JP5064708B2 - プラズマ処理装置 - Google Patents

プラズマ処理装置 Download PDF

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Publication number
JP5064708B2
JP5064708B2 JP2006092965A JP2006092965A JP5064708B2 JP 5064708 B2 JP5064708 B2 JP 5064708B2 JP 2006092965 A JP2006092965 A JP 2006092965A JP 2006092965 A JP2006092965 A JP 2006092965A JP 5064708 B2 JP5064708 B2 JP 5064708B2
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Japan
Prior art keywords
electrode
plasma
processing
gas
upper electrode
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Expired - Fee Related
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JP2006092965A
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English (en)
Japanese (ja)
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JP2007266536A5 (enExample
JP2007266536A (ja
Inventor
直樹 松本
欣延 早川
秀敏 花岡
法明 兒玉
地塩 輿水
学 岩田
諭志 田中
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Tokyo Electron Ltd
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Tokyo Electron Ltd
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Priority to JP2006092965A priority Critical patent/JP5064708B2/ja
Priority to US11/694,158 priority patent/US20070227666A1/en
Publication of JP2007266536A publication Critical patent/JP2007266536A/ja
Publication of JP2007266536A5 publication Critical patent/JP2007266536A5/ja
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Publication of JP5064708B2 publication Critical patent/JP5064708B2/ja
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  • Drying Of Semiconductors (AREA)
JP2006092965A 2006-03-30 2006-03-30 プラズマ処理装置 Expired - Fee Related JP5064708B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2006092965A JP5064708B2 (ja) 2006-03-30 2006-03-30 プラズマ処理装置
US11/694,158 US20070227666A1 (en) 2006-03-30 2007-03-30 Plasma processing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006092965A JP5064708B2 (ja) 2006-03-30 2006-03-30 プラズマ処理装置

Publications (3)

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JP2007266536A JP2007266536A (ja) 2007-10-11
JP2007266536A5 JP2007266536A5 (enExample) 2009-04-02
JP5064708B2 true JP5064708B2 (ja) 2012-10-31

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JP2006092965A Expired - Fee Related JP5064708B2 (ja) 2006-03-30 2006-03-30 プラズマ処理装置

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Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009187673A (ja) * 2008-02-01 2009-08-20 Nec Electronics Corp プラズマ処理装置及び方法
KR102775299B1 (ko) * 2020-04-24 2025-03-06 삼성디스플레이 주식회사 플라즈마 처리 장치

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03138382A (ja) * 1989-10-20 1991-06-12 Nissin Electric Co Ltd 反応性イオンエッチング装置

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JP2007266536A (ja) 2007-10-11

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