JP5164984B2 - サブナノ〜ナノメートル範囲の高位置分解能を有する調節装置 - Google Patents
サブナノ〜ナノメートル範囲の高位置分解能を有する調節装置 Download PDFInfo
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- JP5164984B2 JP5164984B2 JP2009524182A JP2009524182A JP5164984B2 JP 5164984 B2 JP5164984 B2 JP 5164984B2 JP 2009524182 A JP2009524182 A JP 2009524182A JP 2009524182 A JP2009524182 A JP 2009524182A JP 5164984 B2 JP5164984 B2 JP 5164984B2
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- 238000012937 correction Methods 0.000 claims description 49
- 238000000034 method Methods 0.000 claims description 17
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- 239000000463 material Substances 0.000 claims description 3
- 239000010453 quartz Substances 0.000 claims description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 3
- 230000001105 regulatory effect Effects 0.000 claims 1
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
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Classifications
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/06—Drive circuits; Control arrangements or methods
- H02N2/062—Small signal circuits; Means for controlling position or derived quantities, e.g. for removing hysteresis
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/028—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors along multiple or arbitrary translation directions, e.g. XYZ stages
Description
2 プラットフォーム
3 PZT圧電アクチュエータ
4 補正プレート
5 追加アクチュエータ(補正アクチュエータ)
Claims (6)
- 主操作方向についてはそれぞれの位置を高分解能センサにより測定可能で閉ループ動作するPZT固体アクチュエータを用い、また、PZT固体アクチュエータがジョイントを介してプラットフォームに連通している、数マイクロメートルから数100ミリメートルの移動距離でサブナノ〜ナノメートル範囲の高位置分解能を有する調節装置であって、
前記各主操作方向の外部に発生する位置誤差の補正のため、エラーテーブル内に保存された値に従って駆動され圧電体単結晶を用いた追加アクチュエータが設けられ、位置誤差の補正のための制御値は前記主操作方向の、符号が反転された関数として得られ、前記追加アクチュエータは補正プレートにより調整装置のプラットフォームに剛に接続されていることを特徴とする調節装置。 - 間隙を介して配置された2つの補正プレート及びこれらの間に位置する前記追加アクチュエータを用いた補正モジュールが、前記プラットフォーム上に後付け可能に配設されていることを特徴とする請求項1に記載の調節装置。
- 前記追加アクチュエータが1又はそれ以上の自由度を有することを特徴とする請求項1又は2に記載の調節装置。
- 誤差補正用の前記追加アクチュエータが、クリープ及びヒステリシス現象の起きない圧電物質から成ることを特徴とする請求項1〜3のいずれか1項に記載の調節装置。
- 誤差補正用の前記追加アクチュエータが、クオーツ又はニオブ酸リチウム単結晶から成ることを特徴とする請求項4に記載の調節装置。
- 請求項1〜5のいずれか1項に記載の調節装置の操作方法であって、主操作方向から偏位する位置誤差のそれぞれを、主操作方向X、Yの実効値の関数として較正工程にて測定し、エラーテーブルZn=f(X,Y)に保存し、主操作方向X、Yについて各設定値に従い、前記追加アクチュエータ用の補正値を前記エラーテーブルから求め、符号反転の後、補正移動量に変換することを特徴とする調節装置の操作方法。
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102006038011.8 | 2006-08-14 | ||
DE102006038011 | 2006-08-14 | ||
DE102006044285.7 | 2006-09-20 | ||
DE102006044285A DE102006044285A1 (de) | 2006-08-14 | 2006-09-20 | Verstelleinrichtung mit hoher Positionsauflösung, auch im Nano- oder Subnanometerbereich |
PCT/EP2007/058359 WO2008020006A1 (de) | 2006-08-14 | 2007-08-13 | Verstelleinrichtung mit hoher positionsauflösung, auch im nano- oder subnanometerbereich |
Publications (2)
Publication Number | Publication Date |
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JP2010500675A JP2010500675A (ja) | 2010-01-07 |
JP5164984B2 true JP5164984B2 (ja) | 2013-03-21 |
Family
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Application Number | Title | Priority Date | Filing Date |
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JP2009524182A Active JP5164984B2 (ja) | 2006-08-14 | 2007-08-13 | サブナノ〜ナノメートル範囲の高位置分解能を有する調節装置 |
Country Status (5)
Country | Link |
---|---|
US (1) | US20100013354A1 (ja) |
EP (1) | EP2062304B1 (ja) |
JP (1) | JP5164984B2 (ja) |
DE (1) | DE102006044285A1 (ja) |
WO (1) | WO2008020006A1 (ja) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8466637B2 (en) | 2010-07-20 | 2013-06-18 | New Scale Technologies, Inc. | Methods for controlling one or more positioning actuators and devices thereof |
EP2692051B1 (de) * | 2011-03-30 | 2014-05-14 | SmarAct Holding GmbH | Verfahren zur ansteuerung einer mehraktor-antriebsvorrichtung |
CN102426430B (zh) * | 2011-11-25 | 2013-07-31 | 中国科学院光电技术研究所 | 一种基于fpga控制的pzt驱动系统 |
KR101969470B1 (ko) | 2012-04-27 | 2019-04-16 | 에이에스엠엘 네델란즈 비.브이. | 리소그래피 장치 |
JP6225268B2 (ja) * | 2014-01-28 | 2017-11-01 | 浙江大学Zhejiang University | フレキシブルスマートパワー構造 |
CN103872944B (zh) * | 2014-03-03 | 2016-05-04 | 浙江科技学院 | 精确可控微动力构件及方法 |
KR102214830B1 (ko) | 2014-05-02 | 2021-02-10 | 삼성전자주식회사 | 마스터 몰드 제조 방법 |
DE102019112842A1 (de) * | 2019-05-16 | 2020-11-19 | Physik Instrumente (Pi) Gmbh & Co. Kg | Aktuator |
EP4022321A4 (en) * | 2019-08-29 | 2023-08-30 | National Research Council of Canada | ATOMIC NANOPOSITIONING DEVICE |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
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EP0121969A3 (en) * | 1983-03-15 | 1988-01-20 | Micronix Partners | Lithography system |
US4525852A (en) * | 1983-03-15 | 1985-06-25 | Micronix Partners | Alignment apparatus |
JPS62283542A (ja) * | 1986-06-02 | 1987-12-09 | Hitachi Ltd | 高速駆動圧電素子搭載陰極 |
CA2066084A1 (en) * | 1991-05-31 | 1992-12-01 | Gordon Walter Culp | Twisting actuators |
KR19980019031A (ko) * | 1996-08-27 | 1998-06-05 | 고노 시게오 | 스테이지 장치(a stage apparatus) |
US5854487A (en) * | 1997-02-28 | 1998-12-29 | Park Scientific Instruments | Scanning probe microscope providing unobstructed top down and bottom up views |
US5903085A (en) * | 1997-06-18 | 1999-05-11 | Phase Metrics, Inc. | Piezoelectric nanopositioner |
US6612160B2 (en) * | 2001-03-09 | 2003-09-02 | Veeco Instruments, Inc. | Apparatus and method for isolating and measuring movement in metrology apparatus |
JP2002318622A (ja) * | 2001-04-19 | 2002-10-31 | Taiheiyo Cement Corp | 位置検出信号の補正方法及び位置決め装置 |
JP3890233B2 (ja) * | 2002-01-07 | 2007-03-07 | キヤノン株式会社 | 位置決めステージ装置、露光装置及び半導体デバイスの製造方法 |
KR100497729B1 (ko) * | 2003-02-21 | 2005-06-28 | 한국과학기술원 | 유연기구 메커니즘을 이용한 3축 직선운동 스테이지 |
JP2006118867A (ja) * | 2004-10-19 | 2006-05-11 | Hitachi Kenki Fine Tech Co Ltd | 走査型プローブ顕微鏡及びそれを用いた計測方法 |
-
2006
- 2006-09-20 DE DE102006044285A patent/DE102006044285A1/de not_active Ceased
-
2007
- 2007-08-13 WO PCT/EP2007/058359 patent/WO2008020006A1/de active Application Filing
- 2007-08-13 US US12/309,990 patent/US20100013354A1/en not_active Abandoned
- 2007-08-13 JP JP2009524182A patent/JP5164984B2/ja active Active
- 2007-08-13 EP EP07802587A patent/EP2062304B1/de active Active
Also Published As
Publication number | Publication date |
---|---|
DE102006044285A1 (de) | 2008-02-21 |
JP2010500675A (ja) | 2010-01-07 |
US20100013354A1 (en) | 2010-01-21 |
WO2008020006A1 (de) | 2008-02-21 |
EP2062304A1 (de) | 2009-05-27 |
EP2062304B1 (de) | 2012-06-27 |
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