JP5153184B2 - 振動波駆動装置 - Google Patents

振動波駆動装置 Download PDF

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Publication number
JP5153184B2
JP5153184B2 JP2007092571A JP2007092571A JP5153184B2 JP 5153184 B2 JP5153184 B2 JP 5153184B2 JP 2007092571 A JP2007092571 A JP 2007092571A JP 2007092571 A JP2007092571 A JP 2007092571A JP 5153184 B2 JP5153184 B2 JP 5153184B2
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Prior art keywords
elastic member
vibration wave
wave driving
driving device
electro
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Expired - Fee Related
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JP2007092571A
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Japanese (ja)
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JP2008253068A (ja
JP2008253068A5 (enExample
Inventor
暁 北島
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Canon Inc
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Canon Inc
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Priority to JP2007092571A priority Critical patent/JP5153184B2/ja
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Publication of JP2008253068A5 publication Critical patent/JP2008253068A5/ja
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  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
JP2007092571A 2007-03-30 2007-03-30 振動波駆動装置 Expired - Fee Related JP5153184B2 (ja)

Priority Applications (1)

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JP2007092571A JP5153184B2 (ja) 2007-03-30 2007-03-30 振動波駆動装置

Applications Claiming Priority (1)

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JP2007092571A JP5153184B2 (ja) 2007-03-30 2007-03-30 振動波駆動装置

Related Child Applications (1)

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JP2012102869A Division JP5677363B2 (ja) 2012-04-27 2012-04-27 振動波駆動装置および振動子

Publications (3)

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JP2008253068A JP2008253068A (ja) 2008-10-16
JP2008253068A5 JP2008253068A5 (enExample) 2010-04-30
JP5153184B2 true JP5153184B2 (ja) 2013-02-27

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Family Applications (1)

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JP2007092571A Expired - Fee Related JP5153184B2 (ja) 2007-03-30 2007-03-30 振動波駆動装置

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Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008152821A1 (ja) 2007-06-14 2008-12-18 Panasonic Corporation 振動型アクチュエータ及びそれを備えた駆動装置
JP5701020B2 (ja) * 2010-11-24 2015-04-15 キヤノン株式会社 振動型駆動装置における振動体とその製造方法、振動型駆動装置とその振動子
JP5979817B2 (ja) * 2010-03-16 2016-08-31 キヤノン株式会社 振動波駆動装置
US8987972B2 (en) 2010-03-16 2015-03-24 Canon Kabushiki Kaisha Vibrator in vibration type driving apparatus and manufacturing method thereof
JP5930595B2 (ja) * 2010-04-06 2016-06-08 キヤノン株式会社 振動型アクチュエータ、振動子及び振動子の製造方法
JP5818500B2 (ja) * 2011-04-26 2015-11-18 キヤノン株式会社 振動波駆動装置とその振動体の製造方法
JP2012231622A (ja) * 2011-04-27 2012-11-22 Canon Inc 振動波モータにおける振動体の製造方法及び振動体、振動波モータ
JP5677363B2 (ja) * 2012-04-27 2015-02-25 キヤノン株式会社 振動波駆動装置および振動子
JP5847906B2 (ja) * 2014-10-02 2016-01-27 キヤノン株式会社 振動体

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3190633B2 (ja) * 1998-01-05 2001-07-23 セイコーインスツルメンツ株式会社 圧電アクチュエ−タ
JP2006174549A (ja) * 2004-12-14 2006-06-29 Canon Inc 振動波駆動装置

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JP2008253068A (ja) 2008-10-16

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