JP5118425B2 - Room pressure control device and room pressure control method - Google Patents

Description

  The present invention relates to a room pressure control device and a room pressure control method for enabling maintenance of indoor cleanliness and prevention of leakage of contaminated room air, for example, in clean room facilities and experimental facilities.

  Conventionally, a room pressure control device for controlling the room pressure in a plurality of rooms in a chemical manufacturing facility or a semiconductor electronic component manufacturing facility is a controller that controls the chamber pressure on both sides of the door when the door of the room is opened. When the control operation is temporarily stopped and the door is closed, the control operation of the controller that controls the chamber pressure is resumed (see, for example, Patent Document 1).

  Further, in the room pressure control device disclosed in Patent Document 2, when the door of the room is opened, the measurement value input of PID control of the controller that controls the room pressure on both sides of the door is switched to a set value or another fixed value. A simulated signal with no deviation is generated by such a method, and the position of the damper for controlling the chamber pressure is held while continuing the control operation of the controller. When the door is closed, the PID control input of the controller that controls the chamber pressure is returned to the normal state.

  In the room pressure control device disclosed in Patent Document 3, the position of the damper that controls the room pressure on both sides of the door is held simultaneously with the start of the door opening operation, and the door is opened after holding the damper. During the door closing operation, the damper control operation for controlling the chamber pressure is resumed after the door is closed.

  Further, in the room pressure control device disclosed in Patent Document 4, when the door of the room is opened, at least one of the air supply and exhaust in each room on both sides of the door is switched from the room pressure control to the air volume control. When an air volume of a constant air speed is passed through the opening and the door is closed, the air supply / exhaust control of each chamber on both sides of the door is returned to the room pressure control.

JP-A 63-247542 JP 2002-181361 A JP 2004-232976 A JP 2006-292280 A

  Conventionally, since the uniform chamber pressure by opening and closing the doors changes the chamber pressure of the passage, which is the standard for controlling the room pressure in each room, abrupt changes in the chamber pressure in the passages occur in other rooms. There was a problem that the pressure control was disturbed and the room pressure control of each room fell into a hunting state. Also, if the door is opened when the chamber pressure control is in the hunting state, for example, air flow in a certain direction from the clean room to the passage cannot be guaranteed, and cross contamination (cross contamination) may occur. It was.

  The present invention has been made to solve the above problems, and when the door of the target room is opened, the influence on the room pressure of the reference room such as a passage and other rooms based on the reference room is minimized. It is an object of the present invention to provide a room pressure control device and a room pressure control method that can be used.

The present invention provides a room pressure control device that controls the room pressure of each room in a facility having a reference room and other plural rooms, and is installed in at least one of an exhaust duct and an air supply duct provided for each room. The room pressure adjustment damper, the door sensor that is installed for each door of the room, and detects the opening and closing of the door, and the door opening that indicates that the operation to open the door between the reference room and another room has started. When the signal is not output from the door sensor, the room pressure adjusting damper in the other room is controlled to adjust the room pressure in the other room so that the differential pressure with respect to the reference room becomes a constant value. When a door opening signal indicating that an operation of opening a door between the reference room and the target room belonging to the other room is started is output from a door sensor installed on the door, The chamber pressure adjusting damper of the target chamber is controlled so that the chamber pressure of the target chamber is reduced when the door is opened. A target chamber pressure control means for pressurizing reduced pressure or increased to a predetermined value, after the chamber pressure of the target chamber reaches a predetermined value at the time of the door opening, opened to drive the door between the reference chamber and the target chamber door When the door opening signal indicating that the operation of opening the door between the driving means and the reference room and the other room has not started is output, the chamber pressure adjusting damper of the reference room is controlled. Then, the control is performed so that the chamber pressure in the reference chamber becomes the reference chamber pressure, and the door between the reference chamber and the target chamber is fully opened after the chamber pressure in the target chamber reaches a predetermined value when the door is opened. Until the opening of the door, the reference chamber pressure control means for increasing or decreasing the air volume of the damper for adjusting the chamber pressure in the reference chamber according to the opening of the door, the predetermined value when the door is opened is the target chamber Is a chamber pressure of the target chamber set so as to generate a differential pressure that can maintain a passing air volume at a constant air speed between the reference chamber and the reference chamber, The quadrature pressure control means responds to the degree of opening of the target chamber until the door between the reference chamber and the target chamber is fully opened after the chamber pressure in the target chamber reaches a predetermined value when the door is opened. The air volume of the chamber pressure adjusting damper in the target chamber is reduced or increased .

Further , in one configuration example of the room pressure control device of the present invention, the target room pressure control means is provided with a door close completion signal indicating that the door between the reference room and the target room is closed. When output from the door sensor, the chamber pressure adjusting damper of the target chamber is controlled to return the chamber pressure of the target chamber to a predetermined value when the door is closed.

Further, according to the present invention , in a room pressure control method for controlling the room pressure of each room in a facility having a reference room and a plurality of other rooms, an operation of opening a door between the reference room and the other rooms is started. When the door open signal indicating that the signal is not output from the door sensor installed for each door of each room, the chamber pressure adjusting damper of the reference chamber is controlled, and the reference chamber pressure is When the door opening signal indicating that the operation of opening the door between the reference room and the other room has been started and the door opening signal is not output is performed. Controlling the pressure adjusting damper to control the room pressure of the other room so that the differential pressure with the reference room becomes a constant value; and between the reference room and the target room belonging to the other room The door opening signal indicating that the operation to open the door in between has started is the door sensor installed on this door When it is al output, to control the chamber pressure adjusting damper of the target chamber, and the target chamber pressure control step of pressure vacuum or increasing the chamber pressure of the target chamber to a predetermined value at the time of the door opening, of the target chamber After the chamber pressure reaches a predetermined value when the door is opened, a door opening step that drives and opens the door between the reference chamber and the target chamber, and the chamber pressure of the target chamber is a predetermined value when the door is opened. Until the door between the reference chamber and the target chamber is fully opened until the air volume of the damper for adjusting the chamber pressure in the reference chamber is increased or decreased according to the opening degree of the door, The chamber pressure of the target chamber is adjusted according to the opening of the target chamber until the door between the reference chamber and the target chamber is fully opened after the chamber pressure in the target chamber reaches a predetermined value when the door is opened. Reducing or increasing the air volume of the damper, and the predetermined value when the door is opened is equal between the target chamber and the reference chamber. Is characterized in that the differential pressure can be maintained amount of air passing through the wind speed is the chamber pressure of the target chamber configured to produce.

  According to the present invention, when a door opening signal indicating that an operation of opening the door between the reference room and the target room has been started is output from the door sensor installed on the door, the room of the target room is displayed. By controlling the pressure adjustment damper to reduce or increase the room pressure of the target room to a predetermined value when the door is opened, the influence on the room pressure of the reference room and other rooms based on it is minimized. It is possible to improve the stability of each chamber pressure adjusting damper. As a result, in the present invention, there is no disturbance to the room pressure control of other rooms that do not open and close the door, and there is no hunting of control by opening and closing other doors, so even when other doors are opened and closed It is possible to perform the room pressure control.

  In the present invention, after the chamber pressure in the target chamber reaches a predetermined value when the door is opened, door driving means is provided to drive and open the door between the reference chamber and the target chamber. The influence on the room pressure of the room can be suppressed more reliably.

  Further, in the present invention, at the same time when the pressure reduction or pressure increase of the target chamber is started, a part of the door between the reference chamber and the target chamber is opened and stopped, and the reference pressure chamber damper is controlled to control the reference chamber. Maintain the reference room pressure of the room, and when the room pressure in the target room reaches the predetermined value when the door is opened, restart the door to restart the room pressure of the reference room and other rooms based on it. The time for opening the door can be shortened while minimizing the effect on the door. According to the present invention, even when the response capability of the chamber pressure adjusting damper of the target chamber cannot catch up, the chamber pressure adjusting damper of the reference chamber is used to maintain the chamber pressure of the reference chamber. The chamber pressure can be changed to a predetermined value when the door is opened in a short time.

  First, the principle of the present invention will be described. As shown in FIG. 1, in a facility having a plurality of rooms, the indoor static pressure (hereinafter abbreviated as “room pressure”) of each room is controlled to be constant by controlling the air volume of a supply damper or exhaust damper (not shown). Shall. In FIG. 1, R-1 to R-8 are clean rooms, MR is a machine room in which machines such as an air supply fan and an exhaust fan are installed, and AR is in the machine room MR and clean rooms R-1 to R-8. , HW is a passage, 1-1 to 1-8 are doors of clean rooms R-1 to R-8, 1-9 is a door for entering the passage HW from the front chamber AR, and 1-10 is a machine room MR. , 1-11 is a door for entering the front room AR from outside the facility, 2-1 to 2-8 are differential pressure sensors for measuring the differential pressure between the clean rooms R-1 to R-8 and the passage HW, 2 -9 is a differential pressure sensor for measuring the differential pressure between the front chamber AR and the passage HW.

  In the clean rooms R-1 to R-8, the chamber pressure is controlled so that the differential pressure with respect to the passage HW which is the reference chamber becomes +10 [Pa]. In the example of FIG. 1, since the reference chamber pressure in the passage HW is 10 [Pa], the chamber pressure in the clean rooms R-1 to R-8 is 20 [Pa].

Here, consider a case where the door 1-3 of the clean room R-3 is opened as shown in FIG. The example of FIG. 2 shows a conventional case where the differential pressure in each room is not changed. The volume V _{HW of the} passage HW is 576 [m ³ ], the design room pressure SP _HW is 10 [Pa], the volume V _R-3 of the clean room _R-3 is 192 [m ³ ], and the design room pressure SP _R-3 is 20 Assuming [Pa], the air density ρ of the passage HW after the door 1-3 is opened and the clean room R-3 is expressed by the following equation according to the law of conservation of mass.

In Expression (1), ρ _HW is the air density of the passage HW before the door is opened, and ρ _R-3 is the air density of the clean room R-3 before the door is opened.
And passage HW after opening of door 1-3 and room pressure SP of clean room R-3 are as follows.

  Since the chamber pressure SP of the passage HW and the clean room R-3 is 12.5 [Pa] from the equation (2), the chamber pressures of the other clean rooms R-1, R-2, R-4 to R-8 are 22.5 [Pa]. Thus, the opening of the door 1-3 affects the chamber pressure in the passage HW, and the change in the chamber pressure in the passage HW becomes the chamber pressure in the other clean rooms R-1, R-2, R-4 to R-8. Will have an impact. Since the chamber pressure of the passage HW after opening the door is proportional to the volume ratio of itself, the larger the volume of the passage HW, the smaller the change in the chamber pressure of the passage HW and the less the influence on the room pressure of other clean rooms.

  When pure pressure control is used, if the room pressure in one room fluctuates, it affects the room pressure in other rooms through the room pressure in the exhaust duct and passage HW, and disturbs the room pressure control in other rooms. give. Therefore, when the doors of each room are opened in sequence, the room pressure control of each room is frequently subjected to disturbance, and the room in each room is in a hunting state that frequently fluctuates. In particular, a change in the chamber pressure in the passage HW that serves as a reference for the room pressure in each room changes the room pressure in each room. Thus, not changing the chamber pressure in the passage HW is an important point for the chamber pressure control.

  In addition, the required static pressure of the main duct varies greatly with respect to different states such as a state where the door is closed and a state where the door is open. When fan control is performed at a constant static pressure, all excess pressure is applied to the supply damper and exhaust damper, leading to unstable room pressure control and wasteful fan power.

  In view of the above points, in the present invention, the static pressure of the passage HW is stabilized by opening the door after reducing or increasing the pressure of the target chamber. Opening the door after reducing or increasing the pressure of the target chamber is an important point for stabilizing the static pressure in the passage.

[First Embodiment]
Hereinafter, embodiments of the present invention will be described with reference to the drawings. FIG. 3 is a block diagram showing the configuration of the room pressure control apparatus according to the first embodiment of the present invention. Here, only the configuration of the clean room R-3 (target room) and the passage HW (reference room) that are directly targeted for the room pressure control is described.

In FIG. 3, 1-3 is the door of the clean room R-3, 2-3 is a differential pressure sensor for measuring the differential pressure between the clean room R-3 and the passage HW, 3-3 is the opening and closing of the door 1-3 and the door 1 -3 is a door sensor that detects an operation to open and close -3, 4-3 is a door drive mechanism that controls opening and closing of the door 1-3, 5-3 is an air supply duct of the clean room R-3, and 5-9 is a passage HW. 6-3 is an exhaust duct of the clean room R-3, 6-9 is an exhaust duct of the passage HW, 7-3 is an air supply damper of the clean room R-3, and 7-9 is an air supply damper of the passage HW. , 8-3 is an exhaust damper for the clean room R-3, 8-9 is an exhaust damper for the passage HW, 9-3 is a wind speed sensor for supplying air to the clean room R-3, and 9-9 is an air supply for the passage HW. The wind speed sensor 10 is a controller.
The controller 10 constitutes target room pressure control means and reference room pressure control means, and the controller 10 and the door drive mechanism 4-3 constitute door drive means.

  The supply air SA is sent from a supply fan (not shown) of the machine room MR, and is supplied from the supply ducts 5-3 and 5-9 to the clean room R-3 and the passage HW via the supply dampers 7-3 and 7-9. Sent out. Further, the exhaust RA in the clean room R-3 and the passage HW is sucked out from the exhaust ducts 6-3 and 6-9 via the exhaust dampers 8-3 and 8-9 by an exhaust fan (not shown) of the machine room MR. .

  The controller 10 controls the chamber pressure in the passage HW by controlling the opening degree (passing air volume) of the air supply damper 7-9 and the exhaust damper 8-9. Further, the controller 10 controls the opening degree of the supply damper 7-3 and the exhaust damper 8-3 according to the detection result of the differential pressure sensor 2-3, so that the differential pressure between the passage HW is a constant value (for example, The room pressure of the clean room R-3 is controlled so as to be +10 [Pa]).

  In addition, when supply is constant air volume control, about the structure regarding the air supply control of the air supply dampers 7-3 and 7-9, the wind speed sensors 9-3 and 9-3, and the controller 10, the constant air volume control device CAV. Can be replaced.

The operation of the room pressure control apparatus when the door 1-3 of the clean room R-3 is opened in the above state will be described.
When the door 1-3 is opened, the wind speed v at the door opening is as follows.

In Expression (3), α is a flow coefficient (α = 0.6 to 0.7), ρ is an air density [kg / m ³ ], and ΔP is a differential pressure [Pa]. From equation (3), when the door 1-3 is opened, the required differential pressure ΔP that can maintain a constant air velocity v (for example, 0.3 [m / s]) at the door opening is 0.13 [Pa. ]. That is, when the door 1-3 is opened, the room pressure of the clean room R-3 may be set to 10.13 [Pa].

FIG. 4 is a flowchart showing the operation of the room pressure control device of the present embodiment, FIG. 5 is a characteristic diagram showing the operation of the room pressure control device, and FIG. 5 (A) shows the opening of the door 1-3. FIG. 5B is a diagram showing the opening degree of the supply damper and the exhaust damper, and FIG. 5C is a diagram showing the chamber pressure of the clean room R-3. In FIG. 5B, OSA _R-3 is the opening degree of the supply damper 7-3 of the clean room R-3, ORA _R-3 is the opening degree of the exhaust damper 8-3 of the clean room R-3, and ORA _HW is the passage. This is the opening degree of the HW exhaust damper 8-9.

  When the controller 10 receives a door opening signal indicating that the operation of opening the door 1-3 has started from the door sensor 3-3 (YES in step S1 in FIG. 4), the controller 10 sets the room pressure setting value of the clean room R-3. 20 [Pa] is changed to a predetermined value of 10.13 [Pa] when the door is opened, and the opening degree of the exhaust damper 8-3 in the clean room R-3 is controlled at a predetermined opening degree changing speed. The chamber pressure is reduced from 20 [Pa] to 10.13 [Pa] (step S2). In the example of FIGS. 5A to 5C, the door open signal is received at time t1, and the exhaust damper 8-3 is controlled as shown in FIG. As shown, the room pressure of the clean room R-3 decreases.

The door sensor 3-3 may output a door opening signal when an operation button or the like for opening the door 1-3 is operated, or may detect a force to open the door 1-3 to detect the door. An open signal may be output.
Next, the controller 10 detects the time when the chamber pressure of the clean room R-3 is reduced to 10.13 [Pa] (time t2 in FIGS. 5A to 5C), or the exhaust damper 8-3. A value of 10.5 [Pa] in which the wave of the opening is within a predetermined range and the chamber pressure of the clean room R-3 approaches a predetermined 10.13 [Pa] (here, the allowable error in the chamber pressure control of the passage HW is When the pressure is reduced to ± 0.5 [Pa], the door drive mechanism 4-3 is controlled to open the door 1-3 (step S3).

Next, an operation when an operation button or the like for closing the door 1-3 is operated and the door driving mechanism 4-3 closes the door 1-3 will be described.
When the controller 10 receives a door closing completion signal indicating that the door 1-3 is closed from the door sensor 3-3 (YES in step S4), the controller 10 sets the room pressure setting value of the clean room R-3 to 10.13 [Pa. ] To a predetermined value 20 [Pa] when the door is closed, the opening degree of the exhaust damper 8-3 of the clean room R-3 is controlled at a predetermined opening changing speed, and the room pressure of the clean room R-3 is set to 10.13. The pressure is increased from [Pa] to 20 [Pa] (step S5).

FIG. 6 shows the fluctuations in the room pressure when the door 1-3 of the clean room R-3 is opened. In the present embodiment, when the door 1-3 is opened, the air volume of 0.3 m / s can be maintained from the clean room R-3 toward the passage HW.
Conventionally, when the door 1-3 of the clean room R-3 is opened, the chamber pressure in the passage HW fluctuates rapidly, and the other clean room R- using the passage HW as a reference for the chamber pressure and the passage HW as a reference for the chamber pressure. 1, R-2, R-4 to R-8 chamber pressure control is affected.

  On the other hand, in the present embodiment, the chamber pressure setting value of the clean room R-3 is set to the value when the door is opened before the door 1-3 is opened, and the chamber pressure becomes the planned chamber pressure setting value. By opening the door 1-3, it is possible to reduce the influence on the room pressure of the passage HW and other rooms based on the passage HW, and the stability of each damper can be improved. As a result, in this embodiment, there is no disturbance to the room pressure control of other rooms that do not open and close the door, and there is no hunting of control by opening and closing other doors. However, stable room pressure control can be performed.

[Second Embodiment]
Next, a second embodiment of the present invention will be described. In the first embodiment, the opening pressure of the exhaust damper is controlled to change the chamber pressure. However, by performing the air volume control for controlling the flow volume of the exhaust damper, the control stability and the followability are further improved. Can be improved. FIG. 7 is a block diagram showing the configuration of the room pressure control apparatus according to the second embodiment of the present invention. The same components as those in FIG.

In FIG. 7, reference numeral 11-3 denotes an exhaust air velocity sensor for the clean room R-3, and reference numeral 11-9 denotes an exhaust air velocity sensor for the passage HW.
The controller 10a constitutes a target room pressure control means and a reference room pressure control means, and the controller 10a and the door drive mechanism 4-3 constitute a door drive means.

Similar to the first embodiment, when the supply air is constant air flow control, the air supply dampers 7-3 and 7-9, the wind speed sensors 9-3 and 9-3, and the configuration related to the air supply control of the controller 10. Can be replaced with a constant air flow control device CAV.
Further, when the exhaust is controlled by the variable air flow control, the exhaust dampers 8-3 and 8-9, the wind speed sensors 11-3 and 11-9, and the configuration related to the exhaust control of the controller 10 are replaced by the variable air flow control device VAV. Can do.

FIG. 8 is a flowchart showing the operation of the room pressure control device of the present embodiment, FIG. 9 is a characteristic diagram showing the operation of the room pressure control device, and FIG. 9A shows the opening of the door 1-3. FIG. 9B is a diagram showing the air volume of the supply damper and the exhaust damper, and FIG. 9C is a diagram showing the room pressure of the clean room R-3. In FIG. 9B, FSA _R-3 is the passing air volume of the air supply damper 7-3 of the clean room R-3, FRA _R-3 is the passing air volume of the exhaust damper 8-3 of the clean room R-3, and FRA _HW is the passage. This is the air flow rate of the HW exhaust damper 8-9.

  When the controller 10a receives a door opening signal indicating that the operation of opening the door 1-3 has started from the door sensor 3-3 (YES in step S10 in FIG. 8), the controller 10a sets the room pressure setting value of the clean room R-3. The pressure is changed from 20 [Pa] to a predetermined value of 10.13 [Pa] when the door is opened, the passing air volume of the exhaust damper 8-3 is obtained from the wind speed detected by the wind speed sensor 11-3, and the passage of the exhaust damper 8-3 is obtained. The air volume is controlled at a predetermined air volume changing speed, and the chamber pressure in the clean room R-3 is reduced from 20 [Pa] to 10.13 [Pa] (step S11). In the example of FIGS. 9A to 9C, a door opening signal is received at time t1, and the air volume of the exhaust damper 8-3 is controlled as shown in FIG. ), The room pressure in the clean room R-3 decreases.

  The controller 10a operates when the chamber pressure in the clean room R-3 is reduced to 10.13 [Pa] (time t2 in FIGS. 9A to 9C), or the air flow of the exhaust damper 8-3. Is within a predetermined range, and the room pressure of the clean room R-3 approaches a predetermined value of 10.13 [Pa] (in this case, the tolerance of the room pressure control of the passage HW is ± 0.5). When the pressure is reduced to [Pa], the door drive mechanism 4-3 is controlled to open the door 1-3 (step S12).

  The controller 10a opens the door 1 until the door 1-3 is fully opened by the opening operation of the door 1-3 by the door driving mechanism 4-3 (from time t2 to time t3 in FIGS. 9A to 9C). The air volume of the exhaust damper 8-3 of the clean room R-3 is decreased in inverse proportion to the opening of −3, and the air volume of the exhaust damper 8-9 of the passage HW is increased by the same amount as the absolute value of this decrease (step S13, S14). For the exhaust damper 8-9, the air volume control can be performed by obtaining the passing air volume of the exhaust damper 8-9 from the wind speed detected by the wind speed sensor 11-9. The reason for performing the air volume control as in step S14 is to keep the passing air speed of the door constant.

Next, an operation when an operation button or the like for closing the door 1-3 is operated and the door driving mechanism 4-3 closes the door 1-3 will be described.
When the controller 10a receives a door closing signal indicating that the operation of closing the door 1-3 has been started from the door sensor 3-3 (YES in step S15 in FIG. 8), the controller 10a is inversely proportional to the opening degree of the door 1-3. Then, the air volume of the exhaust damper 8-3 in the clean room R-3 is increased, and the air volume of the exhaust damper 8-9 in the passage HW is reduced by the same amount as the absolute value of this increase (step S16).
The door sensor 3-3 may output a door closing signal when an operation button or the like for closing the door 1-3 is operated, or may detect a force for closing the door 1-3 to detect the door. A close signal may be output.

  When the controller 10a receives a door close completion signal indicating that the door 1-3 is closed from the door sensor 3-3 (YES in step S17), the controller 10a sets the room pressure set value of the clean room R-3 to 10.13 [Pa. ] To a predetermined value of 20 [Pa] when the door is closed, the air volume of the exhaust damper 8-3 of the clean room R-3 is controlled at a predetermined air volume changing speed, and the room pressure of the clean room R-3 is 10.13 [Pa] ] To 20 [Pa] (step S18).

  As described above, in the present embodiment, the same effects as in the first embodiment can be obtained. Further, in the present embodiment, by controlling the air volume of the exhaust damper, the control stability and followability can be further improved as compared with the first embodiment.

[Third Embodiment]
Next, a third embodiment of the present invention will be described. In the second embodiment, the case where the room pressure of the clean rooms R-1 to R-8 is higher than the room pressure of the passage HW has been described, but the case where the room pressure of the target room is lower than the room pressure of the passage HW. The present invention can also be applied. Also in the present embodiment, the configuration of the room pressure control device is the same as that of the second embodiment, and therefore will be described using the reference numerals in FIG. However, instead of using the name “clean room R-3”, a room having a lower room pressure than the passage HW is referred to as a target room.

FIG. 10 is a flowchart showing the operation of the room pressure control device of the present embodiment, FIG. 11 is a characteristic diagram showing the operation of the room pressure control device, and FIG. 11 (A) shows the opening of the door 1-3. FIG. 11B is a diagram showing the air volume of the supply damper and the exhaust damper, and FIG. 11C is a diagram showing the chamber pressure of the target chamber. In FIG. 11 (B), FSA _R is an amount of air passing through the supply air damper 7-3 of the target chamber, FRA _R is an amount of air passing through the exhaust damper 8-3 of the target chamber, FRA _HW is the passage HW exhaust damper 8-9 It is the passing air volume.

  When the controller 10a receives the door opening signal from the door sensor 3-3 (YES in step S20 in FIG. 10), the controller 10a changes the chamber pressure setting value of the target chamber to a predetermined value when the door is opened, and the exhaust damper 8 of the target chamber. -3 is controlled at a predetermined air volume changing speed to increase the chamber pressure of the target chamber to a predetermined value when the door is opened (step S21). In the example of FIGS. 11A to 11C, the door open signal is received at time t1, and the air volume of the exhaust damper 8-3 is controlled as shown in FIG. ) As shown in FIG.

  The controller 10a controls the door driving mechanism 4-3 at the time when the chamber pressure in the target chamber is increased to a predetermined value (time t2 in FIGS. 11A to 11C), and the door 1-3. Is opened (step S22). Until the door 1-3 is fully opened (from time t2 to t3 in FIGS. 11A to 11C), the controller 10a is in proportion to the opening degree of the door 1-3, and the exhaust damper 8 in the target chamber. -3 is increased, and the air volume of the exhaust damper 8-9 in the passage HW is reduced by the same amount as the absolute value of this increase (steps S23, S24).

  Next, when the controller 10a receives a door closing signal indicating that an operation of closing the door 1-3 has been started from the door sensor 3-3 (YES in step S25), the controller 10a is proportional to the opening degree of the door 1-3. Then, the air volume of the exhaust damper 8-3 in the target chamber is reduced, and the air volume of the exhaust damper 8-9 in the passage HW is increased by the same amount as the absolute value of this decrease (step S26).

  When the controller 10a receives a door closing completion signal indicating that the door 1-3 is closed from the door sensor 3-3 (YES in step S27), the controller 10a sets the chamber pressure setting value of the target chamber to a predetermined value when the door is closed. The air volume of the exhaust damper 8-3 in the target chamber is controlled at a predetermined air volume changing speed, and the chamber pressure in the target chamber is reduced to a predetermined value when the door is closed (step S28).

  As described above, in the present embodiment, the chamber pressure setting value of the target chamber is set to the value when the door is opened before the door 1-3 is opened, and the chamber pressure is increased to the planned chamber pressure setting value. By opening the door 1-3, the air volume at a predetermined wind speed can be maintained from the passage HW toward the target room, and the influence on the room pressure of the passage HW and other rooms based on the passage HW can be reduced. And the stability of each damper can be improved.

  In the present embodiment, the case where the chamber pressure control in the case where the chamber pressure in the target chamber is lower than the chamber pressure in the passage HW is applied to the second embodiment has been described. However, the present embodiment is applied to the first embodiment. May be. When the chamber pressure in the target chamber is lower than the chamber pressure in the passage HW, the chamber pressure in the target chamber is increased to a predetermined value when the door is opened in step S2 of the first embodiment, and the chamber pressure in the target chamber is determined in step S5. Is reduced to a predetermined value when the door is closed.

  Moreover, although the 1st-3rd embodiment demonstrated the case where the door of an object chamber was an electric door controlled by a controller, it is not restricted to this. Even if the door is manually operated, for example, when the door of the target room is difficult to open rapidly, the pressure in the target room is reduced or increased to a predetermined value when the door is opened before the door opens. If possible, it can be applied.

[Fourth Embodiment]
Next, a fourth embodiment of the present invention will be described. In the first to third embodiments, since the speed of opening the door of the target chamber is determined by the response capacity of the exhaust damper of the target chamber, there is a problem that the time for opening the door is delayed. Therefore, in this embodiment, the time for opening the door is shortened. Also in the present embodiment, the configuration of the room pressure control device is the same as that of the second embodiment, and therefore will be described using the reference numerals in FIG.

  FIG. 12 is a flowchart showing the operation of the room pressure control device of the present embodiment, FIG. 13 is a characteristic diagram showing the operation of the room pressure control device, and FIG. 13 (A) shows the opening of the door 1-3. FIG. 13B is a diagram showing the air volume of the supply damper and the exhaust damper, and FIG. 13C is a diagram showing the room pressure of the clean room R-3.

  When the controller 10a receives a door opening signal from the door sensor 3-3 (YES in step S30 in FIG. 12), the controller 10a changes the room pressure setting value of the clean room R-3 from 20 [Pa] to a predetermined value 10.13 when the door is opened. The pressure is changed to [Pa], and the passage air volume of the exhaust damper 8-3 is controlled at a predetermined air volume change speed to reduce the room pressure of the clean room R-3 from 20 [Pa] to 10.13 [Pa] (step) S31). In the example of FIGS. 13A to 13C, a door opening signal is received at time t10, and the air volume of the exhaust damper 8-3 is controlled as shown in FIG. ), The room pressure of the clean room R-3 starts to decrease.

  The controller 10a changes the room pressure of the clean room R-3 with the exhaust damper 8-3, and at the same time increases the air volume of the exhaust damper 8-9 in the passage HW (step S32) as shown in FIG. The drive mechanism 4-3 is controlled, and the door 1-3 is slightly opened as shown at time t10 to t11 in FIG. 13A, and the door 1-3 is temporarily stopped in this state (step S33).

  Next, the controller 10a controls the door drive mechanism 4-3 when the room pressure of the clean room R-3 reaches a predetermined value 10.13 [Pa] when the door is opened (YES in step S34), As shown at time t12 in FIG. 13A, the opening of the door 1-3 is resumed (step S35).

The controller 10a opens the door 1 until the door 1-3 is fully opened by the opening operation of the door 1-3 by the door driving mechanism 4-3 (from time t12 to time t13 in FIGS. 13A to 13C). The air volume of the exhaust damper 8-3 of the clean room R-3 is decreased in inverse proportion to the opening of −3, and the air volume of the exhaust damper 8-9 of the passage HW is increased by the same amount as the absolute value of this decrease (step S36, S37).
Since the process of step S38-S41 in the case of closing the door 1-3 is the same as step S15-S18 of FIG. 8, description is abbreviate | omitted.

  As described above, in the present embodiment, in order to shorten the time for opening the door 1-3, the door 1-3 is slightly opened at the same time as the chamber pressure of the clean room R-3 is changed by the exhaust damper 8-3. Using the exhaust damper 8-9 of the passage HW, the chamber pressure in the passage HW is maintained. In the present embodiment, the opening of the door 1-3 is controlled according to the response capability of the exhaust damper 8-9 in the passage HW, the amount of exhaust passing through the door 1-3 is suppressed, and the stability of the static pressure in the passage HW is suppressed. By opening the door 1-3 while maintaining the above, it is possible to shorten the time for opening the door 1-3 while realizing the same effect as in the second embodiment. According to this embodiment, even when the response capacity of the exhaust damper 8-3 of the clean room R-3 cannot catch up, the exhaust pressure damper 8-9 of the passage HW is used to maintain the chamber pressure of the passage HW. The room pressure of the clean room R-3 can be changed to a predetermined value when the door is opened in a short time.

[Fifth Embodiment]
Next, a fifth embodiment of the present invention will be described. In the fourth embodiment, the case where the chamber pressure of the clean rooms R-1 to R-8 is higher than the chamber pressure of the passage HW has been described, but the case where the chamber pressure of the target chamber is lower than the chamber pressure of the passage HW is also described. The invention can be applied. Also in the present embodiment, the configuration of the room pressure control device is the same as that of the second embodiment, and therefore will be described using the reference numerals in FIG. However, as in the third embodiment, a room having a lower chamber pressure than the passage HW is referred to as a target room.

  FIG. 14 is a flowchart showing the operation of the room pressure control device of the present embodiment, FIG. 15 is a characteristic diagram showing the operation of the room pressure control device, and FIG. 15 (A) is a diagram showing the opening degree of the door 1-3. FIG. 15B is a diagram showing the air volume of the supply damper and the exhaust damper, and FIG. 15C is a diagram showing the chamber pressure of the target chamber.

  When the controller 10a receives a door opening signal from the door sensor 3-3 (YES in step S50 in FIG. 14), the controller 10a changes the chamber pressure setting value of the target chamber to a predetermined value when the door is opened, and the exhaust damper 8 of the target chamber. -3 is controlled at a predetermined air volume changing speed to increase the chamber pressure of the target chamber to a predetermined value when the door is opened (step S51). In the example of FIGS. 15A to 15C, a door open signal is received at time t10, and the air volume of the exhaust damper 8-3 is controlled as shown in FIG. ) The chamber pressure in the target room begins to rise as shown in (3).

  The controller 10a changes the chamber pressure of the target chamber with the exhaust damper 8-3, and at the same time reduces the air volume of the exhaust damper 8-9 in the passage HW (step S52) as shown in FIG. 4-3 is controlled to slightly open the door 1-3 as shown at time t10 to t11 in FIG. 15A, and the door 1-3 is temporarily stopped in this state (step S53).

  Next, the controller 10a controls the door driving mechanism 4-3 when the chamber pressure in the target chamber reaches a predetermined value when the door is opened (YES in step S54), and performs time t12 in FIG. As shown, the opening of the door 1-3 is resumed (step S55).

The controller 10a opens the door 1 until the door 1-3 is fully opened by the opening operation of the door 1-3 by the door driving mechanism 4-3 (from time t12 to time t13 in FIGS. 15A to 15C). The air volume of the exhaust damper 8-3 in the target chamber is increased in proportion to the opening of -3, and the air volume of the exhaust damper 8-9 in the passage HW is decreased by the same amount as the absolute value of this increase (steps S56 and S57). .
Since the process of step S58-S61 in the case of closing the door 1-3 is the same as step S25-S28 of FIG. 10, description is abbreviate | omitted.

As described above, in the present embodiment, the same effect as in the fourth embodiment can be obtained.
In the first to fifth embodiments, the exhaust pressure damper is mainly used as the chamber pressure adjusting damper to control the chamber pressure. However, the present invention is not limited to this, and the air supply damper is used as the chamber pressure adjusting damper. May be used to control the chamber pressure, or both the exhaust damper and the air supply damper may be used to control the chamber pressure.

  The controllers 10 and 10a described in the first to fifth embodiments can be realized by a computer including a CPU, a storage device, and an interface, and a program that controls these hardware resources. The CPUs of these computers execute the processes described in the first to fifth embodiments in accordance with programs stored in the storage device.

  Moreover, although the case where one door was opened and closed was demonstrated in the 1st-5th embodiment, this invention can also respond to the case where many doors open and close simultaneously. In this case, if the air volume of the exhaust damper 8-9 in the passage HW, which is a common reference, is the sum of the required air volumes for opening and closing the doors, the doors can be opened and closed simultaneously. However, the air volume of the exhaust damper 8-9 in the passage HW cannot exceed the maximum air volume of the damper. Therefore, when the sum of the required air volumes for opening and closing of each door may exceed the maximum air volume of the exhaust damper 8-9 in the passage HW, it is necessary to limit the number of doors that can be simultaneously opened and closed.

  The present invention can be applied to a technique for controlling the room pressure of a plurality of rooms.

It is a top view which shows an example of the facility used as the object of room pressure control in this invention. It is a top view which shows the chamber pressure fluctuation | variation when the door of a clean room opens in the facility of FIG. It is a block diagram which shows the structure of the room pressure control apparatus which concerns on the 1st Embodiment of this invention. It is a flowchart which shows operation | movement of the room pressure control apparatus which concerns on the 1st Embodiment of this invention. It is a characteristic view which shows operation | movement of the room pressure control apparatus which concerns on the 1st Embodiment of this invention. It is a top view which shows the chamber pressure fluctuation | variation when the door of a clean room opens in the 1st Embodiment of this invention. It is a block diagram which shows the structure of the room pressure control apparatus which concerns on the 2nd Embodiment of this invention. It is a flowchart which shows operation | movement of the room pressure control apparatus which concerns on the 2nd Embodiment of this invention. It is a characteristic view which shows operation | movement of the room pressure control apparatus which concerns on the 2nd Embodiment of this invention. It is a flowchart which shows operation | movement of the room pressure control apparatus which concerns on the 3rd Embodiment of this invention. It is a characteristic view which shows the operation | movement of the room pressure control apparatus which concerns on the 3rd Embodiment of this invention. It is a flowchart which shows operation | movement of the room pressure control apparatus which concerns on the 4th Embodiment of this invention. It is a characteristic view which shows the operation | movement of the room pressure control apparatus which concerns on the 4th Embodiment of this invention. It is a flowchart which shows operation | movement of the room pressure control apparatus which concerns on the 5th Embodiment of this invention. It is a characteristic view which shows the operation | movement of the room pressure control apparatus which concerns on the 5th Embodiment of this invention.

Explanation of symbols

  R-1 to R-8 ... clean room, MR ... machine room, AR ... front room, HW ... passage, 1-1 to 1-11 ... door, 2-1 to 2-9 ... differential pressure sensor, 3-3 ... Door sensor, 4-3 ... door drive mechanism, 5-3, 5-9 ... air supply duct, 6-3, 6-9 ... exhaust duct, 7-3, 7-9 ... air supply damper, 8-3, 8-9 ... exhaust damper, 9-3, 9-9, 11-3, 11-9 ... wind speed sensor, 10, 10a ... controller.

Claims (3)

In a room pressure control device that controls the room pressure of each room in a facility having a reference room and other plural rooms ,
A room pressure adjusting damper installed in at least one of an exhaust duct and an air supply duct provided for each room;
A door sensor that is installed for each door in each room and detects opening and closing of the door;
When the door opening signal indicating that the operation of opening the door between the reference room and the other room has not started is output from the door sensor, the room pressure adjusting damper of the other room is controlled. The operation of opening the door between the reference room and the target room belonging to the other room is started by controlling the room pressure of the other room so that the differential pressure with the reference room becomes a constant value . When a door opening signal indicating that this is output from a door sensor installed on the door, the chamber pressure adjusting damper of the target chamber is controlled to set the chamber pressure of the target chamber to a predetermined value when the door is opened. and the target chamber pressure control means for pressurizing reduced pressure or increase in,
Door drive means for driving and opening the door between the reference chamber and the target chamber after the chamber pressure in the target chamber reaches a predetermined value when the door is opened;
When a door opening signal indicating that an operation to open a door between the reference room and another room has not started is output, the reference pressure chamber is controlled by controlling a chamber pressure adjusting damper. Until the door between the reference chamber and the target chamber is fully opened after the chamber pressure of the target chamber reaches a predetermined value when the door is opened. And a reference chamber pressure control means for increasing or decreasing the air volume of the damper for adjusting the chamber pressure in the reference chamber according to the opening of the door,
The predetermined value at the time of opening the door is a chamber pressure of the target chamber set so as to generate a differential pressure capable of maintaining a passing air volume at a constant wind speed between the target chamber and a reference chamber.
The target chamber pressure control means adjusts the opening of the door until the door between the reference chamber and the target chamber is fully opened after the chamber pressure in the target chamber reaches a predetermined value when the door is opened. Accordingly, the air pressure of the damper for adjusting the room pressure in the target room is decreased or increased accordingly . The room pressure control device according to claim 1 ,
When the door closing completion signal indicating that the door between the reference chamber and the target chamber is closed is output from a door sensor installed on the door, the target chamber pressure control means A chamber pressure control device that controls a chamber pressure adjusting damper to return the chamber pressure of the target chamber to a predetermined value when the door is closed. In a room pressure control method for controlling the room pressure of each room in a facility having a reference room and other plural rooms ,
When the door opening signal indicating that the operation of opening the door between the reference room and another room has not started is output from the door sensor installed for each door of each room, the room of the reference room Controlling the pressure adjusting damper so that the chamber pressure of the reference chamber becomes the reference chamber pressure;
When a door opening signal indicating that an operation to open a door between the reference room and the other room has been started is not output, the room pressure adjusting damper of the other room is controlled, and the reference Controlling the room pressure of the other room so that the differential pressure with the room becomes a constant value;
When a door opening signal indicating that an operation of opening a door between the reference room and the target room belonging to the other room has been started is output from a door sensor installed on the door, the target room A target chamber pressure control step of controlling the chamber pressure adjusting damper to reduce or increase the chamber pressure of the target chamber to a predetermined value when the door is opened ;
After the chamber pressure of the target chamber reaches a predetermined value when the door is opened, a door opening step that drives and opens the door between the reference chamber and the target chamber;
Until the door between the reference chamber and the target chamber is fully opened after the chamber pressure in the target chamber reaches a predetermined value when the door is opened, the chamber pressure of the reference chamber is determined according to the opening of the door. Increasing or decreasing the air volume of the adjustment damper; and
Until the door between the reference chamber and the target chamber is fully opened after the chamber pressure of the target chamber reaches a predetermined value when the door is opened, the chamber pressure of the target chamber is determined according to the opening degree of the door. Reducing or increasing the air volume of the adjustment damper, and
The predetermined value when the door is opened is a chamber pressure of the target chamber set so that a differential pressure capable of maintaining a constant air flow rate between the target chamber and a reference chamber is generated. Pressure control method.

Images