JP5066021B2 - Ｐｆｃ処理装置及びｐｆｃ含有ガスの処理方法 - Google Patents

Ｐｆｃ処理装置及びｐｆｃ含有ガスの処理方法 Download PDF

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JP5066021B2
JP5066021B2 JP2008179115A JP2008179115A JP5066021B2 JP 5066021 B2 JP5066021 B2 JP 5066021B2 JP 2008179115 A JP2008179115 A JP 2008179115A JP 2008179115 A JP2008179115 A JP 2008179115A JP 5066021 B2 JP5066021 B2 JP 5066021B2
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pfc
gas
processing apparatus
pipe
processing
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JP2009034671A5 (enExample
JP2009034671A (ja
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洋一 森
哲夫 駒井
日出人 郡山
豊司 篠原
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Ebara Corp
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Ebara Corp
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    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02C—CAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSE GASES [GHG]
    • Y02C20/00—Capture or disposal of greenhouse gases
    • Y02C20/30—Capture or disposal of greenhouse gases of perfluorocarbons [PFC], hydrofluorocarbons [HFC] or sulfur hexafluoride [SF6]

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JP2008179115A 2007-07-10 2008-07-09 Ｐｆｃ処理装置及びｐｆｃ含有ガスの処理方法 Active JP5066021B2 (ja)

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JP2008179115A JP5066021B2 (ja) 2007-07-10 2008-07-09 Ｐｆｃ処理装置及びｐｆｃ含有ガスの処理方法

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JP2007181528 2007-07-10
JP2007181528 2007-07-10
JP2008179115A JP5066021B2 (ja) 2007-07-10 2008-07-09 Ｐｆｃ処理装置及びｐｆｃ含有ガスの処理方法

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JP2009034671A JP2009034671A (ja) 2009-02-19
JP2009034671A5 JP2009034671A5 (enExample) 2011-08-04
JP5066021B2 true JP5066021B2 (ja) 2012-11-07

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Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5020136B2 (ja) * 2007-07-10 2012-09-05 株式会社荏原製作所 フッ素固定剤及びｐｆｃ分解処理剤並びにこれらの調製方法
JP5284773B2 (ja) * 2008-12-26 2013-09-11 株式会社荏原製作所 処理温度を上昇させる排ガス処理方法、排ガス処理装置の運転方法、および排ガス処理装置
JP5498752B2 (ja) * 2009-10-07 2014-05-21 大陽日酸株式会社 排ガス処理方法及び排ガス処理装置

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3264453B2 (ja) * 1992-09-02 2002-03-11 セントラル硝子株式会社 Ｎｆ▲３▼ガスの前処理方法
JP3713333B2 (ja) * 1996-07-04 2005-11-09 同和鉱業株式会社 弗化炭素類の分解法
JPH1176742A (ja) * 1997-09-05 1999-03-23 Sony Corp 排ガス処理装置および排ガス処理方法
JP3789277B2 (ja) * 1999-04-28 2006-06-21 昭和電工株式会社 フッ素化合物の分解用反応剤、分解方法及びその用途
JP2002224565A (ja) * 2000-12-01 2002-08-13 Japan Pionics Co Ltd フルオロカーボンの分解処理剤及び分解処理方法
JP4211467B2 (ja) * 2003-04-16 2009-01-21 株式会社日立製作所 触媒式排ガス処理装置及び排ガス処理方法
JP4413040B2 (ja) * 2004-03-03 2010-02-10 株式会社コロナ シフト反応装置
JP5048208B2 (ja) * 2004-03-19 2012-10-17 株式会社荏原製作所 フッ素含有化合物を含むガスの処理方法及び装置
JP4715991B2 (ja) * 2004-03-24 2011-07-06 戸田工業株式会社 フッ素及び／又はホウ素を吸着する吸着剤
JP4673780B2 (ja) * 2006-03-24 2011-04-20 大陽日酸株式会社 有害ガスの除害装置
JP5020136B2 (ja) * 2007-07-10 2012-09-05 株式会社荏原製作所 フッ素固定剤及びｐｆｃ分解処理剤並びにこれらの調製方法

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