JP5126192B2 - 流体浄化装置 - Google Patents

流体浄化装置 Download PDF

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Publication number
JP5126192B2
JP5126192B2 JP2009237412A JP2009237412A JP5126192B2 JP 5126192 B2 JP5126192 B2 JP 5126192B2 JP 2009237412 A JP2009237412 A JP 2009237412A JP 2009237412 A JP2009237412 A JP 2009237412A JP 5126192 B2 JP5126192 B2 JP 5126192B2
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Japan
Prior art keywords
fluid
unit
treated
photocatalyst
adsorbent
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Expired - Fee Related
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JP2009237412A
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Japanese (ja)
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JP2010017713A5 (enExample
JP2010017713A (ja
Inventor
正孝 福泉
謙二 渡辺
亨 的場
祐 押田
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Fujitsu Semiconductor Ltd
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Fujitsu Semiconductor Ltd
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Priority to JP2009237412A priority Critical patent/JP5126192B2/ja
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Publication of JP2010017713A5 publication Critical patent/JP2010017713A5/ja
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  • Ventilation (AREA)
  • Disinfection, Sterilisation Or Deodorisation Of Air (AREA)
  • Catalysts (AREA)
JP2009237412A 2009-10-14 2009-10-14 流体浄化装置 Expired - Fee Related JP5126192B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009237412A JP5126192B2 (ja) 2009-10-14 2009-10-14 流体浄化装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009237412A JP5126192B2 (ja) 2009-10-14 2009-10-14 流体浄化装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2002356796A Division JP4447213B2 (ja) 2002-12-09 2002-12-09 流体浄化装置

Publications (3)

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JP2010017713A JP2010017713A (ja) 2010-01-28
JP2010017713A5 JP2010017713A5 (enExample) 2010-03-11
JP5126192B2 true JP5126192B2 (ja) 2013-01-23

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ID=41703104

Family Applications (1)

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JP2009237412A Expired - Fee Related JP5126192B2 (ja) 2009-10-14 2009-10-14 流体浄化装置

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JP (1) JP5126192B2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104857849A (zh) * 2015-05-27 2015-08-26 成都虹华环保科技股份有限公司 一种带有检测功能的有机废气处理装置
CN105727706B (zh) * 2016-04-14 2018-07-03 佛山市电建电力设备有限公司 一种应用于工业有机废气VOCs处理设备的控制系统
JP6580187B1 (ja) * 2018-03-28 2019-09-25 大阪瓦斯株式会社 空気浄化ユニット

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05317627A (ja) * 1992-05-15 1993-12-03 Toshiba Corp 空気清浄器
JP3254739B2 (ja) * 1992-07-14 2002-02-12 松下電器産業株式会社 空気浄化方法および空気清浄装置
KR100208703B1 (ko) * 1996-09-11 1999-07-15 윤종용 반도체 크린룸 시스템
JP3693315B2 (ja) * 1997-02-28 2005-09-07 株式会社荏原製作所 クリーンルームにおける気体清浄方法及びその装置
JP2000237538A (ja) * 1999-02-18 2000-09-05 Sharp Corp 光触媒空気浄化装置
JP2001304640A (ja) * 2000-04-18 2001-10-31 Nec Kansai Ltd 空気からのガス状有機物除去方法及びそのシステム

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JP2010017713A (ja) 2010-01-28

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