JP5075106B2 - IC handler - Google Patents

Description

  The present invention relates to an IC handler, and more particularly to an IC handler capable of transferring a plurality of electronic components.

  Conventionally, an IC handler capable of transferring a plurality of electronic components is known (see, for example, Patent Document 1).

  Patent Document 1 discloses an IC handler provided with a device chuck that sucks and holds electronic components to be two DUTs (devices to be measured) and transfers the two sucked DUTs. In this IC handler, it is possible to transfer two DUTs to the inspection socket at a time by adsorbing two DUTs with one device chuck.

JP-A-9-236635

  However, since the IC handler of Patent Document 1 cannot move the two DUTs independently with respect to the device chuck 21, if the two DUTs to be sucked are misaligned, the two DUTs The position cannot be accurately adjusted to the position of each inspection socket.

  Therefore, an IC handler is conceivable in which a plurality of electronic components are moved independently from each other in a horizontal plane so that the position of each electronic component can be accurately adjusted to the position of each inspection socket. However, when considering a configuration in which a plurality of electronic components are moved independently from each other, it is expected that the suction nozzle unit is enlarged and a planar arrangement space of the suction nozzle unit is increased.

  The present invention has been made in order to solve the above-described problems, and one object of the present invention is to suppress the increase in the planar arrangement space of the suction nozzle unit while reducing the size of each electronic component. It is an object of the present invention to provide an IC handler capable of accurately adjusting the position to the position of each inspection socket.

Means for Solving the Problems and Effects of the Invention

In order to achieve the above object, an IC handler according to one aspect of the present invention includes a flat horizontal plate, and holds a unit support that can move in the horizontal and vertical directions, and a suction nozzle that sucks electronic components. A plurality of suction nozzle units including a suction nozzle holding member, and among the plurality of suction nozzle units, in the number of suction nozzle units equal to or less than the number of suction nozzle units, the suction nozzles are connected to the unit support portion. A first direction driving device for moving the suction nozzle in a first direction in a horizontal plane, and a second direction driving device for moving the suction nozzle in a second direction in the horizontal plane intersecting the first direction with respect to the unit support portion. And each suction nozzle unit includes at least a part of the first direction driving device and the second direction driving device as viewed in a plan view. Are arranged so as to overlap with respect to the holding member, the second direction driving device has a second movement motor for moving the suction nozzle in the second direction, in the vicinity of both end portions of the second direction side of the horizontal plate The second direction moving motor is arranged at a substantially central portion on the first direction side of the horizontal plate so as to overlap with the upper side of the horizontal plate when seen in a plan view, in the vicinity of both ends on the first direction side of the horizontal plate. The other second direction moving motor is disposed so as to overlap the lower side of the horizontal plate when seen in a plan view. Here, in the present application, the “IC handler” is used for inspection of an electronic component, and means a component transfer device for transferring the electronic component to a predetermined inspection position.

  In the IC handler according to this aspect, as described above, in the suction nozzle units of the plurality of suction nozzle units, the number of suction nozzle units is the same as or less than the number of suction nozzle units, and the suction nozzles are arranged in the first direction in the horizontal plane. By providing each suction nozzle unit with a first direction drive device for moving and a second direction drive device for moving the suction nozzle in the second direction in the horizontal plane, each suction nozzle unit is sucked. Since each electronic component can be moved in the first direction and the second direction independently of each other, the position of each electronic component can be changed to the position of each inspection socket even when the sucked electronic component is displaced. Can be accurately matched to. Further, by arranging at least a part of the first direction driving device and the second direction driving device so as to overlap with the suction nozzle holding member in a plan view, each electronic component is individually and independently provided. Even if a configuration for moving in the first direction and the second direction is provided, it is possible to suppress an increase in the planar arrangement space of the suction nozzle unit. As a result, the position of each electronic component can be accurately adjusted to the position of each inspection socket while suppressing an increase in the planar arrangement space of the suction nozzle unit.

  In the IC handler according to the above aspect, preferably, the first direction driving device has a first portion arranged so as to overlap the lower side of the unit support portion in a plan view, and the second direction driving device. Has a second part arranged so as to overlap the lower side of the first part of the first direction driving device in plan view, and has a second part of the second direction driving device in plan view. The rotary drive device further includes a third drive portion arranged to overlap the lower side, the first portion of the first direction drive device, the second portion of the second direction drive device, and the third portion of the rotary drive device. Are arranged so as to overlap with the suction nozzle holding member in plan view. If comprised in this way, a unit support part, the 1st part of a 1st direction drive device, the 2nd part of a 2nd direction drive device, the 3rd part of a rotation drive device, and a suction nozzle holding member will overlap in the up-and-down direction. Since it arrange | positions in the state which carried out, the planar arrangement | positioning space of a suction nozzle unit can be made smaller.

In this case, preferably, the first direction driving device further includes a first driving mechanism unit for moving the suction nozzle in the first direction, and a part of the first driving mechanism unit is seen in a plan view, It arrange | positions so that it may overlap with the upper side of a horizontal plate . If comprised in this way, the 1st part of a 1st direction drive device, the 2nd part of a 2nd direction drive device, the 3rd part of a rotation drive device, and adsorption | suction using the area | region below a unit support part In addition to the nozzle holding member being arranged in the state of being overlapped in the vertical direction, a part of the first drive mechanism part and the second drive mechanism part of the second drive mechanism part are utilized by utilizing the area above the horizontal plate of the unit support part. Since the second direction moving motor is arranged in a state where it overlaps the horizontal plate, it is possible to further suppress an increase in the planar arrangement space of the suction nozzle unit.

In the configuration in which the first direction driving device has the first portion, preferably, the first direction driving device includes a first guide member extending in the first direction and a first ball screw extending in the first direction rotatably supported. A shaft, a first direction moving motor for rotating the first ball screw shaft, a first ball nut screwed to the first ball screw shaft, and arranged so as to overlap the lower side of the unit support portion in plan view And a first direction moving member that holds the first ball nut and moves in the first direction relative to the unit support portion when the first ball screw shaft is rotated by the first direction moving motor . If comprised in this way, since a 1st direction movement member can be moved in the position which overlaps under a unit support part, seeing planarly, when a 1st direction movement member moves, a unit support part's Protruding from the arrangement space can be suppressed.

In the configuration in which the first direction driving device includes the first direction moving member, the second direction driving device preferably includes a second guide member extending in the second direction in addition to the second direction moving motor, and a second direction. a second ball screw shaft extending in a second direction which is rotatably supported to be rotated by a driving motor, a second ball nut screwed to the second ball screw shaft, in plan view, a first direction moving member The second ball screw shaft is arranged so as to overlap with the lower side, and the second ball screw shaft is rotated by the second direction moving motor to move in the second direction with respect to the first direction moving member. And a second direction moving member. If comprised in this way, since a 2nd direction movement member can be moved in the position which overlaps with both a unit support part and a 1st direction movement member, a 2nd direction movement member moves in planar view. In this case, it is possible to prevent the unit support portion and the first direction moving member from protruding from the arrangement space.

In the aforementioned structure in which the first direction drive device having a first portion, preferably, the first direction driving equipment includes a first guide member extending in a first direction, a stator extending in a first way direction, the stator and the movable element which is disposed opposite to, in a plan view, movement is arranged so as to overlap the lower side of the unit supporting portion, while being movably held in the first guide member to hold the movable element The stator or the mover is made of a first coil, the other of the stator or the mover is made of a permanent magnet or a second coil, and voltage is applied to at least the first coil. by the applied, the movable member is configured to move the first hand direction relative to the unit support portion for holding the movable element. With this configuration, the moving member can be moved with a simpler structure than the structure using a motor, a ball screw shaft, and a ball nut, and the moving member is supported by the unit when moving in a plan view. It can suppress that it protrudes from the arrangement space of a part.

  In the IC handler according to the above aspect, it is preferable that the plurality of suction nozzle units individually move the suction nozzles in the first direction and the second direction independently and support the units as the unit support portion moves. It is comprised so that it may move to a perpendicular direction integrally with a part. If comprised in this way, since each suction nozzle can be moved to a perpendicular direction integrally with a unit support part using the vertical direction drive device for moving a unit support part to a perpendicular direction, It is not necessary to separately provide a driving device for moving in the vertical direction in each suction nozzle unit. Thereby, it can suppress that a structure becomes complicated.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

(First embodiment)
FIG. 1 is a plan view showing the overall configuration of the IC handler according to the first embodiment of the present invention. 2 to 10 are diagrams for explaining the configuration of the IC handler shown in FIG. The configuration of the IC handler 1 according to the first embodiment of the present invention will be described with reference to FIGS.

  As shown in FIG. 1, the IC handler 1 constitutes a component test apparatus 100 together with the test apparatus main body 2. The IC handler 1 has a function of taking out an electronic component stored in the tray and transferring it to a test head 2a (to be described later) of the test apparatus body 2. The IC handler 1 is configured to sort inspected parts after being inspected by the test head 2a according to the inspection result.

  Further, the IC handler 1 has a rectangular outer shape when seen in a plan view. Further, the IC handler 1 includes a plurality of tray storage units 10 to 13, a tray transfer unit 20, a component take-out unit 30, a component storage unit 40, a component supply unit 50, and a component discharge unit 60 on the base 1 a. And a head unit support portion 70.

  The tray storage unit includes two unexamined tray storage units 10, an empty tray storage unit 11, two good component tray storage units 12, and a defective component tray storage unit 13. The uninspected tray storage unit 10 is configured to store a tray on which uninspected parts are placed. The empty tray storage unit 11 is configured to store an empty tray on which no parts are placed. The non-defective component tray storage unit 12 is configured to store a non-defective component tray on which a non-defective component determined to be non-defective by inspection is placed. The defective component tray storage unit 13 is configured to store a defective component tray on which defective components determined to be defective by inspection are placed. In addition, the tray storage units 10 to 13 are arranged in parallel in the X direction in the vicinity of one end of the IC handler 1 in the Y direction when viewed in plan. On the base 1a, a hot plate 14 is provided on which a heater for heating the components to be placed is arranged. The X direction and the Y direction are two directions orthogonal to each other in the horizontal plane.

  Moreover, these tray storage parts 10-13 are each comprised so that accommodation is possible in the state which accumulated the some tray. Further, in the tray storage units 10 to 13, only the uppermost tray is exposed on the base 1 a and the other trays are arranged below the upper surface of the base 1 a. Specifically, each of the tray storage units 10 to 13 has a table (not shown), and by moving the table up and down, a plurality of trays stacked on the table are arranged one by one on the base 1a. It is configured.

  The tray transfer unit 20 has a function of transporting an empty tray between the tray storage units 10 to 13. Specifically, the tray transfer unit 20 is configured to transfer a tray that has been emptied by taking out electronic components from the unexamined tray storage unit 10 to the uppermost position of the empty tray storage unit 11. . The tray transfer unit 20 is configured to transfer the empty tray from the uppermost stage of the empty tray storage part 11 to the uppermost stage of the good parts tray storage part 12, the defective part tray storage part 13 or the other tray storage part 14. ing. As a result, it is possible to place an empty tray on top of a tray filled with a predetermined number of inspected parts in each of the tray storage units 12 and 13. In addition, the tray transfer unit 20 extends below the rail member support frame 341 described later and extends in the X direction, and is driven by a rail member 21 positioned below the rail member 32 described later and a driving device (not shown). The head portion 22 is movable along the rail member 21 in the X direction. Further, the tray transfer unit 20 moves the head unit 22 in the X direction while adsorbing the empty tray disposed at the uppermost stage by a vacuum pad (not shown) provided in the head unit 22, thereby moving the tray. It is configured to be transferred to another tray storage unit arranged in parallel in the X direction.

  The component extraction unit 30 has a function of extracting uninspected components from the trays of the uninspected tray storage units 10 and 11 and transferring them onto a shuttle 51 (to be described later) of the component supply unit 50. Further, the component take-out portion 30 is formed to extend in the Y direction, one rail member 31 supported by the rail member support frame 341, and to extend in the X direction, and both end portions are supported by the rail member 31 respectively. A support member 32 and a head portion 33 attached to the support member 32. The support member 32 is driven by a drive device (not shown) and is configured to linearly move in the Y direction along the left and right rail members 31. The head portion 33 is driven by a drive device (not shown) and is configured to linearly move along the support member 32 in the X direction. The head unit 33 is equipped with four suction nozzle units 34 that can suck electronic components. Then, the component take-out unit 30 moves the head unit 33 in the X direction and the Y direction, and removes the uninspected component adsorbed by the adsorption nozzle unit 34 from the uppermost tray of the uninspected tray storage unit 10. It is configured to transfer to a predetermined position on the shuttle 51 located at 51a (see FIG. 1). It should be noted that parts that need to be inspected at a predetermined temperature higher than normal temperature are not transferred directly from the uninspected tray storage unit 10 onto the shuttle 51, and the electronic parts are temporarily placed on the hot plate 14. The electronic components that have been placed and have been heated to a desired temperature after a predetermined time have elapsed after being placed are sucked by the suction nozzle unit 34 and transferred onto the shuttle 51 located at the component receiving position 51a.

  The component storage unit 40 has a function of taking out inspected components from a shuttle 61 (to be described later) of the component discharge unit 60 and transferring them to one of the tray storage units 12 or 13. In addition, the component storage portion 40 is formed to extend in the Y direction, one rail member 41 supported by the rail member support frame 341, and to extend in the X direction, and both end portions are supported by the rail member 41, respectively. A support member 42 and a head portion 43 attached to the support member 42. The support member 42 is driven by a drive device (not shown) and is configured to linearly move in the Y direction along the left and right rail members 41. The head portion 43 is driven by a driving device (not shown) and is configured to linearly move along the support member 42 in the X direction. The head portion 43 is equipped with four suction nozzle units 44 that can suck electronic components. Then, the component storage unit 40 moves the head unit 43 in the X direction and the Y direction, and moves the inspected components sucked by the suction nozzle unit 44 from the shuttle 61 located at the component delivery position 61a to the tray storage units 12 and 13. It is comprised so that it may transfer to one of the trays located in the uppermost stage. Specifically, the component storage unit 40 transfers electronic components determined to be good components as a result of the inspection from the shuttle 61 to the tray of the good component tray storage unit 12, and shuttles electronic components determined to be defective components. It is configured to transfer from 61 to the tray of the defective component tray storage unit 13.

  The component supply unit 50 has a function of transferring uninspected components received at the component receiving position 51a to the component delivery positions 51b (see FIG. 2) and 51c. Moreover, the component supply part 50 has the shuttle 51 which can mount eight untested components, and the rail member 52 extended in a Y direction. The shuttle 51 is driven by a drive device (not shown) so as to linearly move along the rail member 52 in the Y direction. Thereby, the component supply part 50 can convey eight untested components from the component receiving position 51a to the component delivery position 51b (refer FIG. 2) or 51c at a predetermined timing. Further, the component supply unit 50 is configured to prevent the uninspected component to be placed from being displaced on the shuttle 51 by driving a vacuum device (not shown) when moving the shuttle 51 in the Y direction. Has been.

  The component discharge unit 60 has a function of transferring the inspected components received at the component receiving positions 61b and 61c (see FIG. 2) to the component delivery position 61a (see FIG. 1). The component discharging unit 60 includes a shuttle 61 on which eight inspected components can be placed, and a rail member 62 extending in the Y direction. The shuttle 61 is driven by a drive device (not shown) and is configured to linearly move in the Y direction along the rail member 62. Thereby, the component discharge part 60 can convey the eight inspected components from the component receiving position 61b or 61c (see FIG. 2) to the component delivery position 61a at a predetermined timing. In addition, the component discharging unit 60 is configured to prevent the inspected component to be placed from being displaced on the shuttle 61 by driving a vacuum device (not shown) when moving the shuttle 61 in the Y direction. Has been.

  The head unit support part 70 is a test of the test apparatus main body 2 described later, in which the untested parts transferred to the parts delivery position 51b (see FIG. 2) or 51c by the shuttle 51 of the parts supply part 50 are exposed on the surface of the base 1a. It is configured to be transferred to the head 2a. Furthermore, the head unit support part 70 is configured to transfer the inspected parts on the test head 2a to the shuttle 61 of the part discharge part 60 located at the part receiving position 61b or 61c (see FIG. 2). The head unit support portion 70 includes a pair of rail members 71 extending in the Y direction, a support member 72 formed so as to extend in the X direction, and two head units 80 and 90 each capable of sucking eight electronic components. And have. The pair of rail members 71 are disposed in the vicinity of both ends on the X direction side of the base 1a. The support member 72 is configured so that the vicinity of both ends on the X direction side is supported by the rail member 71 and is driven by a drive device (not shown) to linearly move along the rail member 71 in the Y direction. ing. The support member 72 has two rail members 72a and 72b extending in the X direction.

  The head units 80 and 90 are arranged on both sides of the support member 72 in the Y direction so as to sandwich the support member 72, respectively. The head unit 80 is slidably provided on the rail member 72a of the support member 72, and is driven by a driving device (not shown) so as to linearly move in the X direction along the rail member 72a. . The head unit 90 is slidably provided on the rail member 72b of the support member 72, is driven by a driving device (not shown), and is configured to linearly move in the X direction along the rail member 72b. That is, the head units 80 and 90 are configured to move integrally in the Y direction as the support member 72 moves, and to move independently from each other in the X direction.

  Further, as shown in FIG. 2, the head unit 80 removes uninspected components from the shuttle 51 at the component delivery position 51b while the electronic components transferred by the head unit 90 are inspected by the test head 2a. It is configured to take out and move in the X direction so as to pass over the imaging device 1b provided on the surface of the base 1a. Further, as shown in FIG. 1, the head unit 90 takes out uninspected parts from the shuttle 51 at the parts delivery position 51c while the electronic parts transferred by the head unit 80 are inspected by the test head 2a. Thus, it is configured to move in the X direction so as to pass over the imaging device 1c provided on the surface of the base 1a. Thereby, while the electronic component transferred to the test head 2a is inspected by one of the head units 80 and 90, the electronic component attracted to the head unit 80 and 90 is detected by the imaging device 1b or the imaging device 1c. It is possible to confirm the positional deviation of the electronic component by taking an image. The head units 80 and 90 have the same configuration. Therefore, in the following, a detailed configuration of the head unit 80 will be described, and a detailed description of the head unit 90 will be omitted.

  Here, in the first embodiment, as shown in FIGS. 3 to 5, the head unit 80 includes a base member 81 (see FIGS. 1 and 2) and a unit support portion 82 (see FIGS. 3 and 4). 8 X-direction drive devices 83, 8 Y-direction drive devices 84, 8 R-axis drive devices 85, 8 head portions 86, suction negative pressure supply portion 87 (see FIG. 3), 2 Two lower imaging devices 88. In addition, one suction nozzle unit 89 is configured by one X-direction drive device 83, one Y-direction drive device 84, one R-axis drive device 85, and one head portion 86. That is, in the head unit 80, eight suction nozzle units 89 are mounted on a base member 81 that is movably attached to the rail member 72a. The X direction driving device 83 is an example of the “first direction driving device” in the present invention, and the Y direction driving device 84 is an example of the “second direction driving device” in the present invention. The R-axis drive device 85 is an example of the “rotation drive device” in the present invention.

  As shown in FIGS. 3 to 7, the unit support portion 82 is a shaft support that supports a base plate 821 (see FIGS. 3 and 4), a horizontal plate 822, a vertical plate 823, and an X-direction ball screw shaft 832b described later. Part 824 (see FIG. 7). The base plate 821 is configured to be movable up and down with respect to the base member 81 by an elevating drive unit 821b including a ball screw 821a (see FIG. 3) extending in the Z direction and a guide rail (not shown). The base plate 821 is attached to the horizontal plate 822 via an angle member (not shown) at the lower end. Then, when the base plate 821 is moved up and down in the Z direction, eight suction nozzle units 89 including the X direction driving device 83, the Y direction driving device 84, the R axis driving device 85, and the head portion 86 are interposed via the horizontal plate 822. And the two lower imaging devices 88 are moved up and down integrally.

  The horizontal plate 822 has a flat plate shape and is disposed so as to overlap the lower side of the base plate 821 when seen in a plan view. Further, as shown in FIG. 8, the horizontal plate 822 has protrusions 822 a that protrude downward from both ends on the Y direction side and the central portion on the Y direction side. Each of the three protrusions 822a is formed to extend in the X direction.

  As shown in FIGS. 3 to 7, the vertical plate 823 is attached to both side surfaces on the X direction side of the horizontal plate 822 and is formed to extend in the Y direction. Further, as shown in FIG. 7, the vertical plate 823 has a height larger than the thickness of the horizontal plate 822 and is disposed so as to protrude downward from the lower surface of the horizontal plate 822. Further, as shown in FIG. 7, the shaft support portion 824 is provided so as to protrude downward from the lower surface of the horizontal plate 822 at the center portion on the X direction side of the horizontal plate 822. The shaft support portion 824 is formed to extend in the Y direction.

  Each of the eight X-direction drive devices 83 has the same configuration, and the suction nozzles 868 (see FIG. 10) arranged on the lower side of each of the eight X-direction drive devices 83 are independent of each other with respect to the horizontal plate 822 in the X direction. It has a function to move. In addition, as shown in FIGS. 7 and 8, the eight X-direction drive devices 83 include an X-direction slide portion 831 (see FIG. 8), an X-direction drive mechanism portion 832, an X-direction moving member 833, and X direction ball nut 834. The X-direction drive mechanism portion 832 is an example of the “first drive mechanism portion” in the present invention, and the X-direction moving member 833 is an example of the “first portion” and the “first direction moving member” in the present invention. It is. The X-direction ball nut 834 is an example of the “first ball nut” in the present invention.

  As shown in FIG. 8, the X-direction slide portion 831 includes an X-direction guide rail 831a extending in the X direction and an X-direction slider 831b slidable on the X-direction guide rail 831a. Four X-direction guide rails 831a are provided as a whole, and one X-direction guide rail 831a is arranged on each lower surface of the protrusions 822a provided at both ends of the horizontal plate 822 on the Y-direction side. Two are arranged on the lower surface. The X-direction guide rail 831a is provided over substantially the entire length of the horizontal plate 822 in the X direction. Two X-direction guide rails 831a are used for each X-direction drive device 83. Specifically, as shown in FIG. 8, the two X-direction guide rails 831a on the Y1 direction side are also used by four X-direction drive devices 83 arranged in parallel in the X direction on the Y1 direction side. The two X-direction guide rails 831a on the Y2 direction side are also used by four X-direction drive devices 83 arranged in parallel in the X direction on the Y2 direction side. Two X-direction sliders 831 b are provided for each X-direction drive device 83. Further, the X-direction slider 831b has a pair of claw portions that engage with the groove portions extending in the X direction provided on both side surfaces of the X-direction guide rail 831a. The directional guide rail 831a is configured to slide in the X direction. Further, the movement of the X-direction slider 831b in the Y direction is restricted by the X-direction guide rail 831a, and the movement in the Z direction is restricted by engaging the claw portion with the groove portion. The X-direction guide rail 831a is an example of the “first guide member” in the present invention.

Each X-direction drive mechanism portion 832 has an X-direction motor 832a, an X-direction ball screw shaft 832b extending in the X direction, two pulleys 832c (see FIG. 7), and a timing belt 832d (see FIG. 7). is doing. As shown in FIG. 6, the X-direction motor 832a is a servo motor, and is disposed on the upper side so as to overlap the horizontal plate 822 in plan view in the vicinity of both end portions on the X-direction side of the horizontal plate 822. . Specifically, four X direction motors 832a are arranged in parallel in the Y direction in the vicinity of both ends on the X direction side of the horizontal plate 822. Further, as shown in FIGS. 6 and 7, the X-direction motor 832a is fixed to the vertical plate 823 via a mounting plate 832e. The X direction motor 832a is an example of the “ first direction moving motor ” in the present invention, and the X direction ball screw shaft 832b is an example of the “first ball screw shaft” in the present invention.

  As shown in FIGS. 7 and 8, the X-direction ball screw shaft 832b is disposed so as to overlap the lower side of the horizontal plate 822 when viewed in plan. The X direction ball screw shafts 832b are arranged in parallel in two rows in the X direction and four in the Y direction. Specifically, as shown in FIG. 8, two X direction ball screw shafts 832b are arranged between two X direction guide rails 831a. Further, as shown in FIG. 7, the X-direction ball screw shaft 832b is rotatably supported by the vertical plate 823 in the vicinity of one end portion and is rotatably supported by the shaft support portion 824. The two pulleys 832c are attached to the output shaft of the X direction motor 832a and one end of the X direction ball screw shaft 832b, respectively. The timing belt 832d is wound around two pulleys 832c. The two pulleys 832c and the timing belt 832d are covered with a cover 832f. With the above configuration, the X-direction drive mechanism 832 is configured to transmit the rotational drive of the X-direction motor 832a to the X-direction ball screw shaft 832b via the two pulleys 832c and the timing belt 832d. As a result, the X-direction ball screw shaft 832b can be rotated.

  As shown in FIG. 8, the X-direction moving member 833 has a rectangular shape when viewed from the X-direction side, and is disposed so as to be suspended below the two X-direction sliders 831b. Further, each X-direction moving member 833 is disposed so as to overlap the lower side of the horizontal plate 822 when viewed in plan. Further, the X-direction moving member 833 is formed in a hollow shape. An oil receiver 900 is inserted and disposed in the hollow portion of the X-direction moving member 833, and both ends are held by the vertical plate 823. Further, as shown in FIGS. 7 and 8, the X-direction moving members 833 are arranged in parallel in two rows in the Y direction and four in the X direction. Further, as shown in FIG. 8, the X direction moving member 833 has both end portions on the Y direction side fixed to the X direction slider 831b. As a result, the X-direction moving member 833 is suspended from the X-direction guide rail 831a via the two X-direction sliders 831b.

  The X direction ball nut 834 is configured to be screwed to the X direction ball screw shaft 832b. In addition, eight X-direction ball nuts 834 are provided as a whole, and each X-direction ball nut 834 is screwed into a separate X-direction ball screw shaft 832b. Further, each X direction ball nut 834 is attached to and held by a separate X direction moving member 833. Accordingly, by rotating the X direction ball screw shafts 832b, the X direction moving members 833 suspended from the X direction guide rails 831a via the X direction ball nuts 834 are independent from each other with respect to the horizontal plate 822. Thus, it can be moved in the X direction.

  Each of the eight Y-direction drive devices 84 has the same configuration, and each suction nozzle 868 (see FIG. 10) disposed on the lower side of each of the Y-direction drive devices 84 is independent of the X-direction moving member 833. It has a function of moving in the Y direction. Further, as shown in FIG. 7 and FIG. 8, a Y-direction slide portion 842 (FIG. 7) is attached. Each of the eight Y-direction drive devices 84 includes a Y-direction slide portion 842 (see FIG. 7), a Y-direction drive mechanism portion 843, a Y-direction ball nut 844, and a head mounting member 845 that is movable in the Y-direction. It is configured. The Y-direction drive mechanism 843 is an example of the “second drive mechanism” in the present invention, and the Y-direction ball nut 844 is an example of the “second ball nut” in the present invention. The head mounting member 845 is an example of the “second portion” and the “second direction moving member” in the present invention.

  As shown in FIG. 7, the support member 841 has a substantially U shape when viewed from the Y direction side, and is disposed so that the opening portion faces downward. Further, the head mounting member 845 serving as the Y-direction moving member is disposed so as to overlap the X-direction moving member 833 when viewed in plan.

  As shown in FIG. 7, the Y-direction slide portion 842 is configured in a cross roller system, extends in the Y-direction, and can be regarded as a part of the support member 841, an inner slider 842b, and a cylinder (not shown). And a shaft member having a shape. The outer slider 842a is an example of the “second guide member” in the present invention. Further, the outer slider 842a is formed so as to extend in the Y direction, and is attached and fixed to the lower surfaces of both end portions of the support member 841 extending downward as viewed from the Y direction. A V-shaped groove extending in the Y direction is formed on the inner side surface of the outer slider 842a. The inner slider 842b is formed to extend in the Y direction, and is attached to the head attachment member 845. The inner slider 842b is disposed adjacent to the outer slider 842a, and a V-shaped groove extending in the Y direction is formed on the outer side surface of the inner slider 842b so as to face the groove of the outer slider 842a. Yes. Further, the outer slider 842a and the inner slider 842b are arranged so as to sandwich a cylindrical shaft member (not shown) extending in the Y direction between the opposing groove portions. Accordingly, the inner slider 842b can slide in the Y direction with respect to the outer slider 842a. Further, by sandwiching the shaft member from both sides by the V-shaped groove, the outer slider 842a and the inner slider 842b are restricted from being displaced in the Z direction.

Each Y-direction drive mechanism 843 includes a Y-direction motor 843a, a Y-direction ball screw shaft 843b extending in the Y direction, two pulleys 843c (see FIG. 8), and a timing belt 843d (see FIG. 8). is doing. The Y direction motor 843a is an example of the “ second direction moving motor ” in the present invention, and the Y direction ball screw shaft 843b is an example of the “second ball screw shaft” in the present invention. As shown in FIG. 6, the Y-direction motor 843 a is a servo motor and is disposed near both ends of the horizontal plate 822 on the Y-direction side. Specifically, two Y-direction motors 843a are arranged in parallel on the upper side so as to overlap the horizontal plate 822 when viewed in plan in the vicinity of both ends on the Y-direction side of the horizontal plate 822, and the other two. Two Y-direction motors 843a are arranged on the lower side so as to overlap the horizontal plate 822 when seen in a plan view. More specifically, two Y-direction motors 843a are disposed on the upper side of the horizontal plate 822 in the vicinity of both ends on the Y-direction side of the horizontal plate 822, at substantially the center portion on the X-direction side. One Y-direction motor 843a is disposed on the lower side of the horizontal plate 822 in the vicinity of both ends. Further, the Y-direction motor 843a disposed below the horizontal plate 822 is disposed adjacent to the support member 841 as shown in FIG. Further, as shown in FIGS. 6 and 8, the Y-direction motor 843a is fixed to the X-direction moving member 833 via a mounting plate 843e.

  As shown in FIGS. 7 and 8, the Y-direction ball screw shaft 843b is disposed at a position surrounded by the substantially U-shaped support member 841, and on the lower side of the X-direction moving member 833 as viewed in plan. They are arranged so as to overlap. The Y direction ball screw shafts 843b are arranged in parallel in two rows in the Y direction and four in the X direction. Further, as shown in FIG. 8, the Y-direction ball screw shaft 843 b is rotatably supported by a portion extending downward in the shape of a wall of the support member 841 in the vicinity of both ends. The two pulleys 843c are respectively attached to the output shaft of the Y direction motor 843a and one end of the Y direction ball screw shaft 843b. The timing belt 843d is wound around two pulleys 843c. With the configuration described above, the Y-direction drive mechanism 843 is configured to transmit the rotational drive of the Y-direction motor 843a to the Y-direction ball screw shaft 843b via the two pulleys 843c and the timing belt 843d. Thereby, the Y-direction ball screw shaft 843b can be rotated.

  The Y direction ball nut 844 is configured to be screwed onto the Y direction ball screw shaft 843b. In addition, eight Y-direction ball nuts 844 are provided as a whole, and each Y-direction ball nut 844 is screwed into a separate Y-direction ball screw shaft 843b.

  As shown in FIGS. 7 and 9, the head mounting member 845 has a substantially T shape when viewed from the Y direction, and is formed to extend in the Y direction. Further, the head mounting member 845 is disposed such that the central convex portion on the X direction side is located on the upper side, and the upper end surface of the convex portion is fixed to the Y direction ball nut 844. Further, inner sliders 842b are attached to both side surfaces of the convex portion of the head attachment member 845, respectively. As a result, the head mounting member 845 is suspended from the support member 841 by the Y-direction slide portion 842. Thereby, by rotating each Y direction ball screw shaft 843b, each head mounting member 845 integrated with each Y direction ball nut 844 together with each inner slider 842b is made independent of each other with respect to the X direction moving member 833. It is possible to move in the Y direction.

  Each of the eight R-axis drive devices 85 has the same configuration, and the suction nozzles 868 (see FIG. 10) arranged on the lower side of each of the eight R-axis drive devices 85 are independent of each other, and the central axes R ( It has a function of rotating around the rotation center (see FIG. 10). Further, each R-axis drive device 85 includes an R-direction motor 851a, two pulleys 851b, and a timing belt 851c, as shown in FIG. The R-direction motor 851a is a servo motor, and is disposed below the head mounting member 845. Specifically, the R-direction motor 851a is disposed below the head mounting member 845 and adjacent to a later-described cylinder portion 861 of the head portion 86. Further, as shown in FIGS. 3 to 5 and 10, the R-direction motor 851 a is attached to a later-described cylinder portion 861 of the head portion 86 via an attachment plate 851 d. As shown in FIG. 10, the two pulleys 851b are attached to an output shaft of the R-direction motor 851a and a shaft portion 862 described later of the head portion 86, respectively. Further, the pulley 851b attached to the shaft portion 862 is disposed so as to overlap the lower side of the head attachment member 845 when seen in a plan view. The timing belt 851c is wound around two pulleys 851b. With the above-described configuration, the R-axis drive device 85 is configured to transmit the rotational drive of the R-direction motor 851a to the shaft portion 862, which will be described later, via the two pulleys 851b and the timing belt 851c. Thereby, the suction nozzle 868 can be rotated about the central axis R through the shaft portion 862. The pulley 851b is an example of the “third portion” in the present invention.

  The head portion 86 is attached to the head attachment member 845 and has a function of holding the suction nozzle 868. The head portion 86 includes a tube portion 861, a shaft portion 862, two adapters 863 and 864, a head member 865, and a suction nozzle holding member 866.

  The cylindrical portion 861 has a substantially rectangular shape when seen in a plan view, and is formed in a hollow cylindrical shape. Further, the cylindrical portion 861 is attached to the lower surface of the head attachment member 845, and is disposed at a position overlapping the head attachment member 845 when seen in a plan view. The shaft portion 862 is inserted into the tube portion 861 and is rotatably supported with respect to the tube portion 861 by a bearing portion 867 within the tube portion 861. A pulley 851b of the R-axis drive device 85 is attached near the lower end of the shaft portion 862. Thus, by driving the R-direction motor 851a, the shaft portion 862 can be rotated via the pulley 851b. A columnar adapter 863 is disposed below the shaft portion 862, and a columnar adapter 864 is disposed below the adapter 863.

  The head member 865 has an octagonal outer shape and is provided under the adapter 864. Further, the head member 865 is disposed so as to overlap the pulley 851b of the R-axis drive device 85 attached to the shaft portion 862 when viewed in a plan view. The head member 865 is formed in a hollow cylindrical shape. Further, a suction nozzle holding member 866 is inserted and held inside the head member 865. Thereby, the suction nozzle holding member 866 is disposed at a position overlapping the pulley 851b of the R-axis drive device 85 attached to the shaft portion 862 when seen in a plan view. Accordingly, the X-direction moving member 833 of the X-direction driving device 83, the head mounting member 845 of the Y-direction driving device 84, and the pulley 851b of the R-axis driving device 85 attached to the shaft portion 862 are each viewed in a plan view. The suction nozzle holding member 866 is disposed so as to overlap. Further, the horizontal plate 822, the X-direction ball screw shaft 832b, the X-direction moving member 833, the support member 841, the Y-direction ball screw shaft 843b, the head mounting member 845, and the R-axis drive device attached to the shaft portion 862. The 85 pulley 851b and the head portion 86 are disposed so as to overlap each other when seen in a plan view. Further, a suction nozzle 868 is attached to the suction nozzle holding member 866 so as to be inserted into the inside from the lower side.

  Further, the suction nozzle holding member 866 and the suction nozzle 868 are slidable integrally with the head member 865 in the vertical direction (Z direction). Further, a compression coil spring 869 is provided at the upper end of the suction nozzle holding member 866 inside the head member 865. Thus, a buffing function (impact mitigation function) against a reaction force from the lower side to the suction nozzle 868 when the suction nozzle 868 is pressed against an inspection socket of the test head 2a to be described later via an electronic component. Has come to work. Further, the suction nozzle 868 rotates around the central axis R integrally with the shaft portion 862, the adapters 863 and 864, the head member 865, and the suction nozzle holding member 866 by rotating the shaft portion 862. It is configured to be. Further, the suction nozzle 868 is formed in a hollow cylindrical shape, and is configured such that a suction force acts on the lower end portion due to an internal negative pressure. As a result, the electronic component can be sucked by the lower end portion of the suction nozzle 868. The suction nozzle 868 is configured such that the negative pressure supplied from the suction negative pressure supply unit 87 (see FIG. 3) is reached via the air passage 865a (see FIG. 10) of the head member 865 or the like. ing.

  With the configuration as described above, the eight suction nozzles 868 can be moved in the X direction and the Y direction with respect to the unit support portion 82 independently of each other, and each central axis R can be moved independently of each other. It can be rotated as a rotation center. As a result, even when the electronic component sucked by each suction nozzle 868 is displaced, each suction nozzle 868 is independently moved and rotated to change the position of the electronic component to the position of the test socket of the test head 2a. It is possible to match with the accuracy.

  The two lower imaging devices 88 are used for confirming the electronic component placement position of the shuttles 51 and 61 and confirming the position of the inspection socket of the test head 2a, respectively.

  The test apparatus main body 2 is configured to be detachable from the IC handler 1, and is disposed so as to overlap the lower side of the IC handler 1 when mounted. The test apparatus main body 2 has a test head 2a, and eight test sockets (not shown) are provided on the test head 2a. Further, the test apparatus main body 2 is configured to inspect the electronic component pressed by the eight inspection sockets.

  Next, the operation of the IC handler 1 according to the first embodiment of the present invention will be described with reference to FIG. 1 and FIG.

  First, four electronic components are picked up and taken out from the uppermost tray of the uninspected tray storage portion 10 by the four suction nozzle units 34 of the component pickup portion 30. Then, the four uninspected parts taken out are moved by the part take-out unit 30 and placed at predetermined positions on the shuttle 51 located at the part receiving position 51a shown in FIG. By repeating this operation twice, eight untested parts are placed on the shuttle 51. Thereafter, the shuttle 51 is transferred to the component delivery position 51b shown in FIG. At this time, the head unit 90 is positioned above the test head 2a, and the electronic component sucked by the head unit 90 is inspected. When the head unit 80 is located above the test head 2a and the electronic component sucked by the head unit 80 is being inspected, the shuttle 51 is transferred to the component delivery position 51c. Further, when the shuttle 51 is transferred, the vacuum device is driven to prevent displacement of electronic components on the shuttle 51.

  Next, the head unit 80 is moved above the component delivery position 51b, and the eight uninspected components placed on the shuttle 51 are sucked and taken out by the eight suction nozzle units 89 of the head unit 80. Then, the head unit 80 is moved in the X direction and disposed at the approximate center of the base 1a on the X direction side. At this time, when the head unit 80 passes above the imaging device 1b, the eight electronic components sucked by the suction nozzle unit 89 are picked up, and the positional deviation of the components is detected. When the inspection of the electronic component on the other head unit 90 side is completed and the inspected component is raised, the head unit 80 moves along with the movement of the support member 72 in the Y direction as shown in FIG. 90 and moved in the Y direction integrally with the test head 2a. As a result, the head unit 90 can be moved above the X-direction right-hand component receiving position 61b or to the X-direction left-hand component receiving position 51c. Note that the lower imaging devices 88 of the head units 80 and 90 are on the shuttle 51 at the parts delivery positions 51b and 51c in the adjustment of the IC handler at the time of factory shipment, periodic inspection, or at the start of inspection of each inspection lot. It is used for mark detection, mark detection on the shuttle 61 at the component receiving positions 61b and 61c, and the amount of movement of the shuttles 51 and 61 on the rail members 52 and 62 in the drive control by each drive device (not shown) Adjustment is performed corresponding to the head units 80 and 90. Further, at the start of inspection of each inspection lot, the lower imaging devices 88 of the head units 80 and 90 detect the positions of the eight inspection sockets of the test head 2a in association with the head units 80 and 90, and the detection result is It is stored in the memory of a control device (not shown).

  Thereafter, based on the detection result of the misalignment of the sucked electronic component, the positions of the eight test sockets of the test head 2a detected and stored (in this case, the data detected by the lower imaging device 88 of the head unit 80) ), The position and orientation of each sucked electronic component are corrected. Specifically, based on the detection result of the displacement, the suction nozzle unit 89 is moved in the X direction by the X direction driving device 83, moved in the Y direction by the Y direction driving device 84, and rotated by the R axis driving device 85. By being moved, the position and orientation of each electronic component are adjusted independently of each other. Then, the eight suction nozzle units 89 are lowered integrally with the unit support portion 82 by the lifting drive unit 821b, and the electronic components sucked by the lower end portions of the suction nozzles 868 are pressed by the corresponding inspection sockets. The

  When the inspection is completed, the eight suction nozzle units 89 are raised together with the unit support portion 82 while sucking the inspected parts. As the support member 72 moves in the Y direction, the head unit 80 moves in the Y direction integrally with the head unit 90 that moves in the Y direction toward the upper side of the test head 2a. Thereafter, as shown in FIG. 2, the head unit 80 is moved in the X direction and disposed above the component receiving position 61c. Then, the eight inspected parts sucked by the suction nozzle unit 89 are transferred to a predetermined position on the shuttle 61 located at the part receiving position 61c. Thereafter, the shuttle 61 is moved to the component delivery position 61a shown in FIG. 1, and the inspected components on the shuttle 61 are sucked and taken out by the suction nozzle unit 44 of the component storage section 40. Then, each of the eight inspected components is distributed to each tray storage unit 12 or 13 according to the inspection result in the component storage unit 40. These series of operations are performed in parallel on both the head unit 80 side and the 90 side. In the case of the head unit 90, during the inspection of the electronic component attracted by the head unit 80, the head unit 90 moves to the right in the X direction and is located above the component receiving position 61b and located at the component receiving position 61b. After the transfer, the inspected part is transferred to the left hand in the X direction, and the uninspected part is sucked from the shuttle 51 at the part delivery position 51c. After the suction, the head unit 90 moves to the center in the X direction, the inspection is completed in the head unit 80, and the eight suction nozzle units 89 are lifted while sucking the inspected parts respectively. It moves in the Y direction integrally with the unit 80 and stops above the test head 2a.

  When the uppermost tray of the uninspected tray storage unit 10 becomes empty during the above series of operations, the tray transfer unit 20 transfers the empty tray to the uppermost stage of the empty tray storage unit 11. Further, when the uppermost tray of the tray storage unit 12 or 13 is filled with the inspected parts, the tray transfer unit 20 causes the uppermost tray of the tray storage unit 12 or 13 filled with the uppermost tray from the empty tray storage unit 11. An empty tray is transferred to the upper stage.

  In the first embodiment, as described above, the X-direction drive device 83 for moving the suction nozzle 868 in the X direction in the horizontal plane and the Y-direction drive device for moving the suction nozzle 868 in the Y direction in the horizontal plane. By providing eight suction nozzle units 89 each including 84, each electronic component sucked by each suction nozzle unit 89 can be moved independently in the X direction and the Y direction. Even when the electronic components are misaligned, the position of each electronic component can be accurately adjusted to the position of each inspection socket. Further, by arranging at least a part of the X-direction drive device 83 and the Y-direction drive device 84 so as to overlap with the suction nozzle holding member 866 in plan view, each electronic component is independently X Even if a configuration for moving in the direction and the Y direction is provided, an increase in the planar arrangement space of the suction nozzle unit 89 can be suppressed. As a result, the position of each electronic component can be accurately adjusted to the position of each inspection socket while suppressing an increase in the planar arrangement space of the suction nozzle unit 89.

  In the first embodiment, the X-direction moving member 833 is disposed so as to overlap the lower side of the unit support portion 82 when viewed in plan, and overlaps the lower side of the X-direction moving member 833 when viewed in plan. The support member 841 is arranged, and the pulley 851b of the R-axis drive device 85 attached to the shaft portion 862 is arranged so as to overlap the lower side of the support member 841 when viewed in plan, and the X-direction moving member 833 is arranged. By arranging the pulley 851b attached to the support member 841 and the shaft portion 862 so as to overlap the suction nozzle holding member 866 in plan view, the unit support portion 82 and the X-direction moving member 833 are arranged. In the state where the support member 841, the pulley 851b of the R-axis drive device 85 attached to the shaft portion 862, and the suction nozzle holding member 866 overlap in the vertical direction. Since the location, it is possible to reduce the planar arrangement space of the suction nozzle unit 89.

  In the first embodiment, the X-direction motor 832a of the X-direction drive mechanism portion 832 is disposed so as to overlap the upper side of the horizontal plate 822 when viewed in plan, and the Y-direction motor 843a of the Y-direction drive mechanism portion 843 is disposed. Are arranged so as to overlap with the upper side of the horizontal plate 822 when viewed in plan, and the X direction motor 832a and the Y direction motor 843a are partially used by utilizing the upper region of the horizontal plate 822. Since it arrange | positions in the state overlapped with the horizontal plate 822, it can suppress that the planar arrangement | positioning space of the suction nozzle unit 89 becomes large.

  In the first embodiment, the X-direction guide rail 831a extending in the X direction and the X-direction ball screw extending in the X direction are rotatably supported so as to overlap the lower side of the unit support portion 82 in plan view. A shaft 832b, an X-direction motor 832a for rotating the X-direction ball screw shaft 832b, and an X-direction ball nut 834 screwed to the X-direction ball screw shaft 832b are arranged. Further, an X-direction moving member 833 that holds the X-direction ball nut 834 is disposed so as to overlap with the lower side of the unit support portion 82 in a plan view. As a result, the X-direction ball screw shaft 832b is rotated by the X-direction motor 832a, whereby the X-direction moving member 833 is moved in the X direction with respect to the unit support portion 82 at a position overlapping the lower side of the unit support portion 82. Therefore, when viewed in a plan view, the X-direction moving member 833 can be prevented from protruding from the arrangement space of the unit support portion 82 when moving.

  In the first embodiment, the outer slider 842a and the inner slider 842b that extend in the Y direction and the Y slider that is rotatably supported extend so as to overlap the lower side of the X direction moving member 833 in plan view. A Y-direction ball screw shaft 843b, a Y-direction motor 843a for rotating the Y-direction ball screw shaft 843b, and a Y-direction ball nut 844 that is screwed to the Y-direction ball screw shaft 843b are arranged. Further, a head mounting member 845 that holds the Y-direction ball nut 844 is disposed so as to overlap the lower side of the X-direction moving member 833 when viewed in a plan view. As a result, the Y-direction ball screw shaft 843b is rotated by the Y-direction motor 843a, so that the head mounting member 845 is moved relative to the X-direction moving member 833 at a position overlapping both the unit support portion 82 and the X-direction moving member 833. Therefore, the head mounting member 845 can be prevented from protruding from the arrangement space of the unit support portion 82 and the X direction moving member 833 when viewed in plan view.

  In the first embodiment, the eight suction nozzle units 89 are configured so as to move in the vertical direction (Z direction) integrally with the unit support portion 82 as the unit support portion 82 moves. Since each suction nozzle 868 can be moved in the vertical direction integrally with the unit support portion 82 using the elevating drive unit 821b for moving the support portion 82 in the vertical direction, the suction nozzle 868 is moved in the vertical direction. There is no need to provide a separate driving device for each suction nozzle unit 89. Thereby, it can suppress that a structure becomes complicated.

( Reference example )
FIG. 11 is a cross-sectional view for explaining the configuration of an IC handler according to a reference example of the present invention. Referring to FIG. 11, in this reference example , unlike the first embodiment, the X direction driving device 283 and the Y direction driving device 284 of the suction nozzle unit 289 are respectively arranged in the X direction and the Y direction by a linear motor system. The IC handler 200 that moves 868 will be described.

In the reference example , as shown in FIG. 11, the X-direction drive device 283 and the Y-direction drive device 284 are arranged so as to overlap with the lower side of the horizontal plate 822 when viewed in plan. Further, each of the eight suction nozzle units 289 has the same configuration.

  Each X-direction driving device 283 has a function of moving the suction nozzle 868 (see FIG. 10) disposed on the lower side independently in the X direction with respect to the horizontal plate 822. Each X-direction drive device 283 includes an X-direction slide portion 283a, an X-direction drive mechanism portion 283b, and an X-direction moving member 283c. The X-direction moving member 283c is an example of the “moving member” in the present invention.

  The X-direction slide portion 283a has an X-direction guide rail 283d extending in the X direction and an X-direction slider 283e that can slide on the X-direction guide rail 283d. Two X-direction guide rails 283d are provided for each suction nozzle unit 289, and are attached to the lower surface of the horizontal plate 822. The X-direction slider 283e has a pair of claw portions that engage with X-direction groove portions provided on both side surfaces of the X-direction guide rail 283d, and the X-direction guide is in a state where the claw portions engage with the groove portions. It is configured to be slidable only in the X direction with respect to the rail 283d. The X-direction guide rail 283d is an example of the “first guide member” in the present invention.

  Each X-direction drive mechanism unit 283b includes a stator 283f, a coil unit 283g, and a power supply unit (not shown). The coil portion 283g is an example of the “mover” of the present invention, and serves as the “first coil” of the present invention. The stator 283f has a cylindrical shape and is formed to extend in the X direction. Further, the stator 283f is attached to the lower surface of the horizontal plate 822 by attachment members 283h at both ends, and is disposed so as to overlap the lower side of the horizontal plate 822 when seen in a plan view. The stator 283f has a plurality of short cylindrical permanent magnets 283i, and the periphery of the permanent magnet 283i is covered with a sleeve (not shown) made of a non-magnetic material. The plurality of permanent magnets 283i are arranged in the axial direction (X direction) so that the N pole and the S pole are alternately positioned in opposite directions. The coil portion 283g is fixedly held by the X-direction moving member 283c inside the hollow X-direction moving member 283c. The coil portion 283g is formed in a cylindrical shape by winding a conductive wire in a spiral shape. A cylindrical stator 283f is inserted into the coil portion 283g. The inner diameter of the coil portion 283g is slightly larger than the outer shape of the stator 283f so that a slight gap can be secured between the stators 283f. The coil portion 283g is formed so that the total length on the X direction side is shorter than the total length of the stator 283f. Further, a voltage is applied to the coil portion 283g by a power supply portion.

  The X-direction moving member 283c has an upper surface attached to the lower surface of the X-direction slider 283e, and a stator so that a slight gap can be secured between the stators 283f at both ends on the X-direction side of the X-direction moving member 283c. Bush members 283j each having an inner diameter slightly larger than the outer diameter of 283f but having an inner diameter smaller than the inner diameter of the coil portion 283g are provided, and play between the X-direction guide rail 283d and the X-direction slider 283e is caused by wear. Even if this occurs, the stator 283f and the coil portion 283g are prevented from immediately contacting each other. Further, the X-direction moving member 283c is disposed so as to overlap the lower side of the horizontal plate 822 when seen in a plan view.

  By controlling the voltage applied to the coil portion 283g with the above configuration, each X-direction drive device 283 moves the X-direction moving member 283c in the X direction independently from each other with respect to the horizontal plate 822. It is possible. Note that the X-direction drive device 283 is provided with a scale (not shown) and an MR head capable of magnetically reading the scale, and the amount of movement of the X-direction moving member 283c in the X direction is adjusted using these.

  The Y direction driving device 284 has the same configuration as the X direction driving device 283 described above. Each Y-direction drive device 284 has a function of moving the suction nozzle 868 (see FIG. 10) disposed on the lower side independently in the Y direction with respect to the X-direction moving member 283c. Each Y-direction drive device 284 includes a Y-direction slide portion 284a, a Y-direction drive mechanism portion 284b, and a Y-direction moving member 284c.

  The Y-direction slide portion 284a includes a Y-direction guide rail 284d extending in the Y direction and a Y-direction slider 284e that can slide on the Y-direction guide rail 284d. Two Y-direction guide rails 284d are provided for each suction nozzle unit 289, and are attached to the lower surface of the X-direction moving member 283c. The Y-direction slider 284e has a pair of claw portions that engage with the groove portions extending in the Y direction provided on both side surfaces of the Y-direction guide rail 284d, and the Y-direction guide is in a state where the claw portions engage with the groove portions. It is configured to be slidable only in the Y direction with respect to the rail 284d.

  Each Y-direction drive mechanism unit 284b includes a stator 284f, a coil unit 284g, and a power supply unit (not shown). The stator 284f has a cylindrical shape and is formed to extend in the Y direction. The stator 284f is attached to the lower surface of the X-direction moving member 283c by attachment members (not shown) at both ends, and is disposed so as to overlap the lower side of the X-direction moving member 283c when viewed in plan. The stator 284f has a plurality of short columnar permanent magnets 284i, and the periphery of the permanent magnet 284i is covered with a sleeve (not shown) made of a non-magnetic material. The plurality of permanent magnets 284i are arranged in the axial direction (Y direction) so that the N pole and the S pole are alternately positioned in opposite directions. The coil part 284g is fixedly held by an upper member 284j and a head mounting member 284k, which will be described later, constituting the Y-direction moving member 284c inside the hollow Y-direction moving member 284c. The coil portion 284g is formed in a cylindrical shape by winding a conductive wire in a spiral shape. A cylindrical stator 284f is inserted into the coil portion 284g. The coil portion 284g is formed so that the total length on the Y direction side is shorter than the total length of the stator 284f. The inner diameter of the coil portion 284g is slightly larger than the outer shape of the stator 284f so that a slight gap can be secured between the stators 284f. In addition, a voltage is applied to the coil unit 284g by a power supply unit. The head mounting member 284k is an example of the “moving member” in the present invention.

  The upper surface of the upper member 284j constituting the Y direction moving member 284c is attached to the lower surface of the X direction slider 283e. The diameter of the Y-direction moving member 284c is slightly larger than the outer shape of the stator 284f so that a slight gap can be secured between the stators 284f at both ends on the Y-direction side. Bush members (not shown) each having a small inner diameter are provided to prevent the stator 284f and the coil portion 284g from immediately contacting each other even if play occurs between the Y-direction guide rail 284d and the Y-direction slider 284e due to wear. . Further, the Y-direction moving member 284c is disposed so as to overlap the lower side of the X-direction moving member 283c when viewed in a plan view. In addition, an R-axis drive device 85 and a head portion 86 are disposed below the head mounting member 284k, as in the first embodiment. That is, the horizontal plate 822, the stator 283f of the X direction driving device 283, the coil part 283g of the X direction driving device 283, the X direction moving member 283c, the Y direction moving member 284c, and the Y direction driving device 284 are fixed. The child 284f, the coil portion 284g of the Y-direction drive device 284, the pulley 851b (see FIG. 10) of the R-axis drive device 85 attached to the shaft portion 862, and the head portion 86 (see FIG. 10), respectively. When viewed in a plan view, the suction nozzle holding member 866 is disposed so as to overlap.

  By controlling the voltage applied to the coil portion 284g with the above-described configuration, each Y-direction drive device 284 has the Y-direction moving member 284c in the Y-direction independently of the X-direction moving member 283c. It is possible to move. The Y-direction drive device 284 is provided with a scale (not shown) and an MR head 284l capable of magnetically reading the scale, and these are used to adjust the amount of movement in the Y direction of the Y-direction moving member 284c. Is done.

The remaining configuration of the reference example is the same as that of the first embodiment.

In the reference example , as described above, the motor, the pulley, and the timing belt are not necessary, and the X-direction moving member 283c and the Y-direction moving member 284c are each in the X direction with a simpler structure than the structure using the ball screw shaft and the ball nut. In addition, the X-direction moving member 283c and the Y-direction moving member 284c can be prevented from protruding from the arrangement space of the horizontal plate 822 during the movement as viewed in plan. it can.

The remaining effects of the reference example are the same as those of the first embodiment.

  The embodiment disclosed this time should be considered as illustrative in all points and not restrictive. The scope of the present invention is shown not by the above description of the embodiments but by the scope of claims for patent, and further includes all modifications within the meaning and scope equivalent to the scope of claims for patent.

For example, in the first embodiment and the reference example , the example in which the eight suction nozzle units are provided in the head unit has been shown. However, the present invention is not limited to this, and a plurality of suction nozzle units other than the plurality are provided. An adsorption nozzle unit may be provided.

In the first embodiment and the reference example , the example in which four suction nozzle units are provided in the head part of the component take-out unit and the component storage unit has been described. However, the present invention is not limited to this, and one suction unit is provided for each. A nozzle unit may be provided, and a plurality of suction nozzle units other than four may be provided.

In the first embodiment and the reference example , the example in which each of the X-direction moving member and the head mounting member is disposed so as to overlap the lower side of the horizontal plate when viewed in plan is shown. Not limited to this, each of the X-direction moving member and the head mounting member may be disposed so as to overlap the upper side of the horizontal plate when seen in a plan view.

Moreover, although the example which arrange | positions all the X direction motors so that it may overlap with the upper side of a horizontal plate was shown in the said 1st Embodiment, this invention is not limited to this, Only a part of X direction motor is attached to a horizontal plate. You may arrange | position so that it may overlap with an upper side, and you may arrange | position all or some X direction motors so that it may overlap with the lower side of a horizontal plate .

  In the first embodiment, the X-direction guide rail, the X-direction ball screw shaft, and the X-direction ball nut are each arranged so as to overlap the lower side of the horizontal plate when viewed in plan. The present invention is not limited to this, and the X-direction guide rail, the X-direction ball screw shaft, and the X-direction ball nut may each be disposed so as to overlap the upper side of the horizontal plate when viewed in plan.

  In the first embodiment, the outer slider, the Y-direction ball screw shaft, and the Y-direction ball nut are each arranged so as to overlap with the lower side of the X-direction moving member when seen in a plan view. The present invention is not limited to this, and the outer slider, the Y-direction ball screw shaft, and the Y-direction ball nut may each be disposed so as to overlap the upper side of the X-direction moving member in plan view.

  In the first embodiment, the X direction driving device, the Y direction driving device, and the R axis driving device are mounted on each of the eight suction nozzle units in each head unit. However, one of the eight suction nozzles is used. Only the R-axis drive device may be mounted on the unit. Among the positional deviations of the electronic components detected by the imaging device, the positional deviations in the X and Y directions of the electronic components in the suction nozzle unit on which only the R-axis drive device is mounted are corrected in the X and Y directions of the head unit. The positional deviations of the electronic components in the other suction nozzle units in the X direction and Y direction are respectively the positions of the head unit in the X direction and Y direction when calculating the position correction amounts of the X direction driving device and Y direction driving device. The correction amount is subtracted when calculating.

Further, in the reference example, an example to configure both the X-direction drive unit and the Y-direction drive linear motor system, the present invention may constitute a X direction drive equipment to the linear motor system .

In the above reference example , a stator made of a permanent magnet is shown as an example of a stator, and a coil portion (first coil) is shown as an example of a mover. However, the present invention is not limited to this, A stator made of a coil (first coil) and a mover made of a permanent magnet may be used. Furthermore, both the stator and the mover may be coils (first coil, second coil).

It is a top view which shows the whole structure of the IC handler by 1st Embodiment of this invention. It is a top view which shows the whole structure of the IC handler by 1st Embodiment of this invention. It is a perspective view which shows the head unit of the IC handler by 1st Embodiment of this invention. It is a side view which shows the head unit of the IC handler by 1st Embodiment of this invention. It is a perspective view which shows the head unit of the IC handler by 1st Embodiment of this invention. It is a perspective view for demonstrating the structure of the head unit of the IC handler by 1st Embodiment of this invention. It is sectional drawing along the 300-300 line of FIG. FIG. 7 is a cross-sectional view taken along line 400-400 in FIG. 6. It is a perspective view for demonstrating the structure of the head unit of the IC handler by 1st Embodiment of this invention. It is sectional drawing which shows the head part of the IC handler by 1st Embodiment of this invention. It is sectional drawing for demonstrating the structure of the head unit of the IC handler by the reference example of this invention.

1,200 IC handler 82 Unit support 8 3 X direction drive device (first direction drive device)
8 4 Y direction drive device (second direction drive device)
85 R axis drive (rotation drive)
89 adsorption Nozuruyuni' door
8 22 Horizontal plate 831a X direction guide rail (first guide member)
832 X direction drive mechanism (first drive mechanism)
832a X direction motor ( first direction moving motor )
832b X direction ball screw shaft (first ball screw shaft)
833 X direction moving member (first part, first direction moving member)
834 X direction ball nut (first ball nut)
842a Outer slider (second guide member)
843 Y-direction drive mechanism (second drive mechanism)
843a Y direction motor ( second direction moving motor )
843b Y direction ball screw shaft (second ball screw shaft)
844 Y direction ball nut (second ball nut)
845 Head mounting member (second part, second direction moving member)
851b Pulley (third part)
866 Suction nozzle holding member 868 Suction nozzle

Claims (7)

A unit support that includes a flat horizontal plate and is movable in the horizontal and vertical directions;
A plurality of suction nozzle units including a suction nozzle holding member for holding a suction nozzle for sucking electronic components;
To move the suction nozzle in the first direction in the horizontal plane with respect to the unit support portion in the suction nozzle units of the plurality of suction nozzle units, which is the same as or less than the number of the suction nozzle units. Each of the suction nozzle units includes a first direction drive device and a second direction drive device for moving the suction nozzle in a second direction within a horizontal plane intersecting the first direction with respect to the unit support portion. Contains
At least a part of the first direction driving device and the second direction driving device is disposed so as to overlap the suction nozzle holding member in a plan view ,
The second direction drive device has a second direction movement motor for moving the suction nozzle in the second direction,
In the vicinity of both ends of the horizontal plate in the second direction side, a part of the second direction moving motor is seen above the horizontal plate at a substantially central portion on the first direction side of the horizontal plate. The IC is disposed so as to overlap, and is disposed so that the other second direction moving motors overlap the lower side of the horizontal plate when viewed in plan in the vicinity of both end portions on the first direction side of the horizontal plate. handler. The first direction driving device has a first portion arranged so as to overlap with a lower side of the unit support portion in a plan view.
The second direction driving device has a second portion arranged so as to overlap with a lower side of the first portion of the first direction driving device in a plan view.
A rotation drive device having a third portion disposed so as to overlap the lower side of the second portion of the second direction drive device in plan view;
The first portion of the first direction driving device, the second portion of the second direction driving device, and the third portion of the rotation driving device are respectively arranged on the suction nozzle holding member in a plan view. The IC handler according to claim 1, wherein the IC handler is arranged so as to overlap with each other. Before Symbol first direction driving device further includes a first drive mechanism for moving the suction nozzle in the first direction,
Before Symbol A portion of the first drive mechanism, in plan view, the are arranged so as to overlap the upper horizontal plate, IC handler according to claim 2. The first direction driving device includes a first guide member extending in the first direction, a first ball screw shaft extending in the first direction supported rotatably, and a first for rotating the first ball screw shaft . A direction moving motor , a first ball nut threadedly engaged with the first ball screw shaft, and disposed so as to overlap the lower side of the unit support portion in plan view, and holding the first ball nut; 4. The apparatus according to claim 2, further comprising a first direction moving member that moves in the first direction with respect to the unit support portion when the first ball screw shaft is rotated by the first direction moving motor . 5. IC handler. The second direction driving device includes a second guide member extending in the second direction in addition to the second direction moving motor, and the second direction driving device rotatably supported so as to be rotated by the second direction moving motor . a second ball screw shaft extending in two directions, a second ball nut screwed before Symbol second ball screw shaft, in plan view, are arranged so as to overlap the lower side of the first direction moving member, said first A second direction moving member that holds the two-ball nut and moves in the second direction with respect to the first direction moving member by rotating the second ball screw shaft by the second direction moving motor. The IC handler according to claim 4, further comprising: The first direction driving equipment includes a first guide member extending in the first direction, and a stator extending in the first hand direction, and the movable element which is arranged to face the stator, in a plane look, are arranged so as to overlap the lower side of the unit support section, while being movably held by the first guide member further includes a movable member for holding the movable element,
One of the stator or the mover comprises a first coil,
The other of the stator or the mover consists of a permanent magnet or a second coil,
By applying a voltage to at least said first coil, said moving member for holding the movable element is configured to move said to the first way direction with respect to the unit support section, according to claim 2 IC handler described in 1.   The plurality of suction nozzle units move the suction nozzles independently and independently in the first direction and the second direction, respectively, and vertically move integrally with the unit support part as the unit support part moves. The IC handler according to claim 1, wherein the IC handler is configured to move in a direction.

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