JP5066772B2 - Liquid crystal display manufacturing equipment - Google Patents

Description

  The present invention relates to an apparatus for manufacturing a liquid crystal display device in which liquid crystal molecules are aligned in a predetermined direction by irradiating ultraviolet rays in a state where an electric field is applied to a liquid crystal display substrate in which liquid crystals are sealed. Specifically, the liquid crystal absorbs ultraviolet rays. The present invention relates to an apparatus for manufacturing a liquid crystal display device that suppresses heat generation to a high temperature and stabilizes the alignment of liquid crystal molecules, and can uniformly irradiate a large area substrate with ultraviolet rays.

  A conventional manufacturing apparatus of this type of liquid crystal display device has a liquid crystal display panel in which a liquid crystal material mixed with liquid crystal and a monomer is sealed between a pair of substrates placed in an ultraviolet irradiation device, and a voltage application device and a substrate are placed between the substrates. A liquid crystal display panel is irradiated with ultraviolet rays from a high-pressure mercury lamp of an ultraviolet irradiation device in a state where liquid crystal molecules are inclined by applying a voltage, and the above monomers are polymerized and polymerized, thereby defining the alignment direction of the liquid crystal molecules. (For example, refer to Patent Document 1).

Such a liquid crystal display device manufacturing apparatus can align liquid crystal molecules in a non-contact manner by controlling the alignment film by rubbing the alignment film, thereby suppressing the occurrence of defects. It has the feature that it can do.
JP 2003-228050 A

  However, in such a conventional apparatus for manufacturing a liquid crystal display device, the liquid crystal display substrate may absorb ultraviolet rays and generate heat at 80 ° C. or higher, and the sealed liquid crystal has a switching function of transmitting and blocking light. There is a possibility that a problem that the image disappears and an appropriate image display cannot be performed may occur.

  In addition, since ultraviolet rays having a wavelength of 300 nm or less damage liquid crystals, it is necessary to provide a filter that blocks transmission of ultraviolet rays having a wavelength of 300 nm or less on the ultraviolet emission side of the ultraviolet irradiation device. In this case, for example, for a large-area liquid crystal display substrate having a side length of more than 2 m, a plurality of rectangular filters must be provided vertically and horizontally, and the amount of transmitted ultraviolet light in the region between the filters Decreases and uneven illuminance occurs, and there is a possibility that the liquid crystal display substrate cannot be uniformly irradiated with ultraviolet rays.

  Accordingly, the present invention addresses such problems and stabilizes the alignment of the liquid crystal molecules by suppressing the liquid crystal display substrate from absorbing ultraviolet rays and generating heat to a high temperature. However, an object of the present invention is to provide an apparatus for manufacturing a liquid crystal display device capable of uniformly irradiating ultraviolet rays.

  In order to achieve the above object, an apparatus for manufacturing a liquid crystal display device according to the present invention applies an electric field to each pixel of a liquid crystal display substrate in which a plurality of pixels are formed in a matrix between a pair of substrates and the liquid crystal is sealed. An apparatus for manufacturing a liquid crystal display device in which the liquid crystal display substrate is irradiated with ultraviolet rays in an applied state to align the molecules of the liquid crystal in a predetermined direction, and is cooled in contact with one surface of the liquid crystal display substrate A concave portion for storing the medium at the center, a stage for adsorbing and holding a peripheral portion of one surface of the liquid crystal display substrate on the upper surface, and a stage disposed above the stage, wherein at least the liquid crystal display substrate A plurality of flash lamps that emit ultraviolet light are provided inside a reflector having an opening having a size corresponding to the display area, and a plurality of rectangular-shaped filters that selectively transmit ultraviolet light of a predetermined wavelength to the opening. A plurality of flash units each time it moves one step while moving a distance that is an integral multiple of the arrangement pitch of the filters vertically and horizontally in a predetermined step. The lamp is turned on.

  With such a configuration, a plurality of pixels are formed in a matrix between a pair of substrates on the upper surface of the stage, and the vicinity of the periphery of one surface of the liquid crystal display substrate in which the liquid crystal is sealed is sucked and held. A cooling medium is stored in a recess formed in the center of the stage with an electric field applied to each pixel of the substrate, and the cooling medium is brought into contact with one surface of the liquid crystal display substrate to cool the liquid crystal display substrate. A plurality of flash lamps for emitting ultraviolet rays inside a reflector having an opening having a size corresponding to at least a display area of the substrate for use, and a plurality of rectangular filters that selectively transmit ultraviolet rays of a predetermined wavelength to the openings Each time the light source device moves one step while moving the light source device in which the light source devices are arranged vertically and horizontally in a predetermined step by a distance that is an integral multiple of the arrangement pitch of the filters, a plurality of Shuranpu is lit, to orient the molecules of the liquid crystal in a predetermined direction.

  The plurality of filters block the transmission of ultraviolet rays having a wavelength of about 300 nm or less. As a result, transmission of ultraviolet rays having a wavelength of about 300 nm or less is blocked by a plurality of filters.

  A support member for supporting the edge of each filter is provided between the plurality of filters. Thereby, the edge of each filter is supported by the support member provided between the plurality of filters.

  According to the first aspect of the present invention, since one surface of the liquid crystal display substrate is cooled by the cooling medium, the liquid crystal can be prevented from absorbing ultraviolet rays and generating heat to a high temperature. In addition, a plurality of flash lamps that emit ultraviolet rays are provided inside a reflector having an opening having a size corresponding to at least a display area of the liquid crystal display device, and a rectangular shape that selectively transmits ultraviolet rays having a predetermined wavelength into the opening. The light source device provided with a plurality of filters arranged vertically and horizontally moves a distance that is an integral multiple of the array pitch of the filters vertically and horizontally in a predetermined step, and turns on a plurality of flash lamps each time it moves one step. Thus, it is possible to uniformly irradiate a large area substrate with ultraviolet rays. Therefore, the alignment of the liquid crystal molecules can be stabilized over the entire display area of the liquid crystal display substrate.

  According to the second aspect of the invention, the filter can block the transmission of ultraviolet rays having a wavelength of about 300 nm or less, and the liquid crystal can be prevented from being damaged by the ultraviolet rays.

  And according to the invention which concerns on Claim 3, a some filter can be easily attached to the opening part of a reflector.

  Embodiments of the present invention will be described below in detail with reference to the accompanying drawings. 1 is a front view showing an embodiment of a manufacturing apparatus of a liquid crystal display device according to the present invention, FIG. 2 is a cross-sectional view taken along line OO of FIG. 1, and FIG. 3 is a right side view of FIG. In this liquid crystal display manufacturing apparatus, a plurality of pixels are formed in a matrix between a pair of substrates, and ultraviolet rays are applied to the liquid crystal display substrate while an electric field is applied to each pixel of the liquid crystal display substrate in which the liquid crystal is sealed. This is for irradiating and orienting liquid crystal molecules in a predetermined direction, and comprises a stage 1, a prober 2, a light source device 3, a conveying means 4, an alignment camera 5, and an air knife 6.

  The liquid crystal display substrate 7 used here has a COA (Color filter On Array) configuration in which the color filter 47 is continuously formed on the upper part of the TFT, and as shown in FIG. Are formed in a matrix to form a display region 9, and the size of the counter electrode substrate 11 is made larger than the size of the TFT substrate 10 as shown in FIG. A plurality of electrodes 12 for supplying drive signals to the plurality of pixels 8 to at least two edges 11b and 11c (see FIG. 4) adjacent to each other on the surface 11a of the counter electrode substrate 11 on the TFT substrate 10 side. A plurality of electrode groups 13 that are arranged side by side are provided. In FIG. 5, reference numeral 14 denotes a liquid crystal layer, and reference numeral 15 denotes a sealing material.

  The stage 1 adsorbs and holds the liquid crystal display substrate 7. As shown in FIGS. 2 and 6, the stage 1 is formed with a recessed portion 16 at the center and is in contact with one surface of the liquid crystal display substrate 7. Cooling water as a cooling medium to be cooled, for example, domestic water, industrial water or pure water, can be stored, and the upper surface 1a is formed in a smooth surface to provide a plurality of suction jets 18 from each suction jet 18 Air is sucked so that the vicinity of the periphery of the back surface 10a of the TFT substrate 10 of the liquid crystal display substrate 7 is adsorbed to the upper surface 1a, and air is ejected from each suction outlet 18 so that the liquid crystal display substrate 7 is floated. It has become. Note that pipes (not shown) are connected to the respective suction jets 18. Further, the ends of these pipes are combined into one and connected to two switching valves. One of the switching valves is connected to a suction pump (not shown) and the other is connected to an air compressor (not shown). Has been. In this case, when the liquid crystal display substrate 7 is held by suction on the stage 1, the switching valve is switched to the suction pump side to suck air from the suction outlet 18. When coarse alignment adjustment is performed between the liquid crystal display substrate 7 and the prober 2 described later, and when the liquid crystal display substrate 7 is carried out, the switching valve is switched to the air compressor side, and the air is discharged from the suction outlet 18. Is ejected to float the liquid crystal display substrate 7.

  Here, on the bottom surface of the recessed portion 16, cooling water is ejected and discharged to the back surface 10 a of the TFT substrate 10 of the liquid crystal display substrate 7 sucked and held on the stage 1, and the cooling water is discharged. And a discharge port (not shown). In addition, the said discharge port is connected and provided in the some drainage groove | channel 20 provided crossing vertically and horizontally as shown in FIG. Each of the jets 19 is provided inside a plurality of islands 21 surrounded by the drainage grooves 20, and one end of a water supply channel 29 is used as each jet 19 as shown in FIG. 6. A water supply pipe (not shown) is connected to the other end of the water supply passage 29, and the end of the water supply pipe is connected to a water supply pump that pumps cooling water from a water storage tank (not shown). Further, a drain pipe (not shown) is connected to the discharge port, and the end of the drain pipe is connected to a water storage tank so that the cooling water can be circulated and used.

  A plurality of photosensors 22 are provided in each island 21 on the bottom surface of the recessed portion 16. The photo sensor 22 inspects the lighting state of the liquid crystal display substrate 7 and receives the transmitted light of the liquid crystal display substrate 7.

  Further, a plurality of lift pins 23 are provided in the drainage groove 20 on the bottom surface of the recessed portion 16. These lift pins 23 support the back surface 10a of the TFT substrate 10 of the liquid crystal display substrate 7 and move up and down together, and the tip positions of the lift pins 23 are formed at substantially the same height. . Further, the periphery of the lift pin 23 is subjected to water leakage prevention treatment so that the cooling water does not leak through the lift pin 23.

  A plurality of wires 45 are stretched on the opening side of the recessed portion 16. The plurality of wires 45 are in contact with the back surface 10a of the TFT substrate 10 of the liquid crystal display substrate 7 sucked and held on the stage 1 to support the liquid crystal display substrate 7 from below, and surround the islands 21 described above. For example, a metal wire or a metal net stretched on the upper end portion of the wire holding frame 46 projecting into the recessed portion 16.

  The prober 2 is disposed on at least two adjacent edge portions 44a and 44b (see FIG. 2) of a frame-like prober holding portion 44 provided so as to surround the stage 1. This prober 2 is provided with a plurality of prober units 2a provided with a plurality of terminals 27 connected to a plurality of electrodes 12 formed on the edge of the liquid crystal display substrate 7 and energized. 27 is protruded upward from the upper surface 1a of the stage 1 (see FIG. 6), and contacts a plurality of electrodes 12 formed on the counter electrode substrate 11 of the liquid crystal display substrate 7 placed on the stage 1. It can be made to. The plurality of terminals 27 are contact pins that are formed so as to expand and contract so as to be shrunk when a pressing force is applied from the outside and to return to the original state when the pressing force is removed, and for liquid crystal display placed on the stage 1 The plurality of electrodes 12 of the substrate 7 are brought into contact with each other at a substantially constant pressure. The prober holding portion 44 is formed so as to be movable in the X-axis and Y-axis directions, and is formed so as to be rotatable about the center thereof. The terminal 27 of the prober 2 is connected to the electrode 12 of the liquid crystal display substrate 7. Alignment can be performed.

  The stage 1 and the prober holding portion 44 are accommodated inside a housing 24 provided so as to surround them, and a liquid crystal display is provided on the stage 1 through a loading / unloading port 25 formed on the side surface of the housing 24. The board | substrate 7 for work can be carried in / out. In addition, a shutter 26 that opens and closes the carry-in / out port 25 by rotating in the direction of the arrow indicated by a broken line in FIG. 3 is attached to the carry-in / out port 25, and is closed during ultraviolet irradiation so that the ultraviolet light is exposed to the outside. It is designed not to leak.

  A light source device 3 is disposed above the stage 1. The light source device 3 irradiates at least the entire display region 9 of the liquid crystal display substrate 7 held on the stage 1 with ultraviolet rays, and corresponds to at least the display region 9 of the liquid crystal display substrate 7 as shown in FIG. A plurality of flash lamps 28 for emitting ultraviolet rays are provided inside the reflector 17 having the opening 17a of the size described above, and a plurality of rectangular filters 47 that selectively transmit ultraviolet rays having a predetermined wavelength are arranged vertically and horizontally on the emission side of the ultraviolet rays. Are arranged side by side. Specifically, the filter 47 blocks ultraviolet light having a wavelength of about 300 nm or less that damages the liquid crystal, and the edge portion is supported by a support member 48 provided between the filters 47. Then, the light source device 3 turns on the plurality of flash lamps 28 every time one step is moved while moving a distance that is an integral multiple of the arrangement pitch of the filters 47 in the vertical and horizontal directions (X-axis and Y-axis directions) in a predetermined step. It is like that. Since the flash lamp 28 emits white light by simmer discharge (preliminary lighting) when a weak current is supplied, the flash lamp 28 can also be used as a lighting inspection backlight of the liquid crystal display substrate 7. it can.

  Conveying means 4 is provided on the side of the stage 1. This transport means 4 carries in and out the liquid crystal display substrate 7 with respect to the stage 1, and the surface opposite to the stage 1 side of the liquid crystal display substrate 7, that is, the upper surface 11d of the counter electrode substrate 11 (FIG. 5) is a robot provided with a plurality of arms 34 that adsorb and hold. The transport means 4 moves forward and backward in the Y-axis direction on the rail 35 shown in FIG. 3, and the head portion 36 rotates 360 ° around the rotation shaft 37. A plurality of suction cups and suction ports 38 are formed at the center of each suction cup on the lower surface of each arm 34. Further, as shown in FIG. 2, each suction port 38 is connected to a groove 39 formed in the arm 34, and another suction hole 38 is provided via a tube by a hole (not shown) formed in the root portion of each arm 34, for example. It can be sucked with a suction pump.

  An alignment camera 5 is provided above the stage 1. The alignment camera 5 detects an alignment mark provided on the liquid crystal display substrate 7 and aligns the electrode 12 of the liquid crystal display substrate 7 and the terminal 27 of the prober 2. The prober holding portion 44 is moved together with the prober holding portion 44 in the X-axis and Y-axis directions, and is rotated about the center of the prober holding portion 44 as an axis.

  An air knife 6 is provided on the carry-in and carry-out side of the liquid crystal display substrate 7 of the stage 1. The air knife 6 is for rapidly drying by blowing compressed air on one surface of the liquid crystal display substrate 7, that is, the back surface 10a (see FIG. 5) of the TFT substrate 10, and is not shown by piping. Connected to an air compressor. Note that the gas to be injected is not limited to air, and may be an inert gas such as nitrogen or argon.

Next, the operation of the liquid crystal display device manufacturing apparatus configured as described above and the manufacturing of the liquid crystal display device will be described with reference to the flowchart of FIG.
First, in step S 1, the liquid crystal display substrate 7 is attracted to the lower surface of the arm 34 of the transport means 4 by the transport means 4 and is transported in the Y-axis direction and positioned on the stage 1. .

  In step S <b> 2, the lift pins 23 are raised and the tips of the lift pins 23 are brought into contact with the back surface 10 a of the TFT substrate 10 of the liquid crystal display substrate 7. When the tip of the lift pin 23 comes into contact with the liquid crystal display substrate 7, this is detected by a sensor (not shown), and the suction of the liquid crystal display substrate 7 to the arm 34 of the transport means 4 is released. As a result, the liquid crystal display substrate 7 is transferred from the transport means 4 to the lift pins 23. The transport means 4 moves in the Y-axis direction and retracts to its original position when the delivery of the liquid crystal display substrate 7 is completed.

  In step S3, as shown in FIG. 6, the lift pins 23 are lowered in the Z-axis direction to place the liquid crystal display substrate 7 on the stage 1. At this time, the lift pins 23 are further lowered and separated from the back surface 10 a of the TFT substrate 10 of the liquid crystal display substrate 7. When the liquid crystal display substrate 7 is placed on the stage 1, this is detected by a sensor (not shown) and controlled by the control means to drive the air compressor (not shown) and switch the switching valve to the air compressor side. Air is ejected from the suction ejection port 18 on the upper surface 1 a of the stage 1 to float the liquid crystal display substrate 7. In this state, the liquid crystal display substrate 7 is pushed in the diagonal direction by a pressing pin (not shown) and pressed against positioning protrusions (not shown) provided at two adjacent edges of the stage 1 in the diagonal direction. . Thereby, the liquid crystal display substrate 7 is arranged at a predetermined position on the stage 1, and coarse alignment adjustment between the electrode 12 of the liquid crystal display substrate 7 and the terminal 27 of the prober 2 is performed. Thereafter, the switching valve is switched to the suction pump side and sucked from the suction outlet 18 to hold the liquid crystal display substrate 7 on the upper surface of the stage 1 by suction. At this time, the plurality of terminals 27 of the prober 2 provided on the prober holding portion 44 are pushed down by the liquid crystal display substrate 7, and the plurality of electrodes 12 provided on the edge of the counter electrode substrate 11 of the liquid crystal display substrate 7. Press contact. The liquid crystal display substrate 7 has the back surface 10 a of the TFT substrate 10 supported from below by a plurality of wires 45 stretched on the upper end of the wire holding frame 46 on the opening side of the recessed portion 16. Thereby, the bending of the liquid crystal display substrate 7 is suppressed.

  In step S4, the alignment camera 5 is turned ON to image the alignment marks provided at the four corners of the liquid crystal display substrate 7. In this case, as shown in FIG. 9A, when the alignment mark 41 is deviated from the center of the field of view 42 of the alignment camera 5, the control means (not shown) is used to control the alignment camera 5 based on the captured image of the alignment mark 41. The displacement amount of the alignment mark 41 from the center of the field of view 42, that is, the displacement amount and the rotation angle in the X-axis and Y-axis directions is calculated, and the prober holder 44 is moved in the X-axis and Y-axis directions according to these displacement amounts and rotation angles. And rotated to position the alignment mark 41 at the center of the field of view 42 of the alignment camera 5 as shown in FIG. As a result, the terminal 27 of the prober 2 is accurately aligned with the electrode 12 of the liquid crystal display substrate 7.

  In step S5, the light source device 3 is driven. In this case, first, a weak current is supplied to each flash lamp 28 to cause a simmer discharge. Therefore, each flash lamp 28 emits white light. At the same time, a plurality of electrodes 12 of the liquid crystal display substrate 7 are energized from a signal source (not shown) through the prober 2, and a predetermined amount of electric field is applied to the plurality of pixels 8 to drive each pixel 8 ON. As a result, the white light can be transmitted through the liquid crystal display substrate 7, and the transmitted light is detected by the plurality of photosensors 22 provided on the bottom surface of the recessed portion 16 of the stage 1, and the lighting state of the liquid crystal display substrate 7 is detected. Check.

  In step S6, when it is confirmed that the entire surface of the liquid crystal display substrate 7 is turned on, the water supply pump is driven to pump the cooling water from the water storage tank, and this cooling water is provided on the bottom surface of the recessed portion 16 of the stage 1. 19, sprayed on the back surface 10 a of the TFT substrate 10 of the liquid crystal display substrate 7. At this time, since the back surface 10 a of the TFT substrate 10 of the liquid crystal display substrate 7 and the plurality of wires 45 are in line contact, the cooling water sprayed on the back surface 10 a of the TFT substrate 10 is recessed in the TFT substrate 10. The liquid crystal display substrate 7 can be efficiently cooled by uniformly hitting substantially the entire surface facing the portion 16. Thereafter, the cooling water is discharged from the discharge port through the drain groove 20, returned to the water storage tank, cooled to a predetermined temperature by a separately provided chiller, and circulated for use.

  In step S7, a lighting control signal is supplied to the light source device 3 in a state where a predetermined amount of electric field is applied to each pixel 8, and each flash lamp 28 is lit for a predetermined time. At this time, as shown in FIG. 10, the light source device 3 represents a distance that is an integral multiple of the arrangement pitch of the filters 47 (in FIG. 10, a distance corresponding to the arrangement pitch of the filters 47) in the X-axis and Y-axis directions. Move in predetermined steps (for example, 6 steps). Specifically, as shown in FIG. 10, the light source device 3 moves 6 steps from left to right along the X axis in the figure, and then moves 1 step from top to bottom along the Y axis. Then, after moving 6 steps from right to left along the X axis, it moves 1 step from top to bottom along the Y axis. Thereafter, the same movement as described above is performed, and the distance corresponding to the arrangement pitch of the filters 47 is zigzag moved. Then, the route is reversed to return to the original position. In this case, the light source device 3 is turned on each time it moves one step, and turns on the plurality of flash lamps 28. As a result, as shown in FIG. 11, ultraviolet rays can be uniformly irradiated over the entire surface of the display region 9 of the liquid crystal display substrate 7, and liquid crystal molecules can be uniformly aligned in a predetermined direction.

  As shown in FIG. 12, the light source device 3 moves a distance corresponding to a half pitch of the arrangement pitch of the filter 47 in three steps in the X-axis and Y-axis directions. When 28 was turned on, the illuminance distribution on the display area 9 of the liquid crystal display substrate 7 was as shown in FIG. Thus, if the movement distance of the light source device 3 in the X-axis and Y-axis directions is inappropriate, the illuminance distribution becomes non-uniform compared to the case of FIG.

  In step S8, the liquid crystal display substrate 7 is irradiated with a predetermined amount of ultraviolet rays while moving the light source device 3 in the same manner as in step S7 with the application of the electric field to each pixel 8 removed. As a result, the alignment of the liquid crystal molecules of each pixel 8 is fixed, and the liquid crystal molecules are prevented from returning to the initial state after the electric field applied to each pixel 8 is removed, thereby stabilizing the alignment of the liquid crystal molecules. it can.

  In step S <b> 9, the light source device 3 is turned OFF, the water supply pump is stopped, and the cooling water in the recessed portion 16 of the stage 1 is drained.

  In step S <b> 10, the transport unit 4 is moved in the Y-axis direction to position the arm 34 above the stage 1. Next, the suction pump of the stage 1 is stopped, and the suction of the liquid crystal display substrate 7 to the upper surface 1a of the stage 1 is released.

  In step S11, the switching valve is switched and the air compressor is driven, and air is ejected from the suction ejection port 18 to float the liquid crystal display substrate 7. Thereafter, the lift pins 23 are raised to lift the liquid crystal display substrate 7 until the upper surface 11 d of the counter electrode substrate 11 contacts the lower surface of the arm 34. When the sensor detects that the liquid crystal display substrate 7 is in contact with the arm 34, the suction pump of the transport means 4 is driven to attract the liquid crystal display substrate 7 to the lower surface of the arm 34, and the liquid crystal display substrate 7 is lifted by the lift pin. 23 to the conveying means 4. When the delivery of the liquid crystal display substrate 7 is completed, the lift pins 23 are lowered to a predetermined position.

  In step S <b> 12, the transport unit 4 moves in the Y-axis direction and carries out the liquid crystal display substrate 7. At this time, compressed air is jetted from the air knife 6 provided on the carry-in and carry-out sides of the stage 1, and the cooling water attached to the back surface 10a of the TFT substrate 10 of the liquid crystal display substrate 7 is blown off to dry the substrate.

  In the above embodiment, the case where the liquid crystal display substrate 7 is irradiated with the predetermined amount of ultraviolet rays in the state where the application of the electric field to each pixel 8 is removed in step S8 has been described, but the present invention is not limited to this. In step S7, when the alignment of the liquid crystal molecules can be obtained sufficiently stably, step S8 may be omitted.

  Further, in the above embodiment, the case where the prober 2 is provided in the frame-like prober holding portion 44 provided so as to be movable surrounding the stage 1 has been described. However, the present invention is not limited to this, and the prober 2 is not limited to the stage. The at least two adjacent edges of 1 may be provided so as to be movable in the X-axis and Y-axis directions and to be rotatable about the center of the prober 2 as an axis. In this case, the alignment camera 5 is preferably provided so that both the electrode 12 of the liquid crystal display substrate 7 and the tip of the terminal 27 of the prober 2 can be observed. Alternatively, in step S3, if the electrode 12 of the liquid crystal display substrate 7 and the terminal 27 of the prober 2 can be aligned within a predetermined allowable range, the prober 2 is fixed to the edge of the stage 1. It may be provided. In this case, step S4 can be omitted, and the alignment camera 5 may not be provided.

  Furthermore, although the case where the plurality of electrodes 12 of the liquid crystal display substrate 7 are provided on the counter electrode substrate 11 side has been described in the above embodiment, the present invention is not limited to this and may be provided on the TFT substrate 10 side. . In this case, when the liquid crystal display substrate 7 is placed on the stage 1, the prober 2 is retracted to the standby position on the side of the stage 1, and the liquid crystal display substrate 7 is placed on the stage 1. It is preferable that the terminals 27 of the prober 2 are brought into contact with each electrode from above by moving to above the plurality of electrodes on the substrate.

  In the embodiment described above, the case where the light source device 3 is moved in a zigzag manner has been described. However, the present invention is not limited to this, and the distance in which the maximum movement amount of the light source device 3 is equal to an integral multiple of the arrangement pitch of the filters 47. Any form such as a spiral may be used.

  In the above embodiment, the case where cooling water is used as the cooling medium has been described. However, the present invention is not limited to this, and any antifreezing liquid or the like can be used as long as it can be cooled by contacting one surface of the substrate. It can be anything.

  In the above description, the case where the TFT substrate 10 has a COA configuration has been described. However, the present invention is not limited to this, and any device can be used as long as the alignment of liquid crystal molecules can be controlled by ultraviolet irradiation. It may be.

It is a front view which shows embodiment of the manufacturing apparatus of the liquid crystal display device by this invention. FIG. 2 is a cross-sectional view taken along line OO in FIG. 1. It is a side view of FIG. It is a top view which shows the example of 1 structure of the liquid crystal display substrate used for the said manufacturing apparatus. It is a center line sectional view of the above-mentioned substrate for liquid crystal display. FIG. 3 is a cross-sectional view taken along the line P-P in FIG. 2. It is a fragmentary sectional bottom view which shows the light source device used for the said manufacturing apparatus. 3 is a flowchart illustrating a method for manufacturing a liquid crystal display device according to the present invention. It is explanatory drawing shown about alignment with the substrate for liquid crystal displays and a prober performed using an alignment camera. It is explanatory drawing which shows the example of a suitable movement of the said light source device. It is explanatory drawing which shows the analysis result of the illumination intensity distribution in the movement of the light source device shown in FIG. It is explanatory drawing which shows the example of an improper movement of the said light source device. It is explanatory drawing which shows the analysis result of the illumination intensity distribution in the movement of the light source device shown in FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Stage 3 ... Light source device 7 ... Substrate for liquid crystal display 8 ... Pixel 10 ... TFT substrate 11 ... Counter electrode substrate 16 ... Recessed part 17 ... Reflector 17a ... Reflector opening 28 ... Flash lamp 47 ... Filter 48 ... Support member

Claims (3)

In a state where an electric field is applied to each of the pixels of the liquid crystal display substrate in which a plurality of pixels are formed in a matrix between a pair of substrates and the liquid crystal is sealed, the liquid crystal display substrate is irradiated with ultraviolet rays. A liquid crystal display manufacturing apparatus for aligning molecules in a predetermined direction,
A recess that stores a cooling medium that cools in contact with one surface of the liquid crystal display substrate, and a stage that adsorbs and holds a peripheral portion of one surface of the liquid crystal display substrate on the upper surface;
A plurality of flash lamps for emitting ultraviolet light are provided inside a reflector disposed above the stage and having an opening having a size corresponding to at least a display area of the liquid crystal display substrate, and ultraviolet light having a predetermined wavelength is provided in the opening. A light source device in which a plurality of rectangular filters that selectively transmit light are arranged vertically and horizontally;
With
The light source device manufactures a liquid crystal display device that turns on the plurality of flash lamps each time it moves one step while moving a distance that is an integral multiple of the arrangement pitch of the filters vertically and horizontally in a predetermined step. apparatus.   The apparatus for manufacturing a liquid crystal display device according to claim 1, wherein the plurality of filters block the transmission of ultraviolet rays having a wavelength of about 300 nm or less.   The apparatus for manufacturing a liquid crystal display device according to claim 1, wherein a support member that supports an edge of each filter is provided between the plurality of filters.

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