JP5180765B2 - アルカリ現像感光性樹脂組成物及びこれを用いて形成した表示素子隔壁並びに表示素子 - Google Patents
アルカリ現像感光性樹脂組成物及びこれを用いて形成した表示素子隔壁並びに表示素子 Download PDFInfo
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- JP5180765B2 JP5180765B2 JP2008257275A JP2008257275A JP5180765B2 JP 5180765 B2 JP5180765 B2 JP 5180765B2 JP 2008257275 A JP2008257275 A JP 2008257275A JP 2008257275 A JP2008257275 A JP 2008257275A JP 5180765 B2 JP5180765 B2 JP 5180765B2
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- 238000005192 partition Methods 0.000 title claims description 34
- 238000000034 method Methods 0.000 claims description 52
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- 239000011737 fluorine Substances 0.000 claims description 40
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- 150000001875 compounds Chemical class 0.000 claims description 30
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- QGKMIGUHVLGJBR-UHFFFAOYSA-M (4z)-1-(3-methylbutyl)-4-[[1-(3-methylbutyl)quinolin-1-ium-4-yl]methylidene]quinoline;iodide Chemical compound [I-].C12=CC=CC=C2N(CCC(C)C)C=CC1=CC1=CC=[N+](CCC(C)C)C2=CC=CC=C12 QGKMIGUHVLGJBR-UHFFFAOYSA-M 0.000 description 3
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 3
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- 150000000000 tetracarboxylic acids Chemical class 0.000 description 1
- ATZHWSYYKQKSSY-UHFFFAOYSA-N tetradecyl 2-methylprop-2-enoate Chemical compound CCCCCCCCCCCCCCOC(=O)C(C)=C ATZHWSYYKQKSSY-UHFFFAOYSA-N 0.000 description 1
- UFDHBDMSHIXOKF-UHFFFAOYSA-N tetrahydrophthalic acid Natural products OC(=O)C1=C(C(O)=O)CCCC1 UFDHBDMSHIXOKF-UHFFFAOYSA-N 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- LDHQCZJRKDOVOX-UHFFFAOYSA-N trans-crotonic acid Natural products CC=CC(O)=O LDHQCZJRKDOVOX-UHFFFAOYSA-N 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- KOZCZZVUFDCZGG-UHFFFAOYSA-N vinyl benzoate Chemical compound C=COC(=O)C1=CC=CC=C1 KOZCZZVUFDCZGG-UHFFFAOYSA-N 0.000 description 1
- 229920001567 vinyl ester resin Polymers 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
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Description
CH2=C(Rn)−COO−Y−O-Rf (2)
(式中、Rnは水素またはメチル基を示し、Yはフッ素原子を含まない2価の有機基を示し、Rfは式(1)に示す含フッ素基である)
CH2=C(Rn)−COO−Y−O-Rf (2)
(式中、Rnは水素またはメチル基を示し、Yはフッ素原子を含まない2価の有機基を示し、Rfは、式(1)のフッ素含有基である)
CF9BuMA:CH2=C(CH3)COOCH2CH2CH2CH2OC9F17
CF9PEMA:CH2=C(CH3)COOCH2CH2OCOC6H4OC9F17
CFnMA:CH2=C(CH3)COOCH2CH2(CF2)nCF3 n=4〜10の混合物
CF9PHSt:CH2=CHC6H4OC9F17
PHSt:パラヒドロキシスチレン
IBMA:イソボルニルメタクリレート
2−HEMA:2−ヒドロキシエチルメタクリレート
GMA:グリシジルメタクリレート
4-HBMA:4−ヒドロキシブチルメタクリレート
MA: メタクリル酸
NPMI:n−フェニルマレイミド
BzMA:ベンジルメタクリレート
AIBN:アゾビスイソブチロニトリル
LM:ラウリルメルカプタン
攪拌機を備えた内容積1リットルの反応機にCF9PEMA(60.0g)、IBMA(18.45g)、4-HBMA(18.45g)、MA(3.10g)、重合開始剤AIBN(0.69g)、及び連鎖移動剤LM(1.70g)を仕込み、さらに固形分濃度が40wt%となるようにプロピレングリコールモノメチルアセテート(PGMEA)を加え、窒素雰囲気下に攪拌しながら、90℃にて14時間重合させた。降温後、固形分濃度が20wt%になるようにPGMEAにて希釈して、含フッ素樹脂A-1の溶液を得た。この溶液は室温に放置しておいても均一な溶液を呈していた。また、含フッ素樹脂A-1の重量平均分子量は8400であり、酸価は20mgKOH/1gポリマーであった。ただし、重量平均分子量は、THFを展開溶媒としたGPCにより求めた(ポリエチレングリコール換算)。
含フッ素樹脂A-1の合成において、原料の配合量を表1及び表2のように変更したほかは同様にして、含フッ素樹脂A-2〜A-14およびa-1〜a-4を得た。いずれの含フッ素樹脂Aにおいても式(1)に示した構造の置換基の含有量は20〜50重量%である。なお、表1及び表2に示した各成分の欄に記した数値の単位は「g」である。特性は、合成例1と同様にして重量平均分子量、酸価、ならびにPGMEA溶解性(20℃)を示した。
攪拌機を備えた内容積1リットルの反応機にIBMA(27.4g)、4-HBMA(13.5g)、MA(4.60g)、重合開始剤AIBN(0.69g)、及び連鎖移動剤LM(1.70g)を仕込み、さらに固形分濃度が40wt%となるようにプロピレングリコールモノメチルアセテート(PGMEA)を加え、窒素雰囲気下に攪拌しながら、90℃にて14時間重合させた。降温後、[(CF3)2CF]2C=CFCF3を19.1gとトリエチルアミン4gを加えて、さらに40℃にて12時間攪拌した。恒温後、溶液をメタノール中に投入し、減圧濾過により含フッ素樹脂A-15を50g得た。
前述A-1の20wt%PGMEA溶液100gと2−アクリロイルオキシエチルイソシアネート1.64g(MW=141.12、イソシアネート基/A-1中のヒドロキシル基=0.5mol/mol)、1,4-ジアザビシクロ[2,2,2]オクタ0.03gとを混合し、50℃にて12時間攪拌し、室温へ冷却した。このポリマー溶液A-1sは、IRによりNCO吸収(2730nm)の消失を確認した。
前述したA-2〜A-14各ポリマーの20wt%PGMEA溶液100gを用い、各ポリマーのヒドロキシル基に対して0.5mol/molとなるように2−アクリロイルオキシエチルイソシアネートを仕込んだ他は、合成例A-1sと同様に行い、ポリマーA-2s〜A-14sの各溶液を得た。
前述A-1の20wt%PGMEA溶液100gと2−アクリロイルオキシエチルイソシアネート4.1g(MW=141.12、イソシアネート基/A-1中のヒドロキシル基=1mol/mol)、1,4-ジアザビシクロ[2,2,2]オクタ0.03gとを混合し、50℃にて12時間攪拌し、室温へ冷却した。このポリマー溶液A-2s2は、IRによりNCO吸収(2730nm)の消失を確認した。
まず(A)成分を除く(B)〜(F)成分を表3及び4に記載した割合(重量部)で混合し、プロピレングリコールモノメチルエーテルアセテートを加えて固形分濃度20重量%となるようにした。引き続き、表3及び4記載の重量部で(A)成分溶液を加えた。次いで、2μmのポリプロピレン製メンブレンフィルターを用いて0.2kg/cm2加圧にてろ過し、アルカリ現像感光性樹脂組成物を調製した。表3及び4において、(A)成分及び(B)成分の( )内に、全固形分に対する配合割合をwt%で示した。(E)成分の配合割合については全固形分に対する(顔料/全固形分)wt%として別欄に示した。
(B)-1:フルオレン骨格を有するエポキシアクリレートの酸無水物重縮合物のプロピレングリコールモノメチルエーテルアセテート溶液(樹脂固形分濃度=56.1重量%、新日鐵化学社製 商品名V259ME)
(B)-2:重量平均分子量30000、酸価100(KOHmg/g)のN−エチルマレイミド/メタクリル酸/ベンジルメタクリレート共重合体のプロピレングリコールモノメチルエーテルアセテート溶液(樹脂固形分濃度=36.7重量%)(N−エチルマレイミド:メタクリル酸:ベンジルメタクリレート=29:20:51mol%)
(C)-1:ジペンタエリスリトールヘキサアクリレートとジペンタエリスリトールペンタアクリレートとの混合物(日本化薬社製 商品名 DPHA)
(D)-1:IRGACURE OXE-01 (チバ・スペシャルティ・ケミカルズ社製)
(D)-2:IRGACURE OXE-02 (チバ・スペシャルティ・ケミカルズ社製)
(E)-1:カーボンブラック濃度20重量%、高分子分散剤濃度5重量%のプロピレングリコールモノメチルエーテルアセテート分散液(固形分25%)
(F)-1:シランカップリング剤 S-510 (信越化学(株)製)
塗布異物:スピンコート後の塗膜に放射状スジが観察された場合を×<不良>、観察されなかった場合を○<良好>とした。
現像性:現像後の画素パターンを顕微鏡観察し、基板に対する剥離やパターンエッジ部分のギザツキが認められないものを○<良好>、認められるものを×<不良>と評価した。
塗膜表面粗度:現像、熱焼成後の塗膜の表面粗度(Ra)の値が、150Å未満を○<良好>、150Å以上を×<不良>と評価した。
パターン密着性:ピーリングテストで20μmパターンの剥がれが認められないものを○<良好>、認められるものを×<不良>と評価した。
PCT密着性:ポストベーク実施済みのパターン形成基板を、121℃、100%RH、2atm、及び24時間の条件下においてPCT(プレッシャー・クッカー)テストを実施後、20μmパターン部にセロハンテープを貼り付けピーリングテストを行うことでパターン密着性を評価した。
接触角測定:前述した同様の方法により、現像後にガラス基板上に黒色の10mm×10mm×2.1μmの四角パターンを形成した。この塗膜上ではブチルカルビトールアセテート(BCA)を用いて、または現像で抜けたガラス面上では水の静的接触角を測定した。
IJ(インクジェット)インキ塗布特性:この得られたマトリックス中にむかって、東芝テック製インクジェットヘッドを用い、粘度10mPa.sec、固形分濃度20%のカラーフィルター用グリーンインキを以下のように打ち込み、80℃にて1分間乾燥後、さらに230℃にてポストベークを行い、光学顕微鏡で塗工状態を観察した。
描画条件1;350×180μm画素ガラス上の中央部に42plのグリーンインキを滴下した。この時、撥インキ剤が無添加の比較例と同等のガラス面上での液広がりを示すものを○とした。
描画条件2;ポストベーク後平均膜厚保が1.8μmとなるようにグレーンインキをマトリックス中に滴下し、ポストベーク後に、マトリックス近くで光漏れが発生しているか、またはマトリックス上にインキ乾燥残りがあるか観察した。
まず(A)成分を除く(B)〜(D)成分ならびにYX-4000H(昭和シェル製;テトラメチルジフェニルエポキシ樹脂)を表5に記載した割合(重量部)で混合し、プロピレングリコールモノメチルエーテルアセテートを加えて固形分濃度20重量%となるようにした。引き続き、表5記載の重量部で(A)成分溶液を加えた。次いで、2μmのポリプロピレン製メンブレンフィルターを用いて0.2kg/cm2加圧にてろ過し、アルカリ現像感光性樹脂組成物を調製した。
Claims (11)
- 前記含フッ素樹脂(A)のほかに下記(B)〜(D)成分、
(B)一分子中に酸性基と2つ以上のエチレン性二重結合とを有するアルカリ現像性オリゴマー、
(C)少なくとも1分子中に3個以上のエチレン性二重結合を有する光重合性モノマー、及び
(D)光重合開始剤、
を必須成分として含む請求項1記載のアルカリ現像感光性樹脂組成物。 - 前記含フッ素樹脂(A)がエチレン性二重結合を有することを特徴とする請求項1又は2に記載のアルカリ現像感光性樹脂組成物。
- 前記含フッ素樹脂(A)が、下記一般式(2)で表される単量体の少なくとも1種30〜80重量部と、アルカリ可溶性基を有する単量体の少なくとも1種1〜30重量部とを共重合させてなることを特徴とする請求項1〜3のいずれかに記載のアルカリ現像感光性樹脂組成物。
CH2=C(Rn)−COO−Y−O-Rf (2)
(式中、Rnは水素またはメチル基を示し、Yはフッ素原子を含まない2価の有機基を示し、Rfは式(1)に示す含フッ素基である) - 前記(B)成分は、下記一般式(4)で表されるビスフェノール類から誘導される2個のグリシジルエーテル基を有するエポキシ化合物と(メタ)アクリル酸との反応物を更に多塩基酸カルボン酸又はその無水物と反応させて得られたアルカリ現像性不飽和基含有オリゴマーである請求項2記載のアルカリ現像感光性樹脂組成物。
- 請求項1〜6のいずれかのアルカリ現像感光性樹脂組成物に対して、
(E)黒色有機顔料、混色有機顔料及び遮光材からなる群から選ばれた少なくとも1種を分散してなる遮光性分散液を添加すると共に、全固形分100重量部に対して(E)成分が25〜60重量部配合されていることを特徴とする遮光性の感光性樹脂組成物。 - 請求項7に記載の表示素子向け隔壁形成用感光性樹脂組成物。
- 請求項8に記載のカラーフィルター隔壁形成用感光性樹脂組成物。
- 請求項8又は9に記載の感光性樹脂組成物を基板上に塗布し、乾燥した後、(a)紫外線露光装置による露光、(b)アルカリ水溶液による現像、及び(c)熱焼成の各工程を必須として得られる隔壁であって、膜厚が1.5〜3μmであることを特徴とする表示素子向け隔壁。
- 請求項10記載の隔壁内にインクジェット印刷法により画素を形成した表示素子。
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