wd plate workpiece W held by the carriage 21, uniform number of small-diameter vent hole is formed on the entire surface, The air pressure P1 of the clean air A in the air supply pressurizing chamber 34 can be held by the capability of the air supply fan 33 and the opening ratio of the air holes.

  Therefore, the clean air A sucked into the supply air pressurizing chamber 34 via the filter 32 by the intake fan 33 is held in the air P1, and the clean air A is transferred from the ventilation holes of the supply air dispersion plate 35 to the plate-like workpiece W. It can supply uniformly to the opening surface of the stacking gap Wd.

  The dispersion exhaust section 25 is composed of an exhaust dispersion plate 36 disposed on the exhaust surface 21R and a hollow exhaust pressure regulating chamber 37 formed on the rear surface side of the exhaust dispersion plate 36. The exhaust dispersion plate 36 is formed in the same size as the air supply dispersion plate 35, and a large number of small-diameter vent holes are uniformly formed over the entire surface. The vent holes of the exhaust dispersion plate 36 are formed to have an opening ratio that can hold the storage chamber 21 at an air pressure P2 that is lower than the air pressure P1 of the supply air pressurization chamber 34 and higher than the air pressure P of the passage of the clean room CR. Has been. Thereby, the clean air A discharged from the opening surface of the stacking gap Wd of the plate-like workpieces W held by the transporter 2 can be discharged uniformly from the exhaust dispersion plate 36 to the exhaust pressure regulating chamber 37. Here, if the air pressure in the exhaust space 26 is P3, the relationship between the ventilation device 22 and the clean air pressure in the passage is P1> P2> P3> P.

  A pair of left and right guide rails 15 for guiding the transporter 2 are attached to the bottom plate 14 of the storage chamber 21 on both the front and rear sides. In the bottom plate 14 inside the guide rail 15, roller openings 16 are formed at regular intervals in the width direction, and transfer rollers 17 are respectively arranged in the roller openings 16. These transfer rollers 17 are configured to be able to be transferred from the loading / unloading port 13 by being rotationally driven around an axial center in the front-rear direction by a transfer driving device (not shown). The roller opening 16 communicates with the exhaust port 23 through the exhaust space 26, and a part of the clean air A in the storage chamber 21 is transferred from the roller opening 16 to the exhaust port 23 through the exhaust space 26. It is configured to discharge. With this configuration, dust generated at the sliding contact portion between the transfer roller 17 and the transporter 2 and the sliding contact portion of the shutter 12 can be discharged from the roller opening portion 16 to the exhaust port 23.

  In the storage chamber 21, when the height of the plate-like workpiece W held by the transporter 2 is low, a wide space is formed above the uppermost plate-like workpiece W. There is a problem that eddy currents or the like are likely to stay and the plate-like workpiece W is easily contaminated. In order to solve this, a movable rectifying plate 42 that can be moved up and down by a rectifying plate elevating device 41 is disposed on the ceiling of the storage chamber 21.

  That is, above the uppermost plate-like workpiece W, there is a rectifying gap Wc that is the same as or larger than the stacking gap Wd of the plate-like workpieces W held by the transporter 2 but does not generate eddy currents. By arranging 42, the clean air A is flowed into the rectifying gap Wc, thereby preventing the uppermost plate-like workpiece W from being contaminated.

  As shown in FIG. 4, the rectifying plate lifting / lowering device 41 includes a bellows-like telescopic cylinder 41b in which a suspension spring 41a is inserted from at least four corner positions of the ceiling plate 21a of the storage chamber 21 into the movable rectifying plate 42. By connecting and supplying pressurized air from an air unit (not shown) mounted on the cart body 1 to the telescopic cylinder 41b through the port 41c, the telescopic cylinder 41b is resisted against the suspension spring 41a. The rectification gap Wc can be formed by extending and contracting and moving the movable rectifying plate 42 up and down.

  FIG. 5 shows another embodiment of the current plate elevating device. This rectifying plate lifting / lowering device 51 is attached to the ball screw shaft 51a suspended from the ceiling plate 21a of the storage chamber 21 in the vicinity of the four corner positions of the storage chamber 21 and the four corner positions of the movable rectifying plate 42 and attached to the ball screw shaft 51a. Each screw member 52b is screwed together, and the ball screw shaft 51a is driven by a reduction gear 51c. Thereby, there can exist an effect similar to the previous baffle plate raising / lowering apparatus 41. FIG.

Furthermore, as still another embodiment of the rectifying plate lifting / lowering device, similarly to the opening / closing driving device of the shutter 12, it can be constituted by a dustproof timing belt and a pulley.
According to the above-described embodiment, the ventilation device 22 of the storage chamber 21 is uniformly distributed over the entire opening surface of the stacking gap Wd by stacking the clean air A on the front surface of the plate-like workpiece W from the distributed air supply portion 24 of the air supply surface 21F. Since clean air is blown in and flows along the front and back surfaces of each plate-like workpiece W, the clean air A after passing through the stacking gap Wd is uniformly discharged from the distributed exhaust portion 25 on the exhaust surface 21R. The plate-like workpiece W can be effectively prevented from being contaminated without the swirl of the clean air A occurring or staying in the stacking gap Wd of the plate-like workpiece A.

  In the distributed air supply unit 24, the clean air A sucked by the intake fan 33 is temporarily stored in the air supply pressurizing chamber 34 to increase the air pressure, so that the clean air A can be uniformly distributed from the air holes of the air supply dispersion plate 35. Can be released. Further, the clean air A after passing through the stacking gap Wd of the plate-like workpieces W can be exhausted smoothly and smoothly from the vent holes of the exhaust dispersion plate 36 to the exhaust pressure regulating chamber 37, and the plate-like workpieces W are contaminated. Can be prevented.

  Further, since a part of the clean air A in the storage chamber 21 is discharged from the roller opening 16 to the exhaust port 23 via the exhaust space 26, the sliding contact portion between the transfer roller 17 and the transporter 2 and the shutter 12. Dust generated at the sliding contact portion can be smoothly discharged from the storage chamber 21, and contamination of the plate-like workpiece W can be prevented.

  Furthermore, when a large space in which clean air A is likely to stay is formed above the uppermost plate-like workpiece W, the movable rectifying plate 42 is lowered by the rectifying plate elevating device 41 to move the movable rectifying plate 42 and the uppermost plate. By forming a rectification gap Wc for flowing clean air A between the rectified workpiece W, clean air A can be circulated through the rectification gap Wc, and contamination of the uppermost plate-like workpiece W can be prevented. It can be effectively prevented.

  In the carrier 2 of the above embodiment, the plurality of plate-like workpieces W in the horizontal posture are held in a plurality of stages in the vertical direction with a plurality of stacking gaps Wd, but as shown in FIG. The plate-like workpieces W may be held in a stacked manner with a gap Wd in the width direction (left and right direction), and as shown in FIG. The stacking gap Wd may be opened in the (left-right direction) and held in a stack.

It is a side view which shows embodiment of the ventilation apparatus of the automatic guided device which concerns on this invention. It is sectional drawing of planar view which shows the storage chamber of an automatic guided vehicle. It is a schematic perspective view explaining the holding | maintenance state of the plate-shaped workpiece of the portable device in a storage chamber. It is sectional drawing of the side view explaining a baffle plate raising / lowering apparatus. It is sectional drawing of the side view explaining embodiment of another baffle plate raising / lowering apparatus. It is a schematic perspective view explaining the other holding state of the plate-shaped workpiece of a transporter. It is a schematic perspective view explaining the other holding state of the plate-shaped workpiece of a carrier.

Explanation of symbols

W Plate-like work Wd Stacking gap Wc Rectification gap A Clean air CR Clean room F Ventilated floor 1 Automated guided vehicle 2 Transporter 3 Dolly body 4 Traveling wheel 12 Shutter 13 Loading / unloading port 14 Floor plate 15 Guide rail 16 Roller opening 17 Transfer roller 21 Storage chamber 21F Air supply surface 21R Exhaust surface 22 Ventilator 23 Exhaust port 24 Dispersed air supply unit 25 Distributed exhaust unit 26 Exhaust space unit 31 Inlet port 32 Filter 33 Intake fan 34 Supply air pressurization chamber 35 Supply air dispersion plate 36 Exhaust Dispersion plate 37 Exhaust pressure adjustment chamber 41 Rectifier plate elevating device 42 Movable rectifier plate

Claims (3)

In a clean room, a ventilator for an automatic guided vehicle for transporting a transporter that holds a plurality of plate-shaped workpieces in a stacked state with a predetermined gap therebetween,
The carriage body having the traveling wheels is provided with a storage chamber for a carrier for holding the plate-like workpiece so that the stacking gap of the plate-like workpiece is opened at least on the symmetrical side surface,
One of the opposing side surfaces facing the symmetrical side surface where the stacking gap of the plate-like workpieces is opened in the storage chamber is the air supply surface, and the other is the exhaust surface,
At least one of a pair of opposing side surfaces of the other pair of storage chambers is formed with a doorway having an opening and closing door,
The air supply surface is provided with a distributed air supply unit that uniformly discharges clean air sucked from a clean room to the entire surface of the stack of plate-like workpieces,
The exhaust surface is provided with a distributed exhaust part that uniformly exhausts clean air discharged from the stacking gap of the plate-like workpieces,
Provided at the bottom of the main body of the carriage is an exhaust port for discharging clean air discharged from the distributed exhaust part toward the floor for traveling,
The distributed air supply unit holds an intake port that is opened on an outer surface of the carriage main body, an intake fan that sucks and pressurizes clean air filtered from the intake port through a filter, and maintains the air pressure of the clean air A supply air pressurizing chamber, and a supply air dispersion plate having a large number of ventilation holes for uniformly discharging clean air in the supply air pressurization chamber into the storage chamber,
The dispersion exhaust section includes an exhaust dispersion plate that uniformly discharges clean air from a large number of vent holes, and an exhaust pressure adjustment chamber that adjusts the air pressure of the clean air discharged from the exhaust dispersion plate. Ventilator for automated guided vehicles. In a clean room, a ventilator for an automatic guided vehicle for transporting a transporter that holds a plurality of plate-shaped workpieces in a stacked state with a predetermined gap therebetween,
The carriage body having the traveling wheels is provided with a storage chamber for a carrier for holding the plate-like workpiece so that the stacking gap of the plate-like workpiece is opened at least on the symmetrical side surface,
One of the opposing side surfaces facing the symmetrical side surface where the stacking gap of the plate-like workpieces is opened in the storage chamber is the air supply surface, and the other is the exhaust surface,
At least one of a pair of opposing side surfaces of the other pair of storage chambers is formed with a doorway having an opening and closing door,
The air supply surface is provided with a distributed air supply unit that uniformly discharges clean air sucked from a clean room to the entire surface of the stack of plate-like workpieces,
The exhaust surface is provided with a distributed exhaust part that uniformly exhausts clean air discharged from the stacking gap of the plate-like workpieces,
Provided at the bottom of the main body of the carriage is an exhaust port for discharging clean air discharged from the distributed exhaust part toward the floor for traveling,
A movable rectifying plate that can be raised and lowered, and a rectifying gap that can flow clean air between the movable rectifying plate and the uppermost plate-like work are formed on the ceiling of the storage room. A ventilation device for an automated guided vehicle, characterized in that a rectifying plate lifting and lowering device is provided. A plurality of transfer rollers for guiding the transporter are provided in a plurality of roller openings formed in the bottom plate of the storage chamber,
The ventilation of the automatic guided vehicle according to claim 1 or 2, wherein the roller opening and the exhaust port are communicated with each other so that a part of the clean air in the storage chamber is discharged from the exhaust port. apparatus.

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