JP5115872B2 - 角度測定方法及び角度測定システム - Google Patents

角度測定方法及び角度測定システム Download PDF

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Publication number
JP5115872B2
JP5115872B2 JP2010241173A JP2010241173A JP5115872B2 JP 5115872 B2 JP5115872 B2 JP 5115872B2 JP 2010241173 A JP2010241173 A JP 2010241173A JP 2010241173 A JP2010241173 A JP 2010241173A JP 5115872 B2 JP5115872 B2 JP 5115872B2
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JP
Japan
Prior art keywords
angle
encoder
rotary encoder
rotation
rotary
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Active
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JP2010241173A
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English (en)
Japanese (ja)
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JP2012093252A (ja
JP2012093252A5 (enExample
Inventor
徹 清水
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Seimitsu Co Ltd
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Tokyo Seimitsu Co Ltd
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Publication date
Priority to JP2010241173A priority Critical patent/JP5115872B2/ja
Application filed by Tokyo Seimitsu Co Ltd filed Critical Tokyo Seimitsu Co Ltd
Priority to EP15156327.7A priority patent/EP2905583B1/en
Priority to EP15152832.0A priority patent/EP2899513B1/en
Priority to EP16181443.9A priority patent/EP3104130A1/en
Priority to EP17163605.3A priority patent/EP3214414A3/en
Priority to EP11186603.4A priority patent/EP2447677B1/en
Publication of JP2012093252A publication Critical patent/JP2012093252A/ja
Publication of JP2012093252A5 publication Critical patent/JP2012093252A5/ja
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Publication of JP5115872B2 publication Critical patent/JP5115872B2/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
    • G01D5/24471—Error correction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
    • G01D5/24471—Error correction
    • G01D5/24485—Error correction using other sensors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/266—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light by interferometric means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
JP2010241173A 2010-10-27 2010-10-27 角度測定方法及び角度測定システム Active JP5115872B2 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2010241173A JP5115872B2 (ja) 2010-10-27 2010-10-27 角度測定方法及び角度測定システム
EP15152832.0A EP2899513B1 (en) 2010-10-27 2011-10-26 Rotary encoder with laser interferometer for determining position changes of the stator
EP16181443.9A EP3104130A1 (en) 2010-10-27 2011-10-26 Angle measuring method and angle measuring system
EP17163605.3A EP3214414A3 (en) 2010-10-27 2011-10-26 Rotary encoder with laser interferometer for determining position changes of the stator
EP15156327.7A EP2905583B1 (en) 2010-10-27 2011-10-26 Angle measuring method and angle measuring system
EP11186603.4A EP2447677B1 (en) 2010-10-27 2011-10-26 Angle measuring method and angle measuring system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010241173A JP5115872B2 (ja) 2010-10-27 2010-10-27 角度測定方法及び角度測定システム

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2012230847A Division JP5187607B2 (ja) 2012-10-18 2012-10-18 角度測定方法及び角度測定システム

Publications (3)

Publication Number Publication Date
JP2012093252A JP2012093252A (ja) 2012-05-17
JP2012093252A5 JP2012093252A5 (enExample) 2012-09-06
JP5115872B2 true JP5115872B2 (ja) 2013-01-09

Family

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JP2010241173A Active JP5115872B2 (ja) 2010-10-27 2010-10-27 角度測定方法及び角度測定システム

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EP (5) EP3214414A3 (enExample)
JP (1) JP5115872B2 (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6090656B2 (ja) * 2012-02-15 2017-03-08 株式会社東京精密 回転角度測定装置及び回転角度測定方法
WO2013122037A1 (ja) * 2012-02-15 2013-08-22 株式会社東京精密 回転角度測定装置及び回転角度測定方法
US9134145B2 (en) 2013-04-03 2015-09-15 Tokyo Seimitsu Co., Ltd. Angle measuring method and angle measuring system
EP3452789B1 (en) * 2016-05-03 2020-02-19 Arges GmbH Optical rotation angle measuring system
JP7034822B2 (ja) * 2018-05-01 2022-03-14 新東エスプレシジョン株式会社 角度測定システム
CN113639674B (zh) * 2021-10-13 2022-01-14 成都宏明电子股份有限公司 基于光折射原理的非接触式旋转电位器
CN116500561A (zh) * 2023-04-19 2023-07-28 湖北三江航天险峰电子信息有限公司 一种下视角可实时精确调节的导引头挂飞装置
CN119533268B (zh) * 2024-06-20 2025-10-10 中国电子科技集团公司第三十八研究所 一种测角系统及其精度控制方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE396108B (sv) * 1975-03-12 1977-09-05 Akermans Verkstad Ab Vinkelmetdon for grevarmen vid grevmaskiner
GB9013390D0 (en) * 1990-06-15 1990-08-08 Renishaw Plc Method and apparatus for measurement of angular displacement
GB9119304D0 (en) * 1991-09-10 1991-10-23 Renishaw Transducer Syst Method and apparatus for calibration of angular displacement
US5508806A (en) * 1995-02-13 1996-04-16 Hewlett-Packard Company Apparatus and method for making rotary calibrations of a machine tool table
JP3698796B2 (ja) * 1996-03-12 2005-09-21 オリンパス株式会社 角度検出装置、及び頭部搭載型映像表示装置
JP3192992B2 (ja) * 1996-08-27 2001-07-30 株式会社東京精密 工作機械の角度割出精度測定方法及びシステム
JP2005292037A (ja) * 2004-04-02 2005-10-20 Tokyo Seimitsu Co Ltd 角度測定装置
NL1033040C2 (nl) * 2006-12-12 2008-06-18 Iac Geometrische Ingenieurs B Een methode voor de kalibratie van de hoek waarover een object geroteerd is om een rotatie-as zoals van een rondtafel.
WO2013122037A1 (ja) * 2012-02-15 2013-08-22 株式会社東京精密 回転角度測定装置及び回転角度測定方法

Also Published As

Publication number Publication date
EP2899513A1 (en) 2015-07-29
EP2447677A2 (en) 2012-05-02
EP3214414A2 (en) 2017-09-06
EP2899513B1 (en) 2017-05-10
EP2447677A3 (en) 2014-05-21
EP2905583B1 (en) 2016-12-07
JP2012093252A (ja) 2012-05-17
EP2905583A1 (en) 2015-08-12
EP2447677B1 (en) 2016-12-07
EP3104130A1 (en) 2016-12-14
EP3214414A3 (en) 2017-09-20

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