JP5142960B2 - 真空ポンプユニット、及びその起動方法 - Google Patents

真空ポンプユニット、及びその起動方法 Download PDF

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Publication number
JP5142960B2
JP5142960B2 JP2008300101A JP2008300101A JP5142960B2 JP 5142960 B2 JP5142960 B2 JP 5142960B2 JP 2008300101 A JP2008300101 A JP 2008300101A JP 2008300101 A JP2008300101 A JP 2008300101A JP 5142960 B2 JP5142960 B2 JP 5142960B2
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pump
vacuum
pump module
module
rotors
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Japanese (ja)
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JP2010127120A (ja
JP2010127120A5 (enExample
Inventor
智 柏原
直樹 飯島
透 大須賀
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Ebara Corp
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Ebara Corp
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Priority to JP2008300101A priority Critical patent/JP5142960B2/ja
Priority to PCT/JP2009/070069 priority patent/WO2010061937A1/ja
Publication of JP2010127120A publication Critical patent/JP2010127120A/ja
Publication of JP2010127120A5 publication Critical patent/JP2010127120A5/ja
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  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
JP2008300101A 2008-11-25 2008-11-25 真空ポンプユニット、及びその起動方法 Active JP5142960B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2008300101A JP5142960B2 (ja) 2008-11-25 2008-11-25 真空ポンプユニット、及びその起動方法
PCT/JP2009/070069 WO2010061937A1 (ja) 2008-11-25 2009-11-20 ドライ真空ポンプユニット及びその起動方法、並びに空冷式ドライ真空ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008300101A JP5142960B2 (ja) 2008-11-25 2008-11-25 真空ポンプユニット、及びその起動方法

Publications (3)

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JP2010127120A JP2010127120A (ja) 2010-06-10
JP2010127120A5 JP2010127120A5 (enExample) 2011-01-13
JP5142960B2 true JP5142960B2 (ja) 2013-02-13

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JP2008300101A Active JP5142960B2 (ja) 2008-11-25 2008-11-25 真空ポンプユニット、及びその起動方法

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114583881B (zh) * 2022-03-02 2023-11-14 安徽智泓净化科技股份有限公司 带有无刷电机的反渗透净水器用增压泵
KR102869962B1 (ko) * 2023-08-10 2025-10-13 (주)삼우피에스 공압센싱을 이용한 공압 전용 휴대용 자동 배수 펌프

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JP2010127120A (ja) 2010-06-10

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