JP5178769B2 - Polishing equipment - Google Patents

Description

  The present invention relates to a polishing apparatus for polishing a cutting tool tip made of, for example, single crystal diamond.

  In recent years, there has been an increasing demand for ultra-precision fine processing using single crystal diamond.

  Specifically, a lot of ultra-precise mold processing using a diamond tool and a diamond end mill is carried out, and since the mold to be molded (molding surface) requires processing accuracy of several tens of nanometers, The cutting edge of a diamond tool or a diamond end mill for cutting a die is required to have a processing accuracy at the nano level.

  By the way, conventionally, a polishing apparatus for automatically polishing a rounded cutting edge in the diamond cutting tool or the diamond end mill has been proposed.

  Specifically, as shown in, for example, Japanese Patent Application Laid-Open No. 56-15965 (hereinafter, “conventional example”), an object holding body for holding an object having a rounded portion to be polished, and the object holding body And a drive source for swinging the object holder, and the object held by the object holder is brought into contact with the polishing portion while being swung. This is a structure for polishing the polishing portion.

  However, in the conventional example, the vibration of the drive source for swinging the workpiece holder is transmitted to the workpiece holder, and the workpiece is shaken (blurring of the swing axis of the workpiece holder). This causes a problem that sufficient processing accuracy cannot be obtained.

JP-A-56-15965

  The present invention solves the above-mentioned problems, and provides an epoch-making polishing apparatus capable of reliably performing extremely high-precision polishing.

  The gist of the present invention will be described with reference to the accompanying drawings.

A polishing apparatus that polishes the curved portion to be polished 2 by abutting against the polishing portion 3 while swinging the workpiece 2 having the curved portion to be polished 2a held by the workpiece holding body 1. The rotary drive shaft 5 of the first drive source 4 for swinging the workpiece holding body 1 is connected to the workpiece holding body 1 to rotate the first drive source 4 to be polished. The first power transmission unit 7 for transmitting to the object holding body 1 is provided. The first power transmission unit 7 is connected to the first series installation unit 7A provided on the rotary drive shaft 5 and the first series installation unit 7A. It consists of a second continuous portion 7B that is continuously provided and provided on the workpiece holding body 1. The first continuous portion 7A has sandwiching portions 23a and 23b that sandwich the second continuous portion 7B from both sides. A plurality of first rolling elements 8 are annularly arranged between the sandwiched portions 23a, 23b and the second connecting portion 7B, and the first rolling elements 8 It relates to a polishing apparatus according to claim which is provided in the pressure contact state wherein the nip 23a by the urging of the urging body 16, 23b and the said second communication portion 7B.

Further, the polishing is performed such that the object to be polished 2 having the curved portion to be polished 2a held by the object to be polished holding body 1 is brought into contact with the polishing portion 3 while being swung and the curved portion to be polished 2 is polished. A rotation drive shaft 5 of a first drive source 4 for swinging the workpiece holder 1 connected to the workpiece holder 1 to rotate the first drive source 4 The first power transmission unit 7 is configured to transmit to the workpiece holder 1, and the first power transmission unit 7 includes a first series installation unit 7 </ b> A provided on the rotary drive shaft 5 and the first series installation unit. 7A, and a second continuous portion 7B provided on the workpiece holding body 1, and the second continuous portion 7B has a sandwiching portion for sandwiching the first continuous portion 7A from both sides, A plurality of first rolling elements 8 are arranged in an annular shape between the sandwiched portion and the first series of arranged portions, and the first rolling elements 8 are biased by the biasing body 16. Those of the polishing apparatus is characterized in that provided in the pressure contact state and more said nip a first communication portion 7A.

Further, the polishing is performed such that the object to be polished 2 having the curved portion to be polished 2a held by the object to be polished holding body 1 is brought into contact with the polishing portion 3 while being swung and the curved portion to be polished 2 is polished. A rotation drive shaft 5 of a first drive source 4 for swinging the workpiece holder 1 connected to the workpiece holder 1 to rotate the first drive source 4 The first power transmission unit 7 is configured to transmit to the workpiece holder 1, and the first power transmission unit 7 includes a first series installation unit 7 </ b> A provided on the rotary drive shaft 5 and the first series installation unit. the provided continuously to 7A consists of a second communication portion 7B provided in the object to be polished holder 1, a plurality of first rolling is between the first communication portion 7A and the second communication portion 7B element 8 is disposed in the annular, the first rolling elements 8 are held by rotation freely rolling element retaining means 9, also, the first rolling elements 8 urges the Tsukezeitai 16 Those of the polishing apparatus is characterized in that provided in the pressure contact state more and the first communication portion 7A and the second communication portion 7B.

Further, in the polishing apparatus according to any one of claims 1-3, wherein the first rolling movement body 8 is one of the polishing apparatus, which is a spherical body.

The polishing apparatus according to any one of claims 1 to 4 , wherein a single-crystal diamond cutting tool tip is employed as the object to be polished 2.

  Since the present invention is configured as described above, it becomes an epoch-making polishing apparatus capable of reliably performing extremely high-precision polishing as compared with the above-described conventional example.

It is use condition explanatory drawing of a present Example. It is operation | movement explanatory drawing of the principal part which concerns on a present Example. It is explanatory drawing of the principal part which concerns on a present Example. It is a perspective view of the principal part concerning a present Example. It is explanatory drawing of the principal part which concerns on a present Example. It is a disassembled perspective view of the principal part which concerns on a present Example. It is explanatory drawing of the principal part which concerns on a present Example. It is explanatory drawing of the principal part which concerns on a present Example.

  An embodiment of the present invention which is considered to be suitable will be briefly described with reference to the drawings showing the operation of the present invention.

  The object to be polished 1 is swung and the object 2 to be polished held by the object to be polished 1 is brought into contact with the polishing part 3 to polish the curved part 2a to be polished.

  When this polishing object 2 is swung and polished by the polishing unit 3, the vibration generated by the first drive source 4 is the first provided between the first series setting unit 7A and the second connecting unit 7B. It is absorbed by the rolling element 8 rolling.

  Therefore, the vibration of the drive source is not directly transmitted as in the above-described conventional example, and therefore the workpiece 2 can be polished with high accuracy.

  A specific embodiment of the present invention will be described with reference to the drawings.

  In this embodiment, an object to be polished 2 having a curved (R-shaped) object to be polished 2a held by the object to be polished holding body 1 is brought into contact with the polishing part 3 while being swung, and then the object to be polished 2a. Is for polishing. In this embodiment, a single crystal diamond cutting tool (blade) attached to the diamond tool 17 is employed as the workpiece 2, but the present invention is not limited to this.

  Specifically, an object moving unit 18 that holds and moves the object to be polished 2 in an apparatus main body equipped with a control unit that controls each operation site, and an object to be polished that is held by the object moving unit 18 It is an apparatus having a polishing unit 3 that contacts and polishes an object 2.

  The workpiece moving unit 18 is configured by providing the workpiece holding body 1 and the first drive source 4 on a cylindrical lifting body 19 which is provided in the apparatus main body through a suitable lifting means so as to be lifted and lowered.

  As shown in FIG. 1, the workpiece holder 1 is constructed by projecting a workpiece holder 21 at the tip of a shaft-like base 20 that is housed in the large diameter portion 19 </ b> A of the elevator 19. ing. In this embodiment, the shaft base 20 is provided with the axis of the shaft base 20 oriented in the horizontal direction, but the shaft core of the shaft base 20 may be provided in the vertical direction.

  A concave groove portion 20a is formed on the peripheral surface of the shaft-shaped base portion 20, and a locking protrusion portion 19a projecting inwardly toward the edge of the tip opening of the elevating body 19 is fitted and locked into the concave groove portion 20a. A bearing structure (not shown) is provided between the groove 20a and the locking projection 19a.

  Further, the base end portion of the shaft-like base portion 20 is provided with a second continuous portion 7B that is connected to a first continuous portion 7A provided on the rotation drive shaft 5 described later and constitutes the first power transmission portion 7. ing.

  As shown in FIGS. 1 and 2, the object to be polished holding part 21 is the object to be polished 2 at the tip part of the arm part 21a projecting from the tip part of the shaft-like base part 20 at a peripheral end position different from the axial center position. Is provided with a chuck portion 21b for detachably holding.

  Accordingly, the workpiece holding portion 21 is movable up and down (in the direction of arrow a in FIG. 2) by moving up and down the elevating body 19, and the shaft-like base portion 20 is moved in the left and right direction relative to the elevating body 19 (FIG. 2 in the direction of arrow b). Therefore, while the object to be polished 2 is held by the object to be polished 1, the object to be polished 1 is swung in the left and right direction by a predetermined angle and brought into contact with the polishing unit 3, so The portion to be polished 2a can be polished.

  As shown in FIG. 1, the first drive source 4 is a servo motor disposed at the rear end portion of the lifting body 19, and the driving front end portion 4 a of the first drive source 4 includes a rear end of the lifting body 19. The rotary drive shaft 5 accommodated in the small end-side diameter portion 19B is attached, and the distal end portion of the rotary drive shaft 5 is connected to the second connecting portion 7B provided at the base end portion of the shaft-like base portion 20 described above. In addition, a first series setting portion 7 </ b> A constituting the first power transmission portion 7 is provided. Reference numeral 22 denotes a bearing portion for bearing the rotary drive shaft 5, and 27 denotes a fastening member for fastening the tip of the rotary drive shaft 5 to an attachment member 23 described later.

  As shown in FIGS. 3 to 5, the first power transmission unit 7 includes a second continuous portion 7 </ b> B (a sandwiched portion 20 b) projecting from the base end portion of the shaft-shaped base portion 20, and the second continuous portion. It is composed of a first series of mounting portions 7A (pinching portions 23a and 23b) that are provided in a sandwiched state with respect to the mounting portion 7B and are provided at the tip of the rotary drive shaft 5.

  Therefore, when the first drive source 4 is driven to rotate, the sandwiching portions 23a and 23b are swung in the left-right direction so that the sandwiched portions projecting from the base end portion of the shaft-like base portion 20 sandwiched between the sandwiching portions 23a and 23b are sandwiched. The portion 20b swings in the left-right direction (the direction of arrow a in FIG. 5), and thus the workpiece holder 1 also swings in the left-right direction.

  Further, the sandwiching portions 23a and 23b serve as the sandwiched portion 20b of the workpiece holder 1 and sandwich the sandwiched portion 20b at a position different from the pivot axis position of the workpiece holder 1.

  This may cause a problem that, for example, a strong force is required for rocking when the structure in which the sandwiched portion 20b is continuously provided at the rocking axis position is used. In this respect, the present embodiment has a structure in which the sandwiching portions 23a and 23b are made to be the sandwiched portion 20b of the workpiece holding body 1 and are continuously provided at an outer position different from the pivot axis position of the workpiece holding body 1. Since it is employed, the workpiece holder 1 can be reliably swung even with a relatively weak force. Note that the sandwiching position of the sandwiching portions 23a and 23b with respect to the sandwiched portion 20b may be set to be the axial position of the first drive source 4 (axial position of the rotary drive shaft 5).

  Further, the first power transmission unit 7 includes a first rolling element 8 between the first serially arranged portion 7A (the sandwiching portions 23a and 23b) and the second continuous portion 7B (the sandwiched portion 20b) that overlap each other. Is provided.

  Specifically, the sandwiching portions 23a and 23b as the first series installation portion 7 are provided on the lower end side of the attachment member 23 attached to the sandwiched portion 20b as the second connecting portion 7B. The first rolling element 8 is disposed between the inner surfaces of the sandwiched portions 23a and 23b and the left and right side surfaces of the sandwiched portion 20b as the second connecting portion 7B facing the inner surfaces.

  Therefore, the first serially arranged portion 7A and the second continuous portion 7B are continuously provided only by the contact of the first rolling element 8.

  The first rolling elements 8 are appropriate metal spherical bodies, and are arranged in a plurality (eight) in an annular manner at positions spaced apart from each other by the rolling element holding means 9.

  As shown in FIGS. 6 and 7, the rolling element holding means 9 is formed by providing a plurality of (eight) through holes 9a in an appropriate metal disk body 9A, and each of the through holes 9a. Functions as a holding hole capable of rotatably holding the first rolling element 8. Reference numeral 9b denotes a fastening hole for connecting the disc body 9A to the sandwiching portions 23a and 23b via the fastening member 14.

  Moreover, the thickness of each disk body 9A is set to a thickness at which a part of the first rolling element 8 protrudes from the front and back surfaces of the disk body 9A when the first rolling element 8 is disposed in the through hole 9a. .

  Each of the disk bodies 9A is rotatably provided on the inner surface of each of the sandwiching portions 23a and 23b via the fastening member 14. The disc body 9A may be rotatably provided on the left and right side surfaces of the sandwiched portion 20b.

  Therefore, the first rolling element 8 is formed between the inner surface of each of the first serially arranged portions 7A (the sandwiching portions 23a and 23b) and the left and right side surfaces of the second continuous portion 7B (the sandwiched portion 20b) facing the inner surface. And is arranged so as to be revolved freely so that it is always in contact with both the first series-installed portion 7A and the second connecting portion 7B.

  Further, the first rolling element 8 is provided in a pressing contact state by the urging force of the urging body 16 with respect to the first series setting portion 7A and the second continuous setting portion 7B.

  Specifically, as shown in FIGS. 5 and 6, the receiving surface for receiving the first rolling element 8 on the inner surface of one of the sandwiching portions 23a is constituted by a receiving body 15 made of a separate body, and this receiving body 15 is attached. It is provided so as to be in pressure contact with the first rolling element 8 by urging the urging body 16 (coil spring).

  Therefore, the sandwiching portion 23a comes into contact with the sandwiched portion 20b in a pressed state by the biasing structure composed of the biasing body 16 and the receiving body 15, and this one sandwiching portion 23a has this biasing structure. As a result, the other sandwiching portion 23b also comes into contact with the sandwiched portion 20b in a pressed state.

  The other sandwiching portion 23b may also be provided with the urging structure comprising the urging body and the receiving body described above, and the first series-installed portion 7A is a sandwich that sandwiches the second connecting portion 7B from both sides. The first rolling elements 8 are provided between the sandwiching portions 23a and 23b and the second connecting portion 7B, but the second connecting portion 7B is provided in the first series. It is good also as a structure which has a pinching part which pinches | interposes part 7A from both sides, and the 1st rolling element 8 is provided between this pinching part and 7 A of continuous installation parts.

  As shown in FIG. 8, the polishing unit 3 has an upper surface of a slide body 10 that slides on a guide rail 25 with a polishing plate 24 having a circular shape in plan view that can be rotated via an appropriate second drive source 12. It is provided so as to be movable toward and away from the workpiece holder 1. Diamond powder is scattered on the surface of the polishing plate 24, and the object to be polished 2 a is polished by rubbing the object to be polished 2 against the surface of the polishing plate 24.

  Further, the slide body 10 is slidably provided by driving the second drive source 12.

  As shown in FIG. 8, the second drive source 12 rotates the screw rod portion 12b by driving the motor 12a, and moves the moving member 11 having a nut portion screwed to the screw rod portion 12b to the motor 12a. The moving member 11 and the slide body 10 are connected to each other via a second power transmission unit 13.

  The second power transmission unit 13 has the same structure as the first power transmission unit 7 described above.

  Specifically, as shown in FIG. 8, the fourth continuous portion 13B (the sandwiched portion 10a) projecting from the side of the slide body 10 and the fourth continuous portion 13B are connected in a sandwiched state. And a third connecting portion 13A (a sandwiching portion 26a) provided on the side of the protruding member 26 provided to protrude from the moving member 11, and this second power transmission portion 13 The drive is configured to be transmitted to the slide body 10.

  Accordingly, when the second drive source 12 is driven, the sandwiching portions 26a and 26b move in the left-right direction, and the sandwiched portion 10a protruding from the side portion of the slide body 10 is sandwiched between the sandwiching portions 26a and 26b. Therefore, the slide body 10 also moves in the left-right direction.

  Further, the second power transmission unit 13 is provided with a second rolling element between the third continuous portion 13A and the fourth continuous portion 13B that are superposed on each other.

  Specifically, the second portion is provided between the inner surfaces of the sandwiched portions 26a and 26b as the third continuous portion 13A and the left and right side surfaces of the sandwiched portion 10a as the fourth continuous portion 13B facing the inner surface. Rolling elements are provided.

  Accordingly, the third continuous portion 13A and the fourth continuous portion 13B are connected continuously only by contact of the second rolling elements.

  The second rolling elements are appropriate metal spherical bodies, and are arranged in a plurality (eight) in an annular manner at positions spaced apart from each other by means of the rolling element holding means.

  The rolling element holding means is formed by providing a plurality of (eight) through holes in an appropriate metal disk body in an annular shape, and each of these through holes is a holding that can hold the second rolling element rotatably. Functions as a hole.

  Moreover, the thickness of each disk body is set to a thickness at which a part of the second rolling element protrudes from the front and back surfaces of the disk body when the second rolling element is disposed in the through hole.

  Each of the disk bodies is rotatably provided on the inner surface of each of the sandwiching portions 26a and 26b via a fastening member. Note that the disc body may be rotatably provided on the left and right side surfaces of the sandwiched portion 10a.

  Therefore, the second rolling element is between the inner surface of each of the third continuous portions 13A (the sandwiching portions 26a and 26b) and the left and right side surfaces of the fourth continuous portion 13B (the sandwiched portion 10a) facing the inner surface. It is arranged so as to be rotatable and revolved so as to be always in contact with both the third connecting portion 13A and the fourth connecting portion 13B.

  Further, the second rolling element is provided in a pressing contact state by the urging force of the urging body with respect to the third continuous portion 13A and the fourth continuous portion 13B.

  Specifically, the receiving surface for receiving the second rolling element is formed as a separate receiving body on the inner surface of one of the sandwiched portions 26a, and this receiving body is rotated by the biasing body (coil spring). It is provided so as to be in pressure contact with the moving body.

  Accordingly, the sandwiching portion 26a comes into contact with the sandwiched portion 10a in a pressed state by the biasing structure including the biasing body and the receiving body, and this one sandwiching portion 26a has the biasing structure. Thus, the other sandwiching portion 26b also comes into contact with the sandwiched portion 10a in a pressed state.

  The other sandwiching part 26b may also be provided with the biasing structure composed of the aforementioned biasing body and receiving body, and the third connecting part 13A is a sandwiching part that sandwiches the fourth connecting part 13B from both sides. The first rolling elements are provided between the sandwiched portions 26a and 26b and the fourth connecting portion 13B. The fourth connecting portion 13B is a third connecting portion. It is good also as a structure which has a clamping part which clamps 13A from both sides, and a 2nd rolling element is provided between this clamping part and the 3rd connection part 13A.

  A polishing process of the object to be polished 2 using the polishing apparatus according to this embodiment having the above-described configuration will be described.

  While the diamond bit 17 is attached to the chuck portion 21b of the workpiece holder 1, the elevator 19 is lowered and brought into contact with the surface of the rotating polishing plate 24, and the workpiece holder 1 is swung left and right. When moved, the rounded portion 2a of the object to be polished 2 is polished (in this case, the polishing position can be changed as appropriate by sliding the polishing plate 24 as appropriate).

  When the polishing object 2 is swung and polished by the polishing unit 3, the vibration generated by the first drive source 4 is transmitted to the first power transmission unit 7 between the polishing object holder 1 and the rotary drive shaft 5. However, this vibration is absorbed by the rolling of the first rolling elements 8 provided between the first serially arranged portions 7A and the second connecting portions 7B (using the above-described first rolling elements 8). Absorbed by the bearing structure with unlimited freedom on the plane).

  After the polishing is completed, the elevating body 19 is raised, the polished diamond tool 17 is removed and replaced with another diamond tool 17, and the polishing operation is sequentially performed.

  Since the present embodiment is configured as described above, the first power transmission unit 7 of the first drive source 4 with respect to the workpiece holding body 1 has a contact continuous structure through the first rolling element 8. Unlike the conventional example, it is possible to prevent the vibration of the first drive source 4 from being transmitted to the workpiece holder 1 as much as possible (as much as possible to shake the swing axis of the workpiece holder 1). In addition, the continuous connection between the workpiece holding body 1 and the rotary drive shaft 5 is in contact with the first rolling element 8 and is not in non-contact. By achieving both nano-level polishing accuracy and high rigidity, extremely high-precision polishing can be realized. As a result of actual trials, it has been confirmed that the contour accuracy and fine shape of a diamond tip of 40 nanometer level can be stably obtained.

  Further, in this embodiment, the polishing unit 3 is provided so as to be slidable by sliding movement of the slide body 10, and a moving member 11 that is moved by driving of the second drive source 12 is connected to the slide body 10. The second power transmission unit 13 that transmits the drive of the second drive source 12 to the slide body 10 includes a third connecting portion 13A provided on the moving member 11, and a slide connected to the third connecting portion 13A. A fourth continuous portion 13B provided on the body 10, and a second rolling element is provided between the third continuous portion 13A and the fourth continuous portion 13B, and the third continuous portion 13A and the fourth Since the continuous portion 13B is continuously provided only by the contact of the second rolling element, the transmission of vibration generated by the second drive source 12 can be prevented as much as possible even when the polishing portion 3 moves. Higher-precision polishing can be realized.

  That is, the ball screw structure adopted as the second drive source 12 in this embodiment is a structure in which it is difficult to realize accurate linear motion due to the structure, and the vibration is generated. There is a concern that the vibration may be transmitted to the polishing unit 3 via the slide body 10 and may hinder the realization of high-precision polishing. In this respect, the present embodiment has the second drive source 12 based on the structure described above. As a result, it is possible to prevent as much as possible the vibration transmitted in the process and to achieve highly accurate polishing.

  Note that the present invention is not limited to this embodiment, and the specific configuration of each component can be designed as appropriate.

DESCRIPTION OF SYMBOLS 1 To-be-polished object holder 2 To-be-polished object 2a To-be-polished part 3 Polishing part 4 1st drive source 5 Rotation drive shaft 7 1st power transmission part 7A 1st series installation part 7B 2nd connection part 8 1st rolling element 9 Rolling element holding means
16 Energizing body
23a Clamping part
23b Clamping part

Claims (5)

A polishing apparatus for polishing a curved portion to be polished by contacting a polishing portion having a curved portion to be polished held by a workpiece holding body while swinging the workpiece. A first power transmission for transmitting a rotational drive of the first drive source to the workpiece holder by connecting a rotary drive shaft of a first drive source for swinging the workpiece holder to the workpiece holder. The first power transmission unit includes a first series installation part provided on the rotary drive shaft, and a second series installation provided on the workpiece holding body and provided on the first series installation part. And the first series of portions includes a sandwiching portion that sandwiches the second connecting portion from both sides, and a plurality of first rolling elements are interposed between the sandwiching portion and the second connecting portion. The first rolling element is provided in a pressing contact state between the sandwiching portion and the second connecting portion by the biasing force of the biasing member. Polishing and wherein the that. A polishing apparatus for polishing a curved portion to be polished by contacting a polishing portion having a curved portion to be polished held by a workpiece holding body while swinging the workpiece. A first power transmission for transmitting a rotational drive of the first drive source to the workpiece holder by connecting a rotary drive shaft of a first drive source for swinging the workpiece holder to the workpiece holder. The first power transmission unit includes a first series installation part provided on the rotary drive shaft, and a second series installation provided on the workpiece holding body and provided on the first series installation part. The second connecting portion has a sandwiching portion that sandwiches the first series of installed portions from both sides, and a plurality of first rolling elements are provided between the sandwiched portion and the first series of installed portions. The first rolling element is provided in a pressing contact state between the first series-installed portion and the sandwiching portion by the urging force of the urging member. Polishing and wherein the that. A polishing apparatus for polishing a curved portion to be polished by contacting a polishing portion having a curved portion to be polished held by a workpiece holding body while swinging the workpiece. A first power transmission for transmitting a rotational drive of the first drive source to the workpiece holder by connecting a rotary drive shaft of a first drive source for swinging the workpiece holder to the workpiece holder. The first power transmission unit includes a first series installation part provided on the rotary drive shaft, and a second series installation provided on the workpiece holding body and provided on the first series installation part. A plurality of first rolling elements are arranged in an annular shape between the first serially arranged part and the second continuous connecting part, and the first rolling element is held by a rolling element holding means capable of rotating freely. are, also, the first rolling elements are provided in the pressure contact state and the said first communication portion second communication portion by the urging of the urging member The polishing apparatus according to claim and. The polishing apparatus according to any one of claims 1 to 3, a polishing apparatus wherein said first rolling motion member is a spherical body. The polishing apparatus according to claim 1-4 any one, the polishing apparatus characterized by employing a single-crystal diamond byte chip as an object to be polished.

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