JP5073310B2 - Leakage detection mechanism and liquid material application apparatus having the same - Google Patents

Description

  The present invention relates to a liquid leakage detection mechanism and a liquid material coating apparatus including the same, and in particular, a small amount of liquid leakage without dropping liquid material leaking from a discharge unit mounted on the coating apparatus onto an object to be coated. The present invention relates to a liquid leakage detection mechanism that can also detect water and a liquid material application device including the same.

  As a coating apparatus that drops liquid crystal onto a liquid crystal panel, there is a coating apparatus that places a substrate on a table and relatively moves a discharge unit facing the substrate to drop liquid crystal (for example, a patent) Reference 1). As a discharge unit used in the coating apparatus, a plunger type discharge unit has been proposed in which a plunger that moves forward and backward in close contact with the inside of a measuring tube is advanced and moved at a high speed to drop a liquid material from a discharge port.

In this type of discharge unit, internal sliding parts and the like are worn away by long-term use, and a gap is formed between the parts, and the liquid material may leak from there.
Also, when disassembling and reassembling the discharge unit for maintenance, etc., even if it is not used for a long time, due to the difference in the skill of the operator, the assembled parts do not work well and a gap is opened. The liquid material may leak from there.
In addition, the joints that connect pipes that supply the liquid material to the discharge unit may leak the liquid material from the fastening portion unless proper tightening is performed.

  When the discharge unit of the coating device is on the coating object to which the liquid material is applied, if the liquid leaks onto the coating object, it will produce defective products, wasting time and costs. End up. In the production process, if there is no process for detecting liquid leakage immediately, the production of defective products will be continued for a long time, and the waste of time and costs may be even greater. In the worst case, it can lead to quality problems.

As an apparatus for detecting leakage in a coating apparatus, Patent Document 2 discloses the apparatus. According to this, since the liquid supply pipe for supplying the liquid material from the coating apparatus main body to the movable discharge unit is arranged, the liquid supply pipe is stored in the cable support guide device so that the movement of the discharge unit can be followed. ing.
In the case where leakage occurs due to deterioration of the fluid flow piping due to the movement of the discharge unit, the liquid leakage is detected at the bottom of the storage portion for storing the cable support guide device containing the fluid flow piping in order to detect the leakage. A sensor is installed.
JP 2006-106150 A JP 2004-243186 A

  The detection device of Patent Literature 2 is a detection device that detects a liquid material leaking from a liquid passage pipe that supplies a liquid material to a discharge unit, and a detection device that directly detects the liquid material leaking from the discharge unit. It wasn't. In addition, when leakage occurs from the discharge unit, there is no means for preventing the leakage from dripping onto the application target, and there is no means for detecting the leakage generated at the discharge unit.

  Until now, no efforts have been made to solve the problem of the liquid material leaking from the discharge unit from the front. However, since the leakage from the discharge unit is directly related to the quality of the product even in a minute amount, it is a problem that must be addressed seriously as a coating device supplier.

  Therefore, the present invention provides a leak detection mechanism that can prevent the leak from the discharge unit from falling onto the object to be coated, and can detect a leak of a small amount of liquid, and An object of the present invention is to provide a liquid material applicator provided.

  The inventor solves the problem of leakage of liquid droplets from the discharge unit by providing a tray directly under the discharge unit, and enables the automatic detection of liquid leakage by providing a liquid leakage detection device. The present invention has been made with various basic ideas.

That is, the first invention is a liquid leakage detection mechanism that can be attached to a coating apparatus that applies a liquid material by relatively moving a workpiece placed on a table and a discharge unit facing the workpiece, A leakage detection mechanism comprising a tray having an opening provided at a position opposite to the discharge port of the unit and a leakage detection device that detects leakage accumulated in the tray, and is disposed immediately below the discharge unit. is there.
The second invention is characterized in that, in the first invention, an outer edge upright portion (9) surrounding the outer edge of the tray and an opening upright portion (11) surrounding the opening portion are provided.
A third invention is characterized in that, in the first or second invention, the tray has a deepest part through which the liquid leaks.
According to a fourth aspect, in the third aspect, the tray has a slope connected to the deepest portion.
A fifth invention is characterized in that, in the third or fourth invention, the detection device is disposed at a deepest portion of the tray.
A sixth invention is characterized in that, in the third or fourth invention, the detection device is disposed in a flow path communicating with the deepest portion of the tray.
A seventh invention is characterized in that, in any one of the first to sixth inventions, the tray is attached in a state where a surface for receiving the liquid material is inclined with respect to a horizontal plane.
The eighth invention is characterized in that, in any one of the first to seventh inventions, the surface (8) for receiving the leakage of the tray has water repellency.
A ninth invention is characterized in that, in any one of the first to eighth inventions, an alarm device is provided that receives a detection signal emitted from the detection device and issues an alarm.
According to a tenth aspect of the present invention, in any one of the first to ninth aspects, the tray is directly attached to a lower end portion of the discharge unit.
According to an eleventh aspect of the present invention, in any one of the first to ninth aspects, the tray is detachably disposed immediately below the discharge unit by a fixture provided on a connection member (7) to which the discharge unit is mounted. It is characterized by being.
A twelfth aspect of the present invention relates to the liquid leakage detection mechanism according to any one of the first to tenth aspects, a discharge unit having a discharge port for discharging a liquid material, a table on which a work is placed, a work and a discharge unit relative to each other. A liquid material application device comprising: a drive unit for movement.
A thirteenth aspect of the invention is a liquid leakage detection mechanism according to the eleventh aspect of the invention, a discharge unit having a discharge port for discharging a liquid material, a table on which a work is placed, and a drive unit that relatively moves the work and the discharge unit. the provided, arranged said leakage detecting mechanism and the discharge unit, detachably said leakage detection mechanism provided movably configured connecting member (7) and the connecting member (7) by the drive unit It is a liquid material applicator characterized by including the attachment .

ADVANTAGE OF THE INVENTION According to this invention, it can prevent directly that the liquid leak from a discharge unit dripping on a coating target object.
Further, even if the amount of liquid leakage is small, it can be detected with high accuracy, and liquid leakage from the discharge unit can be detected regardless of the position where the discharge unit moves.

The liquid leakage detection mechanism of the best mode for carrying out the present invention can be attached to a general liquid material application apparatus. Below, the example at the time of attaching to the liquid material application apparatus 1 provided with the discharge unit 2 which has the discharge port which discharges a liquid material, and the drive part 5 which moves a discharge port in parallel with the application | coating target surface of a workpiece | work is demonstrated. .
The liquid leakage detection mechanism of the best mode includes an outer edge upright portion 9, an opening portion 10 provided at a position opposite to the discharge port of the discharge unit, and a receiving tray 3 having an opening upright portion 11 surrounding the opening portion. The liquid leakage detection device 4 is provided.

  The tray 3 that receives the liquid material leaking from the discharge unit 2 is a plate-like plate, and is provided with an outer edge upright portion 9 that surrounds the periphery perpendicular to the surface 8 that receives the liquid material. The outer edge upright portion 9 prevents the liquid material from flowing out of the tray 3. Moreover, the opening part upper part 11 provided in the opening part 10 prevents the outflow of a liquid material similarly. In the case where the tray 3 is configured by a slope toward the deepest portion 17 (for example, in the case of FIG. 7), the outer edge upright portion 9 is not an essential configuration. However, for the reasons of design, such as a mounting hole such as a screw hole for a mounting tool for mounting the saucer 3, or a function of reinforcing the saucer 3 against bending or deflection, the one provided with the outer edge upright portion 9 May be preferred.

  The tray 3 is preferably disposed directly under the discharge unit 2 from the viewpoint of preventing leakage of the leaked liquid. The tray 3 can be attached in various ways. For example, the tray 3 may be directly disposed on the discharge unit 2 or may be disposed on the connection member 7 that connects the discharge unit 2 and the drive unit 5. The connection member 7 and the tray 3 are configured to be detachable by a fixture. This fixture includes a configuration in which a portion of the tray 3 and the connecting member 7 is fixed with a screw member or the like (see FIG. 2) and a configuration in which the bottom surface of the tray 3 is held (see FIG. 9). Meaning fixture. In this case, it is important that the tray 3 is configured to be movable integrally with the discharge unit 2. By moving together, it is possible to prevent leakage of liquid onto the application target regardless of the movement position of the discharge unit 2.

Moreover, it is preferable that the receiving tray 3 is attached so that the surface 8 for receiving the liquid material is inclined with respect to the horizontal plane. This is because the liquid material flows down to the deepest part 17 which is the lowest part and gathers because of the inclination. The deepest portion 17 may be formed so that the surface 8 itself that receives the liquid material has a slope, and the shape of the tray 3 itself is formed so that the deepest portion 17 is positioned below the slope.
The tray 3 is attached so that the surface 8 that receives the liquid material is inclined with respect to the horizontal plane, or the surface 8 that receives the liquid material itself has an inclined surface, and the surface 8 that receives the liquid material has water repellency. By making it, it can make it easier for a liquid material to flow down and to flow.
In order to give water repellency, it can be realized by making the receiving tray 3 itself with a material having water repellency or by covering the surface 8 for receiving the liquid material with a material having water repellency. Examples of the water-repellent material include fluorine-based resins and silicon-based resins, but the types of these materials are design items selected in consideration of resistance to the liquid material to be applied. The type is not limited.

The detection device 4 is detection means such as an optical sensor, and is installed on the tray 3 so as to move together with the discharge unit 2 and the tray 3. It is installed at the lowest point in the surface 8 for receiving the liquid material of the tray 3 where the liquid material flows down and collects. In the aspect in which the surface 8 itself is molded and the deepest portion 17 formed of a recess is provided, the detection device 4 is attached to the recess. At that time, it is preferable that the liquid material adhering to the receiving tray 3 and the detection device 4 can be wiped out in a timely manner by being installed so that it can be easily attached and detached.
Moreover, since it installs in the location 17 where a liquid material flows down and gathers, even if it is a case where there is little leakage, it can detect that there was leakage.
When a liquid material leaking from the discharge unit 2 is detected, a detection signal issued from the detection device 4 is received, an alarm is issued to notify the operator, or the discharge operation of the discharge unit 2 is stopped. Also good.

Although the plunger type discharge unit is illustrated as the discharge unit 2, the kind of discharge unit is not limited to this. For example, you may use the air-type discharge unit which applies the regulated air only for the desired time to the liquid material in the syringe by which the nozzle which is a discharge port was connected to the front-end | tip.
The detection device 4 is not limited to an optical sensor, and other detection devices may be used as long as they can detect a liquid material. For example, the weight of the liquid material flowing down using a load cell may be detected. Moreover, you may capture and detect the image of the liquid material which has flowed down using the camera.

  Hereinafter, details of the present invention will be described with reference to examples, but the present invention is not limited to the examples.

FIG. 1 is a schematic perspective view of a coating apparatus having a liquid leakage detection mechanism according to the first embodiment.
In the coating apparatus disclosed in FIG. 1, three discharge units 2 are attached to a drive unit 5, and a tray 3 and a detection device 4 are provided on each of them. By providing each receiving unit 2 with a receiving tray 3 and a detecting device 4, it is possible to detect which discharging unit 2 has caused leakage of the liquid material. The number of discharge units 2 attached is a design matter determined by the size of the workpiece 6 that is the application target, the application method, and the like, and is not limited to three, but may be two or less, or conversely, four or more. As a matter of course, when a plurality of discharge units 2 are provided, it is preferable to provide a leak detection mechanism for all the discharge units 2.

  The coating apparatus 1 includes a drive unit 5 and can move (that is, relatively move) a discharge unit 2 having a discharge port in a plane parallel to the application target surface of the workpiece 6. The tray 3 is installed on a connecting member 7 that connects the discharge unit 2 and the drive unit 5, and the detection device 4 is installed on the tray 3. Therefore, the discharge unit 2, the tray 3, and the detection device 4 are integrated with each other. Move. The workpiece 6 is placed on a surface (table) parallel to the discharge port below the discharge unit 2. Then, the liquid material is discharged from the discharge port while the discharge unit 2 is moved along the desired locus by the drive unit 5 with respect to the work 6, and the liquid material is applied to the work 6.

In this embodiment, as the discharge unit 2, a plunger-type discharge device is used in which a plunger that moves forward and backward closely in the measuring tube is advanced and moved at a high speed so that the liquid material is ejected from the discharge port.
FIG. 2 shows an enlarged perspective view of the ejection unit 2, the tray 3 and the detection device 4, and FIG. 3 shows an enlarged perspective view of the tray 3.
As shown in FIG. 3, the shape of the tray 3 is a rectangular plate having the same size as the area of the bottom surface of the discharge unit 2, and surrounds the periphery of the outer periphery perpendicular to the surface 8 for receiving the liquid material. An outer edge upright portion 9 is provided. The outer edge upright portion 9 prevents the liquid material from flowing out of the tray 3. An opening 10 is provided in a portion immediately below the nozzle that is the discharge port. An opening upright portion 11 is also provided at the edge of the opening 10 to prevent the liquid material from flowing out of the tray 3 from the opening 10 for discharging the liquid material.

As shown in FIGS. 2 and 4, the tray 3 is fixed to the connection member 7 by a screw member 21 and is disposed immediately below the discharge unit 2. At this time, the tray 3 is installed with a predetermined gap between the tray 3 and the discharge unit 2. This gap is open to facilitate the flow of the liquid material. However, depending on the state in which the liquid material flows, the tray 3 may be installed such that a part of the surface 8 that receives the liquid material of the tray 3 is in contact with the bottom surface of the discharge unit 2.
In addition, the tray 3 is attached to a movable connecting member 7 of the drive unit 5 independently of the discharge unit 2. Therefore, only the discharge unit 2 can be attached and detached while the tray 3 is installed.

  In the state where the tray 3 is disposed on the connection member 7, the surface 8 for receiving the liquid material is inclined with respect to the horizontal plane. Various methods can be considered for the tilting. FIGS. 4 and 5 show examples in which the tray 3 itself is tilted and fixed while the surface 8 for receiving the liquid material is kept flat. Specifically, after tilting the front side downward (FIG. 4), it is tilted and fixed so that the left side is further lowered (FIG. 5). Then, the left front is the lowest position in the tray, and the leaked liquid material flows down so as to gather in front of the left. In addition, you may shape | mold so that the surface 8 which receives a liquid material may incline.

The detection device 4 is installed in the deepest portion 17 on the left front side, which is the lowest position, in the receiving tray 3 attached at an inclination. The detection device 4 is an installation method in which attachment and removal can be easily performed. By simplifying the attachment and removal, the liquid material that has flowed down and remains on the tray 3 and the liquid material adhering to the detection device 4 can be surely wiped off, and malfunction due to unwiping can be prevented. .
As the detection device 4, an optical sensor for detecting liquid leakage is used in this embodiment. This type of leak detection sensor includes a light projecting unit that irradiates light toward the detection surface and a light receiving unit that receives reflected light from the detection surface inside the translucent case. When immersed in the liquid material, the amount of light incident on the light receiving portion changes, thereby detecting liquid leakage. The liquid leakage detection sensor is installed so as to face the surface 8 that receives the liquid material of the tray 3 so as to be in contact with the liquid material, and monitors whether the liquid material flows down to the sensor installation position 17.

  Further, the same optical reflective photoelectric sensor may be used for the detection device 4. In the reflection type photoelectric sensor, light that is emitted from the sensor and reflected from the detection target is received, and the target is detected by a change in the amount of received light. The reflective photoelectric sensor is installed with a certain gap so that the light projecting / receiving surface thereof faces the surface 8 for receiving the liquid material of the tray 3, and monitors whether the liquid material flows down to the sensor installation position 17.

<< Detection action >>
The operation when the leak is detected by the detection device 4 will be described below.
Due to wear of the internal parts of the discharge unit 2, assembly errors, and improper tightening of the joint, leakage of the liquid material from the main body of the discharge unit 2 and the joint part connecting the pipe that supplies the liquid material to the discharge unit 2 occurred. Assume a case. The leaked liquid material is dripped from the discharge unit 2 onto the tray 3 installed immediately below. The dripped liquid material flows down to the deepest portion 17 where the detection device 4 which is the lowest position is installed due to the inclination of the tray 3. When the liquid material flows down to the position of the detecting device 4, the detecting device 4 detects the liquid material and issues a signal notifying that the liquid material has been detected. When this signal is received by an alarm device (not shown), an alarm is issued to notify the operator. As a notification method, a sound is generated, an indicator lamp (not shown) is turned on or blinked, or characters are displayed on an operation panel (not shown). These alarms may be used alone or in combination.
Further, at the same time as issuing an alarm, the discharge of the liquid material from the discharge unit 2 may be automatically stopped. In order to cancel the alarm, the cause of leakage of the discharge unit 2 is removed, and the liquid material adhering to the tray 3 is wiped off. Moreover, when the liquid material has adhered to the detection apparatus 4, it wipes off together. At this time, if the detecting device 4 is removed from the receiving tray 3, both the receiving tray 3 and the detecting device 4 can be wiped off reliably.

In the present embodiment, a mode in which the tray 3 is directly attached to the discharge unit 2 will be described.
As shown in FIG. 6, when the discharge unit 2 is disposed on the support base 15 and setting is required at a place different from the coating apparatus 1, the discharge unit 2 is installed on the same support base 15 and discharged on a desk or the like. When the unit 2 is used alone, a mode in which the tray 3 is directly attached to the bottom surface of the discharge unit 2 is useful. In any manner, as in the case of the first embodiment, a predetermined gap may be provided between the tray 3 and the discharge unit 2, or a part of the surface 8 for receiving the liquid material of the tray 3 may be provided. The tray 3 may be disposed so as to contact the bottom surface of the discharge unit 2.
The tray 3 is attached by connecting the bottom surface of the discharge unit 2 to the outer edge upright portion 9 or the surface 8 for receiving the liquid material by four fixing tools 16. A known general-purpose fixture can be used as the fixture 16.
As in the liquid leakage detection mechanism of the present embodiment, by configuring the tray 3 to be directly attachable to the bottom surface of the discharge unit 2, it is possible to perform an independent operation on the discharge unit 2 before being mounted on the coating apparatus 1. Thereby, by preparing in advance, it is not necessary to perform the work after the discharge unit 2 is attached to the coating apparatus 1, and it is possible to save time for testing and preparation.

  In Example 3, a modified example of the tray 3 will be described. In Example 1, the surface 8 of the tray 3 is a flat surface, and the deepest portion 17 is formed by attaching the tray 3 itself at an angle. In the present embodiment, the tray 3 itself is formed in advance so as to have an inclination even if the tray 3 is not tilted and fixed at the time of attachment. That is, the surface 8 that receives the liquid material is formed in a shape that is not parallel to the horizontal plane, and the lowest position forms the deepest portion 17. A specific example will be described below with reference to FIGS.

<< Modification 1 >>
Modification 1 is a configuration example of a saucer provided with a deepest portion 17 in a substantially central portion. As shown in FIG. 7, when the four surfaces 8 are formed into inclined surfaces, the deepest portion 17 constitutes the apex of the cone when vertically oriented, so that the liquid material collects on the arrow side in the figure. ing. The portion 17 corresponding to the apex of the central cone is preferably a horizontal plane having substantially the same area as the detection surface of the detection device 4. This central plane portion becomes the deepest portion 17, and the liquid material dripped on the tray 3 flows down the slope 8 and gathers at the deepest portion 17. Therefore, by installing the detection device 4 here, it is possible to perform reliable detection even when the amount of liquid leakage is small. As in FIG. 3, an outer edge upright portion 9 is provided at the outer edge portion to prevent the liquid material from flowing out of the tray 3. In FIG. 7, the outer edge is rectangular and has a quadrangular pyramid shape having four inclined surfaces 8, but the outer edge may be formed in a circular cone shape. Moreover, the deepest part 17 does not need to be located in the center part.

<< Modification 2 >>
The modification 2 is a structural example of the saucer provided with the deepest portion 17 on the near side. As shown in FIG. 8, the surface 8 has a pentagonal shape combining a quadrangle and a trapezoid with one side of the quadrilateral as the bottom, and this is formed into a sloped shape so that the liquid material is collected on the arrow side. Yes. The liquid material dripped onto the tray 3 flows down toward the narrower trapezoidal portion. Then, as the flow proceeds, the width becomes narrower, so that the depth of the liquid material increases at the deepest portion 17. Therefore, by installing the detection device 4 here, it is possible to perform reliable detection even when the amount of liquid leakage is small. The width of the portion where the liquid material gathers is preferably substantially the same as the width of the detection device 4. In order to prevent the liquid material from flowing out of the tray 3 at the outer edge, an outer edge upright portion 9 similar to that shown in FIG. 3 is provided.

The tray 3 of the present embodiment is configured such that only the tray 3 can be attached and detached while the discharge unit 2 is installed.
FIG. 9 shows a state in which the tray 3 of this embodiment is removed. A holder 18, which is a fixture that can attach and detach the tray 3, is provided on the discharge unit mounting plate 20 to which the discharge unit 2 is mounted, and the tray 3 is installed on the holder 18.
The holder 18 is shaped to support the saucer 3 from below so that the saucer 3 does not fall when loosened with the saucer 3. The holder 18 has a U-shaped surface that supports the tray 3, and is configured such that the discharge opening 10 is positioned in the U-shaped holder opening 19. Since the discharge unit 2 discharges the liquid material while being relatively moved in the XY directions, the discharge unit 2 needs to be held by the holder 18 so that the tray 3 is not displaced. In this embodiment, the tray 3 and the holder 18 are configured to be fixed by a screw member (not shown). In addition, in the structure attached to the support stand 15 like Example 2, the convex part fitted to the holder opening 19 of the holder 18 may be provided in the bottom part of the saucer 3, and you may hold | maintain only by fitting.
In the present embodiment, since only the tray 3 can be attached and removed, the tray 3 can be easily cleaned and maintained without being disturbed by the discharge unit 2.
The discharge unit mounting plate 20 may be the connection plate 7 in the first embodiment. Moreover, the discharge unit attachment plate 20 attached to the support stand 15 may be used as in the second embodiment.

In this embodiment, a mode in which the detection device 4 is provided on the connection member 7 will be described.
As shown in FIG. 10, the tray 3 is fixed to the connection member 7 by a screw member 21 and is disposed immediately below the discharge unit 2. Further, the receiving tray 3 is disposed on the connecting member 7, and the surface 8 for receiving the liquid material is inclined with respect to the horizontal plane. In FIG. 10, the deepest part 17 is the lowest position on the right back side, and the leaked liquid material flows down to the right back (arrow 12). And the right back part which is the deepest part 17 of the saucer 3 has provided the opening part of the substantially same width | variety as the flow path 23 connected to the detection apparatus 4 provided in the connection member 7 in a part of the outer edge standing upper part 9. FIG.
The detection device 4 is fitted into the flow path 23 provided in the connection member 7 so that the detection surface faces the tray 3 side. The surface of the flow path 23 opposite to the tray 3 is sealed with a seal member (not shown) to prevent the liquid material from flowing out. Similarly, the connecting portion between the deepest portion 17 of the tray 3 and the flow path 23 of the connecting member 7 is sealed with a sealing member to prevent the liquid material from flowing out.
The liquid material leaked from the discharge unit 2 drops on the tray 3 and collects in the deepest portion 17 at the right back. The deepest part 17 has an opening that leads to the flow path 23 provided in the connection member 7, and the liquid material reaches the detection device 4 through the flow path 23 from the opening.
In the present embodiment, by providing the detection device 4 on the connecting member 7, the size of the tray 3 can be reduced by the amount of the detection device 4, and space saving can be achieved. It is also possible to prevent the detection device 4 from being accidentally touched during work on the discharge unit 2.

1 is a schematic perspective view of a coating apparatus having a leak detection mechanism according to Embodiment 1. FIG. FIG. 3 is an enlarged perspective view that transmits through a main part of a discharge unit according to the first embodiment. FIG. 3 is an enlarged perspective view of a saucer part related to Example 1. 3 is a side view of a discharge unit according to Embodiment 1. FIG. FIG. 3 is a front view of a discharge unit according to the first embodiment. 6 is a schematic perspective view of a discharge unit according to Embodiment 2. FIG. FIG. 10 is a schematic perspective view showing Modification 1 of the saucer related to Example 3. FIG. 10 is a schematic perspective view showing a second modification of the tray related to the third embodiment. 10 is an enlarged perspective view of a discharge unit according to Embodiment 4. FIG. FIG. 10 is an enlarged perspective view through a main part of a discharge unit according to a fifth embodiment.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Application | coating apparatus 2 Discharge unit 3 Receptacle 4 Detection apparatus (sensor)
5 Driving part 6 Application object 7 Connection member 8 Surface (slope) for receiving liquid material
9 Outer edge upright (outer edge of tray)
DESCRIPTION OF SYMBOLS 10 Discharge opening part 11 Opening part rising part 12 Flowing direction of liquid material 13 Inclination to the near side 14 Inclination to the left side 15 Support stand 16 Fixing tool 17 Deepest part 18 Holding tool 19 Holding tool opening 20 Discharge unit mounting plate 21 Screw member 22 Screw hole 23 Flow path

Claims (13)

A liquid leakage detection mechanism that can be attached to a coating device that applies a liquid material by relatively moving a workpiece placed on a table and a discharge unit facing the workpiece,
Leakage detection which is composed of a tray having an opening provided at a position opposite to the discharge port of the discharge unit, and a leak detection device which detects a leak accumulated in the tray, and is disposed immediately below the discharge unit. mechanism.   The liquid leakage detection mechanism according to claim 1, further comprising an outer edge upright portion (9) surrounding the outer edge of the tray and an opening upright portion (11) surrounding the opening.   3. The liquid leakage detection mechanism according to claim 1, wherein the tray has a deepest part where the liquid leakage flows down.   The liquid leakage detection mechanism according to claim 3, wherein the tray has a slope connected to the deepest portion.   The liquid leakage detection mechanism according to claim 3 or 4, wherein the detection device is disposed at a deepest portion of the tray.   The liquid leakage detection mechanism according to claim 3 or 4, wherein the detection device is disposed in a flow path that communicates with a deepest portion of the tray. The liquid leakage detection mechanism according to any one of claims 1 to 6, wherein the tray is attached in a state where a surface for receiving the liquid material is inclined with respect to a horizontal plane. The liquid leakage detection mechanism according to any one of claims 1 to 7 , wherein the surface (8) for receiving the liquid leakage of the tray has water repellency. Either leak detection system of claims 1 to 8, characterized in that it comprises an alarm device for issuing an alarm by receiving a detection signal emanating from the sensing device. The pan may be any liquid leakage detecting mechanism of claims 1 to 9, characterized in that it is directly attached to the lower end of the discharge unit. The leakage according to any one of claims 1 to 9 , wherein the tray is detachably disposed immediately below the discharge unit by a fixture provided on a connection member (7) to which the discharge unit is mounted. Liquid detection mechanism. A liquid leakage detection mechanism according to any one of claims 1 to 10 , a discharge unit having a discharge port for discharging a liquid material, a table on which a work is placed, and a drive unit that relatively moves the work and the discharge unit. A liquid material applicator characterized by the above. A liquid leakage detection mechanism according to claim 11, a discharge unit having a discharge port for discharging a liquid material, a table on which a work is placed, and a drive unit that relatively moves the work and the discharge unit.
Wherein the leakage detecting mechanism and the discharge unit is provided, attached to removably said leakage detection mechanism provided movably configured connecting member (7) and the connecting member (7) by the drive unit A liquid material applicator comprising a tool.