JP5049340B2 - 超音波探触子及び超音波診断装置 - Google Patents

超音波探触子及び超音波診断装置 Download PDF

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Publication number
JP5049340B2
JP5049340B2 JP2009505109A JP2009505109A JP5049340B2 JP 5049340 B2 JP5049340 B2 JP 5049340B2 JP 2009505109 A JP2009505109 A JP 2009505109A JP 2009505109 A JP2009505109 A JP 2009505109A JP 5049340 B2 JP5049340 B2 JP 5049340B2
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Prior art keywords
cmut chip
ultrasonic probe
ultrasonic
ground
substrate
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Japanese (ja)
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JPWO2008114582A1 (ja
Inventor
秀造 佐野
暁史 佐光
小林  隆
美喜雄 泉
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Hitachi Healthcare Manufacturing Ltd
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Hitachi Medical Corp
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22Details, e.g. general constructional or apparatus details
    • G01N29/24Probes
    • G01N29/2406Electrostatic or capacitive probes, e.g. electret or cMUT-probes
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B06GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06BMETHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0292Electrostatic transducers, e.g. electret-type
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/04Analysing solids
    • G01N29/06Visualisation of the interior, e.g. acoustic microscopy
    • G01N29/0654Imaging
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22Details, e.g. general constructional or apparatus details
    • G01N29/221Arrangements for directing or focusing the acoustical waves
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00Indexing codes associated with group G01N29/00
    • G01N2291/10Number of transducers
    • G01N2291/106Number of transducers one or more transducer arrays
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/49Method of mechanical manufacture
    • Y10T29/49002Electrical device making
    • Y10T29/49005Acoustic transducer

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  • Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Pathology (AREA)
  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)
  • Transducers For Ultrasonic Waves (AREA)
JP2009505109A 2007-03-20 2008-02-27 超音波探触子及び超音波診断装置 Active JP5049340B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009505109A JP5049340B2 (ja) 2007-03-20 2008-02-27 超音波探触子及び超音波診断装置

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2007072604 2007-03-20
JP2007072604 2007-03-20
JP2009505109A JP5049340B2 (ja) 2007-03-20 2008-02-27 超音波探触子及び超音波診断装置
PCT/JP2008/053366 WO2008114582A1 (fr) 2007-03-20 2008-02-27 Sonde à ultrason, son procédé de fabrication et dispositif de diagnostic à ultrason

Publications (2)

Publication Number Publication Date
JPWO2008114582A1 JPWO2008114582A1 (ja) 2010-07-01
JP5049340B2 true JP5049340B2 (ja) 2012-10-17

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Family Applications (1)

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JP2009505109A Active JP5049340B2 (ja) 2007-03-20 2008-02-27 超音波探触子及び超音波診断装置

Country Status (5)

Country Link
US (1) US8540640B2 (fr)
EP (1) EP2130495A4 (fr)
JP (1) JP5049340B2 (fr)
CN (1) CN101636112B (fr)
WO (1) WO2008114582A1 (fr)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014239600A (ja) * 2013-06-07 2014-12-18 キヤノン株式会社 静電容量型トランスデューサの駆動装置、及び被検体情報取得装置
JP2016195333A (ja) * 2015-03-31 2016-11-17 キヤノン株式会社 探触子、及びそれを用いた被検体情報取得装置
US10368840B2 (en) 2017-08-03 2019-08-06 Seiko Epson Corporation Ultrasonic apparatus
US10945707B2 (en) 2016-11-16 2021-03-16 Seiko Epson Corporation Ultrasonic transducer device, ultrasonic probe, and ultrasonic apparatus

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CN101304691B (zh) * 2005-11-11 2011-10-26 株式会社日立医药 超声波探头及超声波诊断装置
US20110316383A1 (en) * 2009-03-05 2011-12-29 Hitachi Medical Corporation Ultrasonic transducer, method of producing same, and ultrasonic probe using same
US9199096B2 (en) * 2009-12-31 2015-12-01 Zetroz, Inc. Portable ultrasound system
EP2563043A4 (fr) * 2010-04-23 2017-05-31 Hitachi, Ltd. Sonde ultrasonore, procédé de production à cet effet, et équipement de diagnostic ultrasonore
CN101834345B (zh) * 2010-05-17 2014-09-10 京信通信系统(中国)有限公司 超宽频带天线及其单、双极化辐射单元
JP5787586B2 (ja) 2011-04-14 2015-09-30 キヤノン株式会社 電気機械変換装置
JP5780857B2 (ja) * 2011-07-04 2015-09-16 オリンパス株式会社 超音波ユニットおよび超音波内視鏡
WO2013125626A1 (fr) * 2012-02-23 2013-08-29 日立アロカメディカル株式会社 Dispositif de diagnostic à ultrasons et sonde à ultrasons
US9061320B2 (en) 2012-05-01 2015-06-23 Fujifilm Dimatix, Inc. Ultra wide bandwidth piezoelectric transducer arrays
US9454954B2 (en) 2012-05-01 2016-09-27 Fujifilm Dimatix, Inc. Ultra wide bandwidth transducer with dual electrode
US8767512B2 (en) 2012-05-01 2014-07-01 Fujifilm Dimatix, Inc. Multi-frequency ultra wide bandwidth transducer
US20150148672A1 (en) * 2012-05-31 2015-05-28 Koninklijke Philips N.V. Ultrasound tranducer assembly and method for driving an ultrasound transducer head
US9660170B2 (en) 2012-10-26 2017-05-23 Fujifilm Dimatix, Inc. Micromachined ultrasonic transducer arrays with multiple harmonic modes
US9980702B2 (en) 2012-12-31 2018-05-29 Volcano Corporation Wirebonding fixture and casting mold
US20140187957A1 (en) 2012-12-31 2014-07-03 Volcano Corporation Ultrasonic Transducer Electrode Assembly
JP6200246B2 (ja) 2013-09-08 2017-09-20 キヤノン株式会社 探触子
JP6221582B2 (ja) * 2013-09-30 2017-11-01 セイコーエプソン株式会社 超音波デバイスおよびプローブ並びに電子機器および超音波画像装置
JP6331396B2 (ja) * 2014-01-06 2018-05-30 セイコーエプソン株式会社 超音波デバイス、超音波プローブ、電子機器および超音波デバイスの製造方法
KR102155695B1 (ko) * 2014-02-12 2020-09-21 삼성전자주식회사 전기 음향 변환기
KR20160006494A (ko) 2014-07-09 2016-01-19 삼성전자주식회사 와이어 본딩을 이용한 정전용량 미세가공 초음파 변환기 프로브
KR102184454B1 (ko) 2014-08-25 2020-11-30 삼성전자주식회사 초음파 변환기 모듈, 초음파 변환기 및 초음파 변환기의 제조 방법
JP6601190B2 (ja) * 2015-11-30 2019-11-06 セイコーエプソン株式会社 圧電モジュール、超音波モジュール及び電子機器
CN109414251B (zh) * 2016-06-30 2022-01-18 富士胶片株式会社 超声波内窥镜及其制造方法
JP6852366B2 (ja) 2016-11-29 2021-03-31 セイコーエプソン株式会社 超音波デバイス、及び超音波装置
JP7079648B2 (ja) * 2018-04-24 2022-06-02 富士フイルムヘルスケア株式会社 超音波探触子の製造方法、超音波探触子、超音波検査装置、スマートフォン、および、タブレット
JP7236320B2 (ja) * 2019-05-08 2023-03-09 富士フイルムヘルスケア株式会社 超音波探触子及びそれを用いた超音波送受信装置
CN110743768B (zh) * 2019-09-27 2021-07-02 苏州佳世达电通有限公司 超音波探头
CN110743772B (zh) * 2019-09-27 2021-08-03 苏州佳世达电通有限公司 超音波探头及超音波探头的制造方法
CN113397602B (zh) * 2021-05-21 2022-10-14 深圳市赛禾医疗技术有限公司 心脏内三维超声成像导管及系统、心脏三维模型构建方法

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WO2005077012A2 (fr) * 2004-02-06 2005-08-25 Georgia Tech Research Corporation Dispositifs cmut et procedes de fabrication
JP2006075425A (ja) * 2004-09-10 2006-03-23 Toshiba Corp 超音波プローブおよび超音波画像診断装置
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JP2006212077A (ja) * 2005-02-01 2006-08-17 Olympus Medical Systems Corp 電子ラジアル型超音波プローブ
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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014239600A (ja) * 2013-06-07 2014-12-18 キヤノン株式会社 静電容量型トランスデューサの駆動装置、及び被検体情報取得装置
JP2016195333A (ja) * 2015-03-31 2016-11-17 キヤノン株式会社 探触子、及びそれを用いた被検体情報取得装置
US10945707B2 (en) 2016-11-16 2021-03-16 Seiko Epson Corporation Ultrasonic transducer device, ultrasonic probe, and ultrasonic apparatus
US10368840B2 (en) 2017-08-03 2019-08-06 Seiko Epson Corporation Ultrasonic apparatus

Also Published As

Publication number Publication date
CN101636112B (zh) 2011-10-26
EP2130495A1 (fr) 2009-12-09
WO2008114582A1 (fr) 2008-09-25
US8540640B2 (en) 2013-09-24
JPWO2008114582A1 (ja) 2010-07-01
EP2130495A4 (fr) 2012-03-28
US20100179430A1 (en) 2010-07-15
CN101636112A (zh) 2010-01-27

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