JP5079540B2 - 形状可変ミラーの製造方法及び形状可変ミラー - Google Patents

形状可変ミラーの製造方法及び形状可変ミラー Download PDF

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Publication number
JP5079540B2
JP5079540B2 JP2008038986A JP2008038986A JP5079540B2 JP 5079540 B2 JP5079540 B2 JP 5079540B2 JP 2008038986 A JP2008038986 A JP 2008038986A JP 2008038986 A JP2008038986 A JP 2008038986A JP 5079540 B2 JP5079540 B2 JP 5079540B2
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Japan
Prior art keywords
sacrificial layer
mirror
mirror surface
piezoelectric
substrate
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Expired - Fee Related
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JP2008038986A
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Japanese (ja)
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JP2009198700A5 (https=
JP2009198700A (ja
Inventor
昌明 羽根渕
和明 澤田
直樹 河津
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Nidek Co Ltd
Toyohashi University of Technology NUC
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Nidek Co Ltd
Toyohashi University of Technology NUC
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Priority to JP2008038986A priority Critical patent/JP5079540B2/ja
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Publication of JP2009198700A5 publication Critical patent/JP2009198700A5/ja
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  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)
  • Optical Elements Other Than Lenses (AREA)
JP2008038986A 2008-02-20 2008-02-20 形状可変ミラーの製造方法及び形状可変ミラー Expired - Fee Related JP5079540B2 (ja)

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JP2008038986A JP5079540B2 (ja) 2008-02-20 2008-02-20 形状可変ミラーの製造方法及び形状可変ミラー

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JP2008038986A JP5079540B2 (ja) 2008-02-20 2008-02-20 形状可変ミラーの製造方法及び形状可変ミラー

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JP2009198700A JP2009198700A (ja) 2009-09-03
JP2009198700A5 JP2009198700A5 (https=) 2011-04-07
JP5079540B2 true JP5079540B2 (ja) 2012-11-21

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Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5988592B2 (ja) 2012-01-19 2016-09-07 キヤノン株式会社 可動ミラー、波面補正デバイスおよび眼底検査装置
JP6613593B2 (ja) 2015-04-01 2019-12-04 セイコーエプソン株式会社 電気光学装置、電気光学装置の製造方法、および電子機器
JP2016194631A (ja) 2015-04-01 2016-11-17 セイコーエプソン株式会社 電気光学装置、電気光学装置の製造方法、および電子機器
JP2016200834A (ja) * 2016-08-10 2016-12-01 キヤノン株式会社 可動ミラー
DE102022211639A1 (de) * 2022-11-04 2024-05-08 Carl Zeiss Smt Gmbh Adaptiver Spiegel mit mechanischer Vermittlerschicht und mikrolithographische Projektionsbelichtunganlage

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3482048B2 (ja) * 1995-09-20 2003-12-22 株式会社堀場製作所 薄膜赤外線センサ
JP2003067969A (ja) * 2001-08-27 2003-03-07 Olympus Optical Co Ltd 光ピックアップ
JP3751937B2 (ja) * 2002-12-06 2006-03-08 関西ティー・エル・オー株式会社 アクチュエータおよびアクチュエータシステム
JP2004281742A (ja) * 2003-03-17 2004-10-07 Japan Science & Technology Agency 半導体素子、半導体センサーおよび半導体記憶素子
JP4487523B2 (ja) * 2003-09-18 2010-06-23 パナソニック株式会社 光学ピックアップ収差補正ミラー
JP2008097683A (ja) * 2006-10-10 2008-04-24 Funai Electric Co Ltd 可変形ミラー及びそれを備えた光ピックアップ装置

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