JP2006078086A - Room pressure control system - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a room pressure control system capable of effectively suppressing a room pressure fluctuation by opening and closing of a door. <P>SOLUTION: This system comprises a room pressure adjusting damper Vr adjusting an air discharge quantity qr from object rooms 1a-1c or an air supply quantity qs to the target chambers 1a-1c by opening adjustment, and a room pressure control means 6B adjusting, based on a detected room pressure p of the target rooms 1a-1c, openings b1-b3 of the damper Vr to adjust the room pressure p of the object rooms 1a-1c to a target room pressure ps. This system further comprises a room pressure stabilization means 13 changing, in detection of opening of doors 11 and 12 of the object rooms 1a-1c, the adjustable opening range ZZ of the damper Vr to a contracting side, and returning, in detection of closing of the doors 11 and 12, the range ZZ of the damper Vr to an increasing side. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a room pressure control system used in a clean room facility, and more specifically, a room pressure adjusting damper that adjusts an exhaust air volume from a target room or a supply air volume to the target room by adjusting an opening is provided, and the target The present invention relates to a chamber pressure control system provided with chamber pressure control means for adjusting the chamber pressure of the target chamber to a target chamber pressure by adjusting the opening of the chamber pressure adjusting damper based on the detected chamber pressure of the chamber.

  Conventionally, in this type of room pressure control system, a damper for adjusting the room pressure by the room pressure control means when the opening of the door is detected is used to suppress fluctuations in the room pressure of the target room caused by opening and closing of the door of the target room. When the opening of the door is stopped (that is, the chamber pressure control is stopped), the opening of the damper for adjusting the chamber pressure is fixed to the opening when the door is opened, and the closing of the door is detected, There has been proposed a system in which the opening adjustment of the damper for adjusting the room pressure by the room pressure control means is resumed (see Patent Documents 1 and 2 below).

  Similarly, when the opening of the door is detected to suppress the variation in the chamber pressure caused by the opening and closing of the door of the chamber, the chamber pressure control means controls the chamber pressure control device with a small opening adjustment speed. There has also been proposed a system that switches to a control state in which the opening adjustment of the pressure adjusting damper is executed, and when the closing of the door is detected, the restriction of the opening adjustment speed is released (the following patent document) 2).

JP 63-247542 A JP-A-1-256743

  However, in the above-described conventional system, a large chamber pressure fluctuation at the time of closing the door after the chamber pressure of the target chamber largely fluctuates from the target chamber pressure that has been maintained by the opening of the door is constant. However, depending on the form of fluctuation of the room pressure that occurs due to the opening of the door, the room pressure may be encouraged by deviating from the target room pressure. In this respect, the room pressure in the target room is stabilized as much as possible. In order to achieve the intended purpose of maintaining the target room pressure, there was still room for improvement.

  In other words, the chamber pressure control that adjusts the chamber pressure of the target chamber to the target chamber pressure by adjusting the opening of the damper for adjusting the chamber pressure by the chamber pressure control means is closed while the door of the target chamber is open. If the room pressure of the target chamber fluctuates greatly from the target chamber pressure due to the opening of the door, the chamber pressure fluctuation can be resolved only after the door is closed. Despite being present, the opening of the damper for adjusting the chamber pressure is adjusted by the chamber pressure control means so as to eliminate the fluctuation of the chamber pressure when the door is opened, so that the damper for adjusting the chamber pressure is fully opened (100% opening). Or fully closed (0% opening) or the adjustment limit value close to that, meaning that the opening is adjusted insignificantly, and the exhaust air volume from the target room or the supply air volume to the target room is completely different from that before opening the door In this state, the door is closed and leaks through the door. When the door is shut off, the above-mentioned large room pressure fluctuation when the door is closed (specifically, the room pressure fluctuation caused by shutting off the leaked wind and the subsequent overshoot in the room pressure control) Fluctuation) occurs.

  On the other hand, in the conventional system described above, the opening of the damper for adjusting the chamber pressure by the chamber pressure control means is stopped while the door is in an open state, or the chamber is adjusted in a state where the adjustment speed of the opening is limited to a small value. By controlling the opening of the damper for adjusting the chamber pressure by the pressure control means, it is possible to prevent the opening of the damper for adjusting the chamber pressure from being fully opened and closed as described above when the door is in the open state, or a change in the opening to the vicinity thereof. As a result, it is possible to suppress large fluctuations in the chamber pressure when the door is closed, but as a result of research, the fluctuations in the chamber pressure caused by the opening of the door are not necessarily adjusted by the opening of the damper for adjusting the chamber pressure by the chamber pressure control means. Not only things that cannot be suppressed, for example, when the door opening time is extremely short, when there is not much difference between the pressure in the partner space communicated by the door opening and the target chamber pressure in the target chamber, or the door opening The volume of the partner space communicated by The chamber pressure fluctuation when the door is opened when the ventilation frequency is sufficiently smaller than the volume of the target room or the ventilation frequency, etc. is a relatively slight room pressure fluctuation. It has been found that the degree of opening of the damper for adjusting the chamber pressure by the chamber pressure control means in the open state can be suppressed to some extent or in some cases.

  In the conventional system, even when such a slight change in the room pressure is detected, the opening adjustment of the room pressure adjusting damper by the room pressure control means is stopped by the detection of the opening of the door, or the opening thereof is stopped. If the adjustment speed of the degree adjustment is limited to a small value, a state in which the fluctuation of the room pressure that can be originally suppressed is allowed, and in this sense, in the conventional system, the room pressure of the target room deviates from the target room pressure. There was a case where it was promoted on the contrary.

  In view of this situation, the main problem of the present invention is that it is possible to effectively suppress large fluctuations in the room pressure when the door is closed by rational and simple improvements, and also the problems of the conventional system as described above are also effective. It is in the point to be able to eliminate it.

[1] A first characteristic configuration of the present invention relates to a room pressure control system.
A damper for adjusting the chamber pressure that adjusts the amount of exhaust air from the target chamber or the amount of air supplied to the target chamber by adjusting the opening is provided.
In a chamber pressure control system provided with a chamber pressure control means for adjusting the chamber pressure of the target chamber to the target chamber pressure by adjusting the opening of the chamber pressure adjusting damper based on the detected chamber pressure of the target chamber,
When the opening of the door of the target chamber is detected, the adjustable opening range of the damper for adjusting the chamber pressure is changed to the reduction side, and when the closing of the door is detected, the damper for adjusting the chamber pressure This is because a chamber pressure stabilizing means for returning the adjustable opening range to the increasing side is provided.

  In other words, according to the first characteristic configuration, the chamber pressure fluctuation in the target chamber when the door is opened is a large fluctuation from the target chamber pressure, and can be resolved only after the door is closed (for example, This occurs when there is a relatively large difference between the pressure in the partner space communicated by the opening of the door and the target chamber pressure in the target chamber, and the volume or ventilation rate of the target chamber is smaller than the volume or ventilation rate of the partner space. The chamber pressure adjustment damper opening should be adjusted to the side that eliminates the fluctuation of the room pressure when the door is opened in the room pressure control by the room pressure control means. On the other hand, since the adjustable opening range of the damper for adjusting the chamber pressure is changed to the reduction side by detecting the opening of the door, the opening adjustment of the damper for adjusting the chamber pressure by the chamber pressure control means is a narrow adjustment after the reduction. By the upper limit or lower limit of the possible opening range This effectively suppresses the exhaust air volume from the target room when the door is open or the supply air volume to the target room from being adjusted to a completely different air volume from that before opening the door. can do. Thus, it is possible to effectively suppress a large chamber pressure fluctuation at the time of closing the door, which occurs following a large chamber pressure fluctuation from the target chamber pressure at the time of opening the door.

  Further, according to the first characteristic configuration, when the door is opened, it is only necessary to change the adjustable opening range of the damper for adjusting the chamber pressure to the reduction side, and within the range of the reduced adjustable opening range, the chamber pressure control is performed. By adjusting the opening of the damper for adjusting the chamber pressure by means, the original chamber pressure adjustment function that adjusts the chamber pressure of the target chamber to the target chamber pressure can be demonstrated in the same way as before opening the door. If the chamber pressure fluctuation is so slight that it can be suppressed by adjusting the opening of the damper for adjusting the chamber pressure by the chamber pressure control means, the chamber pressure is controlled within the adjustable opening range after reduction. By adjusting the opening of the damper for adjusting the chamber pressure by means, it is possible to quickly suppress the chamber pressure fluctuation itself at the time of opening the door and keep the chamber pressure in the target chamber as close to the target chamber pressure as possible. Overcoming fluctuations in room pressure when the door is open as in the previous system It is possible to effectively avoid causing a situation which results in long.

  That is, from these, it is possible to provide a room pressure control system that is superior to the conventional system in achieving the intended purpose of keeping the room pressure of the target room at the target room pressure as stably as possible.

  In the implementation of the first characteristic configuration, in order to reduce the adjustable opening range of the chamber pressure adjusting damper when the opening of the door is detected, the chamber pressure control means self-regulates the chamber pressure adjusting damper. Various reduction forms such as a form in which the adjustable opening range is reduced or a form in which the adjustable opening range of the damper for adjusting the chamber pressure is forcibly reduced outside the room pressure control means can be adopted.

  Further, in the implementation of the first characteristic configuration, not only a mode in which the adjustable opening range of the damper for adjusting the chamber pressure is reduced on both the upper limit opening side and the lower limit opening side when the opening of the door is detected, Depending on the case, a mode of reducing only one of the upper limit opening side and the lower limit opening side may be adopted.

  Also, how much the adjustable opening range of the damper for adjusting the chamber pressure is reduced when the door opening is detected can be determined based on the relationship between the partner space and the target chamber that are communicated by the door opening. However, the reduction range of the adjustable opening range may be automatically determined in a self-learning manner based on the detection result of the change in the room pressure in the room pressure stabilization means.

  In the implementation of the first characteristic configuration, the counterpart space that communicates with the target room by opening the door is an indoor space that performs the same room pressure adjustment as the target room, an indoor space that does not perform the room pressure adjustment, or in some cases outdoor Any space such as a space may be used.

[2] The second characteristic configuration of the present invention specifies an embodiment suitable for the implementation of the first characteristic configuration.
The chamber pressure stabilizing means is configured to execute the return to the increase side of the adjustable opening range when a set delay time elapses from the detection time of the closing of the door when the closing of the door is detected. It is in a certain point.

  In other words, as described above, the large chamber pressure fluctuation due to the closing of the door is caused by adjusting the opening of the damper for adjusting the chamber pressure to the fully open state, the fully closed state or a state close thereto, and the exhaust air volume from the target chamber or the target chamber to the target chamber. Caused by chamber pressure fluctuations due to shut-off of the leaked air through the door when the door is closed and the subsequent overshoot in the chamber pressure control when the air supply volume is significantly different from that before the door is opened. The chamber pressure control means adjusts the opening of the damper for adjusting the chamber pressure in the direction opposite to that when the door is opened in order to eliminate the variation in the chamber pressure (that is, the variation in the chamber pressure caused by blocking the leaked air through the door). However, according to the second characteristic configuration, the return to the increase side of the adjustable opening range is executed at the time when the set delay time has elapsed from the detection time of the closing of the door, For the implementation of the first feature configuration Although it is restrained, the opening of the damper for adjusting the chamber pressure is about to be greatly adjusted on the chamber pressure control by the chamber pressure control means on the side that eliminates the fluctuation of the chamber pressure caused by blocking the leaked wind by closing the door. However, until the set delay time elapses, the opening adjustment of the room pressure adjusting damper by the room pressure control means is limited to the upper limit opening or the lower limit opening of the narrow adjustable opening range after the reduction, It is possible to more effectively suppress the chamber pressure fluctuation caused by the overshoot in the chamber pressure control as described above after the door is closed.

  That is, according to the second feature configuration, the large chamber pressure fluctuation when the door is closed can be effectively suppressed by the first feature configuration, and the chamber pressure fluctuation when the door is closed is more effectively suppressed as a whole. be able to.

  In the implementation of the second characteristic configuration, an appropriate time may be set as the set delay time based on the occurrence state of the chamber pressure fluctuation caused by the overshoot in the chamber pressure control. The set delay time may be automatically determined in a self-learning manner based on the detection result of the chamber pressure fluctuation.

[3] The third characteristic configuration of the present invention specifies an embodiment suitable for the implementation of the first or second characteristic configuration.
Each of a plurality of branch exhaust air passages connecting the plurality of target chambers in parallel to a main exhaust air passage connected to an exhaust fan, or a plurality of the air supply air passages connected to an air supply fan The damper for adjusting the chamber pressure is interposed in each of the branch supply air passages connecting the target chambers in parallel,
For each of the plurality of target chambers, the chamber pressure control means adjusts the opening of the chamber pressure adjusting damper with respect to the target chamber based on the detected chamber pressure of the target chamber, thereby adjusting the chamber pressure of the target chamber. To adjust to the pressure,
In the opening degree adjustment by the room pressure control means, a set upper limit opening degree that is less than 100% opening degree and a setting lower limit opening degree that is larger than 0% opening degree for each of the plurality of target chambers. The output of the exhaust fan or the supply fan is adjusted based on the detected opening of each of the chamber pressure adjusting dampers so as to be within the set intermediate opening range between the main exhaust air passage and the main supply air. Air passage pressure control means for adjusting the air passage pressure of the air passage is provided,
In this configuration, when the opening of the door of the target chamber is detected for each of the plurality of target chambers, the chamber pressure stabilizing means sets the adjustable opening range of the chamber pressure adjusting damper with respect to the target chamber. When it is changed to the reduction side and the closing of the door is detected, the adjustable opening range of the chamber pressure adjusting damper with respect to the target chamber is returned to the increase side.

  That is, when there are a plurality of target chambers for chamber pressure adjustment, each of a plurality of branch exhaust air passages that connect a plurality of target chambers in parallel to a main exhaust air passage connected to an exhaust fan, or A chamber pressure adjusting damper is provided in each of the branch supply air passages connecting the plurality of target chambers in parallel to the main supply air passage connected to the air supply fan. For each of the target chambers, a configuration is adopted in which the chamber pressure of the target chamber is adjusted to the target chamber pressure by adjusting the opening of the chamber pressure adjusting damper with respect to the target chamber based on the detected chamber pressure of the target chamber. In this case, each of a plurality of dampers for adjusting the chamber pressure is adjusted to a room pressure within a range of opening with good chamber pressure adjustment characteristics (specifically, an opening range in which the rate of change of the degree of opening and the rate of change of the air volume are as much as possible). The above air path pressure control means is often provided for the purpose of adjusting the function.

  However, in the system provided with this air path pressure control means, the opening of the chamber pressure adjusting damper with respect to any of the target chambers is greatly adjusted to deviate from the set intermediate opening range due to a large change in the chamber pressure due to opening and closing of the door. Therefore, the air passage pressure of the main exhaust air passage or the main air supply air passage is adjusted by adjusting the output of the exhaust fan or the air supply fan, and then the other target rooms due to the effect of the air passage pressure adjustment. When the opening of the damper for adjusting the chamber pressure with respect to the other target chambers is adjusted to a state deviating from the set intermediate opening range due to the fluctuation of the chamber pressure, the main exhaust air passage is adjusted again by adjusting the output of the exhaust fan or the supply fan Or, the air passage pressure of the main air supply passage is adjusted in the opposite direction, and the air passage pressure control by the output adjustment of the exhaust fan or the air supply fan becomes unstable. There is a risk of fluctuations in the room pressure That.

  On the other hand, according to the third characteristic configuration, when the opening of the target chamber door is detected for each of the plurality of target chambers, the adjustable opening range of the chamber pressure adjusting damper with respect to the target chamber is reduced. Therefore, when the door of one of the target rooms is opened, the airway pressure of the main exhaust airway or the main air supply airway is prevented from being changed due to the airway pressure adjustment by the airway pressure control means. As a result, it is possible to effectively suppress the instability of the airway pressure control as described above due to the opening of the door of any one of the target rooms.

  In addition, when the door of any of the target chambers is opened, it is possible to prevent the airway pressure of the main exhaust airway or the main supply airway from being changed due to the airway pressure adjustment by the airway pressure control means. Thus, at the time of opening the door, the first change of the chamber pressure when the door is opened is quickly suppressed by adjusting the opening of the damper for adjusting the chamber pressure within the adjustable opening range after the reduction. The room pressure stabilization function based on the characteristic configuration can be more reliably and effectively exhibited under the condition that the air passage pressure of the main exhaust air passage or the main supply air passage is stable. In order to achieve the intended purpose of keeping the chamber pressure at the target chamber pressure as stable as possible, the chamber pressure control system can be further improved.

  If the third feature configuration is implemented in parallel with the second feature configuration, the adjustable opening range of the damper for adjusting the chamber pressure is maintained in a reduced state until the set delay time elapses from the detection time of the door closing. Thus, it is possible to prevent the air passage pressure of the main exhaust air passage or the main air supply air passage from being changed in the air passage pressure adjustment by the air passage pressure control means even when the door pressure is closed. Thus, the instability of the airway pressure control as described above due to the fluctuation of the room pressure when the door is closed can be suppressed, and the room pressure within the adjustable opening range after the reduction when the door is closed. The function of quickly suppressing the fluctuation of the room pressure when the door is closed by adjusting the opening of the damper for adjusting the room pressure by the control means is also possible under the condition that the air path pressure of the main exhaust air passage or the main supply air passage is stable. It can be surely and effectively exhibited.

  In the implementation of the third feature configuration, the upper limit opening and the lower limit opening of the set intermediate opening range and the upper limit opening and the lower limit opening of the adjustable opening range after changing to the reduction side The relationship may be appropriately determined according to the operating conditions of the system.

  FIG. 1 shows an air conditioning system for a plurality of target rooms 1a to 1c, 2 is a main air supply air path connected to an air supply fan Fs, and 3 is a main exhaust air path connected to an exhaust fan Fr. 1c is connected in parallel to the main supply air passage 2 through the branch supply air passage 2a, and is also connected in parallel to the main exhaust air passage 3 through the branch exhaust air passage 3a. Reference numeral 4 denotes an air conditioner that adjusts the temperature and humidity of the air SA supplied to the target chambers 1a to 1c through the main supply air passage 2 and the branch supply air passage 2a.

  Vs is an air volume adjusting damper interposed in each of the branch air supply passages 2a, 5 is an air volume sensor for detecting the air flow amount qs of each of the branch air supply air paths 2a, and 6A is an air volume controller for operating the air volume adjusting damper Vs. The air volume controller 6A adjusts the opening degree of the air volume adjusting damper Vs according to the deviation Δqs between the detected air volume qs detected by the air volume sensor 5 and the target air volume qss specified by the central controller CC. Air flow control is performed to adjust the air flow rate qs of the branch air supply path 2a (that is, the air flow rate for each of the target chambers 1a to 1c) to the target air flow rate qss.

  Vr is a chamber pressure adjusting damper interposed in each of the branch exhaust air passages 3a, and 7 is a chamber for detecting a chamber pressure p (specifically, a differential pressure between the reference pressure and the chamber pressure) of each of the target chambers 1a to 1c. The pressure sensor 6B is a room pressure controller for operating the room pressure adjusting damper Vr. These room pressure controllers 6B are detected by the room pressure sensor 7 and the target room pressure specified by the central controller CC. The chamber pressure control is performed to adjust the chamber pressure p of each of the target chambers 1a to 1c to the target chamber pressure ps by adjusting the opening degree of the chamber pressure adjusting damper Vr according to the deviation Δp from ps.

  8a is an air supply side pressure sensor for detecting the air passage pressure fs (internal air pressure) of the main air supply air passage 2, and 9A is an air supply side fan controller for operating the air supply fan Fs. The controller 9A outputs the output of the air supply fan Fs by inverter control according to the deviation Δfs between the air path pressure fs detected by the air supply side pressure sensor 8a and the air supply side target air path pressure fss specified by the central controller CC. The air supply side fan control for adjusting the air passage pressure fs of the main air supply air passage 2 to the air supply side target air passage pressure fss by adjustment is performed.

  Reference numeral 8b denotes an exhaust side pressure sensor for detecting the air passage pressure fr (internal pressure of the air passage) of the main exhaust air passage 3, and 9B denotes an exhaust side fan controller for operating the exhaust fan Fr. The exhaust side fan controller 9B mainly adjusts the output of the exhaust fan Fr by inverter control according to the deviation Δfr between the detected air path pressure fr by the exhaust side pressure sensor 8b and the exhaust side target air path pressure frs specified by the central controller CC. Exhaust-side fan control for adjusting the air-path pressure fr of the exhaust-air path 3 to the exhaust-side target air-path pressure frs is executed.

  Reference numerals 10A and 10B denote air supply side and exhaust side air passage pressure setting units in the central controller CC. The air supply side air passage pressure setting unit 10A is a damper for adjusting the air amount in the air amount control by the air amount controller 6A. Setting on the air supply side between the set upper limit opening x1 where the opening degree a1 to a3 of each Vs is less than 100% opening degree (fully open) and the setting lower limit opening degree x2 larger than 0% opening degree (fully closed) Air supply side air passage pressure change control for setting and changing the air supply side target air passage pressure fss according to the detected air openings a1 to a3 of the air volume adjusting dampers Vs so as to be within the intermediate opening range X. Execute.

  Further, the exhaust-side air passage pressure setting unit 10B opens the set upper limit where the opening b1 to b3 of each of the room pressure adjusting dampers Vr is less than 100% opening in the room pressure control by the room pressure controller 6B. The detected opening degree b1 to b3 of each of the dampers Vr for adjusting the chamber pressure so as to be within the range of the setting intermediate opening degree range Y on the exhaust side between the degree y1 and the setting lower limit opening degree y2 larger than 0% opening degree. The exhaust side air passage pressure change control for changing the exhaust side target air passage pressure frs according to the control is executed.

  That is, the air supply side fan controller 9A and the air supply side air path pressure setting unit 10A are configured so that the opening degree a1 to a3 of each of the air volume adjustment dampers Vs is set on the air supply side in the air volume control by the air volume controller 6A. The air passage pressure fs of the main air supply air passage 2 is adjusted by adjusting the output of the air supply fan Fs based on the detection openings a1 to a3 of the air volume adjusting damper Vs so as to be within the intermediate opening range X. The air supply side air passage pressure control means is configured, and by adjusting the air supply side air passage pressure, all the openings a1 to a3 of the air volume adjusting damper Vs are set at the air supply side set intermediate opening as shown in FIG. By entering the range X, the air volume controller 6A operates the air volume adjustment damper Vs to execute the air flow volume adjustment of each of the branched air supply paths 2a (adjustment of the air supply air volume for each of the target chambers 1a to 1c). Is performed well in terms of sensitivity and accuracy.

  Similarly, the exhaust-side fan controller 9B and the exhaust-side air passage pressure setting unit 10B are configured such that the opening degrees b1 to b3 of the chamber pressure adjusting dampers Vr are set to the exhaust side in the above-described chamber pressure control by the chamber pressure controller 6B. The output of the exhaust fan Fr is adjusted based on the detected openings b1 to b3 of the chamber pressure adjusting damper Vr so that the airway pressure fr of the main exhaust airway 3 is adjusted to be within the set intermediate opening range Y. The exhaust side air passage pressure control means to be adjusted is configured, and by adjusting the exhaust side air passage pressure, all of the openings b1 to b3 of the chamber pressure adjusting damper Vr are set at the exhaust side as shown in FIG. By entering the temperature range Y, the chamber pressure controller 6B operates the chamber pressure adjusting damper Vr and executes the chamber pressure adjustment of each of the target chambers 1a to 1c in terms of sensitivity and accuracy. It is like that.

  Specifically, the air supply side air passage pressure setting unit 10A is configured such that the largest one of the detected openings a1 to a3 of the air volume adjusting damper Vs sets the air supply side set intermediate opening range X to the large opening side. When deviating, the target air passage pressure fss on the air supply side is changed to the rising side, and conversely, the smallest one of the detection openings a1 to a3 of the air volume adjustment damper Vs is the set intermediate opening range on the air supply side. When X deviates to the small opening side, the target air passage pressure fss on the air supply side is changed to the lower side, and all the detection openings a1 to a3 of the air volume adjusting damper Vs are set on the air supply side. When it is within the range of the degree range X, the target air path pressure fss on the supply side is maintained at the current value.

  That is, when the maximum detected opening degree a1 to a3 of the air volume adjustment damper Vs deviates from the supply side set intermediate opening range X to the large opening side, the target airway pressure on the supply side By changing fss to the rising side, the output of the supply fan Fs is adjusted to the increase side in adjusting the fan output by the supply side fan controller 9A, and the supply fan Fs to the increase side is adjusted. With respect to the output adjustment of the air volume, the air volume adjustment damper Vs is adjusted so that the opening degree of each of the air volume adjustment dampers Vs is closed on the air volume control, and conversely, the detected opening degrees a1 to a3 of the air volume adjustment damper Vs. When the smallest of these is deviating from the supply side set intermediate opening range X to the small opening side, by changing the supply side target wind path pressure fss to the lower side, the supply side The output of the air supply fan Fs on the adjustment of the fan output by the fan controller 9A In order to adjust the output to the decreasing side, the opening of each of the air volume adjusting dampers Vs is adjusted to the opening side in the air volume control by the air volume controller 6A with respect to the output adjustment of the supply fan Fs to the decreasing side. Thus, all the openings a1 to a3 of the air volume adjusting damper Vs are made to enter the set intermediate opening range X on the supply side.

  On the other hand, the exhaust-side air passage pressure setting unit 10B is specifically configured such that the largest one of the detected openings b1 to b3 of the chamber pressure adjusting damper Vr sets the exhaust-side set intermediate opening range Y to the large opening side. Is changed to the lower side, and conversely, the smallest one of the detected openings b1 to b3 of the chamber pressure adjusting damper Vr is the set intermediate opening range on the exhaust side. When Y deviates to the small opening side, the target air passage pressure frs on the exhaust side is changed to the rising side, and all the detection openings b1 to b3 of the chamber pressure adjusting damper Vr are set on the exhaust side. When it is within the range of the degree range Y, the target air passage pressure frs on the exhaust side is maintained at the current value.

  That is, when the maximum detected opening degree b1 to b3 of the chamber pressure adjusting damper Vr deviates from the exhaust side set intermediate opening range Y to the large opening side, the exhaust side target wind path pressure frs. By changing the output to the lower side, the output of the exhaust fan Fr is adjusted to the increase side in adjusting the fan output by the exhaust side fan controller 9B, so that the output of the exhaust fan Fr to the increase side is adjusted. On the other hand, the opening of each of the chamber pressure adjusting dampers Vr is adjusted to the closing side in the chamber pressure control by the chamber pressure controller 6B, and conversely, the detected opening b1 to b3 of the chamber pressure adjusting damper Vr. When the smallest one of them deviates from the exhaust side set intermediate opening range Y to the small opening side, the exhaust side fan controller is changed by changing the exhaust side target wind path pressure frs to the rising side. Output of exhaust fan Fr for adjusting fan output by 9B In order to adjust the output of the exhaust fan Fr to the decreasing side, the opening of each of the chamber pressure adjusting dampers Vr is adjusted to open on the chamber pressure control by the chamber pressure controller 6B. Thus, the openings b1 to b3 of the chamber pressure adjusting damper Vr are all within the set intermediate opening range Y on the exhaust side.

  11 is a first door provided on the chamber wall between the adjacent first target chamber 1a and the second target chamber 1b, and 12 is a chamber wall between the adjacent second target chamber 1b and the third target chamber 1c. The doors 11 and 12 are equipped with door sensors 11a and 12a that detect opening and closing of the doors 11 and 12, respectively.

  Further, the central controller CC restricts the opening adjustment of the chamber pressure adjusting damper Vr by the chamber pressure controller 6B when the doors 11 and 12 are opened based on the detection information id of the door sensors 11a and 12a. The pressure stabilization unit 13 is provided. Specifically, the room pressure stabilization unit 13 executes the following controls (A) to (C) (see FIG. 4).

  (A) When both the first door 11 and the second door 12 are in a closed state (strictly, it does not include the set delay time Td described later), the room pressure on the opening adjustment by the room pressure controller 6B The adjustable opening range ZZ of each of the adjustment dampers Vr is set to a normal opening range Za ranging from 100% opening to 0% opening as shown in FIG. 3A, and the room pressure controller 6B is used for adjusting the room pressure. It is allowed to adjust the opening degree of the damper Vr in the range Za of 100% opening degree to 0% opening degree.

  (B) When the opening of the first door 11 is detected by the door sensor 11a, the chamber pressure adjusting damper Vr can be adjusted for each of the first target chamber 1a and the second target chamber 1b communicated by the opening of the first door 11. As shown in FIG. 3B, the opening range ZZ includes a set upper limit opening z1 (for example, 80% opening) smaller than the 100% opening and a set lower limit opening z2 (for example, 30) larger than 0% opening. % Opening) to the set reduced opening range Zb.

  Similarly, when the opening of the second door 12 is detected by the door sensor 12a, the adjustment of the chamber pressure adjusting damper Vr for each of the second target chamber 1b and the third target chamber 1c communicated by the opening of the second door 12 is performed. The possible opening range ZZ is changed to the set reduced opening range Zb.

  (C) When the closing of the first door 11 is detected by the door sensor 11a, the chambers for the first target chamber 1a and the second target chamber 1b when the set delay time Td has elapsed from the detection time of the closing. The adjustable opening range ZZ of the pressure adjusting damper Vr is returned from the set reduced opening range Zb to the normal opening range Za.

  Similarly, when the closing of the second door 12 is detected by the door sensor 12a, the second target chamber 1b and the third target chamber 1c are respectively detected when the set delay time Td has elapsed from the detection time of the closing. The adjustable opening range ZZ of the chamber pressure adjusting damper Vr is returned from the set reduced opening range Zb to the normal opening range Za.

  That is, when the doors 11 and 12 are opened as described above, the adjustable opening range ZZ of the chamber pressure adjusting damper Vr is changed to the reduction side, thereby opening the doors of the target chambers 1a to 1c in which the doors 11 and 12 are opened. When the chamber pressure fluctuation at the time is a large fluctuation from the target chamber pressure ps and can only be resolved after the doors 11 and 12 are closed, the door generated following the room pressure fluctuation when the door is opened In order to effectively suppress a large chamber pressure fluctuation at the time of closing, and when the chamber pressure fluctuation at the time of door opening of the target chambers 1a to 1c in which the doors 11 and 12 are opened is slight, the door The room pressure fluctuation itself when the door is opened, which causes the room pressure fluctuation when closing, can be effectively suppressed.

  That is, the chamber pressure fluctuation at the time of opening the target chambers 1a to 1c in which the doors 11 and 12 are opened is a large fluctuation from the target chamber pressure ps and can only be resolved after the doors 11 and 12 are closed. In some cases, the opening b1 to b3 of the chamber pressure adjusting damper Vr with respect to the target chambers 1a to 1c in which the doors 11 and 12 are opened are the chamber pressure fluctuations when the door is opened on the chamber pressure control by the chamber pressure controller 6B. Is reduced to the set reduction opening range Zb by reducing the adjustable opening range ZZ of the chamber pressure adjusting damper Vr to the room pressure controller 6B. The opening adjustment of the adjustment damper Vr is limited to the upper limit opening z1 or the lower limit opening z2 of the adjustable opening range ZZ (= Zb) after reduction, and thereby the exhaust air volume qr from the target chambers 1a to 1c. After the doors 11 and 12 are opened, To suppress from being adjusted to a completely different air volume and the front air, to suppress a large room pressure variation during closed door that due to the large exhaust air volume change.

  In addition, when the chamber pressure fluctuation at the time of opening the target chambers 1a to 1c in which the doors 11 and 12 are opened is slight, the chamber pressure adjustment for the target chambers 1a to 1c in which the doors 11 and 12 are opened is performed. By adjusting the opening of the damper Vr by the room pressure controller 6B within the adjustable opening range ZZ (= Zb) after reduction, the original room pressure adjustment function by the room pressure controller 6B is reduced. The form is utilized within the adjustable opening range ZZ (= Zb) to suppress room pressure fluctuation itself when the door is opened.

  Further, when the doors 11 and 12 are closed, the adjustable opening range ZZ of the chamber pressure adjusting damper Vr is changed to the normal opening range Za when the set delay time Td has elapsed from the detection time of the closing of the doors 11 and 12. When the doors 11 and 12 are closed, the chamber caused by the overshoot in the room pressure control by the room pressure controller 6B following the fluctuation in the room pressure caused by blocking the leakage air through the doors 11 and 12 when the doors 11 and 12 are closed. Pressure fluctuation is also effectively suppressed.

  When the second door 12 is opened with the first door 11 closed, the adjustable opening range ZZ of the chamber pressure adjusting damper Vr with respect to the first target chamber 1a is maintained at the normal opening range Za. Similarly, when the first door 11 is opened with the second door 12 closed, the adjustable opening range ZZ of the chamber pressure adjusting damper Vr with respect to the third target chamber 1c becomes the normal opening range Za. Maintained.

  In the air conditioning system of this embodiment, the chamber pressure adjusting damper is used to reduce the adjustable opening range ZZ of the chamber pressure adjusting damper Vr for the target chambers 1a to 1c in which the doors 11 and 12 are opened. When the detected opening degree b1 to b3 of Vr is increased to the upper limit opening degree z1 of the set reduction opening degree range Zb, the opening degree adjustment of the room pressure adjusting damper Vr to the further opening degree increasing side by the room pressure controller 6B. When the detected openings b1 to b3 of the chamber pressure adjusting damper Vr are reduced to the lower limit opening z2 of the set reduction opening range Zb, the opening is further reduced by the chamber pressure controller 6B. The method of prohibiting the opening adjustment of the chamber pressure adjusting damper Vr is adopted.

  In short, in the present embodiment, the chamber pressure controller 6B adjusts the openings b1 to b3 of the chamber pressure adjusting dampers Vr based on the detection chamber pressure p of the target chambers 1a to 1c to adjust the opening of the target chambers 1a to 1c. A chamber pressure control means for adjusting the chamber pressure p to the target chamber pressure ps is configured.

  Further, the chamber pressure stabilizing unit 13 in the central controller CC moves the adjustable opening range ZZ of the chamber pressure adjusting damper Vr to the reduction side when the opening of the doors 11 and 12 of the target chambers 1a to 1c is detected. When the change is made and the closing of the doors 11 and 12 is detected, the chamber pressure stabilizing means is configured to return the adjustable opening range ZZ of the chamber pressure adjusting damper Vr to the increasing side.

[Another embodiment]
Next, other embodiments of the present invention will be listed.
In the above-mentioned embodiment, the example which changes the adjustable opening range ZZ of the damper Vr for chamber pressure adjustment according to opening / closing of the doors 11 and 12 between the target chambers 1a-1c which implement chamber pressure control was shown. However, when the opening of the door between the target chambers 1a to 1c and the passage or the like is detected, the adjustable opening range ZZ of the chamber pressure adjusting damper Vr with respect to the target chambers 1a to 1c having the door opened is reduced. When the door is closed and the door is closed, the adjustable opening range ZZ of the chamber pressure adjusting damper Vr may be returned to the enlargement side.

  In the above-described embodiment, when the doors 11 and 12 are in the closed state (except within the set delay time Td), the adjustable opening range ZZ of the chamber pressure adjusting damper Vr ranges from 100% opening to 0% opening. Although the opening range is set to Za, when the doors 11 and 12 are in a closed state (except within the set delay time Td), the adjustable opening range ZZ of the chamber pressure adjusting damper Vr is set to 100% opening. Is set within a set limit opening range Za ′ (<Za) between a smaller upper limit opening and a lower limit opening greater than 0% opening, and when the doors 11 and 12 are opened, the chamber pressure is adjusted. The adjustable opening range ZZ of the damper Vr may be configured to be changed to the reduction side with respect to the set limit opening range Za ′.

  In the above-described embodiment, the configuration in which the exhaust pressure air passage 3a from the target chambers 1a to 1c is interposed with the chamber pressure adjusting damper Vr has been described. The present invention can be applied to the case where the chamber pressure adjusting damper Vr is interposed, and can also be applied to the case where the target chamber is a single chamber.

  The present invention is particularly suitable for use in a semiconductor manufacturing clean room or chemical manufacturing clean room that performs room pressure control, but the amount of exhaust air from the target chamber or the target chamber can be adjusted by adjusting the opening of the damper for adjusting the chamber pressure. Any facility that implements chamber pressure control that adjusts the supply air volume to the target chamber to adjust the chamber pressure to the target chamber pressure can be applied regardless of the purpose of the target chamber.

Overall configuration of air conditioning system The figure explaining the adjustment method of airway pressure adjustment The figure which shows the change form of the adjustable opening range Graph explaining change operation of adjustable opening range

Explanation of symbols

1a to 1c Target room qr Exhaust air volume qs Supply air volume Vr Room pressure adjusting damper p Room pressure b1 to b3 Opening of chamber pressure adjusting damper ps Target room pressure 6B Room pressure control means 11, 12 Door ZZ Adjustable opening Range 13 Chamber pressure stabilization means Td Setting delay time Fr Exhaust fan 3 Main exhaust air passage 3a Branch exhaust air passage Fs Supply air fan 2 Main air supply air passage 2a Branch air supply air passage y1 Setting upper limit opening y2 Setting lower limit opening Y setting Intermediate opening range fr Air path pressure of main exhaust air path fs Air path pressure of main air supply air path 9B, 10B Air path pressure control means on exhaust side 9A, 10A Air path pressure control means on air supply side

Claims (3)

A damper for adjusting the chamber pressure that adjusts the amount of exhaust air from the target chamber or the amount of air supplied to the target chamber by adjusting the opening is provided.
A chamber pressure control system including a chamber pressure control means for adjusting a chamber pressure of the target chamber to a target chamber pressure by adjusting an opening of the chamber pressure adjusting damper based on a detection chamber pressure of the target chamber;
When the opening of the door of the target chamber is detected, the adjustable opening range of the damper for adjusting the chamber pressure is changed to the reduction side, and when the closing of the door is detected, the damper for adjusting the chamber pressure A chamber pressure control system provided with a chamber pressure stabilizing means for returning the adjustable opening range of the valve to the increasing side.   The chamber pressure stabilizing means is configured to execute the return to the increase side of the adjustable opening range when a set delay time elapses from the detection time of the closing of the door when the closing of the door is detected. The room pressure control system according to claim 1. Each of a plurality of branch exhaust air passages connecting the plurality of target chambers in parallel to a main exhaust air passage connected to an exhaust fan, or a plurality of the air supply air passages connected to an air supply fan The damper for adjusting the chamber pressure is interposed in each of the branch supply air passages connecting the target chambers in parallel,
For each of the plurality of target chambers, the chamber pressure control means adjusts the opening of the chamber pressure adjusting damper with respect to the target chamber based on the detected chamber pressure of the target chamber, thereby adjusting the chamber pressure of the target chamber. To adjust to the pressure,
In the opening degree adjustment by the room pressure control means, a set upper limit opening degree that is less than 100% opening degree and a setting lower limit opening degree that is larger than 0% opening degree for each of the plurality of target chambers. The output of the exhaust fan or the supply fan is adjusted based on the detected opening of each of the chamber pressure adjusting dampers so as to be within the set intermediate opening range between the main exhaust air passage and the main supply air. Air passage pressure control means for adjusting the air passage pressure of the air passage is provided,
In this configuration, when the opening of the door of the target chamber is detected for each of the plurality of target chambers, the chamber pressure stabilizing means sets the adjustable opening range of the chamber pressure adjusting damper with respect to the target chamber. 3. The configuration according to claim 1 or 2, wherein when the door is detected to be closed and the closing of the door is detected, the adjustable opening range of the chamber pressure adjusting damper with respect to the target chamber is returned to the increasing side. Room pressure control system.

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