JP5125222B2 - Liquid crystal device and electronic device - Google Patents

Description

  The present invention relates to, for example, a technical field of a liquid crystal device having a touch panel function and an electronic apparatus including such a liquid crystal device.

  In this type of liquid crystal device, an optical sensor is arranged for each of a plurality of pixel units or for a group of an arbitrary number of pixel units as a group, and image display using transmitted light that passes through the pixel units and an instruction unit are provided. A liquid crystal device having a so-called touch panel function that enables input of information to the liquid crystal device has been proposed. In such a liquid crystal device, it is detected by a light receiving element such as an optical sensor that an instruction means such as a finger or an indicator member has touched the display surface of the liquid crystal device or moved on the display surface. Information can be entered.

  In this type of liquid crystal device, the light detecting element detects the indicating means by disposing a condensing means such as a microlens on the display surface side when viewed from the light detecting element, that is, the light detecting element. A technique for increasing detection sensitivity (see, for example, Patent Document 1), and a light-shielding film provided between the light-detecting element and the backlight to shield light emitted from the backlight toward the light-detecting element, thereby detecting the light-detecting element. There has been proposed a technique for increasing the detection sensitivity (see, for example, Patent Document 2).

JP 2006-201221 A JP 2005-10690 A

  However, according to the techniques disclosed in Patent Documents 1 and 2, when the amount of light around the liquid crystal device is low, that is, when the external light is weak and dark, the light for specifying the instruction means for indicating the display surface is used. It becomes difficult to detect. In addition, when a condensing unit such as a microlens for condensing light on the light detection element is formed in the liquid crystal device, the manufacturing process of the liquid crystal device is complicated, resulting in an increase in manufacturing cost.

  Therefore, the present invention has been made in view of the above-described problems. For example, a liquid crystal device having a touch panel function in which the detection sensitivity of an instruction unit such as a finger indicating a display surface is increased, and such a liquid crystal device. It is an object to provide an electronic device including the above.

In order to solve the above-described problem, a liquid crystal device according to the present invention includes a first substrate, a second substrate disposed so as to face the first substrate, and a sandwich between the first substrate and the second substrate. A liquid crystal layer formed on the first substrate, a light source disposed on the side opposite to the liquid crystal layer side of the first substrate, and a plurality of pixel regions constituting a display region on the first substrate. A light receiving element that is formed in the opening region and detects the indication means by the amount of incident light; and a metal film formed on the lower layer side of the light receiving element so as to overlap the light receiving element on the first substrate, The light receiving element is formed on a base film formed on the first substrate, and the metal film extends along a surface of a recess formed by partially removing the base film. It is formed .
The liquid crystal device according to the present invention includes a first substrate, a second substrate disposed so as to face the first substrate, a liquid crystal layer sandwiched between the first substrate and the second substrate, A light source disposed on the opposite side of the first substrate to the liquid crystal layer side and a non-opening region that separates opening regions of a plurality of pixel portions constituting a display region on the first substrate from each other; A light-receiving element that detects the indication means according to the amount of incident light, and a metal film formed on a lower layer side of the light-receiving element so as to overlap the light-receiving element on the first substrate, the metal film including the light-receiving element It is characterized by being formed in an island shape wider than the element region where the element is formed.

  According to the liquid crystal device of the present invention, during operation of the liquid crystal device, for example, the liquid crystal layer sandwiched between the pixel electrode formed on the first substrate and the counter electrode formed on the second substrate. The light source light is modulated by controlling the orientation, and a desired image is displayed in the display area by the modulated light.

  The light receiving element is formed in a non-opening region that separates the opening regions of the plurality of pixel portions constituting the display region on the substrate. Here, the “open area” is defined by an opaque film or wiring provided on the first substrate, and uses an area in the pixel through which light contributing to image display can be transmitted, or outside light. The display area in the reflection mode. Conversely, a region where light is not transmitted by an opaque film or wiring formed in the pixel, in other words, a region that does not contribute to display in the pixel is called a “non-opening region”.

The metal film is formed on the lower layer side of the light receiving element so as to overlap the light receiving element on the first substrate, and reflects incident light incident on the display region. Such a metal film reflects incident light incident between the light receiving element and the reflective film in a three-dimensional manner toward the light receiving element. Therefore, the metal film can irradiate the light receiving element with light that has not been irradiated to the light receiving element among incident light incident from the display surface. According to such a metal film, even when the ambient light of the liquid crystal device is weak, that is, when the amount of external light is low, it is possible to increase the detection sensitivity of the pointing means by the light receiving element.

  Therefore, according to the liquid crystal device according to the present invention, external light that is not blocked by the instruction unit that indicates the display surface or light that is reflected by the instruction unit is incident on the display surface as incident light, and the incident light is reflected. By reflecting on the film, it is possible to irradiate the light receiving element with incident light that has not been directly irradiated to the light receiving element. For example, even when the outside light is weak, the detection sensitivity of the light receiving element to detect the indicating means is increased. Is possible.

  In one aspect of the liquid crystal device according to the present invention, the light receiving element is formed on a base film formed on the first substrate, and the reflective film partially removes the base film. It may be formed so as to extend along the surface of the recess formed by.

According to this aspect, the angle of the reflective film with respect to incident light can be adjusted according to the shape of the recess from which the base film is partially removed. Therefore, it is possible to enhance the light condensing ability of the metal film that condenses incident light on the light receiving element by adjusting the shape of the recess formed by partially removing the base film.

  In another aspect of the liquid crystal device according to the present invention, the concave portion has a tapered shape that becomes wider toward the first substrate on a cross section obtained by cutting the concave portion in a plane intersecting the substrate surface of the first substrate. You may do it.

According to this aspect, incident light can be efficiently condensed on the light receiving element by the surface of the metal film having a tapered shape on the cross section.

In another aspect of the liquid crystal device according to the present invention, the metal film is also used as a light-shielding film that emits the light source light so that the light source light emitted from the light source is not irradiated on the light receiving element from the lower layer side. May be.

  According to this aspect, since the light source light is not irradiated onto the light receiving element, the light receiving element can reliably detect the indication means while displaying a desired image on the display surface. More specifically, since the light source light is not irradiated to the light receiving element, it is possible to reduce noise generated when the light source light is directly irradiated to the light receiving element.

  In another aspect of the liquid crystal device according to the present invention, the reflective film may be a metal film.

  According to this aspect, compared with the case where the reflective film is formed using other materials, the reflectance at which the reflective film reflects incident light can be set higher, and the light collection ability of the reflective film to the light receiving element can be increased. Is possible.

  In order to solve the above problems, an electronic device according to the present invention includes the above-described liquid crystal device of the present invention.

  According to the electronic apparatus according to the present invention, the liquid crystal device according to the present invention described above is included, so that a projection display device, a mobile phone, an electronic notebook, a word processor, a viewfinder type capable of high-quality display, or Various electronic devices such as a monitor direct-view video tape recorder, a workstation, a videophone, a POS terminal, and a touch panel can be realized. In addition, as an electronic apparatus according to the present invention, for example, an electrophoretic device such as electronic paper can be realized.

  In order to solve the above problems, a method of manufacturing a liquid crystal device according to the present invention includes a first substrate, a second substrate disposed on the first substrate so as to face the first substrate, and the first substrate. And a liquid crystal layer sandwiched between the second substrates, a light source provided on the opposite side of the display surface indicated by the instruction means when viewed from the first substrate, and a display area on the first substrate. A method of manufacturing a liquid crystal device for manufacturing a liquid crystal device having a plurality of pixel portions, comprising a P-type semiconductor region, a low-resistance region, and an N-type semiconductor region that do not overlap each other on the first substrate. A step of forming a reflective film so as to overlap an element region in which the light receiving element is to be formed; and when forming the light receiving element on the upper layer side of the reflective film, each opening of the plurality of pixel portions in the display region Non-open area that separates areas from each other In, and forming a semiconductor element for switching controls the pixel portion.

  According to the method for manufacturing a liquid crystal device according to the present invention, the above-described liquid crystal device can be manufactured, and the light receiving element and the semiconductor element can be formed by a common process. Therefore, the light receiving element and the semiconductor element are formed by separate processes. Compared to the case, the manufacturing process of the liquid crystal device can be simplified.

  Such an operation and other advantages of the present invention will become apparent from the embodiments described below.

  Hereinafter, embodiments of a liquid crystal device and an electronic apparatus according to the present invention will be described with reference to the drawings.

<1: Liquid crystal device>
<1-1: Overall Configuration of Liquid Crystal Device>
First, the overall configuration of the liquid crystal device 1 according to the present embodiment will be described with reference to FIGS. 1 and 2. FIG. 1 is a plan view of the liquid crystal device 1 as seen from the counter substrate side together with the components formed on the TFT array substrate, and FIG. 2 is a cross-sectional view taken along the line II-II ′ of FIG. The liquid crystal device 1 according to the present embodiment is driven by a TFT active matrix driving method with a built-in driving circuit.

  1 and 2, in the liquid crystal device 1, a TFT array substrate 10 that is an example of the “first substrate” of the present invention and a counter substrate 20 that is an example of the “second substrate” of the present invention are arranged to face each other. ing. A liquid crystal layer 50 is sealed between the TFT array substrate 10 and the counter substrate 20, and the TFT array substrate 10 and the counter substrate 20 are sealed regions located around the image display region 10a, which is a display region in which a plurality of pixel portions are provided. Are adhered to each other by a sealing material 52 provided on the surface.

  The sealing material 52 is made of, for example, an ultraviolet curable resin, a thermosetting resin, or the like for bonding the two substrates, and is applied on the TFT array substrate 10 in the manufacturing process and then cured by ultraviolet irradiation, heating, or the like. It is. In the sealing material 52, a gap material such as glass fiber or glass beads for dispersing the distance (inter-substrate gap) between the TFT array substrate 10 and the counter substrate 20 to a predetermined value is dispersed.

  A light-shielding frame light-shielding film 53 that defines the frame area of the image display area 10a is provided on the counter substrate 20 side in parallel with the inside of the seal area where the sealing material 52 is disposed. However, part or all of the frame light shielding film 53 may be provided as a built-in light shielding film on the TFT array substrate 10 side. There is a peripheral area located around the image display area 10a. In other words, particularly in the present embodiment, when viewed from the center of the TFT array substrate 10, the distance from the frame light shielding film 53 is defined as the peripheral region.

  A data line driving circuit 101 and an external circuit connection terminal 102 are provided along one side of the TFT array substrate 10 in a region located outside the sealing region in which the sealing material 52 is disposed in the peripheral region. The scanning line driving circuit 104 is provided along two sides adjacent to the one side so as to be covered with the frame light shielding film 53. Further, in order to connect the two scanning line driving circuits 104 provided on both sides of the image display region 10 a in this way, a plurality of the pixel lines are covered along the remaining side of the TFT array substrate 10 and covered with the frame light shielding film 53. Wiring 105 is provided.

  In the peripheral region on the TFT array substrate 10, a sensor control circuit unit 201 for controlling a sensor unit including an optical sensor described later is formed. The external circuit connection terminal 102 is connected to a connection terminal provided on the flexible substrate 200 which is an example of a connection means for electrically connecting the external circuit and the liquid crystal device 1. The backlight included in the liquid crystal device 1 is controlled by a backlight control circuit 202 configured by an IC circuit or the like mounted on the FPC 200. Each of the sensor control circuit unit 201 and the backlight control circuit 202 may be built in the liquid crystal device 1 or formed outside the liquid crystal device 1.

  Vertical conductive members 106 functioning as vertical conductive terminals between the two substrates are disposed at the four corners of the counter substrate 20. On the other hand, the TFT array substrate 10 is provided with vertical conduction terminals in a region facing these corner portions. Thus, electrical conduction can be established between the TFT array substrate 10 and the counter substrate 20.

  In FIG. 2, on the TFT array substrate 10, an alignment film is formed on the pixel electrode 9a after the pixel switching TFT, the scanning line, the data line and the like are formed. On the other hand, on the counter substrate 20, in addition to the counter electrode 21, a lattice-shaped or striped light-shielding film 23 and an alignment film are formed on the uppermost layer portion. The liquid crystal layer 50 is made of, for example, a liquid crystal in which one or several types of nematic liquid crystals are mixed, and takes a predetermined alignment state between the pair of alignment films. The image displayed by the liquid crystal device 1 is displayed on the display surface 20 s on the side of the opposite substrate 20 that does not face the liquid crystal layer 50. In the present embodiment, illustration of the polarizing plate and the color filter is omitted for convenience of explanation, but when the polarizing plate and the color filter are arranged on the counter substrate 20, the liquid crystal device is shown in the drawing. The top surface of 1 becomes the display surface.

  The liquid crystal device 1 includes a backlight 206 disposed below the TFT array substrate 10 in the drawing. The backlight 206 is an example of the “light source” in the present invention, and is disposed on the back side of the display surface 20s. The backlight 206 is configured by planarly arranging semiconductor light emitting elements of a point light source, which is an example of a light emitting diode. The backlight 206 may include a light emitting diode such as an organic EL element. Further, a sidelight type backlight that emits light from a light source arranged on a side surface by a light guide in a planar shape may be used.

  1 and 2, on the TFT array substrate 10, in addition to the drive circuits such as the data line drive circuit 101 and the scanning line drive circuit 104, the image signal on the image signal line is sampled to obtain data. Sampling circuit that supplies lines, precharge circuit that supplies pre-charge signals of a predetermined voltage level to multiple data lines in advance of image signals, inspection of quality, defects, etc. of the electro-optical device during production or shipment An inspection circuit or the like may be formed.

<1-2: Circuit Configuration of Liquid Crystal Device>
Next, the circuit configuration of the liquid crystal device 1 will be described with reference to FIGS. 3 and 4. FIG. 3 is a block diagram illustrating a main circuit configuration of the liquid crystal device 1, and FIG. 4 is a block diagram illustrating a detailed circuit configuration of the sensor control circuit unit 201.

  In FIG. 3, the liquid crystal device 1 includes a sensor control circuit unit 201, a backlight control circuit unit 202, a display control circuit unit 203, a sensor unit 204, a display unit 205, and a backlight 206.

  The display unit 205 includes a plurality of pixel units formed in the image display region 10 a on the TFT array substrate 10. The display control circuit unit 203 includes the scanning line driving circuit 104 and the data line driving circuit 101, and the display unit 205 displays images corresponding to various signals including image signals supplied from the external circuit unit 207. The operation of the display unit 205 is controlled as possible. The sensor unit 204 is formed in the image display region 10 a on the TFT array substrate 10 together with the display unit 205.

  The sensor control circuit unit 201 controls the operation of the sensor unit 204 and supplies a signal for changing the light intensity of the light source light emitted from the backlight 206 to the backlight control circuit unit 202.

  Here, a detailed configuration of the sensor control circuit unit 201 will be described with reference to FIG. As shown in FIG. 4, the sensor control circuit unit 201 includes an image processing circuit unit 201a and a memory 201b. When an instruction unit such as a finger that indicates the display surface 20s is detected, the image processing circuit unit 201a processes image data captured by the instruction unit. The memory 201b stores data supplied from the image processing circuit unit 201a. The image processing circuit unit 201a reads the data stored in the memory 201b in a timely manner and uses the data to specify the position of the instruction unit.

  In FIG. 3 again, the backlight control circuit unit 202 controls the operation of the backlight 206 based on signals supplied from the external circuit unit 207 and the sensor control circuit unit 201, respectively. The backlight 206 emits display light for displaying an image corresponding to an image signal supplied from the external circuit unit 207 via the backlight control circuit unit 202 on the display surface. In addition, the reflected light in which such display light is reflected by the instruction unit is detected by the sensor unit 204 together with outside light not blocked by the instruction unit, and is used when detecting the instruction unit.

<1-3: Configuration of Pixel Unit>
Next, the configuration of the pixel portion of the liquid crystal device 1 will be described in detail with reference to FIGS. FIG. 5 is an equivalent circuit of various elements, wirings, and the like in a plurality of pixels formed in a matrix forming the image display region 10a of the liquid crystal device 1. FIG. 6 shows an equivalent circuit of the sensor unit 204 together with the pixel unit. It is the equivalent circuit shown. FIG. 7 is a plan view of the pixel portion formed on the TFT array substrate. 8 is a cross-sectional view taken along the line VIII-VIII ′ of FIG. 9 is a cross-sectional view taken along the line IX-IX ′ of FIG. 7 to 9, the scales of the respective layers and members are different from each other in order to make each layer and each member recognizable on the drawings. 8 and 9, the structure on the lower layer side than the pixel electrode 9a is illustrated in detail.

  In FIG. 5, each of a plurality of pixel portions 72 formed in a matrix that forms the image display region 10a of the liquid crystal device 1 includes a sub-pixel portion 72R that displays red, a sub-pixel portion 72G that displays green, and blue Is included. Therefore, the liquid crystal device 1 is a display device that can display a color image.

  Each of the sub-pixel portions 72R, 72G, and 72B includes a pixel electrode 9a, a TFT 30, and a liquid crystal element 50a. The TFT 30 is electrically connected to the pixel electrode 9a, and performs switching control of the pixel electrode 9a when the liquid crystal device 1 operates. The data line 6a to which the image signal is supplied is electrically connected to the source of the TFT 30. The image signals S1, S2,..., Sn to be written to the data lines 6a may be supplied line-sequentially in this order, or may be supplied for each group to a plurality of adjacent data lines 6a. May be.

  The scanning line 3a is electrically connected to the gate of the TFT 30, and the liquid crystal device 1 sequentially applies the scanning signals G1, G2,..., Gm to the scanning line 3a in a pulse sequence in this order at a predetermined timing. It is comprised so that it may apply. The pixel electrode 9a is electrically connected to the drain of the TFT 30, and the image signal S1, S2,... Supplied from the data line 6a is closed by closing the switch of the TFT 30 serving as a switching element for a certain period. Sn is written at a predetermined timing. Image signals S1, S2,..., Sn written to the liquid crystal via the pixel electrode 9a are held for a certain period with the counter electrode formed on the counter substrate.

  The liquid crystal contained in the liquid crystal layer 50 modulates light and enables gradation display by changing the orientation and order of the molecular assembly depending on the applied voltage level. In the normally white mode, the transmittance for incident light decreases according to the voltage applied in units of each sub-pixel unit. In the normally black mode, the voltage applied in units of each sub-pixel unit. Accordingly, the transmittance for incident light is increased, and light having a contrast corresponding to an image signal is emitted from the liquid crystal device 1 as a whole. The storage capacitor 70 is added in parallel with the liquid crystal element 50a formed between the pixel electrode 9a and the counter electrode in order to prevent the image signal from leaking.

  In FIG. 6, the sensor unit 204 is formed for each pixel unit 72 in the image display region 10 a on the TFT array substrate 10, and includes a TFT 220 and a photodiode 212.

  The gate of the TFT 220 is electrically connected to the precharge line 301, and the source and drain thereof are electrically connected to the sensor output line 304 and the grounded wiring 305, respectively.

  The TFT 220 is switched on and off in accordance with a precharge control signal supplied from the sensor control circuit unit 201 via the sensor precharge line 301. When the TFT 220 is switched from the off state to the on state, an output signal corresponding to the photocurrent generated in the photodiode 212 is output to the sensor output line 304.

  Next, a specific configuration of the pixel portion will be described with reference to FIGS. Note that FIG. 7 illustrates one of the three sub-pixel portions constituting one pixel portion and a photodiode provided in the one pixel portion.

  In FIG. 7, the TFT 30 is configured to include a semiconductor layer 1 a such as a polysilicon layer, and its source is electrically connected to the data line 6 a through a contact hole 81. A part of the scanning line 3 a extends so as to overlap the semiconductor layer 1 a and constitutes the gate electrode 3 a 1 of the TFT 30. The drain of the TFT 30 is electrically connected to the relay layer 90 through the contact hole 82. The relay layer 90 is electrically connected to the pixel electrode 9a via a relay wiring (not shown). The pixel electrode 9a is driven in accordance with an image signal supplied in accordance with on / off of the TFT 30. The capacitor wiring 300 is one of a pair of electrodes included in the storage capacitor 70, and overlaps a part of the semiconductor layer 1 a that functions as a part of a dielectric layer included in the storage capacitor 70.

  The photodiode 212 is an example of the “light receiving element” in the present invention. The photodiode 212 is a general-purpose semiconductor element such as a lateral PIN diode having a P-type semiconductor region, a low-resistance region, and an N-type semiconductor region that do not overlap each other in a planar manner, and together with other components of the liquid crystal device 1, a TFT array substrate. 10 is formed. Each of the wirings 304 and 305 is electrically connected to the photodiode 212 via each of the contact holes 83 and 84. Photocurrent generated in the photodiode 212 in accordance with the light applied to the photodiode 212 is read out to the sensor output line 304 through the TFT 220.

  The photodiode 212 is formed in a non-opening region that separates the opening regions of the plurality of pixel portions constituting the image display region 10a. More specifically, the photodiode 212 is emitted from the backlight 206 on the TFT array substrate 10 where opaque wiring portions such as the wirings 304 and 305 and a reflection film 91 described later are formed. It is formed in a non-opening area where light from the light source is not substantially transmitted. Such a non-opening region separates the opening regions of the respective pixel portions that can substantially transmit the light source light.

  8 and 9, the liquid crystal device 1 includes a plurality of insulating layers 41, 42, 43, 44, 45, and 46, a reflective film 91, a photodiode 212, a TFT 30, and a pixel that are sequentially formed on the TFT array substrate 10. An electrode 9a is provided.

  The semiconductor layer 212a included in the photodiode 212 includes a P-type semiconductor region 212p, a low-resistance region 212i, and an N-type semiconductor region 212n. Therefore, the photodiode 212 is a lateral PIN diode in which a P-type semiconductor region 212p, a low-resistance region 212i, and an N-type semiconductor region 212n are sequentially formed along the substrate surface of the TFT array substrate 10.

  The semiconductor layer 1a included in the TFT 30 includes an N-type impurity region 1d, an LDD region 1b, a channel region 1a ′, an LDD region 1c, and an N-type impurity region 1e in which a polysilicon layer is doped with impurities.

  The insulating layer 41 is an example of the “base film” in the present invention, and is formed on the TFT array substrate 10. The reflective film 91 is formed in a concave portion 92 formed by partially removing the insulating layer 41 formed on the TFT array substrate 10. As shown in FIGS. 7 to 9, the reflective film 91 is formed on the lower layer side of the photodiode 212 so as to overlap the photodiode 212 on the TFT array substrate 10. Accordingly, the reflection film 91 is reflected by incident light that is incident between the photodiode 212 and the reflection film 91 in three dimensions, that is, external light incident on the display surface 20s, or an instruction unit that indicates the display surface 20s. The reflected light is reflected toward the photodiode 212.

  Such a reflective film 91 can irradiate the photodiode 212 with light that has not been irradiated to the photodiode 212 among incident light incident from the display surface 20s. According to the reflective film 91, even when the ambient light of the liquid crystal device 1 is weak, that is, when the amount of external light is low, it is possible to increase the detection sensitivity of the pointing means by the photodiode 212.

  In addition, in the liquid crystal device 1, the reflective film 91 may be formed to extend along the surface of the concave portion 92 formed by partially removing the insulating layer 41. Therefore, the angle of the surface of the reflective film 91 with respect to the incident light in the cross section of the TFT array substrate 10 cut along the surface of the liquid crystal device 1 according to the shape of the recess 92 from which the insulating layer 41 is partially removed. Can be adjusted. Therefore, by adjusting the shape of the recess 92, it is possible to increase the light collecting ability of the reflective film 91 that collects incident light on the photodiode 212.

  In particular, in this embodiment, the cross-sectional shape of the concave portion 92 has a tapered shape that becomes wider toward the TFT array substrate 10 on a cross section obtained by cutting the concave portion 92 on a plane that intersects the substrate surface of the TFT array substrate 10. Yes. A side surface 91a extending along the inclined surface of the recess 92 in the surface of the reflective film 91 is inclined obliquely with respect to the substrate surface of the TFT array substrate 10, and the reflective film 91 extends from the upper side in FIGS. Incident incident light can be collected toward the photodiode 212. Therefore, according to the reflective film 91, incident light can be efficiently collected on the photodiode 212, and the detection sensitivity with which the photodiode 212 detects the indicating means can be increased.

  In addition, the reflection film 91 is also used as a light-shielding film that shields the light source light so that the light source light emitted from the backlight 206 disposed on the lower side of the TFT array substrate 10 is not irradiated to the photodiode 212 in the drawing. ing. Therefore, according to the reflective film 91, since the light source light is not irradiated onto the photodiode 212, the photodiode 212 can reliably detect the instruction means while displaying a desired image on the display surface 20s. More specifically, since the light source light is not irradiated onto the photodiode 212, noise generated when the light source light is directly irradiated onto the photodiode 212 can be reduced. Therefore, the detection sensitivity at which the sensor unit 204 detects the indication unit is increased. It is possible to increase.

  The reflective film 91 is composed of a single-layer metal film or a multilayer film structure in which a metal film is formed on the uppermost layer, as compared with the case of being composed of other film materials or other multilayer structures. Thus, the reflectance of light is increased, and incident light can be effectively collected on the photodiode 212.

  Therefore, according to the liquid crystal device 1, the external light that is not blocked by the instruction unit that instructs the display surface 20s or the light that is reflected by the instruction unit enters the display surface 20s as incident light, and the incident light is reflected on the reflection film. By reflecting at 91, it is possible to irradiate the photodiode 212 with incident light that has not been directly radiated to the photodiode 212. For example, even when the outside light is weak, the photodiode 212 has a detection sensitivity for detecting the indicating means. It is possible to increase.

<2: Manufacturing method of liquid crystal device>
Next, a method for manufacturing the liquid crystal device 1 will be described with reference to FIGS. 10 and 11 are process cross-sectional views sequentially showing main manufacturing steps in a cross section corresponding to FIG. 8, and FIGS. 12 and 13 are cross sections corresponding to FIG. It is process sectional drawing which showed the process corresponding to each process in order.

  As shown in FIGS. 10A and 12A, after forming the recess 92 in the insulating layer 41 by using a general-purpose etching method, the reflective film 91 is formed. The reflective film 91 is formed so as to overlap with an element region in which the photodiode 212 to be formed on the reflective film 91 is formed in a plan view.

  Note that the concave portion 92 having a desired inclined surface can be formed by changing the conditions for partially removing the insulating layer 41 for convenience. Next, as shown in FIGS. 10B and 12B, after forming the insulating layer 42, the photodiode 212 is formed at the same time using a process common to the process of forming the TFT 30. Therefore, according to the manufacturing method of the liquid crystal device according to the present embodiment, the manufacturing process of the liquid crystal device 1 can be simplified as compared with the case where the TFT 30 and the photodiode 212 are formed by separate steps. Insulating layers 43 and 44 are sequentially formed on the TFT 30 and the photodiode 212. The insulating layer 43 is formed before the gate electrode 3a1 is formed, and becomes the gate insulating film of the TFT 30.

  Next, as shown in FIGS. 11C and 13C, a resist layer 60 is formed, and holes 81a, 82a, 83a, and 84a are formed so as to penetrate to the semiconductor layers 1a and 212a. Next, as shown in FIGS. 11D and 13D, contact holes 81, 82, 83, and 84 are formed by forming a conductive film in the holes 81a, 82a, 83a, and 84a. . Thereafter, the insulating layers 45 and 46 and the pixel electrode 9a electrically connected to the TFT 30 are formed in order, and each element constituting the upper layer portion of the pixel electrode 9a is formed, and the liquid crystal device shown in FIGS. 1 is formed.

<3: Electronic equipment>
Next, an embodiment of an electronic apparatus including the above-described liquid crystal device will be described with reference to FIGS.

  FIG. 14 is a perspective view of a mobile personal computer to which the above-described liquid crystal device is applied. In FIG. 14, a computer 1200 includes a main body 1204 provided with a keyboard 1202 and a liquid crystal display unit 1206 including the liquid crystal device described above. The liquid crystal display unit 1206 is configured by adding a backlight to the back surface of the liquid crystal panel 1005, and has a touch panel function that can input information reliably even when the light intensity of external light changes.

  Next, an example in which the above-described liquid crystal device is applied to a mobile phone will be described. FIG. 15 is a perspective view of a mobile phone which is an example of the electronic apparatus of the present embodiment. In FIG. 15, a mobile phone 1300 includes a liquid crystal device 1005 that adopts a reflective display format and has the same configuration as the above-described liquid crystal device, together with a plurality of operation buttons 1302. According to the mobile phone 1300, information can be accurately input via the display surface by an instruction means such as a finger.

It is a top view of the liquid crystal device concerning this embodiment. It is II-II 'sectional drawing of FIG. It is the block diagram which showed the main circuit structures of the liquid crystal device which concerns on this embodiment. It is the block diagram which showed the detailed circuit structure of the sensor control circuit part. 3 is an equivalent circuit in an image display region of the liquid crystal device according to the present embodiment. It is the equivalent circuit which showed the equivalent circuit of the sensor part with the pixel part. It is a top view of the sub pixel part which comprises a pixel part. It is VIII-VIII 'sectional drawing of FIG. It is IX-IX 'sectional drawing of FIG. It is process sectional drawing (the 1) which showed the main processes of the manufacturing method of the liquid crystal device which concerns on this embodiment. It is process sectional drawing (the 2) which showed the main processes of the manufacturing method of the liquid crystal device which concerns on this embodiment. It is process sectional drawing (the 3) which showed the main processes of the manufacturing method of the liquid crystal device which concerns on this embodiment. It is process sectional drawing (the 4) which showed the main processes of the manufacturing method of the liquid crystal device which concerns on this embodiment. It is the perspective view which showed an example of the electronic device which concerns on this embodiment. It is the perspective view which showed the other example of the electronic device which concerns on this embodiment.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... Liquid crystal device, 10 ... TFT array substrate, 20 ... Counter substrate, 50 ... Liquid crystal layer, 72 ... Pixel part, 91 ... Reflective film 203 ... Display control circuit part 204 ... sensor unit 206 ... backlight 212 ... photodiode

Claims (4)

A first substrate;
A second substrate disposed to face the first substrate;
A liquid crystal layer sandwiched between the first substrate and the second substrate;
A light source disposed on a side opposite to the liquid crystal layer side of the first substrate ;
A light-receiving element that is formed in a non-opening region that separates the opening regions of the plurality of pixel units constituting the display region on the first substrate, and that detects the indication means by the amount of incident light ;
And a metal film formed on the lower layer side of the light receiving elements so as to overlap the light receiving element in the first substrate,
The light receiving element is formed on a base film formed on the first substrate, and the metal film is along a surface of a recess formed by partially removing the base film. A liquid crystal device characterized by being formed so as to extend . A first substrate;
A second substrate disposed to face the first substrate;
A liquid crystal layer sandwiched between the first substrate and the second substrate;
A light source disposed on a side opposite to the liquid crystal layer side of the first substrate;
A light-receiving element that is formed in a non-opening region that separates the opening regions of the plurality of pixel units constituting the display region on the first substrate, and that detects the indication means by the amount of incident light;
A metal film formed on a lower layer side of the light receiving element so as to overlap the light receiving element on the first substrate;
The liquid crystal device is characterized in that the metal film is formed in an island shape wider than an element region in which the light receiving element is formed. The recess, in claim 1, characterized in that it has a tapered shape which becomes wider toward the first substrate on section cut said recess in a plane intersecting the substrate surface of the first substrate The liquid crystal device described. An electronic apparatus comprising the liquid crystal device according to any one of claims 1 to 3 .

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