JP2011218509A - Polishing device - Google Patents

Polishing device Download PDF

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JP2011218509A
JP2011218509A JP2010091713A JP2010091713A JP2011218509A JP 2011218509 A JP2011218509 A JP 2011218509A JP 2010091713 A JP2010091713 A JP 2010091713A JP 2010091713 A JP2010091713 A JP 2010091713A JP 2011218509 A JP2011218509 A JP 2011218509A
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polishing apparatus
rolling element
polishing
polished
continuous
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JP5178769B2 (en
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Yasuo Takano
泰夫 高野
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ABICO GIJUTSU KENKYUSHO KK
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ABICO GIJUTSU KENKYUSHO KK
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Abstract

PROBLEM TO BE SOLVED: To provide an epoch-making polishing device that exhibits novel functional effects.SOLUTION: The polishing device rocks a workpiece 2 having a curved part to be polished 2a that is held by a workpiece holder 1, while bringing the workpiece into contact with a polishing part 3 so as to polish the curved part to be polished 2a. The device includes a first power transmitting unit 7 that connects a rotary drive shaft 5 of a first drive source 4 for rocking the workpiece holder 1 with the workpiece holder 1 so as to transmit a rotary drive of the first drive source 4 to the workpiece holder 1.

Description

本発明は、例えば単結晶ダイヤモンド製のバイト用チップを研磨するための研磨装置に関するものである。   The present invention relates to a polishing apparatus for polishing a cutting tool tip made of, for example, single crystal diamond.

近年、単結晶ダイヤモンドを使用した超精密微細加工の要求が高まっている。   In recent years, there has been an increasing demand for ultra-precision fine processing using single crystal diamond.

具体的には、ダイヤモンドバイトやダイヤモンドエンドミルを使った超精密金型加工が多く実施されており、成形する金型(成形面)には数十ナノレベルの加工精度が要求されることから、この金型の切削加工を行なうダイヤモンドバイトやダイヤモンドエンドミルの湾曲状(アール状)の刃先は、ナノレベルでの加工精度が要求されている。   Specifically, a lot of ultra-precise mold processing using a diamond tool and a diamond end mill is carried out, and since the mold to be molded (molding surface) requires processing accuracy of several tens of nanometers, The cutting edge of a diamond tool or a diamond end mill for cutting a die is required to have a processing accuracy at the nano level.

ところで、従来、このダイヤモンドバイトやダイヤモンドエンドミルにおけるアール状の刃先を自動で研磨する研磨装置が提案されている。   By the way, conventionally, a polishing apparatus for automatically polishing a rounded cutting edge in the diamond cutting tool or the diamond end mill has been proposed.

具体的には、例えば特開昭56−15965号(以下、従来例)のように、アール状の被研磨部を有する被研磨物を保持する被研磨物保持体と、この被研磨物保持体に連設され該被研磨物保持体を揺動せしめる駆動源とを有し、被研磨物保持体に保持された被研磨物を揺動させながら研磨部に当接させて該アール状の被研磨部を研磨する構造である。   Specifically, as shown in, for example, Japanese Patent Application Laid-Open No. 56-15965 (hereinafter, “conventional example”), an object holding body for holding an object having a rounded portion to be polished, and the object holding body And a drive source for swinging the object holder, and the object held by the object holder is brought into contact with the polishing portion while being swung. This is a structure for polishing the polishing portion.

しかしながら、従来例は、被研磨物保持体を揺動せしめる駆動源の振動が被研磨物保持体まで伝わり、この被研磨物保持体にブレ(被研磨物保持体の揺動軸芯のブレ)が生じてしまい、十分な加工精度が得られないという問題点があった。   However, in the conventional example, the vibration of the drive source for swinging the workpiece holder is transmitted to the workpiece holder, and the workpiece is shaken (blurring of the swing axis of the workpiece holder). This causes a problem that sufficient processing accuracy cannot be obtained.

特開昭56−15965号公報JP-A-56-15965

本発明は、上述の問題点を解決するもので、極めて高精度の研磨が確実に行われる画期的な研磨装置を提供するものである。   The present invention solves the above-mentioned problems, and provides an epoch-making polishing apparatus capable of reliably performing extremely high-precision polishing.

添付図面を参照して本発明の要旨を説明する。   The gist of the present invention will be described with reference to the accompanying drawings.

被研磨物保持体1に保持された湾曲状の被研磨部2aを有する被研磨物2を揺動させながら研磨部3に当接させて該湾曲状の被研磨部2を研磨する研磨装置であって、前記被研磨物保持体1を揺動せしめる第一駆動源4の回転駆動軸5を該被研磨物保持体1に連設して該第一駆動源4の回転駆動を該被研磨物保持体1に伝達する第一動力伝達部7を有し、この第一動力伝達部7は、前記回転駆動軸5に設けられる第一連設部7Aと、この第一連設部7Aに連設され前記被研磨物保持体1に設けられる第二連設部7Bとから成り、前記第一連設部7Aと前記第二連設部7Bとの間には第一転動体8が設けられ、前記第一連設部7Aと前記第二連設部7Bとは前記第一転動体8の接触によって連設されていることを特徴とする研磨装置に係るものである。   A polishing apparatus that polishes the curved portion to be polished 2 by abutting against the polishing portion 3 while swinging the workpiece 2 having the curved portion to be polished 2a held by the workpiece holding body 1. The rotary drive shaft 5 of the first drive source 4 for swinging the workpiece holding body 1 is connected to the workpiece holding body 1 to rotate the first drive source 4 to be polished. The first power transmission unit 7 for transmitting to the object holding body 1 is provided. The first power transmission unit 7 is connected to the first series installation unit 7A provided on the rotary drive shaft 5 and the first series installation unit 7A. It consists of the 2nd continuous connection part 7B provided in the said to-be-polished object holding body 1, and the 1st rolling element 8 is provided between the said 7th continuous installation part 7A and the said 2nd continuous connection part 7B. The polishing apparatus characterized in that the first series setting portion 7A and the second connecting portion 7B are continuously provided by contact of the first rolling element 8. A.

また、被研磨物保持体1に保持された湾曲状の被研磨部2aを有する被研磨物2を揺動させながら研磨部3に当接させて該湾曲状の被研磨部2を研磨する研磨装置であって、前記研磨部3はスライド体10のスライド移動によりスライド移動自在に設けられており、第二駆動源12の駆動により移動する移動部材11を前記スライド体10に連設して該第二駆動源12の駆動を該スライド体10に伝達する第二動力伝達部13を有し、この第二動力伝達部13は、前記移動部材11に設けられる第三連設部13Aと、この第三連設部13Aに連設され前記スライド体10に設けられる第四連設部13Bとから成り、前記第三連設部13Aと前記第四連設部13Bとの間には第二転動体が設けられ、前記第三連設部13Aと前記第四連設部13Bとは前記第二転動体の接触によって連設されていることを特徴とする研磨装置に係るものである。   Further, the polishing is performed such that the object to be polished 2 having the curved portion to be polished 2a held by the object to be polished holding body 1 is brought into contact with the polishing portion 3 while being swung and the curved portion to be polished 2 is polished. The polishing unit 3 is provided so as to be slidable by sliding movement of the slide body 10, and a moving member 11 that is moved by driving of the second drive source 12 is connected to the slide body 10. The second power transmission unit 13 transmits the drive of the second drive source 12 to the slide body 10, and the second power transmission unit 13 includes a third connecting portion 13A provided on the moving member 11, and It consists of a fourth continuous portion 13B provided on the slide body 10 and connected to the third continuous portion 13A. Between the third continuous portion 13A and the fourth continuous portion 13B, there is a second roll. A moving body is provided, and the third connecting portion 13A and the fourth connecting portion 13B are continuously provided by contact of the second rolling element. The present invention relates to a polishing apparatus.

また、請求項2記載の研磨装置において、前記被研磨物保持体1を揺動せしめる第一駆動源4の回転駆動軸5を該被研磨物保持体1に連設して該第一駆動源4の回転駆動を該被研磨物保持体1に伝達する第一動力伝達部7を有し、この第一動力伝達部7は、前記回転駆動軸5に設けられる第一連設部7Aと、この第一連設部7Aに連設され前記被研磨物保持体1に設けられる第二連設部7Bとから成り、前記第一連設部7Aと前記第二連設部7Bとの間には第一転動体8が設けられ、前記第一連設部7Aと前記第二連設部7Bとは前記第一転動体8の接触によって連設されていることを特徴とする研磨装置に係るものである。   3. The polishing apparatus according to claim 2, wherein a rotation drive shaft 5 of a first drive source 4 for swinging the workpiece holder 1 is connected to the workpiece holder 1 to connect the first drive source. 4 has a first power transmission unit 7 that transmits the rotational drive of 4 to the workpiece holder 1, and the first power transmission unit 7 includes a first series installation portion 7 A provided on the rotational drive shaft 5; It consists of the 2nd continuous connection part 7B provided in the said to-be-polished object holding body 1 and connected to this 1st continuous installation part 7A, Between the said 1st continuous installation part 7A and the said 2nd continuous connection part 7B. 1 is provided with a first rolling element 8, and the first continuous portion 7 </ b> A and the second continuous portion 7 </ b> B are continuously provided by contact of the first rolling element 8. Is.

また、請求項1〜3いずれか1項に記載の研磨装置において、前記第一転動体8若しくは前記第二転動体は複数で且つ環状に配されていることを特徴とする研磨装置に係るものである。   The polishing apparatus according to any one of claims 1 to 3, wherein the first rolling element 8 or the second rolling element is arranged in a plurality and in an annular shape. It is.

また、請求項1,3,4いずれか1項に記載の研磨装置において、前記第一連設部7Aは前記第二連設部7Bを両側から挟み込む挟み込み部23a,23bを有し、この挟み込み部23a,23bと前記第二連設部7Bとの間には前記第一転動体8が設けられていることを特徴とする研磨装置に係るものである。   Further, in the polishing apparatus according to any one of claims 1, 3, and 4, the first series portion 7 </ b> A includes sandwiching portions 23 a and 23 b that sandwich the second connecting portion 7 </ b> B from both sides. The first rolling element 8 is provided between the portions 23a, 23b and the second connecting portion 7B, which relates to a polishing apparatus.

また、請求項1,3,4いずれか1項に記載の研磨装置において、前記第二連設部7Bは前記第一連設部7Aを両側から挟み込む挟み込み部を有し、この挟み込み部と前記第一連設部との間には前記第一転動体8が設けられていることを特徴とする研磨装置に係るものである。   Further, in the polishing apparatus according to any one of claims 1, 3, and 4, the second continuous portion 7 </ b> B includes a sandwiching portion that sandwiches the first series installation portion 7 </ b> A from both sides, and the sandwiching portion and the The first rolling element 8 is provided between the first serially arranged portion and the polishing apparatus according to the present invention.

また、請求項1〜6いずれか1項に記載の研磨装置において、前記第一転動体8若しくは前記第二転動体は転動体保持手段9により保持されていることを特徴とする研磨装置に係るものである。   The polishing apparatus according to claim 1, wherein the first rolling element 8 or the second rolling element is held by a rolling element holding means 9. Is.

また、請求項7記載の研磨装置において、前記転動体保持手段9は自転自在に設けられていることを特徴とする研磨装置に係るものである。   The polishing apparatus according to claim 7, wherein the rolling element holding means 9 is provided so as to freely rotate.

また、請求項1,3,4,5,6,7,8いずれか1項に記載の研磨装置において、前記第一転動体8は付勢体16の付勢により前記第一連設部7Aと前記第二連設部7Bとに押圧接触状態に設けられていることを特徴とする研磨装置に係るものである。   Further, in the polishing apparatus according to any one of claims 1, 3, 4, 5, 6, 7, and 8, the first rolling element 8 is urged by the urging body 16 to form the first series-forming portion 7A. And a second continuous portion 7B in a pressing contact state.

また、請求項1〜9いずれか1項に記載の研磨装置において、前記第一転動体8若しくは前記第二転動体は球状体であることを特徴とする研磨装置に係るものである。   10. The polishing apparatus according to claim 1, wherein the first rolling element 8 or the second rolling element is a spherical body.

また、請求項1〜10いずれか1項に記載の研磨装置において、前記被研磨物2として単結晶ダイヤモンド製のバイト用チップを採用したことを特徴とする研磨装置に係るものである。   The polishing apparatus according to any one of claims 1 to 10, wherein a single-crystal diamond cutting tool chip is used as the object to be polished 2.

本発明は上述のように構成したから、前述した従来例に比し、極めて高精度の研磨が確実に行われる画期的な研磨装置となる。   Since the present invention is configured as described above, it becomes an epoch-making polishing apparatus capable of reliably performing extremely high-precision polishing as compared with the above-described conventional example.

本実施例の使用状態説明図である。It is use condition explanatory drawing of a present Example. 本実施例に係る要部の動作説明図である。It is operation | movement explanatory drawing of the principal part which concerns on a present Example. 本実施例に係る要部の説明図である。It is explanatory drawing of the principal part which concerns on a present Example. 本実施例に係る要部の斜視図である。It is a perspective view of the principal part concerning a present Example. 本実施例に係る要部の説明図である。It is explanatory drawing of the principal part which concerns on a present Example. 本実施例に係る要部の分解斜視図である。It is a disassembled perspective view of the principal part which concerns on a present Example. 本実施例に係る要部の説明図である。It is explanatory drawing of the principal part which concerns on a present Example. 本実施例に係る要部の説明図である。It is explanatory drawing of the principal part which concerns on a present Example.

好適と考える本発明の実施形態を、図面に基づいて本発明の作用を示して簡単に説明する。   An embodiment of the present invention which is considered to be suitable will be briefly described with reference to the drawings showing the operation of the present invention.

被研磨物保持体1を揺動させて該被研磨物保持体1で保持された被研磨物2を研磨部3に当接させて湾曲状の被研磨部2aを研磨する。   The object to be polished 1 is swung and the object 2 to be polished held by the object to be polished 1 is brought into contact with the polishing part 3 to polish the curved part 2a to be polished.

この被研磨物2を揺動させて研磨部3で研磨する際、第一駆動源4で生じる振動は、第一連設部7Aと第二連設部7Bとの間に設けられた第一転動体8が転動することで吸収される。   When this polishing object 2 is swung and polished by the polishing unit 3, the vibration generated by the first drive source 4 is the first provided between the first series setting unit 7A and the second connecting unit 7B. It is absorbed by the rolling element 8 rolling.

従って、前述した従来例のように駆動源の振動がダイレクトに伝わらず、よって、被研磨物2を高精度に研磨できることになる。   Therefore, the vibration of the drive source is not directly transmitted as in the above-described conventional example, and therefore the workpiece 2 can be polished with high accuracy.

本発明の具体的な一実施例について図面に基づいて説明する。   A specific embodiment of the present invention will be described with reference to the drawings.

本実施例は、被研磨物保持体1に保持された湾曲状(アール状)の被研磨部2aを有する被研磨物2を揺動させながら研磨部3に当接させて当該被研磨部2aを研磨するものである。尚、本実施例では、被研磨物2としてダイヤモンドバイト17に付設される単結晶のダイヤモンド製のバイト用チップ(刃物)を採用しているが、これに限られるものではない。   In this embodiment, an object to be polished 2 having a curved (R-shaped) object to be polished 2a held by the object to be polished holding body 1 is brought into contact with the polishing part 3 while being swung, and then the object to be polished 2a. Is for polishing. In this embodiment, a single crystal diamond cutting tool (blade) attached to the diamond tool 17 is employed as the workpiece 2, but the present invention is not limited to this.

具体的には、各作動部位を制御する制御部を内装した装置本体に被研磨物2を保持して移動せしめる被研磨物移動部18と、該被研磨物移動部18で保持された被研磨物2を当接させて研磨する研磨部3とを有する装置である。   Specifically, an object moving unit 18 that holds and moves the object to be polished 2 in an apparatus main body equipped with a control unit that controls each operation site, and an object to be polished that is held by the object moving unit 18 It is an apparatus having a polishing unit 3 that contacts and polishes an object 2.

被研磨物移動部18は、装置本体に適宜な昇降手段を介して昇降自在に設けられる筒状の昇降体19に被研磨物保持体1及び第一駆動源4を設けて構成されている。   The workpiece moving unit 18 is configured by providing the workpiece holding body 1 and the first drive source 4 on a cylindrical lifting body 19 which is provided in the apparatus main body through a suitable lifting means so as to be lifted and lowered.

被研磨物保持体1は、図1に図示したように昇降体19の先端側径大部19Aに収納される軸状基部20の先端部に被研磨物保持部21を突設して構成されている。尚、本実施例では軸状基部20を該軸状基部20の軸芯を横方向に向けて設けているが、軸状基部20の軸芯を縦方向に向けて設けるようにしても良い。   As shown in FIG. 1, the workpiece holder 1 is constructed by projecting a workpiece holder 21 at the tip of a shaft-like base 20 that is housed in the large diameter portion 19 </ b> A of the elevator 19. ing. In this embodiment, the shaft base 20 is provided with the axis of the shaft base 20 oriented in the horizontal direction, but the shaft core of the shaft base 20 may be provided in the vertical direction.

この軸状基部20の周面には凹溝部20aが形成され、この凹溝部20aには昇降体19の先端開口縁部に内方へ向けて突設した係止突部19aが嵌入係止されており、この凹溝部20aと係止突部19aとの間に図示省略のベアリング構造が具備せしめられている。   A concave groove portion 20a is formed on the peripheral surface of the shaft-shaped base portion 20, and a locking protrusion portion 19a projecting inwardly toward the edge of the tip opening of the elevating body 19 is fitted and locked into the concave groove portion 20a. A bearing structure (not shown) is provided between the groove 20a and the locking projection 19a.

また、軸状基部20の基端部には、後述する回転駆動軸5に設けられる第一連設部7Aに連設され第一動力伝達部7を構成する第二連設部7Bが設けられている。   Further, the base end portion of the shaft-like base portion 20 is provided with a second continuous portion 7B that is connected to a first continuous portion 7A provided on the rotation drive shaft 5 described later and constitutes the first power transmission portion 7. ing.

被研磨物保持部21は、図1,2に図示したように軸状基部20の先端部にして軸芯位置と異なる周端位置に突設されるアーム部21aの先端部に被研磨物2を着脱自在に保持するチャック部21bを設けて構成されている。   As shown in FIGS. 1 and 2, the object to be polished holding part 21 is the object to be polished 2 at the tip part of the arm part 21a projecting from the tip part of the shaft-like base part 20 at a peripheral end position different from the axial center position. Is provided with a chuck portion 21b for detachably holding.

従って、被研磨物保持部21は、昇降体19を昇降することで上下方向(図2中矢印a方向)に移動自在となり、また、昇降体19に対して軸状基部20を左右方向(図2中矢印b方向)に揺動されるものである。よって、被研磨物保持体1に被研磨物2を保持した状態で被研磨物保持体1を所定角度左右方向に揺動させて研磨部3に当接させることで、被研磨物2のアール状の被研磨部2aを研磨することができる。   Accordingly, the workpiece holding portion 21 is movable up and down (in the direction of arrow a in FIG. 2) by moving up and down the elevating body 19, and the shaft-like base portion 20 is moved in the left and right direction relative to the elevating body 19 (see FIG. 2 in the direction of arrow b). Therefore, while the object to be polished 2 is held by the object to be polished 1, the object to be polished 1 is swung in the left and right direction by a predetermined angle and brought into contact with the polishing unit 3, so The portion to be polished 2a can be polished.

第一駆動源4は、図1に図示したように昇降体19の後端部に配設されるサーボモーターであり、この第一駆動源4の駆動先端部4aには、昇降体19の後端側径小部19Bに収納される回転駆動軸5が付設され、この回転駆動軸5の先端部には前述した軸状基部20の基端部に設けた第二連設部7Bに連設され、第一動力伝達部7を構成する第一連設部7Aが設けられている。符号22は回転駆動軸5を軸受けするベアリング部、27は回転駆動軸5の先端部を後述する添設部材23に止着する止着部材である。   As shown in FIG. 1, the first drive source 4 is a servo motor disposed at the rear end portion of the lifting body 19, and the driving front end portion 4 a of the first drive source 4 includes a rear end of the lifting body 19. The rotary drive shaft 5 accommodated in the small end-side diameter portion 19B is attached, and the distal end portion of the rotary drive shaft 5 is connected to the second connecting portion 7B provided at the base end portion of the shaft-like base portion 20 described above. In addition, a first series setting portion 7 </ b> A constituting the first power transmission portion 7 is provided. Reference numeral 22 denotes a bearing portion for bearing the rotary drive shaft 5, and 27 denotes a fastening member for fastening the tip of the rotary drive shaft 5 to an attachment member 23 described later.

この第一動力伝達部7は、図3〜5に図示したように、軸状基部20の基端部に突設された第二連設部7B(被挟み込み部20b)と、この第二連設部7Bに対して挟み込み状態で連設され回転駆動軸5の先端部に設けられる第一連設部7A(挟み込み部23a,23b)とで構成されている。   As shown in FIGS. 3 to 5, the first power transmission unit 7 includes a second continuous portion 7 </ b> B (a sandwiched portion 20 b) projecting from the base end portion of the shaft-shaped base portion 20, and the second continuous portion. It is composed of a first series of mounting portions 7A (pinching portions 23a and 23b) that are provided in a sandwiched state with respect to the mounting portion 7B and are provided at the tip of the rotary drive shaft 5.

従って、第一駆動源4を回転駆動させると、挟み込み部23a,23bが左右方向に揺動することで該挟み込み部23a,23bに挟み込まれる軸状基部20の基端部に突設した被挟み込み部20bは左右方向(図5中矢印a方向)に揺動することになり、よって、被研磨物保持体1も左右方向に揺動することになる。   Therefore, when the first drive source 4 is driven to rotate, the sandwiching portions 23a and 23b are swung in the left-right direction so that the sandwiched portions projecting from the base end portion of the shaft-like base portion 20 sandwiched between the sandwiching portions 23a and 23b are sandwiched. The portion 20b swings in the left-right direction (the direction of arrow a in FIG. 5), and thus the workpiece holder 1 also swings in the left-right direction.

また、挟み込み部23a,23bは、被研磨物保持体1の被挟み込み部20bにして該被研磨物保持体1の揺動軸芯位置と異なる位置において被挟み込み部20bを挟み込むものである。   Further, the sandwiching portions 23a and 23b serve as the sandwiched portion 20b of the workpiece holder 1 and sandwich the sandwiched portion 20b at a position different from the pivot axis position of the workpiece holder 1.

これは、仮に被挟み込み部20bの揺動軸芯位置で連設する構造とした場合、揺動させる為には強い力が必要であるなどの問題点が生じ得る。この点、本実施例は、挟み込み部23a,23bを被研磨物保持体1の被挟み込み部20bにして該被研磨物保持体1の揺動軸芯位置と異なる外側位置において連設する構造を採用したから、比較的弱い力であっても確実に被研磨物保持体1を揺動させることができることになる。尚、挟み込み部23a,23bにおける被挟み込み部20bに対する挟み込み位置は、第一駆動源4の軸芯位置(回転駆動軸5の軸芯位置)となるように設定するようにしても良い。   This may cause a problem that, for example, a strong force is required for rocking when the structure in which the sandwiched portion 20b is continuously provided at the rocking axis position is used. In this respect, the present embodiment has a structure in which the sandwiching portions 23a and 23b are made to be the sandwiched portion 20b of the workpiece holding body 1 and are continuously provided at an outer position different from the pivot axis position of the workpiece holding body 1. Since it is employed, the workpiece holder 1 can be reliably swung even with a relatively weak force. Note that the sandwiching position of the sandwiching portions 23a and 23b with respect to the sandwiched portion 20b may be set to be the axial position of the first drive source 4 (axial position of the rotary drive shaft 5).

また、第一動力伝達部7は、互いに重合する第一連設部7A(挟み込み部23a,23b)と第二連設部7B(被挟み込み部20b)との間には第一転動体8が設けられている。   Further, the first power transmission unit 7 includes a first rolling element 8 between the first serially arranged portion 7A (the sandwiching portions 23a and 23b) and the second continuous portion 7B (the sandwiched portion 20b) that overlap each other. Is provided.

具体的には、第一連設部7としての挟み込み部23a,23bは、第二連設部7Bとしての被挟み込み部20bに添設される添設部材23の下端側に設けたもので、この挟み込み部23a,23b夫々の内面と、該内面と対向する第二連設部7Bとしての被挟み込み部20bの左右側面との間に第一転動体8が配設されている。   Specifically, the sandwiching portions 23a and 23b as the first series installation portion 7 are provided on the lower end side of the attachment member 23 attached to the sandwiched portion 20b as the second connecting portion 7B. The first rolling element 8 is disposed between the inner surfaces of the sandwiched portions 23a and 23b and the left and right side surfaces of the sandwiched portion 20b as the second connecting portion 7B facing the inner surfaces.

従って、第一連設部7Aと第二連設部7Bとは第一転動体8の接触のみによって連設されている。   Therefore, the first serially arranged portion 7A and the second continuous portion 7B are continuously provided only by the contact of the first rolling element 8.

この第一転動体8は適宜な金属製の球状体であり、転動体保持手段9を介して互いに等間隔の離れた位置にして複数(8個)環状に並設されている。   The first rolling elements 8 are appropriate metal spherical bodies, and are arranged in a plurality (eight) in an annular manner at positions spaced apart from each other by the rolling element holding means 9.

転動体保持手段9は、図6,7に図示したように適宜な金属製の円板体9Aに複数(8個)の貫通孔9aを環状に設けて構成されており、この各貫通孔9aは第一転動体8を回転自在に保持し得る保持孔として機能する。符号9bは円板体9Aを挟み込み部23a,23bに止着部材14を介して連結する際の止着孔である。   As shown in FIGS. 6 and 7, the rolling element holding means 9 is formed by providing a plurality of (eight) through holes 9a in an appropriate metal disk body 9A, and each of the through holes 9a. Functions as a holding hole capable of rotatably holding the first rolling element 8. Reference numeral 9b denotes a fastening hole for connecting the disc body 9A to the sandwiching portions 23a and 23b via the fastening member 14.

また、円板体9A夫々の厚みは、貫通孔9aに第一転動体8を配した際、円板体9Aの表裏面から第一転動体8の一部が突出する厚みに設定されている。   Moreover, the thickness of each disk body 9A is set to a thickness at which a part of the first rolling element 8 protrudes from the front and back surfaces of the disk body 9A when the first rolling element 8 is disposed in the through hole 9a. .

また、円板体9A夫々は、止着部材14を介して挟み込み部23a,23b夫々の内面に自転自在に設けられている。尚、円板体9Aは被挟み込み部20bの左右側面に回動自在に設けても良い。   Each of the disk bodies 9A is rotatably provided on the inner surface of each of the sandwiching portions 23a and 23b via the fastening member 14. The disc body 9A may be rotatably provided on the left and right side surfaces of the sandwiched portion 20b.

従って、第一転動体8は、第一連設部7A(挟み込み部23a,23b)夫々の内面と、該内面と対向する第二連設部7B(被挟み込み部20b)の左右側面との間で自転自在にして公転自在に配設されており、第一連設部7A及び第二連設部7B双方に対して常時接触状態となるように設けられている。   Therefore, the first rolling element 8 is formed between the inner surface of each of the first serially arranged portions 7A (the sandwiching portions 23a and 23b) and the left and right side surfaces of the second continuous portion 7B (the sandwiched portion 20b) facing the inner surface. And is arranged so as to be revolved freely so that it is always in contact with both the first series-installed portion 7A and the second connecting portion 7B.

また、第一転動体8は、第一連設部7A及び第二連設部7Bに対して付勢体16の付勢により押圧接触状態に設けられている。   Further, the first rolling element 8 is provided in a pressing contact state by the urging force of the urging body 16 with respect to the first series setting portion 7A and the second continuous setting portion 7B.

具体的には、図5,6に図示したように一方の挟み込み部23aの内面にして第一転動体8を受ける受け面を別体から成る受け体15で構成し、この受け体15を付勢体16(コイルバネ)の付勢により第一転動体8に圧接するように設けている。   Specifically, as shown in FIGS. 5 and 6, the receiving surface for receiving the first rolling element 8 on the inner surface of one of the sandwiching portions 23a is constituted by a receiving body 15 made of a separate body, and this receiving body 15 is attached. It is provided so as to be in pressure contact with the first rolling element 8 by urging the urging body 16 (coil spring).

従って、この付勢体16と受け体15とからなる付勢構造により挟み込み部23aは被挟み込み部20bに対して押圧状態で接することになり、この一方の挟み込み部23aがこの付勢構造を具備することで他方の挟み込み部23bも被挟み込み部20bに対して押圧状態で接することになる。   Therefore, the sandwiching portion 23a comes into contact with the sandwiched portion 20b in a pressed state by the biasing structure composed of the biasing body 16 and the receiving body 15, and this one sandwiching portion 23a has this biasing structure. As a result, the other sandwiching portion 23b also comes into contact with the sandwiched portion 20b in a pressed state.

尚、他方の挟み込み部23bにも前述した付勢体と受け体とからなる付勢構造を具備せしめても良く、また、第一連設部7Aは第二連設部7Bを両側から挟み込む挟み込み部23a,23bを有し、この挟み込み部23a,23bと第二連設部7Bとの間には第一転動体8が設けられる構造としたが、第二連設部7Bは第一連設部7Aを両側から挟み込む挟み込み部を有し、この挟み込み部と第一連設部7Aとの間には第一転動体8が設けられる構造としても良い。   The other sandwiching portion 23b may also be provided with the urging structure comprising the urging body and the receiving body described above, and the first series-installed portion 7A is a sandwich that sandwiches the second connecting portion 7B from both sides. The first rolling elements 8 are provided between the sandwiching portions 23a and 23b and the second connecting portion 7B, but the second connecting portion 7B is provided in the first series. It is good also as a structure which has a pinching part which pinches | interposes part 7A from both sides, and the 1st rolling element 8 is provided between this pinching part and 7 A of continuous installation parts.

研磨部3は、図8に図示したように適宜な第二駆動源12を介して回動自在となる平面視円形状の研磨板24を、ガイドレール25上をスライド移動するスライド体10の上面に設けられており、被研磨物保持体1に対して接離移動自在に設けられている。この研磨板24の表面にはダイヤモンドパウダーが散りばめられており、この研磨板24の表面に被研磨物2を擦り合わせることで被研磨部2aを研磨する。   As shown in FIG. 8, the polishing unit 3 has an upper surface of a slide body 10 that slides on a guide rail 25 with a polishing plate 24 having a circular shape in plan view that can be rotated via an appropriate second drive source 12. It is provided so as to be movable toward and away from the workpiece holder 1. Diamond powder is scattered on the surface of the polishing plate 24, and the object to be polished 2 a is polished by rubbing the object to be polished 2 against the surface of the polishing plate 24.

また、スライド体10は、第二駆動源12の駆動によりスライド移動自在に設けられている。   Further, the slide body 10 is slidably provided by driving the second drive source 12.

この第二駆動源12は、図8に図示したようにモーター12aの駆動により螺子棒部12bを回動させ、該螺子棒部12bに螺合されるナット部を形成した移動部材11を該モーター12aの駆動により進退移動させる構造であり(所謂ボールネジ構造)、この移動部材11とスライド体10とは第二動力伝達部13を介して連設されている。   As shown in FIG. 8, the second drive source 12 rotates the screw rod portion 12b by driving the motor 12a, and moves the moving member 11 having a nut portion screwed to the screw rod portion 12b to the motor 12a. The moving member 11 and the slide body 10 are connected to each other via a second power transmission unit 13.

この第二動力伝達部13は前述した第一動力伝達部7と同構造である。   The second power transmission unit 13 has the same structure as the first power transmission unit 7 described above.

具体的には、図8に図示したようにスライド体10の側部に突設した第四連設部13B(被挟み込み部10a)と、この第四連設部13Bに対して挟み込み状態で連設され移動部材11に突設された突設部材26の側部に設けられた第三連設部13A(挟み込み部26a)とから成り、この第二動力伝達部13により第二駆動源12の駆動をスライド体10に伝達するように構成されている。   Specifically, as shown in FIG. 8, the fourth continuous portion 13B (the sandwiched portion 10a) projecting from the side of the slide body 10 and the fourth continuous portion 13B are connected in a sandwiched state. And a third connecting portion 13A (a sandwiching portion 26a) provided on the side of the protruding member 26 provided to protrude from the moving member 11, and this second power transmission portion 13 The drive is configured to be transmitted to the slide body 10.

従って、第二駆動源12を駆動させると、挟み込み部26a,26bが左右方向に移動し、該挟み込み部26a,26bにスライド体10の側部に突設した被挟み込み部10aが挟み込まれているから、スライド体10も左右方向に移動する。   Accordingly, when the second drive source 12 is driven, the sandwiching portions 26a and 26b move in the left-right direction, and the sandwiched portion 10a protruding from the side portion of the slide body 10 is sandwiched between the sandwiching portions 26a and 26b. Therefore, the slide body 10 also moves in the left-right direction.

また、第二動力伝達部13は、互いに重合する第三連設部13Aと第四連設部13Bとの間には第二転動体が設けられている。   Further, the second power transmission unit 13 is provided with a second rolling element between the third continuous portion 13A and the fourth continuous portion 13B that are superposed on each other.

具体的には、第三連設部13Aとしてのこの挟み込み部26a,26b夫々の内面と、該内面と対向する第四連設部13Bとしての被挟み込み部10aの左右側面との間に第二転動体が配設されている。   Specifically, the second portion is provided between the inner surfaces of the sandwiched portions 26a and 26b as the third continuous portion 13A and the left and right side surfaces of the sandwiched portion 10a as the fourth continuous portion 13B facing the inner surface. Rolling elements are provided.

従って、第三連設部13Aと第四連設部13Bとは第二転動体の接触のみによって連設されている。   Accordingly, the third continuous portion 13A and the fourth continuous portion 13B are connected continuously only by contact of the second rolling elements.

この第二転動体は適宜な金属製の球状体であり、転動体保持手段を介して互いに等間隔の離れた位置にして複数(8個)環状に並設されている。   The second rolling elements are appropriate metal spherical bodies, and are arranged in a plurality (eight) in an annular manner at positions spaced apart from each other by means of the rolling element holding means.

転動体保持手段は、適宜な金属製の円板体に複数(8個)の貫通孔を環状に設けて構成されており、この各貫通孔は第二転動体を回転自在に保持し得る保持孔として機能する。   The rolling element holding means is formed by providing a plurality of (eight) through holes in an appropriate metal disk body in an annular shape, and each of these through holes is a holding that can hold the second rolling element rotatably. Functions as a hole.

また、円板体夫々の厚みは、貫通孔に第二転動体を配した際、円板体の表裏面から第二転動体の一部が突出する厚みに設定されている。   Moreover, the thickness of each disk body is set to a thickness at which a part of the second rolling element protrudes from the front and back surfaces of the disk body when the second rolling element is disposed in the through hole.

また、円板体夫々は、止着部材を介して挟み込み部26a,26b夫々の内面に自転自在に設けられている。尚、円板体は被挟み込み部10aの左右側面に回動自在に設けても良い。   Each of the disk bodies is rotatably provided on the inner surface of each of the sandwiching portions 26a and 26b via a fastening member. Note that the disc body may be rotatably provided on the left and right side surfaces of the sandwiched portion 10a.

従って、第二転動体は、第三連設部13A(挟み込み部26a,26b)夫々の内面と、該内面と対向する第四連設部13B(被挟み込み部10a)の左右側面との間で自転自在にして公転自在に配設されており、第三連設部13A及び第四連設部13B双方に対して常時接触状態となるように設けられている。   Therefore, the second rolling element is between the inner surface of each of the third continuous portions 13A (the sandwiching portions 26a and 26b) and the left and right side surfaces of the fourth continuous portion 13B (the sandwiched portion 10a) facing the inner surface. It is arranged so as to be rotatable and revolved so as to be always in contact with both the third connecting portion 13A and the fourth connecting portion 13B.

また、第二転動体は、第三連設部13A及び第四連設部13Bに対して付勢体の付勢により押圧接触状態に設けられている。   Further, the second rolling element is provided in a pressing contact state by the urging force of the urging body with respect to the third continuous portion 13A and the fourth continuous portion 13B.

具体的には、一方の挟み込み部26aの内面にして第二転動体を受ける受け面を別体から成る受け体で構成し、この受け体を付勢体(コイルバネ)の付勢により第二転動体に圧接するように設けている。   Specifically, the receiving surface for receiving the second rolling element is formed as a separate receiving body on the inner surface of one of the sandwiched portions 26a, and this receiving body is rotated by the biasing body (coil spring). It is provided so as to be in pressure contact with the moving body.

従って、この付勢体と受け体とからなる付勢構造により挟み込み部26aは被挟み込み部10aに対して押圧状態で接することになり、この一方の挟み込み部26aがこの付勢構造を具備することで他方の挟み込み部26bも被挟み込み部10aに対して押圧状態で接することになる。   Accordingly, the sandwiching portion 26a comes into contact with the sandwiched portion 10a in a pressed state by the biasing structure including the biasing body and the receiving body, and this one sandwiching portion 26a has the biasing structure. Thus, the other sandwiching portion 26b also comes into contact with the sandwiched portion 10a in a pressed state.

尚、他方の挟み込み部26bにも前述した付勢体と受け体とからなる付勢構造を具備せしめても良く、また、第三連設部13Aは第四連設部13Bを両側から挟み込む挟み込み部26a,26bを有し、この挟み込み部26a,26bと第四連設部13Bとの間には第一転動体が設けられる構造としたが、第四連設部13Bは第三連設部13Aを両側から挟み込む挟み込み部を有し、この挟み込み部と第三連設部13Aとの間には第二転動体が設けられる構造としても良い。   The other sandwiching part 26b may also be provided with the biasing structure composed of the aforementioned biasing body and receiving body, and the third connecting part 13A is a sandwiching part that sandwiches the fourth connecting part 13B from both sides. The first rolling elements are provided between the sandwiched portions 26a and 26b and the fourth connecting portion 13B. The fourth connecting portion 13B is a third connecting portion. It is good also as a structure which has a clamping part which clamps 13A from both sides, and a 2nd rolling element is provided between this clamping part and the 3rd connection part 13A.

以上の構成からなる本実施例に係る研磨装置を使用した被研磨物2の研磨工程について説明する。   A polishing process of the object to be polished 2 using the polishing apparatus according to this embodiment having the above-described configuration will be described.

被研磨物保持体1に係るチャック部21bにダイヤモンドバイト17を装着した状態で昇降体19を降下し、回転する研磨板24の表面に当接させると共に、被研磨物保持体1を左右に揺動させると、被研磨物2のアール状の被研磨部2aが研磨される(この際、研磨板24を適宜スライド移動させることで研磨する位置が適宜変更し得る。)。   While the diamond bit 17 is attached to the chuck portion 21b of the workpiece holder 1, the elevator 19 is lowered and brought into contact with the surface of the rotating polishing plate 24, and the workpiece holder 1 is swung left and right. When moved, the rounded portion 2a of the object to be polished 2 is polished (in this case, the polishing position can be changed as appropriate by sliding the polishing plate 24 as appropriate).

この被研磨物2を揺動させて研磨部3で研磨する際、第一駆動源4で生じる振動は被研磨物保持体1と回転駆動軸5との第一動力伝達部7に伝達されるが、この振動は、第一連設部7A及び第二連設部7B同士間に設けられた第一転動体8が転動することで吸収される(前述した第一転動体8を用いた平面上に制限のない自由度を有する軸受構造により吸収される。)。   When the polishing object 2 is swung and polished by the polishing unit 3, the vibration generated by the first drive source 4 is transmitted to the first power transmission unit 7 between the polishing object holder 1 and the rotary drive shaft 5. However, this vibration is absorbed by the rolling of the first rolling elements 8 provided between the first serially arranged portions 7A and the second connecting portions 7B (using the above-described first rolling elements 8). Absorbed by the bearing structure with unlimited freedom on the plane).

研磨終了後、昇降体19を上昇させ研磨済みのダイヤモンドバイト17を取り外して他のダイヤモンドバイト17に取り替えて研磨作業を順次行う。   After the polishing is completed, the elevating body 19 is raised, the polished diamond tool 17 is removed and replaced with another diamond tool 17, and the polishing operation is sequentially performed.

本実施例は上述のように構成したから、被研磨物保持体1に対する第一駆動源4の第一動力伝達部7が第一転動体8を介しての接触連設構造であるから、前述した従来例と異なり、第一駆動源4の振動が被研磨物保持体1に伝達するのを可及的に防止でき(被研磨物保持体1の揺動軸芯のブレを可及的に防止することができる)、しかも、被研磨物保持体1と回転駆動軸5との連設は、第一転動体8を介して接触状態であって非接触とすることもないため、よって、ナノレベルの研磨精度と高剛性を両立することで極めて高精度な研磨が実現し得ることになる。実際に試してみたところ、40ナノレベルのダイヤモンドチップの輪郭精度と微細形状が安定的に得られることを確認している。   Since the present embodiment is configured as described above, the first power transmission unit 7 of the first drive source 4 with respect to the workpiece holding body 1 has a contact continuous structure through the first rolling element 8. Unlike the conventional example, it is possible to prevent the vibration of the first drive source 4 from being transmitted to the workpiece holder 1 as much as possible (as much as possible to shake the swing axis of the workpiece holder 1). In addition, the continuous connection between the workpiece holding body 1 and the rotary drive shaft 5 is in contact with the first rolling element 8 and is not in non-contact. By achieving both nano-level polishing accuracy and high rigidity, extremely high-precision polishing can be realized. As a result of actual trials, it has been confirmed that the contour accuracy and fine shape of a diamond tip of 40 nanometer level can be stably obtained.

また、本実施例は、研磨部3はスライド体10のスライド移動によりスライド移動自在に設けられており、第二駆動源12の駆動により移動する移動部材11を前記スライド体10に連設して該第二駆動源12の駆動を該スライド体10に伝達する第二動力伝達部13は、移動部材11に設けられる第三連設部13Aと、この第三連設部13Aに連設されスライド体10に設けられる第四連設部13Bとから成り、第三連設部13Aと第四連設部13Bとの間には第二転動体が設けられ、第三連設部13Aと第四連設部13Bとは第二転動体の接触によってのみ連設されているから、この研磨部3の移動においても第二駆動源12で生じる振動の伝わりを可及的に防止し得るから、より一層高精度な研磨が実現し得ることになる。   Further, in this embodiment, the polishing unit 3 is provided so as to be slidable by sliding movement of the slide body 10, and a moving member 11 that is moved by driving of the second drive source 12 is connected to the slide body 10. The second power transmission unit 13 that transmits the drive of the second drive source 12 to the slide body 10 includes a third connecting portion 13A provided on the moving member 11, and a slide connected to the third connecting portion 13A. A fourth continuous portion 13B provided on the body 10, and a second rolling element is provided between the third continuous portion 13A and the fourth continuous portion 13B, and the third continuous portion 13A and the fourth Since the continuous portion 13B is continuously provided only by the contact of the second rolling element, the transmission of vibration generated by the second drive source 12 can be prevented as much as possible even when the polishing portion 3 moves. Higher-precision polishing can be realized.

即ち、本実施例で第二駆動源12として採用したボールネジ構造は、その構造上、正確な直動性を実現することは困難とされ振動が生じる構造であり、第二駆動源12で発生する振動がスライド体10を介して研磨部3に伝達してしまい、高精度な研磨の実現の障害となり得る懸念があるが、この点、本実施例は、前述した構造から、第二駆動源12で生じる振動の伝わりを可及的に防止し、高精度な研磨を実現し得ることになる。   That is, the ball screw structure adopted as the second drive source 12 in this embodiment is a structure in which it is difficult to realize accurate linear motion due to the structure, and the vibration is generated. There is a concern that the vibration may be transmitted to the polishing unit 3 via the slide body 10 and may hinder the realization of high-precision polishing. In this respect, the present embodiment has the second drive source 12 based on the structure described above. As a result, it is possible to prevent as much as possible the vibration transmitted in the process and to achieve highly accurate polishing.

尚、本発明は、本実施例に限られるものではなく、各構成要件の具体的構成は適宜設計し得るものである。   Note that the present invention is not limited to this embodiment, and the specific configuration of each component can be designed as appropriate.

1 被研磨物保持体
2 被研磨物
2a 被研磨部
3 研磨部
4 第一駆動源
5 回転駆動軸
7 第一動力伝達部
7A 第一連設部
7B 第二連設部
8 第一転動体
9 転動体保持手段
10 スライド体
11 移動部材
12 第二駆動源
13 第二動力伝達部
13A 第三連設部
13B 第四連設部
16 付勢体
23a 挟み込み部
23b 挟み込み部
DESCRIPTION OF SYMBOLS 1 To-be-polished object holder 2 To-be-polished object 2a To-be-polished part 3 Polishing part 4 1st drive source 5 Rotation drive shaft 7 1st power transmission part 7A 1st series installation part 7B 2nd connection part 8 1st rolling element 9 Rolling element holding means
10 Slide body
11 Moving member
12 Second drive source
13 Second power transmission
13A Third connecting part
13B Fourth connecting section
16 Energizing body
23a Clamping part
23b Clamping part

Claims (11)

被研磨物保持体に保持された湾曲状の被研磨部を有する被研磨物を揺動させながら研磨部に当接させて該湾曲状の被研磨部を研磨する研磨装置であって、前記被研磨物保持体を揺動せしめる第一駆動源の回転駆動軸を該被研磨物保持体に連設して該第一駆動源の回転駆動を該被研磨物保持体に伝達する第一動力伝達部を有し、この第一動力伝達部は、前記回転駆動軸に設けられる第一連設部と、この第一連設部に連設され前記被研磨物保持体に設けられる第二連設部とから成り、前記第一連設部と前記第二連設部との間には第一転動体が設けられ、前記第一連設部と前記第二連設部とは前記第一転動体の接触によって連設されていることを特徴とする研磨装置。   A polishing apparatus for polishing a curved portion to be polished by contacting a polishing portion having a curved portion to be polished held by a workpiece holding body while swinging the workpiece. A first power transmission for transmitting a rotational drive of the first drive source to the workpiece holder by connecting a rotary drive shaft of a first drive source for swinging the workpiece holder to the workpiece holder. The first power transmission unit includes a first series installation part provided on the rotary drive shaft, and a second series installation provided on the workpiece holding body and provided on the first series installation part. A first rolling element is provided between the first series setting part and the second series connection part, and the first series setup part and the second series connection part are arranged in the first rolling unit. A polishing apparatus, wherein the polishing apparatus is continuously provided by contact of a moving body. 被研磨物保持体に保持された湾曲状の被研磨部を有する被研磨物を揺動させながら研磨部に当接させて該湾曲状の被研磨部を研磨する研磨装置であって、前記研磨部はスライド体のスライド移動によりスライド移動自在に設けられており、第二駆動源の駆動により移動する移動部材を前記スライド体に連設して該第二駆動源の駆動を該スライド体に伝達する第二動力伝達部を有し、この第二動力伝達部は、前記移動部材に設けられる第三連設部と、この第三連設部に連設され前記スライド体に設けられる第四連設部とから成り、前記第三連設部と前記第四連設部との間には第二転動体が設けられ、前記第三連設部と前記第四連設部とは前記第二転動体の接触によって連設されていることを特徴とする研磨装置。   A polishing apparatus for polishing a curved portion to be polished by contacting a polishing portion having a curved portion to be polished held by a workpiece holding body while swinging the workpiece. The slide part is slidably moved by the slide movement of the slide body, and a moving member that moves by the drive of the second drive source is connected to the slide body to transmit the drive of the second drive source to the slide body. A second power transmission portion, and the second power transmission portion includes a third continuous portion provided on the moving member, and a fourth continuous portion provided on the slide body and provided on the third continuous portion. A second rolling element is provided between the third continuous portion and the fourth continuous portion, and the third continuous portion and the fourth continuous portion are defined by the second continuous portion. A polishing apparatus, wherein the polishing apparatus is continuously provided by contact of rolling elements. 請求項2記載の研磨装置において、前記被研磨物保持体を揺動せしめる第一駆動源の回転駆動軸を該被研磨物保持体に連設して該第一駆動源の回転駆動を該被研磨物保持体に伝達する第一動力伝達部を有し、この第一動力伝達部は、前記回転駆動軸に設けられる第一連設部と、この第一連設部に連設され前記被研磨物保持体に設けられる第二連設部とから成り、前記第一連設部と前記第二連設部との間には第一転動体が設けられ、前記第一連設部と前記第二連設部とは前記第一転動体の接触によって連設されていることを特徴とする研磨装置。   3. The polishing apparatus according to claim 2, wherein a rotation drive shaft of a first drive source for swinging the object holding body is connected to the object holding body to rotate the first drive source. A first power transmission portion for transmitting to the polished article holding body; the first power transmission portion; a first series-installed portion provided on the rotary drive shaft; A second continuous portion provided on the polished article holding body, a first rolling element is provided between the first continuous portion and the second continuous portion, and the first continuous portion and the second continuous portion The polishing apparatus, wherein the second continuous portion is continuously provided by contact of the first rolling element. 請求項1〜3いずれか1項に記載の研磨装置において、前記第一転動体若しくは前記第二転動体は複数で且つ環状に配されていることを特徴とする研磨装置。   4. The polishing apparatus according to claim 1, wherein a plurality of the first rolling elements or the second rolling elements are arranged in a ring shape. 5. 請求項1,3,4いずれか1項に記載の研磨装置において、前記第一連設部は前記第二連設部を両側から挟み込む挟み込み部を有し、この挟み込み部と前記第二連設部との間には前記第一転動体が設けられていることを特徴とする研磨装置。   5. The polishing apparatus according to claim 1, wherein the first series portion includes a sandwiching portion that sandwiches the second connecting portion from both sides, and the sandwiching portion and the second connecting portion. A polishing apparatus, wherein the first rolling element is provided between the first and second portions. 請求項1,3,4いずれか1項に記載の研磨装置において、前記第二連設部は前記第一連設部を両側から挟み込む挟み込み部を有し、この挟み込み部と前記第一連設部との間には前記第一転動体が設けられていることを特徴とする研磨装置。   5. The polishing apparatus according to claim 1, wherein the second continuous portion includes a sandwiching portion that sandwiches the first series-installed portion from both sides, and the sandwiching portion and the first series-installed portion. A polishing apparatus, wherein the first rolling element is provided between the first and second portions. 請求項1〜6いずれか1項に記載の研磨装置において、前記第一転動体若しくは前記第二転動体は転動体保持手段により保持されていることを特徴とする研磨装置。   The polishing apparatus according to any one of claims 1 to 6, wherein the first rolling element or the second rolling element is held by a rolling element holding unit. 請求項7記載の研磨装置において、前記転動体保持手段は自転自在に設けられていることを特徴とする研磨装置。   8. The polishing apparatus according to claim 7, wherein the rolling element holding means is provided so as to freely rotate. 請求項1,3,4,5,6,7,8いずれか1項に記載の研磨装置において、前記第一転動体は付勢体の付勢により前記第一連設部と前記第二連設部とに押圧接触状態に設けられていることを特徴とする研磨装置。   The polishing apparatus according to any one of claims 1, 3, 4, 5, 6, 7, and 8, wherein the first rolling element is urged by an urging body to connect the first series of portions and the second continuous member. A polishing apparatus, wherein the polishing apparatus is provided in a pressing contact state with a mounting portion. 請求項1〜9いずれか1項に記載の研磨装置において、前記第一転動体若しくは前記第二転動体は球状体であることを特徴とする研磨装置。   The polishing apparatus according to claim 1, wherein the first rolling element or the second rolling element is a spherical body. 請求項1〜10いずれか1項に記載の研磨装置において、前記被研磨物として単結晶ダイヤモンド製のバイト用チップを採用したことを特徴とする研磨装置。   11. The polishing apparatus according to claim 1, wherein a single-crystal diamond cutting tool tip is adopted as the object to be polished.
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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS642853A (en) * 1987-06-23 1989-01-06 Toshiba Corp Tool holding device
JP2004019409A (en) * 2002-06-20 2004-01-22 Tama Engineering Kk Base isolation supporting device for building
JP2007203427A (en) * 2006-02-03 2007-08-16 Saitama Prefecture Thinning device and thinning forming method for drill

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS642853A (en) * 1987-06-23 1989-01-06 Toshiba Corp Tool holding device
JP2004019409A (en) * 2002-06-20 2004-01-22 Tama Engineering Kk Base isolation supporting device for building
JP2007203427A (en) * 2006-02-03 2007-08-16 Saitama Prefecture Thinning device and thinning forming method for drill

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