JP5173311B2 - インプリント方法、インプリント装置および半導体製造方法 - Google Patents

インプリント方法、インプリント装置および半導体製造方法 Download PDF

Info

Publication number
JP5173311B2
JP5173311B2 JP2007208266A JP2007208266A JP5173311B2 JP 5173311 B2 JP5173311 B2 JP 5173311B2 JP 2007208266 A JP2007208266 A JP 2007208266A JP 2007208266 A JP2007208266 A JP 2007208266A JP 5173311 B2 JP5173311 B2 JP 5173311B2
Authority
JP
Japan
Prior art keywords
mold
substrate
resin
distance
imprint
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2007208266A
Other languages
English (en)
Japanese (ja)
Other versions
JP2009043998A (ja
JP2009043998A5 (enExample
Inventor
信人 末平
淳一 関
真吾 奥島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2007208266A priority Critical patent/JP5173311B2/ja
Priority to US12/184,372 priority patent/US7708927B2/en
Publication of JP2009043998A publication Critical patent/JP2009043998A/ja
Priority to US12/726,375 priority patent/US7985061B2/en
Publication of JP2009043998A5 publication Critical patent/JP2009043998A5/ja
Application granted granted Critical
Publication of JP5173311B2 publication Critical patent/JP5173311B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/02—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles
    • B29C43/021—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles characterised by the shape of the surface
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C33/00—Moulds or cores; Details thereof or accessories therefor
    • B29C33/42—Moulds or cores; Details thereof or accessories therefor characterised by the shape of the moulding surface, e.g. ribs or grooves
    • B29C33/424—Moulding surfaces provided with means for marking or patterning
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/003—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor characterised by the choice of material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/02—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles
    • B29C43/14—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles in several steps
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/02—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles
    • B29C43/021—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles characterised by the shape of the surface
    • B29C2043/023—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles characterised by the shape of the surface having a plurality of grooves
    • B29C2043/025—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles characterised by the shape of the surface having a plurality of grooves forming a microstructure, i.e. fine patterning
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/02—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles
    • B29C43/14—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles in several steps
    • B29C2043/141—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles in several steps for making single layer articles
    • B29C2043/142—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles in several steps for making single layer articles by moving a single mould or the article progressively, i.e. portionwise
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/32—Component parts, details or accessories; Auxiliary operations
    • B29C43/36—Moulds for making articles of definite length, i.e. discrete articles
    • B29C43/361—Moulds for making articles of definite length, i.e. discrete articles with pressing members independently movable of the parts for opening or closing the mould, e.g. movable pistons
    • B29C2043/3615—Forming elements, e.g. mandrels or rams or stampers or pistons or plungers or punching devices
    • B29C2043/3634—Forming elements, e.g. mandrels or rams or stampers or pistons or plungers or punching devices having specific surface shape, e.g. grooves, projections, corrugations
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/02—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles
    • B29C43/04—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles using movable moulds

Landscapes

  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Mathematical Physics (AREA)
  • Theoretical Computer Science (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Shaping Of Tube Ends By Bending Or Straightening (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP2007208266A 2007-08-09 2007-08-09 インプリント方法、インプリント装置および半導体製造方法 Expired - Fee Related JP5173311B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2007208266A JP5173311B2 (ja) 2007-08-09 2007-08-09 インプリント方法、インプリント装置および半導体製造方法
US12/184,372 US7708927B2 (en) 2007-08-09 2008-08-01 Imprint method and imprint apparatus
US12/726,375 US7985061B2 (en) 2007-08-09 2010-03-18 Imprint apparatus having attitude control

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007208266A JP5173311B2 (ja) 2007-08-09 2007-08-09 インプリント方法、インプリント装置および半導体製造方法

Publications (3)

Publication Number Publication Date
JP2009043998A JP2009043998A (ja) 2009-02-26
JP2009043998A5 JP2009043998A5 (enExample) 2010-09-16
JP5173311B2 true JP5173311B2 (ja) 2013-04-03

Family

ID=40345719

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007208266A Expired - Fee Related JP5173311B2 (ja) 2007-08-09 2007-08-09 インプリント方法、インプリント装置および半導体製造方法

Country Status (2)

Country Link
US (2) US7708927B2 (enExample)
JP (1) JP5173311B2 (enExample)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5289006B2 (ja) * 2008-11-19 2013-09-11 株式会社東芝 パターン形成方法およびプログラム
NL2003875A (en) 2009-02-04 2010-08-05 Asml Netherlands Bv Imprint lithography method and apparatus.
JP5443070B2 (ja) 2009-06-19 2014-03-19 東京エレクトロン株式会社 インプリントシステム
JP2011025220A (ja) * 2009-06-24 2011-02-10 Tokyo Electron Ltd テンプレート処理装置、インプリントシステム、テンプレート処理方法、プログラム及びコンピュータ記憶媒体
JP2011009362A (ja) * 2009-06-24 2011-01-13 Tokyo Electron Ltd インプリントシステム、インプリント方法、プログラム及びコンピュータ記憶媒体
JP5060517B2 (ja) 2009-06-24 2012-10-31 東京エレクトロン株式会社 インプリントシステム
WO2011024700A1 (ja) * 2009-08-31 2011-03-03 コニカミノルタオプト株式会社 成形型、光学素子及び成形型の製造方法
JP5296641B2 (ja) * 2009-09-02 2013-09-25 東京エレクトロン株式会社 インプリント方法、プログラム、コンピュータ記憶媒体及びインプリント装置
WO2011040466A1 (ja) * 2009-10-01 2011-04-07 東京エレクトロン株式会社 テンプレート処理装置、インプリントシステム、テンプレート処理方法、及びコンピュータ記憶媒体
US8522712B2 (en) 2009-11-19 2013-09-03 Tokyo Electron Limited Template treatment method, program, computer storage medium, template treatment apparatus and imprint system
JP5611112B2 (ja) * 2010-05-21 2014-10-22 東京エレクトロン株式会社 インプリントシステム、インプリント方法、プログラム及びコンピュータ記憶媒体
JP5618663B2 (ja) * 2010-07-15 2014-11-05 株式会社東芝 インプリント用のテンプレート及びパターン形成方法
JP5145397B2 (ja) * 2010-11-02 2013-02-13 東京エレクトロン株式会社 テンプレート処理方法、プログラム、コンピュータ記憶媒体及びテンプレート処理装置
US10108086B2 (en) 2013-03-15 2018-10-23 Nanonex Corporation System and methods of mold/substrate separation for imprint lithography
WO2014145360A1 (en) * 2013-03-15 2014-09-18 Nanonex Corporation Imprint lithography system and method for manufacturing
JP6611450B2 (ja) * 2015-03-31 2019-11-27 キヤノン株式会社 インプリント装置、インプリント方法、及び物品の製造方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02113456A (ja) * 1988-10-20 1990-04-25 Mitsubishi Electric Corp ディスク基板製造装置
TW401618B (en) * 1998-09-23 2000-08-11 Nat Science Council Manufacture method of the dielectrics and the structure thereof
US6873087B1 (en) * 1999-10-29 2005-03-29 Board Of Regents, The University Of Texas System High precision orientation alignment and gap control stages for imprint lithography processes
AU2001297642A1 (en) * 2000-10-12 2002-09-04 Board Of Regents, The University Of Texas System Template for room temperature, low pressure micro- and nano-imprint lithography
JP3588633B2 (ja) * 2001-09-04 2004-11-17 独立行政法人産業技術総合研究所 インプリントリソグラフィー用移動ステージ
JP2005101201A (ja) * 2003-09-24 2005-04-14 Canon Inc ナノインプリント装置
US20050098534A1 (en) * 2003-11-12 2005-05-12 Molecular Imprints, Inc. Formation of conductive templates employing indium tin oxide
JP4455093B2 (ja) * 2004-02-20 2010-04-21 キヤノン株式会社 モールド、モールドを用いた加工装置及びモールドを用いた加工方法
JP4455092B2 (ja) * 2004-02-20 2010-04-21 キヤノン株式会社 加工装置及び加工方法
JP2007027361A (ja) * 2005-07-15 2007-02-01 Toppan Printing Co Ltd インプリント用モールド

Also Published As

Publication number Publication date
US20090039550A1 (en) 2009-02-12
US7708927B2 (en) 2010-05-04
JP2009043998A (ja) 2009-02-26
US20100173032A1 (en) 2010-07-08
US7985061B2 (en) 2011-07-26

Similar Documents

Publication Publication Date Title
JP5173311B2 (ja) インプリント方法、インプリント装置および半導体製造方法
CN1262883C (zh) 影印用于平版印刷工艺中的自动化液体分配的方法和系统
JP5265728B2 (ja) インプリントリソグラフィ
KR100963510B1 (ko) 압인 리소그래피 프로세스 및 시스템
EP1942374B1 (en) Imprint method for producing structure
US8318066B2 (en) Step and repeat imprint lithography process
US20060121728A1 (en) Method for fast filling of templates for imprint lithography using on template dispense
KR100863796B1 (ko) 임프린트 리소그래피를 위한 정렬
JP6300459B2 (ja) インプリント装置およびインプリント方法、それを用いた物品の製造方法
JP5366903B2 (ja) インプリントリソグラフィ方法及び装置
KR20200120766A (ko) 반도체 디바이스 패키지 제작 프로세스들을 위한 평탄화
JP7210155B2 (ja) 装置、方法、および物品製造方法
US11333969B2 (en) Imprint apparatus, imprint method, and article manufacturing method
US20190139789A1 (en) Apparatus for imprint lithography comprising a logic element configured to generate a fluid droplet pattern and a method of using such apparatus
US20200096863A1 (en) Method of fluid droplet offset and apparatus for imprint lithography
KR102571412B1 (ko) 평탄화 장치, 평탄화 방법 및 물품 제조 방법
KR102604061B1 (ko) 성형 장치, 성형 방법, 및 물품의 제조 방법
JP2019186347A (ja) 加工装置、インプリント装置、平坦化装置、および加工方法
JP2020129612A (ja) インプリント装置および物品製造方法
JP7669199B2 (ja) インプリント装置、インプリント方法、コンピュータプログラム、及び物品の製造方法
JP7446934B2 (ja) 型、平坦化装置、平坦化方法及び物品の製造方法
JP2025029466A (ja) 平坦化方法、および物品製造方法
JP7195789B2 (ja) 平坦化装置、及び物品の製造方法
JP2025038354A (ja) 成形装置、成形方法、および物品の製造方法。
KR20250163808A (ko) 평탄화 장치, 평탄화 방법, 및 물품 제조 방법

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20100802

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20100802

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20120210

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20120221

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20120418

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20121204

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20121227

R151 Written notification of patent or utility model registration

Ref document number: 5173311

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R151

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20160111

Year of fee payment: 3

RD03 Notification of appointment of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: R3D03

LAPS Cancellation because of no payment of annual fees