JP5088270B2 - 精密微動位置決めユニット、それを備えたステージ装置、露光装置及び検査装置 - Google Patents

精密微動位置決めユニット、それを備えたステージ装置、露光装置及び検査装置 Download PDF

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Publication number
JP5088270B2
JP5088270B2 JP2008210285A JP2008210285A JP5088270B2 JP 5088270 B2 JP5088270 B2 JP 5088270B2 JP 2008210285 A JP2008210285 A JP 2008210285A JP 2008210285 A JP2008210285 A JP 2008210285A JP 5088270 B2 JP5088270 B2 JP 5088270B2
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Japan
Prior art keywords
electromagnetic actuator
positioning unit
precision fine
mover
displacement sensor
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Expired - Fee Related
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JP2008210285A
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English (en)
Japanese (ja)
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JP2010050114A (ja
JP2010050114A5 (enExample
Inventor
洋一 本村
寿之 河野
義昭 久保田
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Yaskawa Electric Corp
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Yaskawa Electric Corp
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Priority to JP2008210285A priority Critical patent/JP5088270B2/ja
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  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP2008210285A 2008-08-19 2008-08-19 精密微動位置決めユニット、それを備えたステージ装置、露光装置及び検査装置 Expired - Fee Related JP5088270B2 (ja)

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JP2008210285A JP5088270B2 (ja) 2008-08-19 2008-08-19 精密微動位置決めユニット、それを備えたステージ装置、露光装置及び検査装置

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JP2008210285A JP5088270B2 (ja) 2008-08-19 2008-08-19 精密微動位置決めユニット、それを備えたステージ装置、露光装置及び検査装置

Publications (3)

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JP2010050114A JP2010050114A (ja) 2010-03-04
JP2010050114A5 JP2010050114A5 (enExample) 2012-01-19
JP5088270B2 true JP5088270B2 (ja) 2012-12-05

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Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5673014B2 (ja) * 2010-11-24 2015-02-18 日本精工株式会社 位置決め装置、半導体露光装置、組立・検査装置及び精密工作機械
JP5824274B2 (ja) * 2011-07-29 2015-11-25 株式会社Ｓｃｒｅｅｎホールディングス 基板移送装置および描画装置
US10476354B2 (en) 2011-09-16 2019-11-12 Persimmon Technologies Corp. Robot drive with isolated optical encoder
KR102179267B1 (ko) * 2011-09-16 2020-11-16 퍼시몬 테크놀로지스 코포레이션 패시브 회전자를 가진 로봇 구동
CN107457573A (zh) * 2017-09-19 2017-12-12 苏州迈客荣自动化技术有限公司 一种精密定位工作台
CN111487846B (zh) * 2019-01-28 2021-04-09 上海微电子装备（集团）股份有限公司 一种工件台定位接口工装
CN110006993A (zh) * 2019-04-03 2019-07-12 安徽见行科技有限公司 可连续微调的涡流传感器探头装置
KR102684506B1 (ko) * 2021-06-25 2024-07-15 가부시키가이샤 프로테리아루 제어 시스템, 자세 조정 장치 및 제어 방법

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3073218B2 (ja) * 1990-04-27 2000-08-07 住友重機械工業株式会社 回転並進ステージ
JP2902225B2 (ja) * 1992-09-30 1999-06-07 キヤノン株式会社 位置決め装置
JPH0786377A (ja) * 1993-09-10 1995-03-31 Canon Inc 位置決め装置
JP3196798B2 (ja) * 1993-10-12 2001-08-06 キヤノン株式会社 自重支持装置
JPH10521A (ja) * 1996-06-07 1998-01-06 Nikon Corp 支持装置
JPH1193846A (ja) * 1997-09-18 1999-04-06 Daikin Ind Ltd リニアレシプロ圧縮機のピストン位置検出装置及び検出方法
JPH11154698A (ja) * 1997-11-21 1999-06-08 Nikon Corp テーブル支持装置
JP2000209834A (ja) * 1999-01-08 2000-07-28 Yaskawa Electric Corp ボイスコイル形リニアモ―タ
JP2001297974A (ja) * 2000-04-14 2001-10-26 Canon Inc 位置決め装置
JP2003264134A (ja) * 2002-03-08 2003-09-19 Nikon Corp ステージ制御装置、露光装置、及びデバイス製造方法

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