JP5099376B2 - Method for manufacturing light emitting device - Google Patents

Method for manufacturing light emitting device Download PDF

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JP5099376B2
JP5099376B2 JP2009051055A JP2009051055A JP5099376B2 JP 5099376 B2 JP5099376 B2 JP 5099376B2 JP 2009051055 A JP2009051055 A JP 2009051055A JP 2009051055 A JP2009051055 A JP 2009051055A JP 5099376 B2 JP5099376 B2 JP 5099376B2
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silicone resin
spin
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優輝 伊藤
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Toyoda Gosei Co Ltd
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/31Structure, shape, material or disposition of the layer connectors after the connecting process
    • H01L2224/32Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
    • H01L2224/321Disposition
    • H01L2224/32151Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/32221Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/32245Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/44Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L2224/45Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
    • H01L2224/45001Core members of the connector
    • H01L2224/45099Material
    • H01L2224/451Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
    • H01L2224/45138Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
    • H01L2224/45144Gold (Au) as principal constituent
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48245Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
    • H01L2224/48247Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item

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Description

本発明は、発光素子がシリコーン樹脂で封止された発光装置の製造方法に関するものである。本発明の発光装置の製造方法によって製造される発光装置では、発光素子を搭載するリードフレームの変色を防ぐことができる。   The present invention relates to a method for manufacturing a light emitting device in which a light emitting element is sealed with a silicone resin. In the light emitting device manufactured by the method for manufacturing a light emitting device of the present invention, discoloration of the lead frame on which the light emitting element is mounted can be prevented.

従来、発光素子が透明樹脂で封止された発光装置が知られている。透明樹脂の種類としては、耐熱性、耐薬品性、電気的絶縁性及び透光性等を考慮し、エポキシ樹脂がよく用いられている。しかし、発光素子の高光度化にともない、発光素子からの熱及び光によってエポキシ樹脂が黄変し、透過率が低下して光度が低下するという問題が生じてきた。このため、エポキシ樹脂よりもさらに、耐熱性及び耐光性に優れたシリコーン樹脂が発光素子の封止剤として開発されている(特許文献1、2)。   Conventionally, a light emitting device in which a light emitting element is sealed with a transparent resin is known. As the type of transparent resin, an epoxy resin is often used in consideration of heat resistance, chemical resistance, electrical insulation, translucency, and the like. However, with the increase in luminous intensity of the light emitting element, there has been a problem that the epoxy resin is yellowed by heat and light from the light emitting element, the transmittance is lowered and the luminous intensity is lowered. For this reason, the silicone resin which was further excellent in heat resistance and light resistance rather than an epoxy resin is developed as a sealing agent of a light emitting element (patent documents 1, 2).

一方、近年、固体NMRの測定技術の進歩に伴い、パルスNMR法がプラスチック材料等の特性を評価する方法として注目されている。例えば、NMR法を用いて1H核のスピン−スピン緩和時間(横緩和時間)を測定しポリマーの性能を評価することができる(特許文献3)。また緩和時間を測定することにより、ゴムの架橋度等を評価する方法も開発されている(特許文献4)。
特開2006−202952号公報 特開2004−221308号公報 特開2006−335857号公報 特開2002−350377号公報 特開平8−122284号公報
On the other hand, in recent years, with the progress of measurement technology of solid-state NMR, the pulse NMR method has attracted attention as a method for evaluating characteristics of plastic materials and the like. For example, the polymer performance can be evaluated by measuring the spin-spin relaxation time (transverse relaxation time) of 1H nuclei using NMR (Patent Document 3). A method for evaluating the degree of crosslinking of rubber by measuring the relaxation time has also been developed (Patent Document 4).
JP 2006-202952 A JP 2004-221308 A JP 2006-335857 A JP 2002-350377 A JP-A-8-122284

しかし、発明者は、封止剤としてシリコーン樹脂を用いた場合、銅基材に銀めっきが施されたリードフレームや、銅やアルミからなるリードフレームが腐食して変色し、反射率が低下して光度が低下するという問題があることを見出した。本発明は、発光素子の封止剤としてシリコーン樹脂を用いた発光装置の製造方法において、リードフレームの変色を防止することができ、光度が低下し難い発光装置の製造方法を提供することを解決すべき課題とする。   However, when the silicone resin is used as the sealant, the inventor corrodes and discolors the lead frame in which the copper base material is silver-plated or the lead frame made of copper or aluminum, and the reflectance decreases. And found that there was a problem that the luminous intensity decreased. The present invention solves the problem of providing a method of manufacturing a light emitting device that can prevent discoloration of a lead frame and is less likely to cause a decrease in luminous intensity in a method of manufacturing a light emitting device using a silicone resin as a sealant for a light emitting element. It should be a challenge.

発明者は、リードフレームの少なくとも発光素子側の表面においてAg、Cu又はAlが主成分とされている場合には、封止剤としてシリコーン樹脂を用いた場合に、リードフレームが腐食して変色するという現象を発見した。そして、その変色の度合いは、シリコーン樹脂の種類によって、大きく異なることを見出した。さらには、その変色の度合いは、パルスNMR法によって測定したシリコーン樹脂のスピン−スピン緩和時間と深い相関関係があるという事実を見出し、本発明を完成するに至った。   The inventor found that the lead frame corroded and discolored when silicone resin was used as the sealant when Ag, Cu, or Al was the main component at least on the light emitting element side surface of the lead frame. I found the phenomenon. The degree of discoloration was found to vary greatly depending on the type of silicone resin. Furthermore, the fact that the degree of discoloration has a deep correlation with the spin-spin relaxation time of the silicone resin measured by the pulse NMR method has been found, and the present invention has been completed.

すなわち、本発明の第1の局面の発光装置の製造方法は、
リードフレームに固定された発光素子と、該発光素子をシリコーン樹脂で封止するシリコーン封止部とを備え、該リードフレームの少なくとも該発光素子側の表面はAg、Cu又はAlが主成分とされている発光装置の製造方法であって、
前記シリコーン樹脂を準備するステップと、
パルスNMR法によって、前記シリコーン樹脂におけるH核の平均のスピン−スピン緩和時間を測定するステップと、
前記シリコーン樹脂におけるH核の平均のスピン−スピン緩和時間が25°C、共鳴周波数25MHzにおいて100マイクロ秒以下であるか否か評価するステップと、
前記評価結果に基づいてシリコーン樹脂を選定するステップと、
選定された前記シリコーン樹脂で前記発光装置を封止してシリコーン封止部を形成するステップと、
を含む発光装置の製造方法である。
That is, the manufacturing method of the light-emitting device according to the first aspect of the present invention,
A light-emitting element fixed to the lead frame; and a silicone sealing portion that seals the light-emitting element with a silicone resin. At least the surface of the lead frame on the light-emitting element side is mainly composed of Ag, Cu, or Al. A method for manufacturing a light emitting device,
Providing the silicone resin;
Measuring the average spin-spin relaxation time of 1 H nuclei in the silicone resin by pulse NMR,
Evaluating whether the average spin-spin relaxation time of 1 H nuclei in the silicone resin is 100 microseconds or less at 25 ° C. and a resonance frequency of 25 MHz;
Selecting a silicone resin based on the evaluation results;
Sealing the light emitting device with the selected silicone resin to form a silicone sealing portion;
The manufacturing method of the light-emitting device containing this.

発明者の試験結果によれば、パルスNMR法によって測定されたH核の平均のスピン−スピン緩和時間が25°C、共鳴周波数25MHzにおいて100マイクロ秒以下(さらに好ましくは50マイクロ秒以下)であるシリコーン樹脂を用いれば、リードフレーム表面のAgやCuやAlの変色を長時間にわたって防ぐことができる。 According to the inventor's test results, the average spin-spin relaxation time of 1 H nuclei measured by the pulse NMR method is 100 microseconds or less (more preferably 50 microseconds or less) at a resonance frequency of 25 MHz at 25 ° C. If a certain silicone resin is used, discoloration of Ag, Cu, or Al on the lead frame surface can be prevented for a long time.

また、発光装置のリードフレームの変色としては、リードフレームに銀めっきが施されている場合には、銀めっきが硫黄系の化合物や塩素系の化合物によって特に変色しやすいことも見出している。そして、これら銀めっきの変色は、パルスNMR法によって測定されたH核の平均のスピン−スピン緩和時間が、25°C、共鳴周波数25MHzにおいて100マイクロ秒以下のシリコーン樹脂を用いることによって、効果的に防ぐことができる。このため、本発明の第2の局面の発光装置の製造方法は、リードフレームの少なくとも発光素子側の表面は、銀めっきが施されていることとした。 In addition, as a color change of the lead frame of the light emitting device, it has also been found that when the lead frame is silver-plated, the silver plating is particularly easily discolored by a sulfur compound or a chlorine compound. The discoloration of the silver plating is effective by using a silicone resin having an average spin-spin relaxation time of 1 H nuclei measured by a pulse NMR method of 100 microseconds or less at 25 ° C. and a resonance frequency of 25 MHz. Can be prevented. For this reason, in the manufacturing method of the light emitting device according to the second aspect of the present invention, at least the surface of the lead frame on the light emitting element side is subjected to silver plating.

また、本発明の第3の局面の発光装置の製造方法は、シリコーン樹脂はフェニル基及びノルボルネン骨格を有する熱硬化性シリコーン樹脂であることとした。発明者の試験結果によれば、シリコーン樹脂のなかでもフェニル基及びノルボルネン骨格を有する熱硬化性シリコーン樹脂は、スピン−スピン緩和時間が短く、AgやCuやAlが主成分とする表面を有するリードフレームの変色を効果的に防止することができる。   In the method for manufacturing a light emitting device according to the third aspect of the present invention, the silicone resin is a thermosetting silicone resin having a phenyl group and a norbornene skeleton. According to the inventor's test results, among the silicone resins, thermosetting silicone resins having a phenyl group and a norbornene skeleton have a short spin-spin relaxation time and lead having a surface mainly composed of Ag, Cu, or Al. The discoloration of the frame can be effectively prevented.

トップビュータイプの発光装置の模式断面図である。It is a schematic cross section of a top view type light emitting device. 各種発光装置の耐久試験における緩和時間と光度残存率との関係を示すグラフである。It is a graph which shows the relationship between the relaxation time and the luminous intensity residual rate in the durability test of various light-emitting devices. フリップチップタイプの発光素子を備えた発光装置の模式断面図である。It is a schematic cross-sectional view of a light emitting device including a flip chip type light emitting element.

本発明の発光装置の製造方法で製造される発光装置において、発光素子はリードフレームに固定されている。そして、リードフレームの少なくとも発光素子側の表面はAg、Cu又はAlが主成分とされている。このようなリードフレームとしては、例えば銅や、しんちゅう等の銅合金や、ステンレス基材に銀めっきが施されたリードフレーム等が挙げられる。銀めっきの下に銅めっきなどの下地めっきが施されているリードフレームでも良い。また、めっきは施されていないリードフレームとして、銅や銅合金からなるリードフレームや、アルミやアルミ合金からなるリードフレームでもよい。これらのリードフレームは、表面が硫黄系化合物や、塩素系化合物によって変色し易いが、本発明の発光装置の製造方法で製造される発光装置では、それらのリードフレームの変色を長期にわたって効果的に防ぐことができる。   In the light emitting device manufactured by the method for manufacturing a light emitting device of the present invention, the light emitting element is fixed to the lead frame. And at least the surface of the lead frame on the light emitting element side is mainly composed of Ag, Cu or Al. As such a lead frame, for example, copper, a copper alloy such as brass, a lead frame in which a stainless steel base is subjected to silver plating, and the like can be cited. A lead frame having a base plating such as copper plating under the silver plating may be used. Further, the lead frame not plated may be a lead frame made of copper or copper alloy, or a lead frame made of aluminum or aluminum alloy. The surface of these lead frames is easily discolored by sulfur-based compounds or chlorine-based compounds. However, in the light-emitting devices manufactured by the method for manufacturing a light-emitting device of the present invention, the discoloration of those lead frames is effectively effective over a long period of time. Can be prevented.

また、本発明の発光装置の製造方法は、パルスNMR法によって、発光素子を封止するシリコーン樹脂におけるH核の平均のスピン−スピン緩和時間を測定するステップと、H核の平均のスピン−スピン緩和時間が25°C、共鳴周波数25MHzにおいて100マイクロ秒以下であるか否か評価するステップと、評価結果に基づいてシリコーン樹脂を選定する。 In addition, the method for manufacturing a light emitting device of the present invention includes a step of measuring an average spin-spin relaxation time of 1 H nuclei in a silicone resin encapsulating a light emitting element by pulse NMR, and an average spin of 1 H nuclei. A step of evaluating whether or not the spin relaxation time is 100 microseconds or less at 25 ° C. and a resonance frequency of 25 MHz, and a silicone resin is selected based on the evaluation result.

ここで、H核を対象とするパルスNMR法とは、強い磁場の中にサンプルを置き、そこへ電磁波パルスを付与し、電磁波パルスに対する応答信号をコイルによって検出し、液体や固体のH核磁気緩和時間を測定する方法である。H核磁気緩和現象には、以下に示す2種類の緩和現象が存在する。すなわち、第1の緩和現象は、エネルギーの面から注目した緩和現象であり、吸収した電磁波エネルギーを放出し、元のエネルギー分布に戻るというエネルギーの緩和過程である。また、第2の緩和現象は、核スピンの歳差運動の位相がそろった状態から、ランダムな状態へ移行するという緩和課程であり、エネルギーのやり取りのない緩和現象である。 Here, the pulse NMR method for 1 H nuclei is a method in which a sample is placed in a strong magnetic field, an electromagnetic pulse is applied thereto, a response signal to the electromagnetic pulse is detected by a coil, and a liquid or solid 1 H is detected. This is a method for measuring the nuclear magnetic relaxation time. The 1 H nuclear magnetic relaxation phenomenon includes the following two types of relaxation phenomena. That is, the first relaxation phenomenon is a relaxation phenomenon focused on from the viewpoint of energy, and is an energy relaxation process in which absorbed electromagnetic wave energy is released and returns to the original energy distribution. The second relaxation phenomenon is a relaxation process in which the phase shifts from the phase of precession of nuclear spins to a random state, and is a relaxation phenomenon with no exchange of energy.

上述の第1の緩和現象はスピン−格子緩和(縦緩和)と呼ばれており、吸収したエネルギーの放出過程がその本質である。一方、第2の緩和現象は、スピン−スピン緩和(横緩和)と呼ばれており、熱力学におけるコヒーレントな状態からランダムな状態に移行する緩和過程である。これら2つの緩和現象は、検出するコイルの方向を規定することにより、それぞれ独立して測定することができる。すなわち、スピン−格子緩和(縦緩和)は外部磁場に対して検出コイルを磁場と同じ方向(すなわち縦方向)に向けたときに検出され、スピン−スピン緩和(横緩和)は外部磁場に対して検出コイルを磁場と垂直方向(すなわち横方向)に向けたときに検出される。   The first relaxation phenomenon described above is called spin-lattice relaxation (longitudinal relaxation), and the process of releasing absorbed energy is its essence. On the other hand, the second relaxation phenomenon is called spin-spin relaxation (lateral relaxation), and is a relaxation process in which a coherent state in thermodynamics shifts to a random state. These two relaxation phenomena can be measured independently by defining the direction of the coil to be detected. That is, spin-lattice relaxation (longitudinal relaxation) is detected when the detection coil is oriented in the same direction as the magnetic field (ie, longitudinal direction) with respect to the external magnetic field, and spin-spin relaxation (transverse relaxation) is detected with respect to the external magnetic field. It is detected when the detection coil is oriented in a direction perpendicular to the magnetic field (ie, in the lateral direction).

本発明においては、これらの2つの緩和現象のうち、スピン−スピン緩和現象によってシリコーン樹脂を評価し、選定する。このため、シリコーン樹脂を入れたサンプル管を所定の角度(マジック角)に傾斜させて回転させながら電磁波パルスを照射し、外部磁場に対して磁場と垂直方向(すなわち横方向)に向けた検出コイルによって、自由誘導減衰(FID)信号を検出する。   In the present invention, among these two relaxation phenomena, the silicone resin is evaluated and selected by the spin-spin relaxation phenomenon. For this reason, a detection coil that irradiates an electromagnetic wave pulse while rotating a sample tube containing silicone resin at a predetermined angle (magic angle) and directing the external magnetic field in a direction perpendicular to the magnetic field (ie, lateral direction) To detect a free induction decay (FID) signal.

ところで、現実のシリコーン樹脂の細部構造は、結晶相や非晶質相やそれらの相の界面付近の相等、完全な均一構造とはなっておらず、こうして得られたスピン−スピン緩和に対応する自由誘導減衰(FID)信号には、各相に対応する異なった緩和現象が混在する状態となっている。しかし、これらの各相に対応する緩和時間は、ガウス関数成分と指数関数成分とに分離し、各相ごとに求めることができる。本発明においては、パルスNMR法によって測定されたH核の平均のスピン−スピン緩和時間が25°C、共鳴周波数25MHzにおいて100マイクロ秒以下(さらに好ましくは50マイクロ秒以下)であるシリコーン樹脂を選定する。このような、シリコーン樹脂を選定することにより、銅基材に銀めっきが施されたリードフレームや、銅やアルミからなるリードフレームの腐食が防止され、これによって反射率の低下を防ぐことができ、ひいては発光装置の光度の低下を防止することができる。 By the way, the detailed structure of an actual silicone resin is not a completely uniform structure such as a crystalline phase, an amorphous phase, or a phase near the interface between these phases, and corresponds to the spin-spin relaxation obtained in this way. In the free induction decay (FID) signal, different relaxation phenomena corresponding to each phase are mixed. However, the relaxation time corresponding to each of these phases can be obtained for each phase by separating it into a Gaussian function component and an exponential function component. In the present invention, a silicone resin having an average spin-spin relaxation time of 1 H nucleus measured by a pulse NMR method of 25 ° C. and a resonance frequency of 25 MHz is 100 microseconds or less (more preferably 50 microseconds or less). Select. By selecting such a silicone resin, corrosion of lead frames with silver plating on the copper base and lead frames made of copper or aluminum can be prevented, thereby preventing a decrease in reflectivity. As a result, a decrease in the luminous intensity of the light emitting device can be prevented.

このような判断基準によって選定したシリコーン樹脂を封止剤に用いた発光装置におけるリードフレームの変色が防止される理由については明確とはなっていないが、次のように考えられる。すなわち、封止剤として用いるシリコーン樹脂は、一般的に大きなガス透過性を有する。このため、外気中に含まれる塩酸ガス等のハロゲン系ガスや、亜硫酸ガス等の硫黄系ガスがシリコーン樹脂中を通ってリードフレーム表面に達し、リードフレーム表面の銀めっきを腐食して変色させる。しかし、シリコーン樹脂のスピン−スピン緩和時間(横緩和時間)は、シリコーン樹脂の架橋度によって異なり(例えば特開平8−122284)、架橋度の大きなシリコーン樹脂ほどスピン−スピン緩和時間(横緩和時間)は短くなり、ガス透過性も低くなる。このため、リードフレーム表面の変色原因となる硫黄系ガスや塩素系ガスが透過し難くなり、その結果、リードフレームの変色が防止されるのである。   The reason why the lead frame is prevented from being discolored in the light emitting device using the silicone resin selected according to such a criterion as the sealant is not clear, but is considered as follows. That is, the silicone resin used as the sealant generally has a large gas permeability. For this reason, a halogen-based gas such as hydrochloric acid gas or a sulfur-based gas such as sulfurous acid gas contained in the outside air reaches the lead frame surface through the silicone resin and corrodes and discolors the silver plating on the lead frame surface. However, the spin-spin relaxation time (transverse relaxation time) of the silicone resin varies depending on the degree of crosslinking of the silicone resin (for example, JP-A-8-122284). Becomes shorter and gas permeability becomes lower. For this reason, sulfur-based gas and chlorine-based gas that cause discoloration of the lead frame surface are difficult to permeate, and as a result, discoloration of the lead frame is prevented.

本発明の発光装置の製造方法は、トップビュータイプ、サイドビュータイプ、砲弾タイプ、COBタイプ等、LEDの形状を問わず、それぞれの製造方法として適用することができる。また、発光素子は短波長の光を放出するものにおいて特に効果が著しい。具体的には青色発光LED、紫外発光LED及び紫外発光LEDを用いた単色又は蛍光体入りの白色LEDである。かかる発光素子に対する耐久性からシリコーン封止材が採用されるからである。短波長の光を発光する発光素子として、III族窒化物系化合物半導体発光素子を用いることが好ましい。ここに、III族窒化物系化合物半導体とは、一般式としてAlGaIn1−X−YN(0≦X≦1、0≦Y≦1、0≦X+Y≦1)で表され、III族元素の少なくとも一部をボロン(B)、タリウム(Tl)等で置換しても良く、また、窒素(N)の少なくとも一部もリン(P)、ヒ素(As)、アンチモン(Sb)、ビスマス(Bi)等で置換できる。 The manufacturing method of the light emitting device of the present invention can be applied as each manufacturing method regardless of the shape of the LED, such as a top view type, a side view type, a shell type, and a COB type. The light emitting element is particularly effective when it emits light having a short wavelength. Specifically, it is a monochromatic or phosphor-containing white LED using a blue light emitting LED, an ultraviolet light emitting LED, and an ultraviolet light emitting LED. This is because a silicone sealing material is employed because of durability against such a light emitting element. As a light-emitting element that emits light having a short wavelength, a group III nitride compound semiconductor light-emitting element is preferably used. Here, the group III nitride compound semiconductor is represented by a general formula of Al X Ga Y In 1- XYN (0 ≦ X ≦ 1, 0 ≦ Y ≦ 1, 0 ≦ X + Y ≦ 1), At least a part of the group III element may be substituted with boron (B), thallium (Tl), etc., and at least a part of the nitrogen (N) is also phosphorus (P), arsenic (As), antimony (Sb) , Bismuth (Bi) or the like.

また、III族窒化物系化合物半導体は任意のドーパントを含むものであっても良い。n型不純物として、シリコン(Si)、ゲルマニウム(Ge)、セレン(Se)、テルル(Te)、カーボン(C)等を用いることができる。p型不純物として、マグネシウム(Mg)、亜鉛(Zn)、ベリリウム(Be)、カルシウム(Ca)、ストロンチウム(Sr)、バリウム(Ba)等を用いることができる。なお、p型不純物をドープした後にIII族窒化物系化合物半導体を電子線照射、プラズマ照射若しくは炉による加熱にさらすことができるが必須ではない。
III族窒化物系化合物半導体層はMOCVD(有機金属気相成長)法により形成される。素子を構成する全ての半導体層を当該MOCVD法で形成する必要はなく、分子線結晶成長法(MBE法)、ハライド系気相成長法(HVPE法)、スパッタ法、イオンプレーティング法等を併用することが可能である。
Further, the group III nitride compound semiconductor may contain an arbitrary dopant. As the n-type impurity, silicon (Si), germanium (Ge), selenium (Se), tellurium (Te), carbon (C), or the like can be used. As the p-type impurity, magnesium (Mg), zinc (Zn), beryllium (Be), calcium (Ca), strontium (Sr), barium (Ba), or the like can be used. Although the group III nitride compound semiconductor can be exposed to electron beam irradiation, plasma irradiation or furnace heating after doping with p-type impurities, it is not essential.
The group III nitride compound semiconductor layer is formed by MOCVD (metal organic chemical vapor deposition). It is not necessary to form all the semiconductor layers constituting the element by the MOCVD method, and the molecular beam crystal growth method (MBE method), halide vapor phase epitaxy method (HVPE method), sputtering method, ion plating method, etc. are used in combination. Is possible.

発光素子の構成としては、MIS接合、PIN接合やpn接合を有したホモ構造、ヘテロ構造若しくはダブルへテロ構造のものを用いることができる。発光層として量子井戸構造(単一量子井戸構造若しくは多重量子井戸構造)を採用することもできる。かかるIII族窒化物系化合物半導体発光素子として、主たる光受発光方向(電極面)を光デバイスの光軸方向にしたフェイスアップタイプや主たる光受発光方向を光軸方向と反対方向にして反射光を利用するフリップチップタイプを用いることができる。   As a structure of the light-emitting element, a homostructure, a heterostructure, or a double heterostructure having a MIS junction, a PIN junction, or a pn junction can be used. A quantum well structure (single quantum well structure or multiple quantum well structure) can also be adopted as the light emitting layer. As such a group III nitride compound semiconductor light emitting device, a face-up type in which the main light receiving and emitting direction (electrode surface) is the optical axis direction of the optical device, and the reflected light with the main light receiving and emitting direction opposite to the optical axis direction. A flip chip type using the above can be used.

以下本発明の実施例を比較例と比較しつつ、より詳細に説明する。
<各種シリコーン樹脂のスピン−スピン緩和時間の測定>
各種シリコーン樹脂のスピン−スピン緩和時間を以下の条件によって測定した。
測定装置: 日本電子MU25型
共鳴周波数: 25MHz
測定温度: 25 °C
観測核種:
磁石: 永久磁石 0.58T
検出方式: QD方式(Quadrature Detection)
パルス系列: ソリッド−エコー法
RFパルス幅:2マイクロ秒
パルス間隔: 8マイクロ秒
パルス繰り返し時間: 1sec
Hereinafter, examples of the present invention will be described in more detail while comparing with comparative examples.
<Measurement of spin-spin relaxation time of various silicone resins>
The spin-spin relaxation times of various silicone resins were measured under the following conditions.
Measuring device: JEOL MU25 type resonance frequency: 25MHz
Measurement temperature: 25 ° C
Observation nuclide: 1 H
Magnet: Permanent magnet 0.58T
Detection method: QD method (Quadrature Detection)
Pulse sequence: Solid-echo method RF pulse width: 2 microseconds Pulse interval: 8 microseconds Pulse repetition time: 1 sec

<LEDの耐久試験>
上記のようにしてスピン−スピン緩和時間を測定したシリコーン樹脂を封止剤として、図1に示すように、フェイスアップの発光素子を使用したトップビュータイプの青色発光の発光装置1を作製し、耐久試験をおこなった。発光素子10は全面に銀めっきが施されたリードフレーム20上に、シリコーンペースト20aによって固定されている。発光素子10の図示しないn電極及びp電極は、それぞれAuワイヤ11及び12によりリードフレーム20にワイヤボンディングされている。リードフレーム20は樹脂製ケース21に設けられた凹部21aの底面に固定され、両端が露出するように樹脂製ケース21に埋め込まれている。さらに、凹部21aはシリコーン樹脂からなるシリコーン封止部22によって封止されており、これにより発光素子10は封止されている。
<LED durability test>
Using the silicone resin whose spin-spin relaxation time was measured as described above as a sealant, as shown in FIG. 1, a top view type blue light emitting device 1 using a face-up light emitting device was produced, Durability test was conducted. The light emitting element 10 is fixed by a silicone paste 20a on a lead frame 20 having a silver plating on the entire surface. An n electrode and a p electrode (not shown) of the light emitting element 10 are wire bonded to the lead frame 20 with Au wires 11 and 12, respectively. The lead frame 20 is fixed to the bottom surface of the recess 21a provided in the resin case 21, and is embedded in the resin case 21 so that both ends are exposed. Further, the concave portion 21a is sealed with a silicone sealing portion 22 made of a silicone resin, whereby the light emitting element 10 is sealed.

以上の発光装置1は、次のようにして製造される。
銀めっきの施されたリードフレーム20を用意し、型成形によって樹脂製ケース21を成形するとともに、リードフレーム20を凹部21aの底に固定する。発光素子10を銀めっきが施されたリードフレーム20の上にシリコーン樹脂20aによって固定する。発光素子10の図示しないn電極及びp電極はそれぞれ金ワイヤ11及び12により、リードフレーム20にワイヤボンディングする。各種のシリコーン樹脂を準備し、パルスNMR法によって、当該シリコーン樹脂におけるH核の平均のスピン−スピン緩和時間を測定する。そして、当該シリコーン樹脂におけるH核の平均のスピン−スピン緩和時間が25°C、共鳴周波数25MHzにおいて100マイクロ秒以下であるか否か評価し、当該評価結果に基づいてシリコーン樹脂を選定する。選定されたシリコーン樹脂を凹部21aに充填し、加熱硬化させて、発光装置1を得る。
The above light-emitting device 1 is manufactured as follows.
A silver-plated lead frame 20 is prepared, a resin case 21 is formed by molding, and the lead frame 20 is fixed to the bottom of the recess 21a. The light emitting element 10 is fixed on a lead frame 20 on which silver plating is applied by a silicone resin 20a. An n electrode and a p electrode (not shown) of the light emitting element 10 are wire-bonded to the lead frame 20 with gold wires 11 and 12, respectively. Various silicone resins are prepared, and the average spin-spin relaxation time of 1 H nuclei in the silicone resin is measured by a pulse NMR method. Then, it is evaluated whether or not the average spin-spin relaxation time of 1 H nuclei in the silicone resin is 100 microseconds or less at 25 ° C. and a resonance frequency of 25 MHz, and a silicone resin is selected based on the evaluation result. The selected silicone resin is filled in the concave portion 21a and is cured by heating to obtain the light emitting device 1.

以上のようにして、各種のシリコーン樹脂を封止剤として用いた作製した発光装置について、通電発光(5mA)させた状態で連続1000時間の耐久試験を行った。また、通電させない状態でも同様に連続1000時間の耐久試験を行った。試験条件は、劣化を促進させるために、85°Cに加熱した大気中とした。評価は、(試験後の発光装置の光度)/(試験前の発光装置の光度)の光度残存率で評価した。   As described above, the manufactured light-emitting device using various silicone resins as a sealant was subjected to a continuous 1000-hour durability test in a state where current was emitted (5 mA). In addition, a continuous 1000 hour durability test was conducted in the same manner even when no current was applied. The test conditions were air heated to 85 ° C. in order to promote deterioration. The evaluation was made by the residual ratio of luminous intensity of (luminosity of light emitting device after test) / (luminosity of light emitting device before test).

<評 価>
測定したシリコーン樹脂の種類を表1に示す。また、測定されたスピン−スピン緩和時間及び耐久試験の結果を表2に示す。なお、表2における緩和時間の単位は全てマイクロ秒である。また、緩和時間におけるT(1)、T(2)、T(3)は、各相ごとに求められた緩和時間である。さらに、成分量AM(1)、AM(2)、AM(3)は、緩和時間がT(1)、T(2)、T(3)を示す各相の成分の割合を示している。

Figure 0005099376
Figure 0005099376
<Evaluation>
Table 1 shows the types of silicone resins measured. Table 2 shows the measured spin-spin relaxation time and the results of the durability test. Note that the units of relaxation time in Table 2 are all microseconds. Further, T 2 (1), T 2 (2), and T 2 (3) in the relaxation time are relaxation times obtained for each phase. Furthermore, the component amounts AM (1), AM (2), and AM (3) indicate the proportions of the components of the respective phases whose relaxation times indicate T 2 (1), T 2 (2), and T 2 (3). ing.
Figure 0005099376
Figure 0005099376

表2から、実施例1〜実施例4の発光装置に用いたシリコーン樹脂は、スピン−スピン緩和時間T(1)が27〜175マイクロ秒であり、比較例1〜3の発光装置に用いたシリコーン樹脂の緩和時間T(1)が960〜1760マイクロ秒であるのと比較して、極めて短いことが分かる。また、耐久試験の結果において、実施例1〜実施例4の発光装置は光度の変化が少なく、長期間安定した光度を示した。これに対して、比較例1〜3の発光装置は光度が急速に低下した。これは、実施例1〜実施例4の発光装置ではリードフレームの銀めっきがほとんど変色しなかったためである。このことは、試験後の比較例1〜3の発光装置のリードフレーム表面を実体顕微鏡で観察したところ変色していたのに対し、実施例1〜4の発光装置のリードフレームは、ほとんど変色が認められなかったことから、明らかである。 From Table 2, the silicone resin used for the light emitting devices of Examples 1 to 4 has a spin-spin relaxation time T 2 (1) of 27 to 175 microseconds, and is used for the light emitting devices of Comparative Examples 1 to 3. It can be seen that the relaxation time T 2 (1) of the obtained silicone resin is extremely short compared to 960 to 1760 microseconds. In addition, as a result of the durability test, the light emitting devices of Examples 1 to 4 showed little change in luminous intensity and showed a stable luminous intensity for a long time. In contrast, the luminous intensity of the light emitting devices of Comparative Examples 1 to 3 rapidly decreased. This is because the silver plating of the lead frame hardly changed in the light emitting devices of Examples 1 to 4. This is because the lead frame surfaces of the light emitting devices of Comparative Examples 1 to 3 after the test were discolored when observed with a stereomicroscope, whereas the lead frames of the light emitting devices of Examples 1 to 4 were almost discolored. It is clear from the fact that it was not recognized.

また、表1に示すように、実施例2の発光装置に用いたシリコーン樹脂の原料から、ジフェニルシロキサン構造が多く認められ、実施例3の発光装置に用いたシリコーン樹脂の原料からは、フェニルシロキサン構造及びSi−ノルボルネン構造が多く認められ、実施例4の発光装置に用いたシリコーン樹脂の原料からは、メチルフェニルシロキサン構造及びシリケート構造が多く認められた。また、表2に示すように、これらの成分を含むシリコーン樹脂は緩和時間が短くなり、リードフレームの変色を防止できることが分かった。これらの成分のうち、Si−ノルボルネン構造は炭素−炭素の二重結合を含み、Si−Hと架橋反応を行うことにより(下記反応式参照)、硫黄系のガスや塩素系のガスの拡散が遅くなるものと推測される。

Figure 0005099376
Further, as shown in Table 1, many diphenylsiloxane structures are recognized from the raw material of the silicone resin used in the light emitting device of Example 2, and from the raw material of the silicone resin used in the light emitting device of Example 3, phenylsiloxane is used. Many structures and Si-norbornene structures were observed, and many methylphenylsiloxane structures and silicate structures were recognized from the raw material of the silicone resin used in the light emitting device of Example 4. Further, as shown in Table 2, it was found that the silicone resin containing these components has a short relaxation time and can prevent lead frame discoloration. Among these components, the Si-norbornene structure contains a carbon-carbon double bond, and by performing a crosslinking reaction with Si-H (see the following reaction formula), diffusion of sulfur-based gas and chlorine-based gas is prevented. Presumed to be slow.
Figure 0005099376

<各種発光装置の耐久試験>
フェイスアップの発光素子を使用したトップビュータイプの青色LED及び白色LEDを用い、耐久試験を行った。封止剤としてのシリコーン樹脂は、上記実施例1、比較例1、比較例2及び比較例3において用いたシリコーン樹脂を用いた。各シリコーン樹脂のスピン−スピン緩和時間T(平均)は実施例1が17マイクロ秒、比較例1が1417マイクロ秒、比較例2が628マイクロ秒、比較例3が1112マイクロ秒である。
<Durability test of various light emitting devices>
An endurance test was performed using a blue LED and a white LED of a top view type using a face-up light emitting element. As the silicone resin as the sealant, the silicone resin used in Example 1, Comparative Example 1, Comparative Example 2, and Comparative Example 3 was used. The spin-spin relaxation time T 2 (average) of each silicone resin is 17 microseconds in Example 1, 1417 microseconds in Comparative Example 1, 628 microseconds in Comparative Example 2, and 1112 microseconds in Comparative Example 3.

耐久試験における試験条件は、85°C大気中5mA通電状態、85°C大気中非通電状態とし、試験時間は1000時間とした。評価は(試験後の発光装置の光度)/(試験前の発光装置の光度)の値で定義される光度残存率で評価した。   The test conditions in the durability test were an energized state of 5 mA in the atmosphere at 85 ° C and a non-energized state in the atmosphere of 85 ° C, and the test time was 1000 hours. Evaluation was based on the residual ratio of luminous intensity defined by the value of (luminous intensity of light emitting device after test) / (luminous intensity of light emitting device before test).

その結果、図2に示すように、スピン−スピン緩和時間T(平均)が17マイクロ秒という短い緩和時間を示す実施例1のシリコーン樹脂を用いたLEDでは、いずれの環境下においても、光度残存率が高かった。そして、さらにはスピン−スピン緩和時間T(平均)が長いほど、光度残存率が低くなり、封止剤として用いたシリコーン樹脂のスピン−スピン緩和時間T(平均)の値が、光度残存率と極めて高い相関関係を有することが分かった。また、試験後のリードフレームの変色を実体顕微鏡で観察したところ、スピン−スピン緩和時間T(平均)の値が長いものほど、変色の度合いが大きいことが分かった。そして、図2の結果から、スピン−スピン緩和時間T(平均)が100マイクロ秒以下であれば、優れた光度残存率を示すことが分かった。
また、硬化後の屈折率を測定したところ、表2に示すように、実施例1〜3のシリコーン樹脂では1.5以上であったのに対し、比較例1及び2では1.41、比較例3では1.40と低かった。このことから、スピン−スピン緩和時間T(平均)の値が短いものほど、屈折率が大きい傾向にあった。
As a result, as shown in FIG. 2, in the LED using the silicone resin of Example 1 in which the spin-spin relaxation time T 2 (average) exhibits a relaxation time as short as 17 microseconds, the luminous intensity in any environment The survival rate was high. Further, the longer the spin-spin relaxation time T 2 (average), the lower the luminous intensity residual rate, and the value of the spin-spin relaxation time T 2 (average) of the silicone resin used as the sealant is the residual luminous intensity. It was found to have a very high correlation with the rate. Further, when the discoloration of the lead frame after the test was observed with a stereomicroscope, it was found that the longer the value of the spin-spin relaxation time T 2 (average), the greater the degree of discoloration. From the results shown in FIG. 2, it was found that when the spin-spin relaxation time T 2 (average) is 100 microseconds or less, an excellent luminous intensity residual rate is exhibited.
Moreover, when the refractive index after hardening was measured, as shown in Table 2, in the silicone resins of Examples 1 to 3, it was 1.5 or more, whereas in Comparative Examples 1 and 2, it was 1.41. In Example 3, it was as low as 1.40. From this, the shorter the value of the spin-spin relaxation time T 2 (average), the larger the refractive index.

本発明の発光装置の製造方法は、フリップチップタイプの発光素子を用いたLEDの製造方法としても適用可能である。図3に本発明の製造方法による、フリップチップタイプの発光素子を用いたLEDの構造を示す。このLEDは、図3に示すようにAuバンプ24a、24bによってフリップチップタイプの発光素子110が固定されている。他の構成は図1に示すLEDと同様であり、同一の構成については同一の符号を付して詳細な説明を省略する。
このように、バンプによって発光素子を固定する発光装置に対しても、本発明の製造方法を適用して、本発明の効果を奏することができる。
The method for manufacturing a light emitting device of the present invention can also be applied as a method for manufacturing an LED using a flip chip type light emitting element. FIG. 3 shows the structure of an LED using a flip-chip type light emitting element according to the manufacturing method of the present invention. In this LED, as shown in FIG. 3, a flip chip type light emitting element 110 is fixed by Au bumps 24a and 24b. Other configurations are the same as those of the LED shown in FIG. 1, and the same components are denoted by the same reference numerals, and detailed description thereof is omitted.
As described above, the manufacturing method of the present invention can be applied to the light emitting device in which the light emitting element is fixed by the bumps, and the effects of the present invention can be achieved.

この発明は上記発明の実施形態に何ら限定されるものではない。特許請求の範囲を逸脱せず、当業者が容易に想到できる範囲で種々の変形態様もこの発明に含まれる。   The present invention is not limited to the embodiments of the invention described above. Various modifications are also included in the present invention as long as those skilled in the art can easily conceive without departing from the scope of the claims.

20…リードフレーム
10…発光素子
22…シリコーン封止部
20 ... Lead frame 10 ... Light emitting element 22 ... Silicone sealing part

Claims (3)

リードフレームに固定された発光素子と、該発光素子をシリコーン樹脂で封止するシリコーン封止部とを備え、該リードフレームの少なくとも該発光素子側の表面はAg、Cu又はAlが主成分とされている発光装置の製造方法であって、
前記シリコーン樹脂を準備するステップと、
パルスNMR法によって、前記シリコーン樹脂におけるH核の平均のスピン−スピン緩和時間を測定するステップと、
前記シリコーン樹脂におけるH核の平均のスピン−スピン緩和時間が25°C、共鳴周波数25MHzにおいて100マイクロ秒以下であるか否か評価するステップと、
前記評価結果に基づいてシリコーン樹脂を選定するステップと、
選定された前記シリコーン樹脂で前記発光装置を封止してシリコーン封止部を形成するステップと、
を含む発光装置の製造方法。
A light-emitting element fixed to the lead frame; and a silicone sealing portion that seals the light-emitting element with a silicone resin. At least the surface of the lead frame on the light-emitting element side is mainly composed of Ag, Cu, or Al. A method for manufacturing a light emitting device,
Providing the silicone resin;
Measuring the average spin-spin relaxation time of 1 H nuclei in the silicone resin by pulse NMR,
Evaluating whether the average spin-spin relaxation time of 1 H nuclei in the silicone resin is 100 microseconds or less at 25 ° C. and a resonance frequency of 25 MHz;
Selecting a silicone resin based on the evaluation results;
Sealing the light emitting device with the selected silicone resin to form a silicone sealing portion;
A method for manufacturing a light-emitting device including:
前記リードフレームの少なくとも前記発光素子側の表面は、銀めっきが施されていることを特徴とする請求項1に記載の発光装置の製造方法。   The method for manufacturing a light emitting device according to claim 1, wherein at least a surface of the lead frame on the light emitting element side is subjected to silver plating. 前記シリコーン樹脂はフェニル基及びノルボルネン骨格を有する熱硬化性シリコーン樹脂であることを特徴とする請求項1又は2記載の発光装置の製造方法。   3. The method for manufacturing a light emitting device according to claim 1, wherein the silicone resin is a thermosetting silicone resin having a phenyl group and a norbornene skeleton.
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