JP5486439B2 - Room pressure control system - Google Patents

Description

  The present invention relates to a chamber pressure control system that returns the atmospheric pressure of a chamber to be interrupted, which interrupts the chamber pressure control among the target chambers in which the chamber pressure control is performed, to atmospheric pressure.

  When there is no disturbance that fluctuates the set chamber pressure of a plurality of adjacent chambers, the first chamber pressure that maintains the chamber pressure at the set chamber pressure by the air volume adjusting means of the control damper attached to the exhaust device connected to each chamber Control process and second chamber pressure control process in which the amount of air passing through the control damper through the air amount adjusting means of the control damper is set to a preset change air amount value in a room where fluctuations in the room pressure are expected when disturbance occurs When the disturbance ends, there is a chamber pressure control method that returns the air volume that passes through the control damper to the stable air volume value that maintains the set chamber pressure via the air volume adjusting means of the control damper (see Patent Document 1).

  In this room pressure control method, when a disturbance that fluctuates the set room pressure of the room occurs, the air volume that passes through the control damper is preset in the room where the fluctuation of the room pressure is expected via the air volume adjusting means of the control damper. When the airflow value is changed and the disturbance ends, the airflow that passes through the control damper is returned to the stable airflow value that maintains the set chamber pressure via the airflow adjustment means of the control damper. It is possible to quickly return the chamber pressure of each chamber to the installation chamber pressure.

JP 2007-198651 A

  When fumigating or heat-treating any one of the plurality of chambers, it is necessary to interrupt the chamber pressure control for the chambers that perform the processing, but in the chamber pressure control method disclosed in the above publication, If the room pressure control, which has been implemented for fumigation and heat treatment rooms, is interrupted at once, the balance between the supply air volume and the exhaust air volume in that room and other rooms will be significantly disrupted, and these rooms will be overly shaded. Pressure or excessive positive pressure can cause contaminants to flow out of the room, or dust, fine powder, gas, bacteria, or other unwanted materials from the outside of the room. In addition, when the chamber becomes excessive negative pressure or excessive positive pressure, an extreme load is applied to the peripheral wall, the peripheral wall may collapse, or a crack may occur in the seal portion connecting the peripheral walls.

  The object of the present invention is to maintain the chamber pressure of the remaining target chambers other than the target chamber to be interrupted for interrupting the chamber pressure control among a plurality of target chambers at the set chamber pressure, while setting the chamber pressure of the target chamber to be atmospheric pressure. It is to provide a room pressure control system that can be returned to Another object of the present invention is to provide a room pressure control system that can return the room pressure of a room to be interrupted to atmospheric pressure smoothly and in a short time.

  The premise of the present invention for solving the above-mentioned problems is that at least two target chambers in which chamber pressure control is performed, an air supply fan for supplying air to the target chambers, and exhaust for exhausting air from the target chambers The room pressure control system includes a fan and returns the room pressure of the target room to be interrupted to interrupt the room pressure control among the target rooms.

  The feature of the present invention in the above premise is that the chamber pressure control system can adjust the flow rate of the air exhausted from the interruption target chamber and the first damper for separation that can adjust the flow rate of the air supplied to the interruption target chamber A second separating damper, a controller for operating the damper opening of the first separating damper and the second separating damper based on the chamber pressure of the chamber to be interrupted, and measuring the chamber pressure of the chamber to be interrupted A first chamber pressure sensor that outputs the chamber pressure to the controller, and the controller interrupts the upper and lower limit chamber pressures of the chamber to be interrupted and the first chamber pressure sensor when interrupting the chamber pressure control of the chamber to be interrupted. As a result of comparing the chamber pressure comparison means for comparing the measurement chamber pressure of the target chamber with the upper and lower limit chamber pressures of the chamber to be interrupted and the measurement chamber pressure, Damper opening of the 1st and 2nd dampers First closing operation means for performing a closing operation for gradually closing from the open state to fully closing, and when the measurement chamber pressure exceeds the upper limit chamber pressure, the second damper is closed while the damper opening degree of the first damper is being closed. The second closing operation means for temporarily stopping the closing operation of the damper opening, and when the measurement chamber pressure falls below the lower limit chamber pressure, the damper opening of the first damper is performed while closing the damper opening of the second damper. And a third closing operation means for temporarily stopping the closing operation.

  As an example of the present invention, when the measurement chamber pressure that has exceeded the upper limit chamber pressure no longer exceeds the upper limit chamber pressure, the controller interrupts the second closing operation means and restarts the first closing operation means to reduce the lower limit chamber pressure. When the measurement chamber pressure that has fallen below does not fall below the lower limit chamber pressure, the third closing operation unit is interrupted and the first closing operation unit is resumed.

  As another example of the present invention, the chamber pressure control system includes a control damper that adjusts a flow rate of air exhausted from the target chambers and holds the chamber pressure of each target chamber at a set chamber pressure. While the first to third closing means are being executed, in order to maintain the chamber pressure between the target chamber to be interrupted and the remaining target chamber excluding the target chamber to be maintained at the set chamber pressure, the air exhausted from these target chambers Adjust the flow rate.

  As another example of the present invention, the chamber pressure control system includes a second chamber pressure sensor that measures the chamber pressure of the remaining target chambers excluding the chamber to be interrupted and outputs the measured chamber pressure to the controller. During execution of the first to third closing operation means, the setting chamber pressure of the remaining target chamber is compared with the measurement chamber pressure of the remaining target chamber output from the second chamber pressure sensor, and the remaining target chamber is set. As a result of comparing the chamber pressure with the measurement chamber pressure, if the measurement chamber pressure of the remaining target chamber deviates from the set chamber pressure, the first to third closing operation means are interrupted, and the measurement chamber pressure of the remaining target chamber is When returning to the set chamber pressure, the first to third closing operation means are restarted.

  As another example of the present invention, a constant air volume unit in which the chamber pressure control system keeps the flow rate constant with respect to a change in the flow rate of air supplied to the interruption target chamber and the remaining target chamber excluding the interruption target chamber. The controller holds the flow rate of the air flowing from the constant air volume unit into the interruption target chamber at the flow rate immediately before the execution of the first to third closing operation means when executing the first to third closing operation means.

  As another example of the present invention, the controller controls the inverter of the air supply fan while executing the first to third closing operation means, and maintains a constant static pressure of the air supplied from the air supply fan. Supply air fan control means for reducing the air volume of the air supplied from the air supply fan with a predetermined downward gradient is included.

  As another example of the present invention, the controller compares the set room pressure of the remaining target chamber with the measurement chamber pressure of the remaining target chamber output from the second chamber pressure sensor during execution of the air supply fan control means. As a result of comparing the set room pressure of the remaining target room and the measurement room pressure, if the measurement room pressure of the remaining target room deviates from the set room pressure, the air supply fan control means is interrupted, and the remaining target room When the measurement chamber pressure returns to the set chamber pressure, the supply fan control unit is restarted.

  As another example of the present invention, when the measurement chamber pressure of the remaining target chamber returns to the set chamber pressure and the air supply fan control unit is restarted, the controller may restart after restarting the processing speed of the air supply fan control unit before restarting. Increase the processing speed of the air supply fan control means.

  As another example of the present invention, the controller controls the inverter of the exhaust fan during execution of the first to third closing operation means, and keeps the static pressure of the air exhausted from the exhaust fan constant from the exhaust fan. Exhaust fan control means for reducing the air volume of the exhausted air with a predetermined downward gradient is included.

  As another example of the present invention, the controller compares the set chamber pressure of the remaining target chamber with the measurement chamber pressure of the remaining target chamber output from the second chamber pressure sensor during execution of the exhaust fan control means, As a result of comparing the set room pressure of the remaining target room and the measurement room pressure, if the measurement room pressure of the remaining target room deviates from the set room pressure, the exhaust fan control means is interrupted and the measurement room of the remaining target room is stopped. When the pressure returns to the set chamber pressure, the exhaust fan control means is restarted.

  As another example of the present invention, when the measurement chamber pressure of the remaining target chamber returns to the set chamber pressure and the exhaust fan control unit is restarted, the controller performs exhaust after restarting more than the processing speed of the exhaust fan control unit before restarting. Increase the processing speed of the fan control means.

  As another example of the present invention, the upper limit chamber pressure is in the range of +3 to +10 Pa of the set chamber pressure of the chamber to be interrupted, and the lower limit chamber pressure is in the range of −3 to −10 Pa of the set chamber pressure of the chamber to be interrupted. .

  As another example of the present invention, the controller opens one of the damper opening of the first separating damper and the damper opening of the second separating damper during execution of the first to third closing operation means. When the degree becomes 1 to 10%, the closing operation of the damper opening of one damper is interrupted until the damper opening of the other damper reaches 1 to 10%, and the damper opening of the other damper is 1 When it becomes -10%, the closing operation of the damper opening degree of one damper is restarted.

  According to the chamber pressure control system of the present invention, when the measurement chamber pressure of the chamber to be interrupted is within the range of the upper and lower limit chamber pressures, the damper openings of the first and second dampers are gradually closed from the open state to be fully closed. When the chamber pressure control of the target chamber is interrupted, the balance between the supply air flow rate and the exhaust air flow rate of the target chamber and the remaining target chambers other than the target chamber remains unchanged. The room pressure of the target room is not excessively negative or positive, and the room pressure of the remaining target room is maintained at the set room pressure, while the room pressure of the target room for interruption is returned to atmospheric pressure smoothly and in a short time. Can do. When interrupting the room pressure control of the target room, the system can prevent the outflow of pollutants from the target room, and the dust, fine powder, gas, bacteria, etc. Inflow can be prevented. When the measurement chamber pressure of the chamber to be interrupted exceeds the upper limit chamber pressure, the system temporarily stops the closing operation of the damper opening of the second damper while executing the closing operation of the damper opening of the first damper. Further, the measurement chamber pressure of the chamber to be interrupted can be prevented from further rising, and the chamber pressure of the chamber to be interrupted is smoothly returned to the atmospheric pressure while the measurement chamber pressure of the chamber to be interrupted is returned to the set room pressure range. be able to. This system temporarily stops the closing operation of the damper opening of the first damper while performing the closing operation of the damper opening of the second damper when the measurement chamber pressure falls below a predetermined lower limit chamber pressure. The measurement chamber pressure in the chamber to be interrupted can be prevented from dropping further, and the chamber pressure in the chamber to be interrupted can be smoothly returned to atmospheric pressure while returning the measurement chamber pressure in the chamber to be interrupted to the set room pressure range. Can do.

  When the measurement chamber pressure that has exceeded the upper limit chamber pressure no longer exceeds the upper limit chamber pressure, the second closing operation means is interrupted and the first closing operation means is restarted, and the measurement chamber pressure that has fallen below the lower limit chamber pressure is lower than the lower limit chamber pressure. The chamber pressure control system that interrupts the third closing operation means and restarts the first closing operation means when the chamber pressure no longer falls below the first pressure is closed when the measurement chamber pressure returns to within the range of the upper and lower limit chamber pressures. The operation means is restarted, and the first closing operation means performs the closing operation of the damper opening of the first damper for separation and the second damper for separation. The chamber pressure can be returned to atmospheric pressure in a short time.

  The control damper includes a control damper that adjusts the flow rate of air exhausted from the target chambers to maintain the chamber pressure of each target chamber at the set chamber pressure, and the control damper is suspended during execution of the first to third closing operation means. And a chamber pressure control system that maintains the chamber pressure of the remaining target chambers excluding the interrupted target chamber at the set chamber pressure, the control damper is used during the execution of the first to third closing operation means. Since the chamber pressure is maintained at the set chamber pressure, when interrupting the chamber pressure control of the chamber to be interrupted, the balance between the supply air volume and the exhaust air volume in the chamber to be interrupted and the remaining target chambers other than that is not disrupted. The room pressure of these target rooms will not be excessively negative or positive, and the room pressure of the remaining target rooms will be kept at the set room pressure, while the room pressure of the target rooms will be smoothly returned to atmospheric pressure. Can do. In this system, the measurement chamber pressure is maintained at the set chamber pressure by the control damper, and the first closing operation means performs the closing operation of the damper opening of the first damper and the second damper. Can be returned to atmospheric pressure in a short time.

  It includes a second chamber pressure sensor that measures the chamber pressure of the remaining target chambers excluding the interrupted target chamber and outputs the measured chamber pressure to the controller. During execution of the first to third closing operation means, the remaining target chambers The first to third closing operation means are interrupted when the measurement chamber pressure is deviated from the setting chamber pressure, and the first to third closing operation means is interrupted when the measurement chamber pressure of the remaining target chamber returns to the setting chamber pressure. Since the first to third closing operation means are interrupted when the measurement chamber pressure of the remaining target chamber deviates from the set chamber pressure, the room pressure control system that resumes the remaining target chamber supplies the supply air flow rate and the exhaust air flow rate of the remaining target chamber. Therefore, it is possible to return the chamber pressure of the target chamber to the atmospheric pressure while maintaining the chamber pressure of the remaining target chamber at the set chamber pressure. This system can prevent the outflow of pollutants from the remaining target room when interrupting the room pressure control of the target room, so that dust, fine powder, gas, bacteria, etc. from the outside to the remaining target room can be prevented. Inflow of unnecessary materials can be prevented.

  Including a constant air volume unit that keeps the flow rate constant with respect to a change in the flow rate of air supplied to the interruption target chamber and the remaining target chambers excluding the interruption target chamber, and performing the first to third closing operation means at the time of execution The chamber pressure control system that maintains the flow rate of air flowing from the constant air volume unit into the interruption target chamber at the flow rate immediately before the execution of the first to third closing operation means When the constant air flow unit operates to keep it constant, the chamber pressure in the chamber to be interrupted greatly exceeds the predetermined upper limit chamber pressure or significantly lower than the lower limit chamber pressure, and the chamber pressure in the chamber to be interrupted increases smoothly and in a short time. Although the pressure cannot be returned to the atmospheric pressure, the flow rate of the air flowing into the chamber to be interrupted from the constant air flow unit is maintained at the flow rate immediately before the execution of the first to third closing operation means, so even if there is a change in the air flow rate Determine the room to be interrupted The volume unit does not operate, and the constant air volume unit does not prevent the chamber pressure of the chamber to be interrupted from returning to atmospheric pressure, and the chamber pressure in the chamber to be interrupted can be returned to atmospheric pressure smoothly and in a short time. .

  During the execution of the first to third closing operation means, the air volume of the air supplied from the air supply fan while controlling the inverter of the air supply fan and keeping the static pressure of the air supplied from the air supply fan constant. The chamber pressure control system that reduces the air pressure at a predetermined downward slope supplies the suspension target chamber with a constant static pressure of the air supplied from the supply fan when interrupting the chamber pressure control of the suspension target chamber. Since the air volume of unnecessary air to be reduced is decreased with a predetermined downward gradient, the balance between the supply air volume and the exhaust air volume in the target room for interruption and the remaining target rooms other than that is not disturbed, and the room pressure in these target rooms Thus, the negative pressure or the positive pressure is not excessively increased, and the room pressure of the target chamber to be interrupted can be returned to the atmospheric pressure smoothly and in a short time while the remaining chamber pressure is maintained at the set chamber pressure.

  If the measurement chamber pressure in the remaining target chamber deviates from the set room pressure while the supply air fan control means is running, the supply air fan control means is interrupted and the measurement chamber pressure in the remaining target chamber returns to the set room pressure. In this case, the room pressure control system that restarts the air supply fan control means keeps the room pressure of the remaining target room at the set room pressure without causing a balance between the air supply air volume and the exhaust air volume of the remaining target room. The chamber pressure of the interruption target chamber can be returned to the atmospheric pressure. This system can prevent the outflow of pollutants from the remaining target room when interrupting the room pressure control of the target room, so that dust, fine powder, gas, bacteria, etc. from the outside to the remaining target room can be prevented. Inflow of unnecessary materials can be prevented.

  When the measurement chamber pressure of the remaining target chamber returns to the set chamber pressure and the supply fan control means is restarted, the processing speed of the supply fan control means after restarting is higher than the processing speed of the supply fan control means before restarting. The increased chamber pressure control system increases the processing speed of the air supply fan control means after restarting, so that the air volume that is unnecessary to supply air to the interrupted room in the state of following the downward gradient of the air supply fan control means The balance between the supply air flow rate and the exhaust air flow rate of the target room and the remaining target rooms other than the target room is not lost, and the remaining target room pressure is maintained at the set room pressure, and the room is interrupted. The chamber pressure in the target chamber can be returned to atmospheric pressure smoothly and in a short time.

  During execution of the first to third closing means, the inverter of the exhaust fan is controlled, and the air volume of the air exhausted from the exhaust fan is kept at a predetermined downward gradient while the static pressure of the air exhausted from the exhaust fan is kept constant. The room pressure control system that reduces the air volume of the air to be exhausted from the chamber to be interrupted while maintaining the static pressure of the air exhausted from the exhaust fan constant when the chamber pressure control of the chamber to be interrupted is interrupted. Since the air volume is decreased with a predetermined slope, the balance between the supply air flow rate and the exhaust air flow rate in the target room other than the interrupted target room and the remaining target room is not lost, and the room pressure in those target rooms is excessively negative or positive. Therefore, the chamber pressure of the target chamber to be interrupted can be returned to the atmospheric pressure smoothly and in a short time while maintaining the chamber pressure of the remaining target chamber at the set chamber pressure.

  When the measurement chamber pressure in the remaining target chamber deviates from the set chamber pressure while the exhaust fan control means is running, the exhaust fan control means is interrupted, and the measurement chamber pressure in the remaining target chamber returns to the set chamber pressure The room pressure control system that restarts the exhaust fan control means does not break the balance between the supply air volume and the exhaust air volume in the remaining target room, and keeps the room pressure in the remaining target room at the set room pressure, The chamber pressure can be returned to atmospheric pressure. This system can prevent the outflow of pollutants from the remaining target room when interrupting the room pressure control of the target room, so that dust, fine powder, gas, bacteria, etc. from the outside to the remaining target room can be prevented. Inflow of unnecessary materials can be prevented.

  When the measurement chamber pressure of the remaining target chamber returns to the set chamber pressure and the exhaust fan control means is restarted, the room pressure increases the processing speed of the exhaust fan control means after the restart than the processing speed of the exhaust fan control means before the restart. By increasing the processing speed of the exhaust fan control means after restarting, the control system can reduce the amount of unnecessary air that is exhausted from the interrupted chamber while following the downward gradient of the exhaust fan control means. The balance between the supply air flow rate and the exhaust air flow rate of the target room and the remaining target rooms other than that is not lost, and the room pressure of the target room is maintained while maintaining the room pressure of the remaining target room at the set room pressure. It can return to atmospheric pressure smoothly and in a short time.

  The chamber pressure control system in which the upper limit chamber pressure is in the range of +3 to +10 Pa of the set chamber pressure of the chamber to be interrupted and the lower limit chamber pressure is in the range of −3 to −10 Pa of the set chamber pressure of the chamber to be interrupted is the upper limit chamber pressure. When the lower chamber pressure is within the above range and the measurement chamber pressure exceeds the upper chamber pressure, the closing operation of the damper opening of the second damper is temporarily performed while the closing operation of the damper opening of the first damper is executed. When the measurement chamber pressure falls below the lower limit chamber pressure, the closing operation of the damper opening of the first damper is temporarily stopped while the closing operation of the damper opening of the second damper is executed. It is possible to prevent further increase in the measurement chamber pressure of the chamber, and it is possible to prevent further decrease in the measurement chamber pressure of the chamber to be interrupted, so that the measurement chamber pressure of the chamber to be interrupted is within the set chamber pressure range. While returning, the chamber pressure in the room to be interrupted can be returned to atmospheric pressure smoothly. That.

  When the damper opening degree of one of the first damper for separation and the damper opening degree of the second damper for separation becomes 1 to 10% during execution of the first to third closing operation means When the damper opening of one damper is interrupted until the damper opening of the other damper reaches 1 to 10% and the damper opening of the other damper reaches 1 to 10%, The chamber pressure control system that restarts the closing operation of the damper opening of the damper balances the damper opening of the first damper for separation with the damper opening of the second damper for separation. When control is interrupted, the balance between the supply air volume and exhaust air volume of the target chamber and the remaining target chambers other than the target chamber will not be disrupted, and the chamber pressure in those target chambers will be excessively negative or positive. Without maintaining the room pressure of the remaining target room at the set room pressure, The chamber pressure in the cross-sectional target chamber can be returned to atmospheric pressure smoothly and short time.

The block diagram of the room pressure control system shown as an example. The figure which shows an example of the time change of the chamber pressure when returning the chamber pressure of a 2nd clean room to atmospheric pressure. The flowchart explaining an example of the room pressure control method performed in a system. The block diagram of the room pressure control system shown as another example. The flowchart explaining an example of the room pressure control method performed in a system. 6 is a flowchart continuing from FIG.

  The details of the room pressure control system according to the present invention will be described with reference to the accompanying drawings such as FIG. 1 which is a configuration diagram of the room pressure control system shown as an example. In FIG. 1, the 1st clean room 11 (pre-processing chamber) and the 2nd clean room 12 (work room) are shown from those sides.

In this embodiment, a pressure reduction control method in which the set room pressure of the clean rooms 11 and 12 is higher than the outdoor atmospheric pressure and the room pressure of the clean rooms 11 and 12 is returned to the atmospheric pressure will be described as an example. In this embodiment, the second clean room 12 is a room to be interrupted (a room pressure control during execution is interrupted for reasons such as fumigation or heat treatment, and the room pressure is returned to atmospheric pressure), and the first clean room A decompression control method implemented by the system 10A will be described with 11 as the remaining target rooms excluding the target room to be interrupted (the room for continuing the room pressure control during execution).

  In FIG. 1 (including FIG. 4 described later), two clean rooms 11 and 12 adjacent to each other are illustrated, but the clean room is not limited to two adjacent rooms, and the first to first three or more adjacent rooms are not limited. The decompression control method of the system 10A (including the system 10B described later) can be applied to n clean rooms or three or more independent first to nth clean rooms. The decompression control method of the system 10A (including the system 10B) can be applied not only to a clean room but also to a room for any other purpose. The room pressure control system 10A interrupts the room pressure control being executed in the second clean room 12 while maintaining the room pressure of the first clean room 11 at the set room pressure, and returns the room pressure of the clean room 12 to atmospheric pressure.

  The room pressure control system 10A (pressure reduction control method) includes first and second clean rooms 11 and 12, an air supply duct 13 that supplies air to the clean rooms 11 and 12, and air is discharged from the clean rooms 11 and 12 to the outside. Exhaust duct 14, an air supply fan 15 that supplies air to the clean rooms 11 and 12, an exhaust fan 16 that exhausts air from the clean rooms 11 and 12, a first damper 17 for separation, and a second damper for separation 18, first and second chamber pressure sensors 19 and 20, and a controller 21 (control device).

  These clean rooms 11 and 12 have a predetermined volume of air-tight air-conditioned space surrounded by a ceiling 22, a floor 23, and a peripheral wall 24, and are partitioned from the outside by the ceiling 22, the floor 23, and the peripheral wall 24. The ceiling 22 is provided with an air supply port (not shown) for taking the air supplied from the air supply duct 13 into the clean rooms 11 and 12. The peripheral wall 24 is provided with an exhaust port (not shown) for taking the air of the clean rooms 11 and 12 into the exhaust duct 14. Although not shown, the peripheral wall 24 is provided with a door for entering and exiting the clean rooms 11 and 12 from outside and a door for going back and forth between the clean rooms 11 and 12. The door is made of airtight to keep the airtightness of the clean rooms 11, 12.

In the system 10A, the chamber pressures of the clean rooms 11 and 12 are strictly managed during the operation, and the chamber pressure is maintained at a preset chamber pressure. Note that there is no particular limitation on the set room pressure of the clean rooms 11 and 12, and the set room pressure can be freely determined according to the use and volume of the clean rooms 11 and 12. The set room pressure of the first and second clean rooms 11 and 12 may be lower than the outdoor air pressure. In this case, the system 10A implements a pressure increase control method for returning the room pressure of the clean room 12 to the atmospheric pressure.

  The air supply duct 13 is formed by a main duct 25 and two first and second branch ducts 26 and 27 branched from the main duct 25. The main duct 25 is provided with an air supply fan 15 (air supply blower) for supplying a predetermined amount of air to the clean rooms 11 and 12. The first branch duct 26 is connected to an air supply port (not shown) provided on the ceiling 22 of the first clean room 11 and connected to the clean room 11, and the second branch duct 27 is connected to the ceiling 22 of the second clean room 12. It connects to a facility air supply port (not shown) and is connected to the clean room 12. A separation first damper 17 is installed in the second branch duct 27.

  The exhaust duct 14 is formed of a main duct 28 and two first and second branch ducts 29 and 30 branched from the main duct 28. An exhaust fan 16 (exhaust fan) that exhausts a predetermined amount of air from the clean rooms 11 and 12 to the outside of the room is attached to the main duct 28. The first branch duct 29 is connected to an exhaust port (not shown) provided on the peripheral wall 24 of the first clean room 11 and connected to the clean room 11, and the second branch duct 30 is provided on the peripheral wall 24 of the second clean room 12. The exhaust port (not shown) is connected to the clean room 12.

  The air supply fan 15 forcibly supplies a predetermined amount of air to the first and second clean rooms 11 and 12. An inverter (not shown) is attached to the air supply fan 15, and a static pressure sensor (not shown) that measures the static pressure of the air supply duct 13 (main duct 25) is installed. The inverter of the air supply fan 15 is connected to the controller 21 via an interface 31 (wired or wireless), and outputs the air volume (wind speed) of the fan 15 to the controller 21 and is measured by a static pressure sensor while the fan 15 is operating. The measured static pressure of the supplied air duct 13 is output to the controller 21. The air supply fan 15 has its air volume changed by PID control or PD control of the inverter.

  The exhaust fan 16 forcibly exhausts a predetermined amount of air from the first and second clean rooms 11 and 12. An inverter (not shown) is attached to the exhaust fan 16, and a static pressure sensor (not shown) for measuring the static pressure of the exhaust duct 14 (main duct 28) is installed. The inverter of the exhaust fan 16 is connected to the controller 21 via the interface 31 and outputs the air volume (wind speed) of the fan 16 to the controller 21 and measures the exhaust duct 14 measured by the static pressure sensor during the operation of the fan 16. The static pressure is output to the controller 21. The air volume of the exhaust fan 16 is changed by PID control or PD control of the inverter.

  The first separating damper 17 and the second separating damper 18 include a controller (not shown), a modular roll motor (not shown), swirling blades 32 and 33 swirling by the driving force of the motor, and swirling blades. It is formed from an air flow path (not shown) that is opened and closed by turning of 32 and 33. The first damper 17 for separation adjusts the flow rate of air supplied to the second clean room 12 (interruption target chamber) according to the turning angle (damper opening) of the swirl vanes 32. The second damper 18 for separation adjusts the flow rate of air exhausted from the second clean room 12 (interruption target chamber) according to the turning angle (damper opening) of the swirl vane 33. The controllers of the dampers 17 and 18 are connected to the controller 21 via the interface 31 and output the turning angles of the turning blades 32 and 33 to the controller 21.

  The second chamber pressure sensor 20 is installed in the first clean room 11 and is connected to the controller 21 via the interface 31. The second chamber pressure sensor 20 measures the chamber pressure of the first clean room 11 and outputs the measured chamber pressure to the controller 21. The first chamber pressure sensor 19 is installed in the second clean room 12 and is connected to the controller 21 via the interface 31. The first chamber pressure sensor 19 measures the chamber pressure in the second clean room 12 and outputs the measured chamber pressure to the controller 21.

  The controller 21 is a computer having a central processing unit that performs arithmetic processing and a main storage device (memory) that can store various conditions. Although not shown, the controller 21 is connected to an input device for inputting various conditions and a display device for input confirmation via an interface. The controller 21 outputs an opening degree control signal to the first separating damper 17 and the second separating damper 18.

  The damper rolls 17 and 18 are rotated by a modular roll motor according to an opening degree control signal output from the controller 21 to the controller, whereby the swirl vanes 32 and 33 are swung at a predetermined angle. By changing the turning angle of the swirling blades 32 and 33, the opening degree of the air flow path of the dampers 17 and 18 is changed, and the flow rate of the air passing through the air flow path can be changed between fully open and fully closed. In addition, by fully closing the opening of the air flow path of the dampers 17 and 18, the flow rate of air passing through the air flow path can be reduced to 0, and the flow rate of air supplied to the second clean room 12 can be reduced. The flow rate of air exhausted from the second clean room 12 can be reduced to zero.

  The main storage device of the controller 21 stores the set room pressures of the first and second clean rooms 11 and 12. The main storage device of the controller 21 stores the upper limit chamber pressure and the lower limit chamber pressure of the second clean room 12. The upper limit chamber pressure is in the range of the set atmospheric pressure of the second clean room 12 +3 to +10 Pa, preferably +5 Pa. The lower limit chamber pressure is in the range of the set atmospheric pressure −3 to −10 Pa of the second clean room 12, preferably −5 Pa.

  The main storage device of the controller 21 stores the set static pressure of the air supply duct 13 (main duct 25) in which the air supply fan 15 is operating, and the exhaust duct 14 (main duct 28) in which the exhaust fan 16 is operating. The set static pressure is stored. The main storage device of the controller 21 stores the turning speed of the swirling blades 32 and 33 when the first separating damper and the second separating dampers 17 and 18 are closed.

  FIG. 2 is a diagram illustrating an example of a temporal change in the chamber pressure when the chamber pressure of the second clean room 12 is returned to the atmospheric pressure, and FIG. 3 is an example of a decompression control method executed in the system 10A. It is a flowchart to explain. In FIG. 2, the case where the measurement chamber pressure exceeds the upper limit chamber pressure and the case where the measurement chamber pressure falls below the lower limit chamber pressure are indicated by dotted lines.

  Based on FIGS. 2 and 3, the decompression control method performed by the system 10 </ b> A will be described as follows. When the system 10A is activated, the controller 21 maintains the air flow rate of the supply / exhaust fans 15 and 16 at the set air flow rate, and executes the room pressure control for the first and second clean rooms 11 and 12 (S-10).

  In this system 10A, as shown by an arrow X1, a predetermined amount of air is supplied from the supply duct 13 to the clean rooms 11 and 12 by the supply fan 15, and as shown by an arrow X2, the clean rooms 11 and 12 are supplied by the exhaust fan 16. A predetermined flow rate of air is discharged from the air to the exhaust duct 14. During the normal operation of the system 10A, the room pressures of the clean rooms 11 and 12 are held at the set room pressure by the controller 21. During the execution of the chamber pressure control, the controller 21 keeps the swivel angles (damper opening) of the swirl vanes 32 and 33 of the first and second dampers 17 and 18 in principle fully open.

  When performing fumigation processing, heat treatment, or the like on the second clean room 12 (interruption target room), the second clean room 12 is returned to atmospheric pressure while continuing room pressure control on the first clean room 11 (remaining target room). There is a need. When returning the second clean room 12 to atmospheric pressure, a room pressure control interruption signal is transmitted to the controller 21. The controller 21 determines whether to interrupt the room pressure control of the second clean room 12 depending on the presence or absence of the room pressure control interruption signal, and to return the room pressure of the clean room 12 to atmospheric pressure (S-11). When the room pressure control of the second clean room 12 is not interrupted (when there is no room pressure control interruption signal), the controller 21 continues the room pressure control for the first and second clean rooms 11 and 12 and performs normal operation of the system 10A. It continues and the chamber pressure of these clean rooms 11 and 12 is hold | maintained at a setting chamber pressure.

  During the operation of the system 10 </ b> A, the first and second chamber pressure sensors 19 and 20 measure the chamber pressure in the clean rooms 11 and 12, and output the measured measurement chamber pressure to the controller 21. The inverter of the air supply fan 15 outputs the air volume (wind speed) of the fan 15 to the controller 21, and outputs the measured static pressure of the air supply duct 13 (main duct 25) measured by the static pressure sensor to the controller 21. Yes. The inverter of the exhaust fan 16 outputs the air volume (wind speed) of the fan 16 to the controller 21, and outputs the measured static pressure of the exhaust duct 14 (main duct 28) measured by the static pressure sensor to the controller 21. The control units of the first and second dampers 17 and 18 output the turning angles of the turning blades 32 and 33 to the controller 21.

  When the room pressure control of the second clean room 12 is interrupted and the room pressure of the clean room 12 is returned to the atmospheric pressure (when the room pressure control interruption signal is present), the controller 21 performs a pressure reduction control method. The controller 21 compares the upper limit chamber pressure set in the clean room 12 with the measurement chamber pressure of the clean room 12 output from the first chamber pressure sensor 19, and the lower limit chamber pressure set in the clean room 12 and the first chamber pressure. The measurement room pressure of the clean room 12 output from the sensor 19 is compared (room pressure comparison means) (S-12), and it is determined whether the measurement room pressure of the clean room 12 is within the range of the upper and lower limit chamber pressures (S -13).

  As a result of comparing the upper and lower limit chamber pressures of the second clean room 12 and the measurement chamber pressure, the controller 21 has the measurement chamber pressure within the upper limit chamber pressure and the measurement chamber pressure within the lower limit chamber pressure. When the determination is made, a closing operation is performed in which the turning angle (damper opening) of the swirling blades 32 and 33 of the first and second dampers 17 and 18 is gradually closed from the open state (fully opened state) to the fully closed state at a constant turning speed. Execute (first closing operation means) (S-14).

  While executing the first closing operation means, the controller 21 controls the inverter of the fan 15 while comparing the set static pressure of the air supply fan 15 with the measured static pressure so that the measured static pressure becomes the set static pressure. In the state where the static pressure is kept constant, the air volume of air supplied from the fan 15 is decreased with a constant downward gradient, and it becomes unnecessary to supply air to the second clean room 12 from the air volume of air supplied from the fan 15. Decrease by the air volume (air supply fan control means) (S-14). Further, during the execution of the first closing operation means, the inverter of the fan 16 is controlled while comparing the set static pressure of the exhaust fan 16 and the measured static pressure so that the measured static pressure becomes the set static pressure. The air volume of the air exhausted by the fan 16 is decreased with a constant downward slope while the air pressure is kept constant, and the air volume of the air exhausted by the fan 15 is reduced by the air volume of unnecessary air exhausted from the second clean room 12. (Exhaust fan control means) (S-14). In the air supply fan control means and the exhaust fan control means, the controller 21 performs feedback control by PID control or PD control.

  The controller 21 compares the set room pressure of the first clean room 11 and the measurement room pressure of the clean room 11 output from the second chamber pressure sensor 20 during execution of the first closing operation means and the supply / exhaust fan control means. Then, it is determined whether the measurement chamber pressure of the clean room 11 is within the set chamber pressure range (S-15). As a result of comparing the set room pressure of the first clean room 11 and the measurement room pressure, the controller 21 determines that the first closing operation means and the supply / exhaust fan control means when the measurement room pressure of the clean room 11 is within the set room pressure. And continue (S-16).

  Next, the controller 21 determines whether or not the turning angle (damper opening) of the turning blades 32 and 33 of the first and second dampers 17 and 18 is fully closed (S-17). When the controller 21 determines that the swivel angles of the swirl vanes 32 and 33 of the dampers 17 and 18 are fully closed, it is assumed that the chamber pressure of the second clean room 12 has become atmospheric pressure, and the decompression control method of this system 10A Exit. Even after the chamber pressure in the second clean room 12 reaches atmospheric pressure, the chamber pressure in the first clean room 11 is maintained at the set chamber pressure. If the controller 21 determines in step 17 (S-17) that the turning angles of the swirling blades 32 and 33 of the dampers 17 and 18 are not fully closed, the controller 21 performs the procedure from step 12 (S-12).

  In step 17 (S-17), during execution of the first closing operation means, the controller 21 turns the turning angle (damper opening) of the turning blade 21 of the first separating damper 17 and the turning blade of the second separating damper 18. When one of the turning angles (damper opening) of 33 becomes 1 to 10%, the turning angles (damper opening) of the turning blades 32 and 33 of the dampers 17 and 18 ), The closing operation of the swirl blade of one damper is interrupted until the swivel angle (damper opening) of the swirl blade of the other damper reaches 1 to 10%, and the swivel angle of the swirl blade of the other damper is When the (damper opening) becomes 1 to 10%, the closing operation of the swirl blade of one damper is resumed (closing operation waiting / resuming means).

  For example, when the swivel angle of the swirl vane 32 of the first damper 17 is 1 to 10% with respect to 100% fully open, the swivel angle of the swirl blade 33 of the second damper 28 is 1 to 10 with respect to 100% fully open. If not, the closing operation of the swirl vane 32 of the first damper 17 is interrupted until the swirl angle of the swirl vane 33 of the second damper 18 becomes 1 to 10%, and the swirl vane 33 of the second damper 18 is interrupted. (For example, the turning angle of the turning blade 32 of the first damper 17 is 10% and the turning angle of the turning blade 33 of the second damper 18 is not only 10%, 8%, 5%, 3%, 1%, etc.), the closing operation of the swirl vanes 32 of the first damper 17 is resumed.

In step 15 (S-15), the controller 21 compares the set room pressure of the first clean room 11 and the measurement room pressure. As a result, if the measurement room pressure of the clean room 11 deviates from the set room pressure, a first closing operation means interrupting the supply and discharge air fan control means (S-18), perform the procedures from the step 15 (S-15). When the controller 21 determines in step 15 (S-15) that the room pressure of the clean room 11 has returned to the set room pressure as a result of comparing the set room pressure of the first clean room 11 and the measurement room pressure, the first The closing operation means and the supply / exhaust fan control means are restarted (S-16).

  When restarting the air supply / exhaust fan control means, the controller 21 increases the processing speed of the air supply fan control means after the restart than the processing speed of the air supply fan control means before the restart, and the exhaust fan control means before the restart. The processing speed of the exhaust fan control means after restarting is higher than the processing speed (processing speed increasing means). Examples of increasing the processing speed include changing the slope of P in PID control or PD control, or increasing the number of sampling times per unit time of the measurement chamber pressure. When the controller 21 restarts the supply / exhaust fan control means, the processing speed of the supply / exhaust fan control means may be the same as that before the restart.

  In step 13 (S-13), the controller 21 compares the upper and lower limit chamber pressures of the second clean room 12 and the measurement chamber pressures. As a result, as shown by the dotted line in FIG. If it is determined that the measurement chamber pressure exceeds the upper limit chamber pressure, the swivel angle (damper opening) of the swirl vane 32 of the first damper 17 is gradually changed from the open state (fully opened state) to the constant swirl speed. While performing the closing and closing operation, the closing operation of the turning angle (damper opening) of the turning blade 33 of the second damper 18 is temporarily stopped (second closing operation means) (S-19).

  While executing the second closing operation means, the controller 21 controls the inverter of the fan 15 while comparing the set static pressure of the supply fan 15 and the measured static pressure so that the measured static pressure becomes the set static pressure. In the state where the static pressure is kept constant, the air volume of air supplied from the fan 15 is decreased with a constant downward gradient, and it becomes unnecessary to supply air to the second clean room 12 from the air volume of air supplied from the fan 15. Decrease by the air volume (air supply fan control means) (S-19). Further, during the execution of the second closing operation means, the inverter of the fan 16 is controlled while comparing the set static pressure of the exhaust fan 16 and the measured static pressure so that the measured static pressure becomes the set static pressure. The air volume of the air exhausted by the fan 16 is decreased with a constant downward slope while the air pressure is kept constant, and the air volume of the air exhausted by the fan 15 is reduced by the air volume of unnecessary air exhausted from the second clean room 12. (Exhaust fan control means) (S-19).

  While executing the second closing operation means and the supply / exhaust fan control means, the controller 21 compares the set room pressure of the first clean room 11 with the measurement room pressure of the clean room 11 output from the second chamber pressure sensor 20. Then, it is determined whether the measurement chamber pressure of the clean room 11 is within the set chamber pressure range (S-20). When the controller 21 determines that the measurement chamber pressure in the clean room 11 is within the range of the set chamber pressure as a result of comparing the set chamber pressure in the first clean room 11 and the measurement chamber pressure, the second closing operation means and the supply / exhaust air The fan control means is continued (S-21), and the procedure from Step 12 (Step 12) is performed.

In step 20 (S-20), the controller 21 compares the set room pressure of the first clean room 11 with the measurement room pressure. As a result, if the measurement room pressure of the clean room 11 is out of the set room pressure, a second closing operation means interrupting the supply and discharge air fan control means (S-22), perform the procedures from the step 20 (S-20). When the controller 21 determines in step 20 (S-20) that the measured chamber pressure in the clean room 11 has returned to the set chamber pressure as a result of comparing the set chamber pressure in the first clean room 11 with the measured chamber pressure, The 2 closing operation means and the supply / exhaust fan control means are restarted (S-21).

  When restarting the air supply / exhaust fan control means, the controller 21 sets the processing speed of the air supply fan control means after restarting more than the processing speed of the air supply fan control means before restarting, as in step 16 (S-16). In addition, the processing speed of the exhaust fan control means after restart is increased (processing speed increase means) than the processing speed of the exhaust fan control means before restart. When the controller 21 restarts the supply / exhaust fan control means, the processing speed of the supply / exhaust fan control means may be the same as that before the restart.

  In step 13 (S-13), the controller 21 compares the upper and lower limit chamber pressures of the second clean room 12 and the measurement chamber pressures. As a result, as shown by the dotted line in FIG. If it is determined that the measurement chamber pressure is lower than the upper limit chamber pressure, the swivel angle (damper opening) of the swirl vane 33 of the second damper 18 is gradually changed from the open state (fully opened state) to the constant swirl speed. While performing the closing operation, the closing operation of the turning angle (damper opening) of the turning blade 32 of the first damper 17 is temporarily stopped (third closing operation means) (S-19).

  While executing the third closing operation means, the controller 21 controls the inverter of the fan 15 while comparing the set static pressure of the air supply fan 15 with the measured static pressure so that the measured static pressure becomes the set static pressure. In the state where the static pressure is kept constant, the air volume of air supplied from the fan 15 is decreased with a constant downward gradient, and it becomes unnecessary to supply air to the second clean room 12 from the air volume of air supplied from the fan 15. Decrease by the air volume (air supply fan control means) (S-19). Further, during the execution of the third closing operation means, the inverter of the fan 16 is controlled while comparing the set static pressure of the exhaust fan 16 and the measured static pressure so that the measured static pressure becomes the set static pressure. The air volume of the air exhausted by the fan 16 is decreased with a constant downward slope while the air pressure is kept constant, and the air volume of the air exhausted by the fan 15 is reduced by the air volume of unnecessary air exhausted from the second clean room 12. (Exhaust fan control means) (S-19).

  While executing the third closing operation means and the supply / exhaust fan control means, the controller 21 compares the set room pressure of the first clean room 11 with the measurement room pressure of the clean room 11 output from the second room pressure sensor 20. Then, it is determined whether the measurement chamber pressure of the clean room 11 is within the set chamber pressure range (S-20). When the controller 21 determines that the measurement chamber pressure in the clean room 11 is within the set chamber pressure as a result of comparing the set chamber pressure in the first clean room 11 and the measurement chamber pressure, the controller 21 and the supply / exhaust air The fan control means is continued (S-21), and the procedure from Step 12 (Step 12) is performed.

In step 20 (S-20), the controller 21 compares the set room pressure of the first clean room 11 with the measurement room pressure. As a result, if the measurement room pressure of the clean room 11 is out of the set room pressure, a third closing operation means interrupting the supply and discharge air fan control means (S-22), perform the procedures from the step 20 (S-20). In step 20 (S-20), the controller 21 compares the set room pressure of the first clean room 11 and the measurement room pressure. As a result, if the measurement room pressure of the clean room 11 returns to the set room pressure range, The closing operation means and the supply / exhaust fan control means are restarted (S-21).

  When restarting the air supply / exhaust fan control means, the controller 21 sets the processing speed of the air supply fan control means after restarting more than the processing speed of the air supply fan control means before restarting, as in step 16 (S-16). In addition, the processing speed of the exhaust fan control means after restart is increased (processing speed increase means) than the processing speed of the exhaust fan control means before restart. When the controller 21 restarts the supply / exhaust fan control means, the processing speed of the supply / exhaust fan control means may be the same as that before the restart.

  When the measurement chamber pressure of the second clean room 12 is within the upper and lower limit chamber pressures, the system 10A opens the swirl angles (damper opening) of the swirl vanes 32 and 33 of the first and second dampers 17 and 18. Since the closing operation of gradually closing from the fully opened state to fully closing is executed, when the room pressure control of the second clean room 12 is interrupted, the supply air flow rate and the exhaust air flow rate of the first clean room 11 and the second clean room 12 The room pressure of the clean room 11 and 12 does not become excessively negative or positive, and the room pressure of the second clean room 12 is maintained while maintaining the room pressure of the first clean room 11 at the set room pressure. The pressure can be returned to atmospheric pressure smoothly and in a short time. When the system pressure control of the second clean room 12 is interrupted, the system 10A can prevent the outflow of contaminants from the first clean room 11 and the second clean room 12, and the dust and Inflow of unnecessary substances such as fine powder, gas and bacteria can be prevented.

  When the measurement chamber pressure of the second clean room 12 exceeds the upper limit chamber pressure, the system 10A performs the closing operation of the turning angle of the turning blade 32 of the first damper 17 and the turning of the turning blade 33 of the second damper 18 Since the angle closing operation is temporarily stopped, it is possible to prevent the measurement chamber pressure of the second clean room 12 from further rising, and the clean room 12 is returned to the set room pressure range while returning the measurement chamber pressure of the clean room 12 to the range of the set room pressure. The chamber pressure can be returned to atmospheric pressure smoothly. When the measurement chamber pressure falls below a predetermined lower limit chamber pressure, the system 10A closes the turning angle of the swirling blade 32 of the first damper 17 while performing the closing operation of the swirling blade 33 of the second damper 18. Since the operation is temporarily stopped, the measurement chamber pressure of the second clean room 12 can be prevented from further decreasing, and the measurement chamber pressure of the clean room 12 is returned to within the range of the set chamber pressure while the chamber pressure of the clean room 12 is restored. Can be returned to atmospheric pressure smoothly.

  FIG. 4 is a configuration diagram of a room pressure control system 10B shown as another example, and FIG. 5 is a flowchart for explaining an example of a decompression control method executed in the system 10B. FIG. 6 is a flowchart continuing from FIG. This system 10B is different from that of FIG. 1 in that it has constant air volume units 34 and 35 and high-speed control dampers 36 and 37, and other configurations are the same as the system 10A of FIG. By attaching the same reference numerals, detailed description of the other components of the system 10B is omitted.

  A room pressure control system 10B that performs the pressure reduction control method includes a first and second clean rooms 11, 12, an air supply duct 13 that supplies air to the clean rooms 11, 12, and air from the clean rooms 11, 12 to the outside. An exhaust duct 14 to be discharged, an air supply fan 15 for supplying air to the clean rooms 11 and 12, an exhaust fan 16 for exhausting air from the clean rooms 11 and 12, a first damper 17 for separation, and a second for separation Damper 18, first and second chamber pressure sensors 19, 20, controller 21 (control device), first and second constant air volume units 34, 35 (CAV), and first and second high-speed control dampers 36 , 37 (PCD) (control damper).

  The first constant air volume unit 34 is installed in the first branch duct 26 (air supply duct 13) connected to the first clean room 11. The second constant air volume unit 35 is installed in the second branch duct 27 (air supply duct 13) connected to the second clean room 12. The first and second constant air volume units 34 and 35 are formed of a motor damper and a controller, and a housing for housing them (not shown). The controller of the second constant air volume unit 35 is connected to the controller 21 via the interface 31. The dampers of these units 34 and 35 are formed by a modular roll motor (rotary machine), swirling blades that swirl via the driving force of the motor, and an air flow path that is opened and closed by swirling of the swirling blades. In these units 34 and 35, the modulation roll motor is rotated by the control signal from the controller, and the swirl vanes are swung at a predetermined angle.

  The controllers of the constant airflow units 34 and 35 are microprocessors having a central processing unit that performs arithmetic processing and a storage unit that can store various conditions. The controllers of the constant air volume units 34 and 35 adjust the opening degree of the blades with respect to the air flow path so that the amount of air passing through the air flow path becomes a preset value. The storage unit of the controller of the constant air volume units 34 and 35 stores the correlation between the set atmospheric pressure of the ducts 26 and 27 and the air passage amount passing through the air flow path of the constant air volume units 34 and 35. The correlation between the air passage amount corresponding to the above and the turning angle (damper opening degree) of the turning blade of the damper corresponding to the air passage amount is stored. During the normal operation of the system 10B, the units 34 and 35 adjust the amount of air passing through the units 34 and 35 with respect to fluctuations in the internal pressure of the branch ducts 26 and 27, and supply the air to the clean rooms 11 and 12. Keep the amount constant.

  The first high speed control damper 36 is installed in the first branch duct 29 (exhaust duct 14) connected to the first clean room 11. The second high speed control damper 37 is installed in the second branch duct 30 (exhaust duct 14) connected to the second clean room 12. The control dampers 36 and 37 are opened and closed by a controller (not shown), a modular roll motor (not shown), swirling blades 38 and 39 swirling by the driving force of the motor, and swirling of the swirling blades 38 and 39. The air flow path (not shown) is formed.

  A third chamber pressure sensor 40 that measures the chamber pressure of the first clean room 11 is connected to the controller of the control damper 36. The room pressure sensor 40 measures the room pressure of the first clean room 11 and outputs the measured room pressure to the control unit of the control damper 36. A fourth chamber pressure sensor 41 that measures the chamber pressure of the second clean room 12 is connected to the controller of the control damper 37. The room pressure sensor 41 measures the room pressure of the second clean room 12 and outputs the measured room pressure to the controller of the control damper 37.

  The controllers of the control dampers 36 and 37 are microprocessors having a central processing unit that performs arithmetic processing and a storage unit that can store various conditions. The controllers of the control dampers 36 and 37 adjust the opening degree of the blades with respect to the air flow path so that the amount of air passing through the air flow path becomes a preset value. The storage unit of the controller of the control dampers 36 and 37 stores the correlation between the set atmospheric pressure of the clean rooms 11 and 12 and the amount of air passing through the air flow paths of the dampers 36 and 37, and corresponds to the set atmospheric pressure. The correlation between the air passing amount and the turning angle (damper opening) of the swing blades 38 and 39 of the damper corresponding to the air passing amount is stored.

  The first high-speed control damper 36 is exhausted from the first clean room 11 when the modulated roll motor is rotated by the opening control signal output from the controller, and the swirl vane 38 is swung to a predetermined angle (damper opening). Adjust the air flow rate. The second high-speed control damper 37 is exhausted from the second clean room 12 when the modulated roll motor is rotated by the opening control signal output from the controller and the swirl vane 39 is swung to a predetermined angle (damper opening). Adjust the air flow rate. In the normal operation of the system 10B, the control dampers 36 and 37 maintain the room pressures of the clean rooms 11 and 12 within the set room pressure range.

  Based on FIGS. 5 and 6, the decompression control method performed by the system 10 </ b> B will be described as follows. When the system 10B is activated, the controller 21 maintains the air flow rate of the supply / exhaust fans 15 and 16 at the set air flow rate, and executes the room pressure control for the first and second clean rooms 11 and 12 (S-30). During the normal operation of the system 10A, the room pressures of the clean rooms 11 and 12 are held at the set room pressure by the controller 21.

  During normal operation of the system 10B, even if pressure fluctuations occur in the air flowing through the branch ducts 25 and 27 (the air supply duct 13), the air passing amount of the ducts 25 and 27 is constant by the constant air volume units 34 and 35. And a constant amount of air is always supplied to the clean rooms 11 and 12. Even if the measurement chamber pressure of the clean rooms 11 and 12 is out of the set chamber pressure range, the flow rate of the air exhausted from the clean rooms 11 and 12 is adjusted by the first and second high-speed control dampers 36 and 37, and the clean room The chamber pressures 11 and 12 are maintained within the set chamber pressure range. During the execution of the room pressure control (during normal operation), the controller 21 keeps the turning angles (damper opening degrees) of the turning blades 32 and 33 of the first and second dampers 17 and 18 fully open.

  The controller 21 determines whether to interrupt the room pressure control of the second clean room 12 and return the room pressure of the clean room 12 to atmospheric pressure (S-31). When the room pressure control of the second clean room 12 is not interrupted (when there is no room pressure control interruption signal), the controller 21 continues the room pressure control for the first and second clean rooms 11 and 12 and performs the normal operation of the system 10B. It continues and the chamber pressure of these clean rooms 11 and 12 is hold | maintained at a setting chamber pressure.

  When the room pressure control of the second clean room 12 is interrupted and the room pressure of the clean room 12 is returned to the atmospheric pressure (when the room pressure control interruption signal is present), the controller 21 is determined when the first to third closing operation means are executed. A control signal is output to the controller of the air volume unit 35, and the flow rate of the air supplied from the unit 35 to the clean room 12 is maintained at the flow rate immediately before the execution of the first to third closing operation means (S-32). The constant air volume unit 34 keeps the amount of air supplied to the clean room 11 constant (S-33). Further, the high speed control dampers 36 and 37 maintain the chamber pressure of the clean rooms 11 and 12 within the set chamber pressure range (S-34).

  The controller 21 compares the upper limit chamber pressure set in the second clean room 12 with the measurement chamber pressure of the clean room 12 output from the first chamber pressure sensor 19, and the lower limit chamber pressure set in the clean room 12 and the first chamber pressure. The measurement room pressure of the clean room 12 output from the room pressure sensor 19 is compared (room pressure comparison means) (S-35), and it is determined whether the measurement room pressure of the clean room 12 is within the range of the upper and lower limit room pressures. (S-36).

  As a result of comparing the upper and lower limit chamber pressures of the second clean room 12 and the measurement chamber pressure, the controller 21 has the measurement chamber pressure within the upper limit chamber pressure and the measurement chamber pressure within the lower limit chamber pressure. If it is determined, a closing operation is performed in which the turning angle (damper opening) of the swirling blades 32 and 33 of the first and second dampers 17 and 18 is gradually closed from the open state (fully opened state) to the fully closed state at a constant turning speed. Execute (first closing operation means) (S-37).

  While executing the first closing operation means, the controller 21 controls the inverter of the fan 15 while comparing the set static pressure of the air supply fan 15 with the measured static pressure so that the measured static pressure becomes the set static pressure. In the state where the static pressure is kept constant, the air volume of the air supplied from the fan 15 is decreased with a constant downward gradient (air supply fan control means) (S-37). Further, during the execution of the first closing operation means, the inverter of the fan 16 is controlled while comparing the set static pressure of the exhaust fan 16 and the measured static pressure so that the measured static pressure becomes the set static pressure. Is maintained constant, the air volume of the air exhausted by the fan 16 is decreased with a constant downward gradient (exhaust fan control means) (S-37).

  While executing the first closing operation means and the supply / exhaust fan control means, the controller 21 compares the set room pressure of the first clean room 11 with the measurement room pressure, and the measurement room pressure of the clean room 11 falls within the range of the set room pressure. (S-38). As a result of comparing the set room pressure of the first clean room 11 and the measurement room pressure, the controller 21 determines that the first closing operation means and the supply / exhaust fan control means when the measurement room pressure of the clean room 11 is within the set room pressure. And continue (S-39).

  The controller 21 determines whether or not the turning angle (damper opening) of the turning blades 32 and 33 of the first and second dampers 17 and 18 is fully closed (S-40). When the controller 21 determines that the swivel angles of the swirl vanes 32 and 33 of the dampers 17 and 18 are fully closed, it is assumed that the chamber pressure of the second clean room 12 has become atmospheric pressure, and the decompression control method of this system 10B Exit. Even after the chamber pressure in the second clean room 12 reaches atmospheric pressure, the chamber pressure in the first clean room 11 is maintained at the set chamber pressure. If the controller 21 determines in step 40 (S-40) that the swivel angles of the swirl vanes 32 and 33 of the dampers 17 and 18 are not fully closed, the controller 21 performs the procedure from step 35 (S-35).

  In step 40 (S-40), during execution of the first closing operation means, the controller 21 turns the turning angle (damper opening) of the turning blade 21 of the first separating damper 17 and the turning blade of the second separating damper 18. When one of the turning angles (damper opening) of 33 becomes 1 to 10%, the turning angles (damper opening) of the turning blades 32 and 33 of the dampers 17 and 18 ), The closing operation of the swirl blade of one damper is interrupted until the swivel angle (damper opening) of the swirl blade of the other damper reaches 1 to 10%, and the swivel angle of the swirl blade of the other damper is When the (damper opening) becomes 1 to 10%, the closing operation of the swirl blade of one damper is resumed (closing operation waiting / resuming means).

  In step 38 (S-38), the controller 21 compares the set room pressure of the first clean room 11 and the measurement room pressure. As a result, if the measurement room pressure of the clean room 11 is out of the set room pressure, The first closing operation means and the air supply fan control means are interrupted (S-41). In this case, the high speed control damper 36 returns the chamber pressure of the first clean room 11 to the set chamber pressure (S-42), and the controller 21 executes the procedure from step 38 (S-38).

  In step 38 (S-38), the controller 21 determines that the room pressure of the clean room 11 has been returned to within the range of the set room pressure by the control damper 36 as a result of comparing the set room pressure of the first clean room 11 and the measurement room pressure. Then, the first closing operation means and the supply / exhaust fan control means are restarted (S-39).

  When restarting the air supply / exhaust fan control means, the controller 21 increases the processing speed of the air supply fan control means after the restart than the processing speed of the air supply fan control means before the restart, and the exhaust fan control means before the restart. The processing speed of the exhaust fan control means after restarting is higher than the processing speed (processing speed increasing means). When the controller 21 restarts the supply / exhaust fan control means, the processing speed of the supply / exhaust fan control means may be the same as that before the restart.

  In step 36 (S-36), the controller 21 compares the upper and lower limit chamber pressures of the second clean room 12 and the measurement chamber pressures. As a result, the measurement chamber pressure is not within the upper and lower limit chamber pressures (refer to FIG. 2). When it is determined that the measurement chamber pressure exceeds the upper limit chamber pressure, the closing operation of gradually closing the turning angle (damper opening) of the swirl vane 32 of the first damper 17 from the open state (fully opened state) at a constant turning speed is performed. While performing, the closing operation of the turning angle (damper opening) of the turning blade 33 of the second damper 18 is temporarily stopped (second closing operation means) (S-43).

  While executing the second closing operation means, the controller 21 controls the inverter of the fan 15 while comparing the set static pressure of the supply fan 15 and the measured static pressure so that the measured static pressure becomes the set static pressure. In the state where the static pressure is kept constant, the air volume of the air supplied from the fan 15 is decreased with a constant downward gradient (air supply fan control means) (S-43). Further, during the execution of the second closing operation means, the inverter of the fan 16 is controlled while comparing the set static pressure of the exhaust fan 16 and the measured static pressure so that the measured static pressure becomes the set static pressure. Is kept constant, the air volume of the air exhausted by the fan 16 is decreased with a constant downward gradient (exhaust fan control means) (S-43).

  While executing the second closing operation means and the supply / exhaust fan control means, the controller 21 compares the set room pressure of the first clean room 11 with the measurement room pressure, and the measurement room pressure of the clean room 11 falls within the range of the set room pressure. (S-44). When the controller 21 determines that the measurement chamber pressure in the clean room 11 is within the range of the set chamber pressure as a result of comparing the set chamber pressure in the first clean room 11 and the measurement chamber pressure, the second closing operation means and the supply / exhaust air The fan control means is continued (S-45), and the procedure from step 35 (step 35) is performed.

  In step 44 (S-44), as a result of comparing the set room pressure of the first clean room 11 and the measurement room pressure, the controller 21 is executing if the measurement room pressure of the clean room 11 is out of the set room pressure range. The second closing operation means and the air supply fan control means are interrupted (S-46). In this case, the high speed control damper 36 returns the chamber pressure of the first clean room 11 to the set chamber pressure (S-47), and the controller 21 executes the procedure from step 44 (S-44).

In step 44 (S-44), as a result of comparing the set room pressure of the first clean room 11 and the measurement room pressure, the controller 21 determines that the room pressure of the clean room 11 has returned to within the range of the set room pressure by the control damper 36. Then, the second closing operation means and the supply / exhaust fan control means are restarted (S-45).

  When restarting the supply / exhaust fan control means, the controller 21 sets the processing speed of the supply air fan control means after the restart to be higher than the processing speed of the supply air fan control means before the restart, as in step 39 (S-39). In addition, the processing speed of the exhaust fan control means after restart is increased (processing speed increase means) than the processing speed of the exhaust fan control means before restart. When the controller 21 restarts the supply / exhaust fan control means, the processing speed of the supply / exhaust fan control means may be the same as that before the restart.

  In step 36 (S-36), the controller 21 compares the upper and lower limit chamber pressures of the second clean room 12 and the measurement chamber pressure. As a result, the measurement chamber pressure is not within the upper and lower limit chamber pressures, and the measurement chamber pressure is the upper limit. When it is determined that the pressure is lower than the chamber pressure, the turning angle (damper opening) of the swirl vane 33 of the second damper 18 is gradually closed from the open state (fully opened state) to the constant swirl speed, The closing operation of the turning angle (damper opening) of the turning blade 32 of the 1 damper 17 is temporarily stopped (third closing operation means) (S-43).

  While executing the third closing operation means, the controller 21 controls the inverter of the fan 15 while comparing the set static pressure of the air supply fan 15 with the measured static pressure so that the measured static pressure becomes the set static pressure. In the state where the static pressure is kept constant, the air volume of the air supplied from the fan 15 is decreased with a constant downward gradient (air supply fan control means) (S-43). Further, during the execution of the third closing operation means, the inverter of the fan 16 is controlled while comparing the set static pressure of the exhaust fan 16 and the measured static pressure so that the measured static pressure becomes the set static pressure. Is kept constant, the air volume of the air exhausted by the fan 16 is decreased with a constant downward gradient (exhaust fan control means) (S-43).

  While executing the third closing operation means and the supply / exhaust fan control means, the controller 21 compares the set room pressure of the first clean room 11 with the measurement room pressure, and the measurement room pressure of the clean room 11 falls within the range of the set room pressure. (S-44). When the controller 21 determines that the measurement chamber pressure in the clean room 11 is within the set chamber pressure as a result of comparing the set chamber pressure in the first clean room 11 and the measurement chamber pressure, the controller 21 and the supply / exhaust air The fan control means is continued (S-45), and the procedure from step 35 (step 35) is performed.

  In step 44 (S-44), as a result of comparing the set room pressure of the first clean room 11 and the measurement room pressure, the controller 21 is executing if the measurement room pressure of the clean room 11 is out of the set room pressure range. The third closing operation means and the air supply fan control means are interrupted (S-46). In this case, the high speed control damper 36 returns the chamber pressure of the first clean room 11 to the set chamber pressure (S-47), and the controller 21 executes the procedure from step 44 (S-44).

In step 44 (S-44), as a result of comparing the set room pressure of the first clean room 11 and the measurement room pressure, the controller 21 determines that the room pressure of the clean room 11 has returned to within the range of the set room pressure by the control damper 36. Then, the third closing operation means and the supply / exhaust fan control means are restarted (S-45).

  When restarting the supply / exhaust fan control means, the controller 21 sets the processing speed of the supply air fan control means after the restart to be higher than the processing speed of the supply air fan control means before the restart, as in step 39 (S-39). In addition, the processing speed of the exhaust fan control means after restart is increased (processing speed increase means) than the processing speed of the exhaust fan control means before restart. When the controller 21 restarts the supply / exhaust fan control means, the processing speed of the supply / exhaust fan control means may be the same as that before the restart.

  This system 10B has the following effects in addition to the effects of the system 10A of FIG. The system 10B uses the first and second high speed control dampers 36 and 37 to maintain the room pressures of the clean rooms 11 and 12 at the set room pressure while the first to third closing operation means are being executed. When the room pressure control is interrupted, the balance between the supply air flow rate and the exhaust air flow rate of the clean rooms 11 and 12 is not lost, and the chamber pressures of the clean rooms 11 and 12 are not excessively negative or positive. The room pressure of the clean room 12 can be smoothly returned to the atmospheric pressure while maintaining the room pressure of the clean room 11 at the set room pressure. The system 10B maintains the chamber pressures of the clean rooms 11 and 12 at the set chamber pressures by the control dampers 36 and 37, and the swirl angles (dampers) of the swirl vanes of the first damper 17 and the second damper 18 in the first closing operation means. Therefore, when the control of the room pressure of the clean room 12 is interrupted, the room pressure of the clean room 12 can be returned to the atmospheric pressure in a short time.

  In the system 10B, when the air flow rate changes, when the constant air flow unit 35 is operated so as to keep the flow rate constant, the room pressure of the clean room 12 is predetermined when the room pressure control of the clean room 12 is interrupted. The room pressure of the clean room 12 cannot be returned to the atmospheric pressure smoothly and in a short time, but the flow rate of air flowing into the clean room 12 from the constant air volume unit 35 is greatly reduced. Since the flow rate immediately before the execution of the first to third closing operation means is maintained, even if there is a change in the air flow rate, the unit 35 of the clean room 12 does not operate, and the unit 35 reduces the room pressure of the clean room 12. There is no hindrance to returning to the atmospheric pressure, and the room pressure of the clean room 12 is returned to the atmospheric pressure smoothly and in a short time. Door can be.

DESCRIPTION OF SYMBOLS 10A Room pressure control system 10B Room pressure control system 11 1st clean room 12 2nd clean room 13 Supply air duct 14 Exhaust duct 15 Supply air fan 16 Exhaust fan 17 Separation first damper 18 Separation second damper 19 First chamber pressure sensor 20 Second chamber pressure sensor 21 Controller 34 First constant air volume unit 35 Second constant air volume unit 36 First high speed control damper 37 Second high speed control damper

Claims (13)

At least two target chambers in which the chamber pressure control is performed, an air supply fan for supplying air to the target chambers, and an exhaust fan for exhausting air from the target chambers, and the chamber pressure in the target chambers In the chamber pressure control system that returns the chamber pressure of the chamber to be interrupted to interrupt atmospheric pressure,
A separation damper capable of adjusting a flow rate of air supplied to the interruption target chamber and a separation second damper capable of adjusting a flow rate of air exhausted from the interruption target chamber. A controller for operating the damper opening of the first damper for separation and the second damper for separation based on the chamber pressure of the chamber to be interrupted, and measuring the chamber pressure of the chamber to be interrupted and measuring the measured chamber pressure A first chamber pressure sensor that outputs to the controller,
When interrupting the chamber pressure control of the interruption target chamber, the controller compares the upper and lower limit chamber pressures of the interruption target chamber with the measurement chamber pressure of the interruption target chamber output from the first chamber pressure sensor. If the measurement chamber pressure is within the range of the upper and lower limit chamber pressures as a result of comparing the pressure comparison means with the upper and lower limit chamber pressures and the measurement chamber pressures of the chambers to be interrupted, the dampers of the first and second dampers First closing operation means for performing a closing operation for gradually closing the opening degree from the open state to fully closing, and the closing operation of the damper opening degree of the first damper when the measurement chamber pressure exceeds the upper limit chamber pressure And a second closing operation means for temporarily stopping the closing operation of the damper opening of the second damper, and when the measurement chamber pressure falls below the lower limit chamber pressure, the damper opening of the second damper The damper opening of the first damper while performing the closing operation of Chamber pressure control system and executes the third closing operation means for temporarily stopping the closing operation.   When the measurement chamber pressure that has exceeded the upper limit chamber pressure no longer exceeds the upper limit chamber pressure, the controller interrupts the second closing operation unit and restarts the first closing operation unit, and the lower limit chamber pressure 2. The room pressure control system according to claim 1, wherein when the measurement chamber pressure that has fallen below has become less than the lower limit chamber pressure, the third closing operation unit is interrupted and the first closing operation unit is resumed.   The chamber pressure control system includes a control damper that adjusts a flow rate of air exhausted from the target chambers and maintains a chamber pressure of each target chamber at a set chamber pressure. During the execution of the third closing operation means, the flow rate of the air exhausted from the target chambers is adjusted in order to maintain the chamber pressures of the target chambers and the remaining target chambers excluding the target chambers at the set chamber pressures The room pressure control system according to claim 1 or 2.   The chamber pressure control system includes a second chamber pressure sensor that measures a chamber pressure of a remaining target chamber excluding the chamber to be interrupted and outputs the measured chamber pressure to the controller. During execution of the third closing operation means, the set chamber pressure of the remaining target chamber is compared with the measurement chamber pressure of the remaining target chamber output from the second chamber pressure sensor, and the remaining target chamber is measured. As a result of comparing the set chamber pressure with the measurement chamber pressure, if the measurement chamber pressure of the remaining target chamber deviates from the set chamber pressure, the first to third closing operation means are interrupted, and the remaining target chamber The room pressure control system according to any one of claims 1 to 3, wherein when the measurement chamber pressure returns to the set chamber pressure, the first to third closing operation means are resumed.   The room pressure control system includes a constant air volume unit that maintains a constant flow rate with respect to a flow rate change of air supplied to the interruption target chamber and the remaining target chambers excluding the interruption target chamber, When the first to third closing operation means are executed, the flow rate of air flowing from the constant air volume unit into the interruption target chamber is maintained at a flow rate immediately before the execution of the first to third closing operation means. The room pressure control system according to claim 4.   The controller controls the inverter of the air supply fan during execution of the first to third closing operation means, and maintains the static pressure of the air supplied from the air supply fan in a constant state. The room pressure control system according to any one of claims 1 to 5, further comprising an air supply fan control means for reducing an air volume of air supplied from the fan with a predetermined downward gradient.   The controller compares the set chamber pressure of the remaining target chamber with the measurement chamber pressure of the remaining target chamber output from the second chamber pressure sensor while executing the supply fan control means, As a result of comparing the set chamber pressure of the remaining target chamber and the measurement chamber pressure, if the measurement chamber pressure of the remaining target chamber deviates from the set chamber pressure, the supply fan control means is interrupted, and the remaining target chamber is 7. The room pressure control system according to claim 6, wherein when the measured chamber pressure of the chamber returns to the set chamber pressure, the air supply fan control means is resumed.   When the measurement chamber pressure of the remaining target chamber returns to the set chamber pressure and the supply fan control unit is restarted, the controller controls the supply air after restarting more than the processing speed of the supply fan control unit before restarting. The room pressure control system according to claim 7, wherein the processing speed of the air fan control means is increased.   The controller controls the inverter of the exhaust fan during execution of the first to third closing operation means, and exhausts the exhaust fan from the exhaust fan while maintaining a constant static pressure of the air exhausted from the exhaust fan. The room pressure control system according to any one of claims 1 to 8, further comprising an exhaust fan control means for reducing the air volume with a predetermined downward gradient. The controller compares the set room pressure of the remaining target chamber with the measurement chamber pressure of the remaining target chamber output from the second chamber pressure sensor during execution of the exhaust fan control means, and As a result of comparing the set chamber pressure of the target chamber with the measurement chamber pressure, if the measurement chamber pressure of the remaining target chamber deviates from the set chamber pressure, the exhaust fan control means is interrupted, and the remaining target chamber The room pressure control system according to claim 9 , wherein when the measurement chamber pressure returns to the set chamber pressure, the exhaust fan control means is restarted.   The controller, when the measurement chamber pressure of the remaining target chamber returns to the set chamber pressure and restarts the exhaust fan control means, the exhaust fan control after the restart than the processing speed of the exhaust fan control means before the restart. The room pressure control system according to claim 10, wherein the processing speed of the means is increased.   2. The upper limit chamber pressure is in a range of +3 to +10 Pa of a set chamber pressure of the chamber to be interrupted, and the lower limit chamber pressure is in a range of −3 to −10 Pa of a set chamber pressure of the chamber to be interrupted. The room pressure control system according to any one of claims 11 to 11.   While the first to third closing operation means are being executed, the controller has a damper opening of one of the damper opening of the first separating damper and the damper opening of the second separating damper. -10%, the closing operation of the damper opening of one damper is interrupted until the damper opening of the other damper reaches 1-10%, and the damper opening of the other damper is 1-10% The room pressure control system according to any one of claims 1 to 12, wherein the operation of closing the damper opening degree of one of the dampers is resumed when the value becomes.

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