JP3089130B2 - Room pressure control device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a room pressure control device used in a facility having a target room requiring room pressure control, such as a pharmaceutical factory, an LSI factory, or a microorganism research laboratory. An air-supply-side adjustment damper and an air-supply-side airtight damper are interposed in series in an air path, and an exhaust-side adjustment damper and an exhaust-side airtight damper are interposed in series in an exhaust path for the target chamber. The required air supply control for adjusting the opening amount of the air-side adjustment damper to adjust the air supply amount to the target chamber to the required air supply amount, and the opening of the exhaust-side adjustment damper for adjusting the opening degree of the target chamber The present invention relates to a room pressure control device provided with control means for performing required room pressure control for adjusting pressure to a required room pressure.

[0002]

2. Description of the Related Art When a supply / exhaust operation for a target chamber is stopped, a room pressure control device of this type closes a supply-side airtight damper and an exhaust-side airtight damper to supply and exhaust air to and from the target chamber. Conventionally, in this type of room pressure control device, in order to start the air supply / exhaust operation to the target room, the air supply to the target room is adjusted by opening the air supply side adjustment damper. Under the execution of the required air supply control that adjusts the amount to the set required air supply, and the necessary room pressure control that adjusts the opening pressure of the exhaust-side adjustment damper to adjust the room pressure of the target room to the set required air pressure,
The supply-side airtight damper and the exhaust-side airtight damper were opened and operated.

[0003] Also, when the supply / exhaust operation to the target chamber is stopped, the supply-side airtight damper and the exhaust-side airtight damper are opened while the required air supply amount control and the required room pressure control are executed. .

[0004]

However, in the conventional apparatus, when the supply / exhaust operation is started, the supply-side airtight damper and the exhaust-side airtight damper are opened under the required supply amount control. In order to control the required amount of air supply during the air supply stop stage when the air-side airtight damper is still fully closed, the air-supply-side adjustment damper is greatly opened, and in this state, the air-side airtight damper is closed. The opening operation is started, and therefore, the supply air amount changes abruptly at the start of the opening operation of these hermetic dampers, and the required room pressure control cannot follow this, and the room pressure of the target room fluctuates greatly. There was a case.

[0005] And due to these room pressure fluctuations, for example,
There has been a problem that the intended purpose of room pressure control, such as maintaining the cleanliness of the target room and preventing harmful substances from leaking from the target room, cannot be sufficiently achieved.

Further, in order to minimize such fluctuations in the room pressure at the start of the supply / exhaust operation, additional control means for opening and closing the airtight damper at a considerably slow speed is required. There was also a problem that was expensive.

[0007] In view of the above circumstances, an object of the present invention is to effectively solve the above-described problems by adopting a rational control mode.

[0008]

According to a first feature of the present invention, a supply-side adjustment damper and a supply-side hermetic damper are interposed in series in a supply path to a target chamber, and the target chamber is provided with a control valve. In the exhaust path, an exhaust-side adjustment damper and an exhaust-side airtight damper are interposed in series, and the degree of opening of the supply-side adjustment damper is adjusted to adjust the supply amount to the target chamber to the required supply amount. A control means for executing a required air supply amount control to perform necessary air pressure control and a necessary room pressure control for adjusting an opening degree of the exhaust side adjustment damper to adjust the room pressure of the target room to a set required room pressure. Means, when a start command of the supply / exhaust operation is given, the shutoff release control for opening the supply-side airtight damper and the exhaust-side airtight damper, and in a state where the supply-side adjustment damper is fully closed, Opening operation of the supply side airtight damper and the exhaust side airtight damper started. And is the same at the same time or after the point you have to configure to return to the required air supply amount control in need chamber pressure control under execution.

According to a second aspect of the present invention, in the first aspect of the present invention, the control means returns to the required supply amount control in the cutoff release control. The point is that the air supply adjustment damper is configured to return to the required air supply control under the required room pressure control in a state where the opening operation speed in the return process from the fully closed state is limited.

According to a third aspect of the present invention, in the embodiment of the first or second aspect of the present invention, the control means is provided in the shutoff release control together with the supply side adjustment damper on the exhaust side. In the state where the adjustment damper is fully closed, the opening operation of the air-supply-side airtight damper and the exhaust-side airtight damper is started, and at the same time or thereafter, the required air supply is resumed under the return of the necessary chamber pressure control. The point is that it is configured to return to the quantity control.

According to a fourth aspect of the present invention, in the embodiment of the first aspect of the present invention, each of the plurality of target chambers is branched and connected from a main air supply path to a plurality of the target chambers. In each of the air supply paths, the air supply side adjustment damper and the air supply side airtight damper are interposed in series, and each of the exhaust paths separately branched and connected from the main exhaust path to the plurality of target chambers. In a configuration in which the exhaust-side adjustment damper and the exhaust-side hermetic damper are interposed in series, the control unit is configured to issue a supply / exhaust operation start command for only a part of the target chambers. Is provided, the above-mentioned block release control is executed only for some of the target rooms.

According to a fifth aspect of the present invention, in the above-described embodiment of the present invention, the main supply path is branched and connected to a plurality of the target chambers. In each of the air supply paths, the air supply side adjustment damper and the air supply side airtight damper are interposed in series, and each of the exhaust paths separately branched and connected from the main exhaust path to the plurality of target chambers. In a configuration in which the exhaust-side adjustment damper and the exhaust-side hermetic damper are interposed in series, the control unit is provided with a plurality of target chambers when a start command of a supply / exhaust operation of the entire apparatus is given. Are configured to execute the above-described block release control.

[0013]

According to the first aspect of the present invention, in response to the start command of the supply / exhaust operation, the supply-side adjustment damper is fully closed as shut-off release control for opening the supply-side airtight damper and the exhaust-side airtight damper. By starting the opening operation of the supply-side airtight damper and the exhaust-side airtight damper under the condition, the supply-side airtight damper is opened under the condition that the supply-side adjustment damper is greatly opened at the start of the supply / exhaust operation. To prevent fluctuations in the room pressure due to sudden changes in the amount of air supply caused by opening the air conditioner.

Simultaneously with or after the start of this opening operation, by returning to the required air supply control under the execution of the required room pressure control, the amount of air supplied to the target room is increased to the set required air supply. At the same time, in accordance with this, the exhaust side adjustment damper is operated to open in accordance with the increase in the air supply amount on the necessary room pressure control, thereby maintaining the room pressure of the target room at the set required room pressure and the air supply amount and The displacement is increased to enter a steady supply / exhaust operation state.

In the case where the return to the required air supply control is performed after the opening operation of the airtight damper is completed, the airtight damper and the exhaust gas are discharged by holding the air supply damper fully closed until the airtight damper is restored. It is also possible to prevent room pressure fluctuations caused by deviation of the opening operation from the side airtight damper.

In the characteristic configuration according to the second aspect of the present invention, the opening operation speed in the process of returning from the fully closed state of the supply-side adjustment damper is limited in returning to the required supply amount control in the cutoff release control. In this state, by returning to the required air supply control under execution of the required room pressure control, when returning to the required room pressure control, the amount of air supplied to the target room is set gradually toward the required air supply. (I.e., increase with the rate of change limited), and in conjunction with this, the exhaust-side adjustment damper is opened in accordance with the gradual increase in the supply amount on the required chamber pressure control, whereby In the process of increasing the air supply amount and the exhaust amount to enter the steady air supply / exhaust operation state, the room pressure of the target room is more stably maintained at the set necessary room pressure.

When the return to the required air supply control is performed simultaneously with the start of the opening operation of the airtight damper, the air supply dam is limited by the above-described restriction of the opening operation speed, and the return to the required air supply control is performed. Is performed after the opening operation of the airtight damper is started and before the opening operation is completed, the air supply side adjustment damper is fully closed until the operation is returned, and the air supply amount is limited by the restriction of the opening operation speed. With the restriction, it is also possible to prevent the fluctuation of the room pressure caused by the deviation of the opening operation between the supply-side airtight damper and the exhaust-side airtight damper.

According to a third aspect of the present invention, in the shutoff release control, the supply-side airtight damper and the exhaust-side airtight damper are provided with the exhaust-side adjustment damper and the exhaust-side adjustment damper fully closed. By starting the opening operation of the damper, room pressure fluctuations caused by opening the exhaust-side airtight damper when the exhaust-side adjustment damper is in an open state with an indefinite opening at the start of the supply / exhaust operation are also adjusted. To prevent.

That is, in the conventional apparatus described above, when the supply / exhaust operation is started, the air supply damper and the exhaust gas damper are opened under the required room pressure control. In order to control the required chamber pressure in the closed supply / exhaust stop stage, the exhaust-side adjustment damper is opened at an indefinite opening degree, and the opening operation of the exhaust-side airtight damper is started under that state, Therefore, at the start of the opening operation of these hermetic dampers, the amount of exhaust changes suddenly, and there is also a problem that the required room pressure control cannot follow up and the room pressure of the target room fluctuates greatly. The opening operation of the supply-side airtight damper and the exhaust-side airtight damper is started with the exhaust-side adjustment damper as well as the air-supply-side adjustment damper fully closed, as shown in FIG. Can be prevented.

Then, at the same time as or after the start of the airtight damper opening operation, by returning to the required air supply control under the return of the required chamber pressure control, the air supply to the target chamber is performed in the same manner as in the first aspect of the present invention. In addition to increasing the air supply to the required air supply, the exhaust-side adjustment damper is opened in accordance with the increase in the air supply in the required air pressure control. The air supply amount and the exhaust amount are increased while maintaining the room pressure, and a steady supply and exhaust operation state is entered.

According to the characteristic feature of the invention according to claim 4, in response to a start command of the supply / exhaust operation for only a part of the plurality of target rooms, the shutoff is performed only for the part of the target rooms. By executing the release control, the air supply is performed in the state where the room pressure fluctuation at the start of the air supply / exhaust operation is prevented as described above for only some of the target rooms while maintaining the current state of the other target rooms. The side airtight damper and the exhaust side airtight damper are opened to start the supply / exhaust operation.

According to a fifth aspect of the invention, in response to a supply / exhaust operation start command for the entire apparatus, the above-described shutoff release control is executed for each of the plurality of target chambers, whereby the plurality of target chambers are controlled. As described above, the supply-side airtight damper and the exhaust-side airtight damper are opened in the state where the room pressure fluctuation at the start of the supply / exhaust operation is prevented as described above, and the supply / exhaust operation is started.

[0023]

According to the first aspect of the present invention, fluctuations in the room pressure at the start of the supply / exhaust operation can be effectively prevented, whereby the cleanliness of the target room can be maintained, The intended purpose of room pressure control, such as preventing harmful substances from leaking from the target room, can be more reliably achieved.

In addition, a supply-side adjustment damper and an exhaust-side adjustment damper, which are inherently provided with an opening control mechanism for controlling the required supply amount and the required room pressure, are used to start the supply / exhaust operation. Since the pressure fluctuation is prevented, additional control means for the hermetic damper, such as opening the hermetic damper at a slow speed, is unnecessary or simple, and the apparatus cost can be reduced. .

According to the second aspect of the present invention, the required chamber pressure is maintained more stably in the process of starting the air supply / exhaust operation and entering the steady air supply / exhaust operation state (ie, the process of returning to the required air supply control). As a result, the intended purpose of the room pressure control can be more reliably achieved.

According to the third aspect of the present invention, it is possible to effectively prevent the fluctuation of the room pressure due to the sudden change in the displacement at the start of the air supply / exhaust operation, and thus the intended purpose of the room pressure control is more reliably achieved. it can.

According to the fourth aspect of the present invention, the room pressure fluctuation is caused only in some of the target rooms by the start command of the supply / exhaust operation for only some of the target rooms. The air supply / exhaust operation can be started in a state in which the air supply / exhaust operation is effectively prevented, for example, after the air supply / exhaust operation is temporarily stopped due to fumigation in only some of the target rooms, for example. In a facility where it is necessary to start the air supply / exhaust operation only for some of the target rooms in the operation of the facility, such as resuming the air supply / exhaust operation only for some of the target rooms, Device.

According to the fifth aspect of the present invention, the supply / exhaust operation can be started in each of the plurality of target rooms in a state where the room pressure fluctuation is prevented by the supply / exhaust operation start command of the entire apparatus. Therefore, for example, this is a suitable device in a facility where it is necessary to simultaneously start the supply / exhaust operation of a plurality of target rooms at the start of operation of the facility.

[0029]

Next, an embodiment will be described.

FIG. 1 shows an equipment configuration of a supply / exhaust system for a plurality of target chambers 1. A main air supply path 3 from an air supply fan 2 is connected to each of the target chambers 1 via a branch air supply path 4. The main exhaust path 6 connected to the exhaust fan 5 is connected to each of the target chambers 1 via the branch exhaust path 7, and the main air supply path 3 and the main exhaust path 6 return air at their backbones. It is connected by road B.

Each of the branch air supply passages 4 is provided with an airtight damper Vs on the air supply side and an air supply amount adjusting device 8 from the upstream side thereof. Air supply amount sensor 8A for detecting the air supply amount, air supply-side airtight damper V
s and a supply-side adjustment damper 8B which is interposed in series in the branch supply path 4 to adjust the supply amount by adjusting the opening degree, and the supply amounts Qx1, Qx2, Qx3 detected by the supply amount sensor 8A. An air supply controller 8C is provided to adjust the opening of the air supply-side adjustment damper 8B so that the target air supply amounts Qm1, Qm2, and Qm3 are obtained.

Each of the branch exhaust passages 7 is provided with a chamber pressure adjusting device 9 and an exhaust airtight damper Ve from the upstream side thereof. The chamber pressure sensor 9A for detecting (differential pressure from the outside or the absolute pressure of the target chamber 1) and the exhaust side airtight damper Ve are interposed in series in the branch exhaust path 7 to adjust the exhaust amount by adjusting the opening degree. The chamber pressure Px1, Px2, and Px3 detected by the exhaust-side adjustment damper 9B and the chamber pressure sensor 9A are changed to target chamber pressures Pm1 and Pm.
A room pressure controller 9C is provided for adjusting the opening of the exhaust-side adjustment damper 9B so as to be 2, Pm3.

A is an air conditioner for adjusting the temperature and humidity of the supply air, and Vb is a return air damper for adjusting the amount of return air from the main exhaust passage 6 to the main air supply passage 3.

Reference numeral 10 denotes start / stop of a supply / exhaust operation, control of an air supply amount for each target room 1, control of a room pressure for each target room 1,
The central control device 10 controls and controls the dampers. The central control device 10 includes a fan control unit 11 for the air supply fan 2 and the exhaust fan 5, and a supply amount setting unit 1.
2. Room pressure setting unit 13, target air supply amount changing unit 14, and
A damper control unit D is provided.

When a start command of the supply / exhaust operation (ie, a start command of the supply / exhaust operation of the entire apparatus) is given to the fan control unit 11, as shown in FIG.
And the exhaust fans 5 are started, and the outputs of the fans 2 and 5 are gradually increased at predetermined change rates α1 and β1 (α1 <β1 is set in this example), while the supply / exhaust operation is stopped. When a command (that is, a command to stop the supply / exhaust operation of the entire apparatus) is given, as shown in FIG. 2, the stop operation for each of the fans 2 and 5 is performed in a predetermined order (in this example, the air supply fan 2 is exhausted). Before fan 5), and
In these fan stop operations, the outputs of the fans 2 and 5 are gradually decreased at predetermined change rates α2 and β2 (α2 <β2 is set in this example).
Stop 5

When the air supply / exhaust operation is in a steady state, the air supply fan 2 and the air supply fan 2 are controlled so that the air supply pressure in the main air supply passage 3 and the exhaust pressure in the main exhaust air passage 6 are respectively maintained at predetermined pressure values. The output of each exhaust fan 5 is adjusted and controlled.

As shown in FIG. 2, the damper control unit D
When a start command of the supply / exhaust operation (a start command of the supply / exhaust operation of the entire apparatus) is given, the return air damper Vb is opened at a predetermined change speed γ1, and the supply-side airtight damper Vs of each of the target chambers 1 is operated. And opening the exhaust-side hermetic damper Ve to release the target chamber shut-off state. Further, until the opening operation of the supply-side hermetic damper Vs and the exhaust-side hermetic damper Ve is completed, the air supply amount is maintained. In a state prioritizing the controller 8C and the room pressure controller 9C, the supply-side adjustment damper 8B and the exhaust-side adjustment damper 9B of each target chamber 1 are forcibly maintained in the fully closed state continuously from the time of shutting down the target chamber. When the opening operation of the supply-side airtight damper Vs and the exhaust-side airtight damper Ve is completed, the opening degree control (that is, the supply amount control) of the supply-side adjustment damper 8B is transferred to the supply amount controller 8C. And the exhaust-side adjustment damper 9B Opening control (i.e., room pressure control) will be transferred to the chamber pressure controller 9C.

When a command to stop the supply / exhaust operation (a command to stop the supply / exhaust operation of the entire apparatus) is given, the return air damper Vb is closed at a predetermined change speed γ2, and the supply fan 2 and the exhaust When the stop of the fan 5 is completed, the supply-side airtight damper Vs and the exhaust-side airtight damper Ve of each target room 1 are closed to shut off the target room, and the supply-side airtight damper Vs and the exhaust-side airtight damper Ve are closed. Is completed, the air supply controller 8C and the room pressure controller 9
Prior to C, the supply-side adjustment damper 8B and the exhaust-side adjustment damper 9B of each target chamber 1 are forcibly switched to the fully closed state,
While the target room is shut off, these adjustment dampers 8B and 9B are kept in the fully closed state.

The room pressure setting unit 13 responds to each object room 1
Are set, the required room pressures Ps1, Ps2, and Ps3 are set to target room pressures Pm1, Pm2, and Pm3 (Ps1 = Pm3) of the respective room pressure controllers 9C.
1, Ps2 = Pm2, Ps3 = Pm3) to each of the room pressure controllers 9C, thereby controlling the room pressure P of each of the target rooms 1 by adjusting the opening degree of the exhaust-side adjustment damper 9B as room pressure control.
x1, Px2, Px3 must be set.
The required room pressure control which adjusts to Ps3 is performed, and the required room pressure Ps
Until the setting of 1, Ps2, and Ps3 is changed, the target chamber pressures Pm1, Pm2, and Pm3 of the respective chamber pressure controllers 9C are fixed.

On the other hand, with respect to the air supply amount control, each target room 1
The required air supply amount Qs1, Qs2, Qs3 of the air supply amount setting unit 1
2, the required air supply amount Qs1, Qs2,
In response to the setting of Qs3, as shown in FIG. 2, the target air supply amount changing unit 14 supplies an air supply / exhaust operation start instruction (a start instruction of the air supply / exhaust operation of the entire apparatus), and then supplies air on the air supply side. The opening operation of the damper Vs and the exhaust side airtight damper Ve is completed, and the opening degree control of the air supply side adjustment damper 8B is performed by the air supply amount controller 8C.
Until the transfer to, the target supply amount Qm1 of each supply amount controller 8C regardless of the set required supply amount Qs1, Qs2, Qs3 of each target room 1 set in the supply amount setting unit 12. Q
Specify 0 as m2 and Qm3 (Qm1 = Qm2 = Qm3
= 0).

After that, when the opening degree control of the supply side adjustment damper 8B is transferred to the supply amount controller 8C, the target supply amounts Qm1, Qm2, Qm designated to the respective supply amount controllers 8C.
3 at predetermined time intervals T1, T2, and T3 in order from the target room 1 having the higher target room pressures Pm1, Pm2, and Pm3 (that is, the set required chamber pressures Ps1, Ps2, and Ps3), and at predetermined time intervals equal to each other. At the change rate θ1, the required supply air amount Qs1, Qs2, Qs3 is sequentially increased from 0, thereby preventing the temporary chamber pressure reversal phenomenon between the target chambers 1 and the supply air adjustment damper. In a state where the opening operation speed in the process of returning from the fully closed state of 8B is limited, the air supply amounts Qx1, Qx2, and Qx3 of each target room 1 are set.
s1, Qs2, and Qs3 to increase to a steady supply / exhaust operation state.
The air supply amount Qx1, Qx2, Qx3 to each target room 1 is set by adjusting the opening degree of the air supply side adjustment damper 8B.
The required air supply amount control is adjusted to 1, Qs2, and Qs3.

FIG. 2 shows a case where the relationship between the set required chamber pressures is Ps1>Ps2> Ps3.

As shown in FIG. 2, when a command to stop the supply / exhaust operation (a command to stop the supply / exhaust operation of the entire apparatus) is given to the target supply amount changing unit 14, as shown in FIG. Target air supply amount Qm1, Qm2, Qm3 to be specified for the heater 8C
Are set at predetermined time intervals T4 and T5 in order from the target chamber 1 having the lower target chamber pressures Pm1, Pm2, and Pm3 (that is, the required set chamber pressures Ps1, Ps2, and Ps3), and at the same predetermined change speed θ2. Required air supply Qs1, Qs2
Qs3 is sequentially reduced from 0 to 0, thereby preventing the temporary room pressure reversal phenomenon between the target chambers 1 and limiting the closing operation speed of the air supply side adjustment damper 8B.
The supply amount Qx1, Qx2, Qx3 of each target room 1 is reduced, and the closing operation of the supply side airtight damper Vs and the exhaust side airtight damper Ve by the damper control unit D is performed under the reduced supply amount. To do.

In the above, the start / stop of the supply / exhaust operation of the entire equipment with the start / stop of the air supply fan 2 and the exhaust fan 5 has been described. During the supply and exhaust operation as
In the case of a partial suspension in which only a part of the target rooms 1 is shut off and the supply / exhaust operation to the target rooms 1 is temporarily stopped (for example, in order to perform a fumigation process on some of the target rooms 1). The central control device 10 also performs the same control as described above for the case where the target room 1 is temporarily shut off.

Specifically, (see FIG. 3), a temporary stop command in which the target room 1 for temporarily stopping the supply / exhaust operation is designated (ie, a stop instruction of the supply / exhaust operation for only some target rooms 1) ) Is given, the target air supply amount changing unit 14 sets the target air supply amounts Qm2 and Qm3 specified in the air supply amount controller 8C of the target room 1 to be temporarily stopped by the target air supply amounts Qm2 and Qm3 of the target room 1 to be temporarily stopped. From the target chamber 1 having the lower room pressures Pm2 and Pm3 (that is, the set required chamber pressures Ps2 and Ps3), the required air supply amounts Qs2 and Qs3 are set to 0 at predetermined time intervals T4 and at predetermined equal change rates θ2. In a state in which the temporary room pressure reversal phenomenon between the target chambers 1 in which the supply / exhaust operation is temporarily stopped is prevented, and the closing operation speed of the supply-side adjustment damper 8B is limited. In, those to pause Reducing the first air supply amount Qx2, Qx3.

Further, the damper control unit D determines when the target supply amounts Qm2 and Qm3 of the target room 1 to be temporarily stopped become zero.
The supply-side airtight damper Vs and the exhaust-side airtight damper Ve of the target room 1 to be temporarily stopped are closed to shut off the target room 1 to be temporarily stopped.
When the closing operation of the exhaust-side hermetic damper Ve is completed, the supply-side adjustment damper 8B and the exhaust-side adjustment damper 9B of the target room 1 to be temporarily stopped are prioritized over the supply amount controller 8C and the room pressure controller 9C. The state is forcibly switched to the fully closed state, and the adjustment dampers 8B and 9B are kept in the fully closed state during the target room shutoff state.

Thereafter, when a restart command for the target room 1 in which the supply / exhaust operation is temporarily stopped (ie, a start command for the supply / exhaust operation for only a part of the target rooms 1) is given,
The damper control unit D opens and shuts off the supply-side airtight damper Vs and the exhaust-side airtight damper Ve of the temporarily stopped target room 1 to release the target room shutoff, and then releases the supply-side airtight damper V.
s and the opening operation of the exhaust-side hermetic damper Ve are completed, and the priority is given to the air supply amount controller 8C and the room pressure controller 9C. Supply side adjustment damper 8B and exhaust side adjustment damper 9B
Forcibly fully closed, and the airtight dampers V on the air supply side
s and the opening operation of the exhaust side airtight damper Ve is completed, the opening degree control of the air supply side adjustment damper 8B (that is, the air supply amount control) is transferred to the air supply amount controller 8C, and the exhaust side adjustment damper is transferred. The opening degree control of 9B (that is, the room pressure control) is transferred to the room pressure controller 9C.

Further, the target air supply amount changing section 14 completes the opening operation of the air supply damper Vs and the air exhaust damper Ve of the temporarily stopped target chamber 1 and completes the opening control of the air supply adjustment damper 8B. Until is transferred to the air supply controller 8C, the target air supply amounts Qm2 and Qm3 specified in the air supply controller 8C of the temporarily stopped target room 1 are kept at 0, and thereafter, the target rooms 1 and 2 are temporarily stopped. The target air supply amounts Qm2 and Qm3 specified in the air supply amount controller 8C of the first target room 1 are set to the target room pressures Pm2 and Pm3 of the temporarily stopped target room 1 (that is, the set required room pressures Ps2 and Pm2).
Ps3) Predetermined time intervals T1,
At T2 and at a predetermined change rate θ1 equal to each other, the required supply air amount Qs2 is gradually increased from Qs3 to Qs3, thereby temporarily reversing the room pressure between the target rooms 1 in which the supply / exhaust operation is temporarily stopped. In a state where the phenomenon is prevented, and in a state where the opening operation speed in the process of returning from the fully closed state of the air supply side adjustment damper 8B is limited, the air supply amounts Qx2 and Qx3 of the temporarily stopped target room 1 are set. The air volumes are increased to Qs2 and Qs3, and the temporarily stopped target room 1 is returned to the normal supply / exhaust operation state.

In both cases of stopping the supply / exhaust operation of the entire equipment and the above-described partial stop, the supply-side airtight damper Vs and the exhaust-side airtight damper Ve are closed to shut off the target chamber. Is the integral value of the air supply amount deviation in the air supply amount controller 8C adopting the PID control, and also the PID
The room pressure controller 9C employing the control resets the integral value of the chamber pressure deviation, and at the start of the next supply / exhaust operation, the opening operation of the supply-side and exhaust-side hermetic dampers Vs, Ve is completed. When the opening degree control of the air supply side adjustment damper 8B is transferred to the air supply amount controller 8C, and the opening degree control of the exhaust side adjustment damper 9B is transferred to the room pressure controller 9C, each deviation integrated value becomes 0.
From the initial state, the control operation of the air supply controller 8C and the room pressure controller 9C is performed, whereby the air supply controller 8C and the room pressure controller 9C are influenced by the residual deviation integrated value.
It is possible to prevent the opening degree adjustment of the air supply side adjustment damper 8B and the opening degree adjustment of the exhaust side adjustment damper 9B from becoming unstable immediately after the transfer to the control.

In the case where the target chamber 1 is subjected to the fumigation process during the partial suspension period, the return air damper Vb is temporarily stopped so that the fumigated exhaust gas is not led to another target chamber 1 at the time of resumption. Close.

In short, in the present embodiment, the central control device 10, the air supply amount sensor 8A, the air supply amount controller 8C, the room pressure sensor 9A, and the room pressure controller 9C comprise the air supply side adjustment damper 8
Adjust the opening degree of B to supply air Qx1, Qx2 to the target room 1.
The required air supply amount control for adjusting Qx3 to the set required air supply amount Qs1, Qs2, Qs3, and the opening degree of the exhaust-side adjustment damper 9B is adjusted to set the room pressures Px1, Px2, and Px3 of the target room 1 to the required room pressure Ps1. , Ps2, Ps3, and Ps3.

When the start command of the supply / exhaust operation is given, the control means fully closes the supply-side adjustment damper 8B as a shut-off release control for opening the supply-side airtight damper Vs and the exhaust-side airtight damper Ve. The opening operation of the supply-side hermetic damper Vs and the exhaust-side hermetic damper Ve is started under the condition described above, and thereafter (or simultaneously as described later), the required air supply is performed under execution of the required chamber pressure control. It is configured to return to the quantity control.

In addition, this control means restricts the opening operation speed in the process of returning from the fully closed state of the supply-side adjustment damper 8B to return to the required supply amount control in the above-described cutoff release control. In addition to the configuration of returning to the required air supply control under the execution of the required chamber pressure control, in the above-described cutoff release control, the exhaust side adjustment damper 9B and the exhaust side adjustment damper 9B are fully closed together with the supply side adjustment damper 8B. The opening operation of the supply-side airtight damper Vs and the exhaust-side airtight damper Ve is started, and thereafter (or at the same time), the control returns to the required air supply control under the required room pressure control.

Further, this control means, when a start command of the supply / exhaust operation for only a part of the target rooms 1 out of the target rooms 1 is given, the control means performs the above-mentioned only for some of the target rooms 1 With the configuration to execute the cutoff release control, when a start command of the supply / exhaust operation as the entire device is given,
The above-mentioned block release control is executed for each of the plurality of target rooms 1.

[Another Embodiment] In the above-described embodiment, the supply-side adjustment damper 8B and the exhaust-side adjustment damper are operated until the opening operation of the supply-side airtight damper Vs and the exhaust-side airtight damper Ve is completed in the shutoff release control. 9B is maintained in the fully closed state. However, in the shut-off release control, the supply-side adjustment damper 8B and the exhaust-side adjustment damper 9B are controlled.
While the opening operation of the supply-side airtight damper Vs and the exhaust-side airtight damper Ve is started with B fully closed, the supply-side adjustment damper 8B and the exhaust-side adjustment damper 9B are kept fully closed. Is released, and the opening degree control of the air supply side adjustment damper 8B and the exhaust side adjustment damper 9B is transferred to the air supply amount controller 8C and the room pressure controller 9C (that is, the time when the control returns to the necessary air supply amount control). , And when returning to required room pressure control)
Is not limited to the time when the opening operation of the supply-side airtight damper Vs and the exhaust-side airtight damper Ve is completed, but the time when the opening operation of the air-supply-side airtight damper Vs and the exhaust-side airtight damper Ve starts, and during the opening operation. It may be a point in time.

The object room 1 may be used for any purpose. The purpose of the room pressure control is to maintain the cleanliness of the room.
Any purpose may be used.

Incidentally, reference numerals are written in the claims for convenience of comparison with the drawings, but the present invention is not limited to the configuration of the attached drawings by the entry.

[Brief description of the drawings]

Fig. 1 Equipment configuration diagram

FIG. 2 is a diagram showing an operation control mode in starting and stopping the supply / exhaust operation.

FIG. 3 is a diagram showing an operation control mode at the time of partial suspension.

[Explanation of symbols]

 REFERENCE SIGNS LIST 1 target room 3 main air supply path 4 air supply path 6 main exhaust path 7 exhaust path 8B air supply side adjustment damper 9B exhaust side adjustment damper 10, 8A, 8C, 9A, 9C control means Vs air supply side airtight damper Ve exhaust side Airtight damper Qx1, Qx2, Qx3 Air supply amount Qs1, Qs2, Qs3 Set required air supply amount Px1, Px2, Px3 Room pressure Ps1, Ps2, Ps3 Set required room pressure

Claims (5)

(57) [Claims] 1. An air supply passage (4) for an object room (1),
Supply side adjustment damper (8B) and supply side airtight damper (Vs)
Are arranged in series, and the exhaust path (7) for the target chamber (1) is adjusted to the exhaust side.
The damper (9B) and the exhaust side airtight damper (Ve) are connected in series.
Interposed and adjust the opening degree of the air supply side adjustment damper (8B) to adjust the target
(Qx1), (Qx2), (Qx
3) Set the required air supply amount (Qs1), (Qs2), (Qs
3) The required air supply control to be adjusted in
The opening of the chamber (9B) is adjusted to adjust the chamber pressure (P
x1), (Px2) and (Px3) are set as required chamber pressure (Ps
1), required room pressure control adjusted to (Ps2), (Ps3)
(10, 8A, 8C, 9A, 9)
C) , wherein the control means (10, 8A, 8C, 9A, 9C) controls the airtightness on the air supply side when a start command for air supply / exhaust operation is given.
Open the damper (Vs) and the exhaust side airtight damper (Ve).
The air supply side adjustment damper (8B)
The air-tight damper (Vs) on the air supply side under the condition that the valve is fully closed
And the opening operation of the exhaust side airtight damper (Ve) is started.
And at the same time or thereafter,
Return to required air supply control during execution
That chamber pressure control device. 2. The control means (10, 8A, 8C, 9).
A, 9C) is returned to the required air supply amount control in the above-described cutoff release control.
However, the return of the air supply side adjustment damper (8B) from the fully closed state
With the opening speed in the process limited,
Return to required air supply control under execution of control
The room pressure control device according to claim 1, wherein 3. The control means (10, 8A, 8C, 9).
A, 9C) in the shutoff release control, the air supply side adjustment damper
(8B) and fully close the exhaust side adjustment damper (9B)
Under the condition described above, the supply-side airtight damper (Vs ) and
Opening operation of the exhaust side airtight damper (Ve) is started,
At the same time or after that, the required chamber pressure control is restored.
To return to required air supply control at
Item 3. The room pressure control device according to item 1 or 2. 4. A plurality of said target chambers from a main air supply passage (3).
Each of the air supply paths (4) branched and connected to (1) separately
The supply side adjustment damper (8B) and the supply side airtight damper
And a plurality of target chambers (1) from the main exhaust path (6) to the plurality of target chambers (1).
In each of the exhaust paths (7) separately branched and connected,
Side adjustment damper (9B) and the exhaust side airtight damper (Ve)
And the control means (10, 8A, 8C, 9A, 9C) are connected
Only target rooms (1) of target rooms (1)
When a supply / exhaust operation start command is issued,
The above-mentioned block release control is executed only for the target room (1).
The method according to any one of claims 1 to 3, wherein
Room pressure control device. 5. A plurality of said target chambers from a main air supply passage (3).
Each of the air supply paths (4) branched and connected to (1) separately
The supply side adjustment damper (8B) and the supply side airtight damper
And a plurality of target chambers (1) from the main exhaust path (6) to the plurality of target chambers (1).
In each of the exhaust paths (7) separately branched and connected,
Side adjustment damper (9B) and the exhaust side airtight damper (Ve)
And the control means (10, 8A, 8C, 9A, 9C) are installed in series in
When a start command for supply / exhaust operation as a whole is given,
For each of the plurality of target rooms (1), the above-mentioned blocking release
5. The method according to claim 1, wherein the control is performed.
Item 2. The room pressure control device according to item 1.