JP5063066B2 - 半導体装置の作製方法 - Google Patents

半導体装置の作製方法 Download PDF

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Publication number
JP5063066B2
JP5063066B2 JP2006262010A JP2006262010A JP5063066B2 JP 5063066 B2 JP5063066 B2 JP 5063066B2 JP 2006262010 A JP2006262010 A JP 2006262010A JP 2006262010 A JP2006262010 A JP 2006262010A JP 5063066 B2 JP5063066 B2 JP 5063066B2
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Japan
Prior art keywords
film
substrate
insulating film
semiconductor device
element groups
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Expired - Fee Related
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JP2006262010A
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English (en)
Japanese (ja)
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JP2007123859A (ja
JP2007123859A5 (https=
Inventor
了介 渡邊
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Semiconductor Energy Laboratory Co Ltd
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Semiconductor Energy Laboratory Co Ltd
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Priority to JP2006262010A priority Critical patent/JP5063066B2/ja
Publication of JP2007123859A publication Critical patent/JP2007123859A/ja
Publication of JP2007123859A5 publication Critical patent/JP2007123859A5/ja
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/01—Manufacture or treatment
    • H10W72/0198—Manufacture or treatment batch processes

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  • Electroluminescent Light Sources (AREA)
  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
  • Thin Film Transistor (AREA)
JP2006262010A 2005-09-30 2006-09-27 半導体装置の作製方法 Expired - Fee Related JP5063066B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2006262010A JP5063066B2 (ja) 2005-09-30 2006-09-27 半導体装置の作製方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2005288141 2005-09-30
JP2005288141 2005-09-30
JP2006262010A JP5063066B2 (ja) 2005-09-30 2006-09-27 半導体装置の作製方法

Publications (3)

Publication Number Publication Date
JP2007123859A JP2007123859A (ja) 2007-05-17
JP2007123859A5 JP2007123859A5 (https=) 2009-10-22
JP5063066B2 true JP5063066B2 (ja) 2012-10-31

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ID=38147303

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006262010A Expired - Fee Related JP5063066B2 (ja) 2005-09-30 2006-09-27 半導体装置の作製方法

Country Status (1)

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JP (1) JP5063066B2 (https=)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009260313A (ja) 2008-03-26 2009-11-05 Semiconductor Energy Lab Co Ltd Ｓｏｉ基板の作製方法及び半導体装置の作製方法
KR101596698B1 (ko) * 2008-04-25 2016-02-24 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치 및 반도체 장치 제조 방법
WO2009139282A1 (en) * 2008-05-12 2009-11-19 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method for manufacturing semiconductor device
WO2009142310A1 (en) 2008-05-23 2009-11-26 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method for manufacturing the same
WO2009148001A1 (en) * 2008-06-06 2009-12-10 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing semiconductor device
US8053253B2 (en) * 2008-06-06 2011-11-08 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing semiconductor device
WO2010032602A1 (en) 2008-09-18 2010-03-25 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
WO2010032611A1 (en) 2008-09-19 2010-03-25 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method for manufacturing the same
WO2010035625A1 (en) 2008-09-25 2010-04-01 Semiconductor Energy Laboratory Co., Ltd. Semi conductor device
WO2010035627A1 (en) * 2008-09-25 2010-04-01 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
US9000442B2 (en) * 2010-01-20 2015-04-07 Semiconductor Energy Laboratory Co., Ltd. Light-emitting device, flexible light-emitting device, electronic device, and method for manufacturing light-emitting device and flexible-light emitting device
US9023254B2 (en) * 2011-10-20 2015-05-05 E I Du Pont De Nemours And Company Thick film silver paste and its use in the manufacture of semiconductor devices
CN102751586B (zh) * 2012-07-10 2015-03-11 大连理工大学 一种基于相变材料的可调谐左手超材料
KR102097153B1 (ko) * 2012-08-31 2020-04-06 삼성디스플레이 주식회사 유기 발광 장치 및 그 제조 방법
US20140061610A1 (en) 2012-08-31 2014-03-06 Hyo-Young MUN Organic light emitting device and manufacturing method thereof
KR102308784B1 (ko) * 2020-02-28 2021-10-01 한양대학교 산학협력단 텔루륨 산화물 및 이를 채널층으로 구비하는 박막트랜지스터

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4748859B2 (ja) * 2000-01-17 2011-08-17 株式会社半導体エネルギー研究所 発光装置の作製方法
JP3974749B2 (ja) * 2000-12-15 2007-09-12 シャープ株式会社 機能素子の転写方法
TW574753B (en) * 2001-04-13 2004-02-01 Sony Corp Manufacturing method of thin film apparatus and semiconductor device
JP2002353235A (ja) * 2001-05-23 2002-12-06 Matsushita Electric Ind Co Ltd アクティブマトリクス基板とそれを用いた表示装置およびその製造方法
JP4748943B2 (ja) * 2003-02-28 2011-08-17 株式会社半導体エネルギー研究所 半導体装置の作製方法
JP3836096B2 (ja) * 2003-08-25 2006-10-18 オムロン株式会社 Ｉｃタグ及びｉｃタグの製造方法
JP4836465B2 (ja) * 2004-02-06 2011-12-14 株式会社半導体エネルギー研究所 薄膜集積回路の作製方法及び薄膜集積回路用素子基板

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Publication number Publication date
JP2007123859A (ja) 2007-05-17

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