JP5035750B2 - Crystal resonator element, crystal resonator, and crystal oscillator - Google Patents

Description

  The present invention relates to a crystal resonator element, a crystal resonator, and a crystal oscillator, and more particularly to a mesa-type crystal resonator element having a convex thick portion on a main surface of a substrate, a crystal resonator using the same, and a crystal oscillator. .

  Piezoelectric devices such as vibrators and transmitters using quartz as a piezoelectric element are widely used as reference frequency sources and transmission sources for various electronic devices because of their excellent frequency-temperature characteristics. In particular, a piezoelectric vibrator (quartz crystal vibrator) using a quartz substrate cut at a cut angle called AT cut exhibits a cubic curve with a frequency-temperature characteristic, so that it is widely used for mobile communication devices such as mobile phones. It's being used.

  In recent years, mesa-type quartz resonator blanks that have a high vibration energy confinement efficiency and are easy to manufacture have become widespread among quartz resonator blanks that are required to be small and low in cost (see, for example, Patent Document 1). A specific configuration of the mesa-type crystal vibrating piece is as shown in FIG. In the quartz crystal resonator element 1 having such a configuration, the excitation electrode 4 is provided on the vibrating part 2 that is a thick part formed in a convex shape, and the connection electrode 6 is provided on the peripheral part 3 that is a thin part formed on the periphery thereof. Since it forms, the extraction electrode 5 which connects both will straddle a level | step-difference part. Here, when the shape of the quartz substrate is formed by wet etching, at the step portion between the vibrating portion 2 and the peripheral portion 3, due to the anisotropy of the crystal structure of the quartz, FIGS. The state is as shown. 11B is a diagram showing a cross section taken along the line AA in FIG. 11A showing the planar shape of the quartz crystal resonator element, and FIG. 11C is a cross section taken along the line BB in FIG. 11A. FIG.

  As can be seen from FIG. 11C, a tapered surface including a reverse tapered surface is formed in the stepped portion where the extraction electrode 5 is disposed, that is, the stepped portion on the + X-axis side. With such a reverse taper surface, it becomes difficult to form an electrode film by sputtering or vapor deposition. For this reason, in the extraction electrode 5 straddling the reverse tapered surface, a portion where the film thickness of the electrode becomes extremely thin is generated, and there is a possibility that the portion is disconnected.

As a technique for solving such a problem, for example, a technique disclosed in Patent Document 2 can be cited. The technique disclosed in Patent Document 2 is to form the connection electrode forming portion and the extraction electrode forming portion in the thickness of the quartz base plate in addition to the vibrating portion, that is, the same thickness as the vibrating portion. By adopting such a configuration, the extraction electrode does not straddle the step portion, and there is no possibility of causing disconnection.
2007-158486 2004-200777

However, in the technique disclosed in the above-mentioned Patent Document 2, a thick lead electrode forming portion may cause vibration energy leakage.
Therefore, the present invention solves the above-mentioned problem, maintains a vibration energy confinement effect on the vibration part, and can also prevent disconnection of the extraction electrode, and a crystal resonator on which the crystal vibration piece is mounted, An object of the present invention is to provide a crystal oscillator.

SUMMARY An advantage of some aspects of the invention is to solve at least a part of the problems described above, and the invention can be implemented as the following forms or application examples.
A crystal resonator element according to a first embodiment is provided with an AT-cut crystal element plate having a thick vibration part and a thin peripheral part arranged around the vibration part, and on the front and back surfaces of the crystal element plate. A quartz crystal resonator element, wherein the vibrating plate has a vibrating portion protruding on one or both of the + Y′-axis side and the −Y′-axis side, and the vibrating portion is When projecting on the + Y′-axis side, in the plan view shape of the vibration part, the + X-axis and the corner located on the + X-axis side and the −Z′-axis side with respect to the center of the vibration part A curved line having a line segment intersecting with the −Z ′ axis as a tangent line, or a straight line segment intersecting with the + X axis and the −Z ′ axis is provided, and the vibration part is projected on the −Y ′ axis side. In this case, in the plan view shape of the vibration part, the + X axis and the + X are arranged at corners located on the + X axis side and the + Z ′ axis side with respect to the center of the vibration part. A curved line with a line segment intersecting with the Z′-axis as a tangent line or a straight line segment intersecting with the + X-axis and the + Z′-axis is provided, and the planar view shape of the vibration part is an outer edge excluding the corner part. And the electrode includes an excitation electrode disposed in the vibration portion, a connection electrode disposed in the peripheral portion, and an extraction electrode that electrically connects the excitation electrode and the connection electrode. The crystal vibrating piece is characterized in that the extraction electrode is disposed so as to pass through the curved portion or the straight portion provided at the corner.
The quartz crystal resonator element having the above-described characteristics can prevent disconnection of the extraction electrode while maintaining the confinement effect of the vibration energy with respect to the vibration part. Therefore, it is possible to prevent deterioration of electrical characteristics and improve yield.
A crystal resonator element according to a second embodiment is the crystal resonator element according to the first embodiment, wherein each end on the −X axis side and the + X axis side of the resonator section is based on the center of the resonator section. The quartz crystal resonator element according to claim 1, wherein the edge located in the portion is provided so as to coincide with an antinode of bending vibration generated in the vibration portion.
With the quartz crystal resonator element having the above-described characteristics, it is possible to suppress the bending vibration superimposed on the thickness-shear vibration that is the main vibration.
A quartz crystal resonator element according to a third aspect is the crystal resonator element according to the first or second aspect, wherein the linear portion is counterclockwise 25 ° ≦ θ with respect to a straight line parallel to the Z ′ axis. A quartz crystal resonator element formed so as to coincide with a direction within a range of <90 °.
In the case of the quartz crystal vibrating piece having the above-described characteristics, the straight line portion on which the extraction electrode is disposed can be configured with only a forward tapered surface. For this reason, there is no portion where the thickness of the extraction electrode becomes extremely thin, and the risk of disconnection is reduced.
A quartz crystal resonator element according to a fourth aspect is the crystal resonator element according to any one of the first to third aspects, wherein the extraction electrode is arranged on an inner side of an extension line of a linear edge in the vibration part. A quartz crystal vibrating piece characterized by the installation.
If the quartz crystal resonator element has the above-described characteristics, it is possible to suppress an increase in the dimension in the width direction of the quartz base plate. Therefore, the quartz crystal resonator element can be reduced in size.
A crystal resonator element according to a fifth aspect is the crystal resonator element according to any one of the first to fourth aspects, wherein a width of the extraction electrode is made to coincide with a width of the linear portion or the curved portion. A quartz crystal vibrating piece.
The quartz crystal resonator element having the above-described characteristics can reduce the risk of disconnection and reduce the resistance value of the extraction electrode.
In addition, the crystal resonator according to the first embodiment defines a crystal vibration according to any one of the first to fifth embodiments by defining the −X axis side of the crystal base plate as a free end and the + X axis side as a fixed end. A crystal resonator characterized in that a piece is housed in a package.
Since the crystal resonator having the above-described characteristics can suppress the occurrence of disconnection, it can have high reliability and high yield. Further, when the quartz crystal vibrating piece is formed by wet etching, it is possible to suppress etching biting on the free end side.
The crystal oscillator according to the first embodiment is characterized in that an oscillation circuit is mounted on the crystal resonator described as the first embodiment.
The crystal oscillator having the above-described features can be highly reliable and have a high yield, like the crystal resonator.
The crystal oscillator according to the second embodiment is characterized in that the crystal resonator element described in the first to fifth embodiments and an oscillation circuit are mounted in a single package.
Even a crystal oscillator having such characteristics can have high reliability and good yield.

  [Application Example 1] An AT-cut quartz base plate having a thick vibrating portion and a thin peripheral portion arranged around the vibrating portion, and electrodes disposed on the front and back surfaces of the quartz base plate In the quartz crystal resonator plate, the quartz base plate has the vibrating portion protruding on one or both of the + Y′-axis side and the −Y′-axis side, and the vibrating portion on the + Y′-axis side. When projecting, a curve in which the tangent direction coincides with the direction between the + X axis direction and the −Z ′ axis direction at the corner on the + X axis side and the −Z ′ axis side in the planar view shape of the vibration part. Or a straight line portion that coincides with the direction between the + X-axis direction and the −Z′-axis direction, and the vibrating portion is projected on the −Y′-axis side, the planar shape of the vibrating portion is At the corner on the + X-axis side and the + Z′-axis side, a curved line whose tangential direction coincides with the direction between the + X-axis direction and the + Z′-axis direction, or the + X-axis direction A linear portion that coincides with the direction between the Z′-axis directions is provided, and each of the planar shapes of the vibrating portions includes a linear edge on an outer edge excluding a corner portion, and the electrode is disposed on the vibrating portion It comprises an excitation electrode, a connection electrode disposed on the peripheral edge, and an extraction electrode that electrically connects the excitation electrode and the connection electrode, and the extraction electrode passes through the curved portion or the straight portion. A quartz crystal vibrating piece characterized by being arranged.

  The quartz crystal resonator element having the above-described characteristics can prevent disconnection of the extraction electrode while maintaining the confinement effect of the vibration energy with respect to the vibration part. Therefore, it is possible to prevent deterioration of electrical characteristics and improve yield.

Application Example 2 In the quartz crystal resonator element according to Application Example 1, the edges located at the ends of the vibration part at the −X-axis side and the + X-axis side are caused by bending vibration generated in the vibration part. A quartz crystal vibrating piece characterized by being provided in accordance with the position of the belly.
With the quartz crystal resonator element having the above-described characteristics, it is possible to suppress the bending vibration superimposed on the thickness-shear vibration that is the main vibration.

  Application Example 3 In the quartz crystal resonator element according to Application Example 1 or Application Example 2, the linear portion has a range of 25 ° ≦ θ <90 ° counterclockwise with respect to a straight line parallel to the Z ′ axis. A quartz crystal vibrating piece characterized by being formed so as to coincide with the inner direction.

  In the case of the quartz crystal vibrating piece having the above-described characteristics, the straight line portion on which the extraction electrode is disposed can be configured with only a forward tapered surface. For this reason, there is no portion where the thickness of the extraction electrode becomes extremely thin, and the risk of disconnection is reduced.

[Application Example 4] The quartz crystal resonator element according to any one of Application Examples 1 to 3, wherein the extraction electrode is disposed inside an extension line of a linear edge in the vibration part. A crystal vibrating piece.
If the quartz crystal resonator element has the above-described characteristics, it is possible to suppress an increase in the dimension in the width direction of the quartz base plate. Therefore, the quartz crystal resonator element can be reduced in size.

[Application Example 5] The quartz crystal resonator element according to any one of Application Examples 1 to 4, wherein a width of the extraction electrode is made to coincide with a width of the linear portion or the curved portion. Vibrating piece.
The quartz crystal resonator element having the above-described characteristics can reduce the risk of disconnection and reduce the resistance value of the extraction electrode.

[Application Example 6] The crystal element plate according to any one of Application Examples 1 to 5 is accommodated in a package, with the -X axis side of the quartz base plate defined as a free end and the + X axis side defined as a fixed end. A featured crystal unit.
Since the crystal resonator having the above-described characteristics can suppress the occurrence of disconnection, it can have high reliability and high yield. Further, when the quartz crystal vibrating piece is formed by wet etching, it is possible to suppress etching biting on the free end side.

Application Example 7 A crystal oscillator comprising an oscillation circuit mounted on the crystal resonator according to Application Example 6.
The crystal oscillator having the above-described features can be highly reliable and have a high yield, like the crystal resonator.

Application Example 8 A crystal oscillator comprising the crystal resonator element according to any one of Application Examples 1 to 5 and an oscillation circuit mounted in a single package.
Even a crystal oscillator having such characteristics can have high reliability and good yield.

Hereinafter, embodiments of the crystal resonator element, the crystal resonator, and the crystal oscillator of the present invention will be described in detail with reference to the drawings.
First, with reference to FIG. 1, 1st Embodiment which concerns on the quartz crystal vibrating piece of this invention is described. In FIG. 1, FIG. 1A shows a plan view of a quartz crystal vibrating piece, and FIG. 1B shows a cross section taken along the line AA in FIG.

  The crystal vibrating piece 10 includes a crystal base plate 12 and electrodes (20, 22, 24) formed on the surface of the crystal base plate 12. In the crystal resonator element 10 according to the embodiment, a crystal element plate cut out at a cut angle called AT cut is used as the crystal element plate 12. AT cut refers to rotating the plane (Y plane) including the X axis and Z axis, which are crystal axes of quartz, about 35 degrees 15 minutes around the X axis from the Z axis in the counterclockwise direction (−Y axis direction). This is a quartz base plate cut out so as to have an obtained main surface (main surface including the X-axis and the Z′-axis). In the crystal base plate 12 having such a configuration, the longitudinal direction of the crystal base plate 12 can be defined as the X axis, the short side direction as the Z ′ axis, and the thickness direction as the Y ′ axis. Moreover, the quartz base plate according to the embodiment includes a thick vibrating portion 14 and a thin peripheral portion 16 disposed around the vibrating portion 14.

Here, when the shape of the quartz base plate 12 is formed by wet etching, as described in the section of the background art, a stepped surface (cross section indicated by AA) facing the + X axis side includes a tapered surface including a reverse taper. Is formed. In the quartz crystal resonator element 10 according to the present embodiment, on the + Y′-axis-side main surface, the corner located on the + X-axis side of the vibrating unit 14 is changed from the + X-axis end to the −Z′-axis end. The C chamfered portion 18 is formed by cutting it straight. On the other hand, on the main surface on the −Y′-axis side, the corner portion located on the + X-axis side in the vibration unit 14 is linearly cut from the end on the + X-axis side to the end on the + Z′-axis side. A chamfered portion 18 is formed. Therefore, the straight line constituting the C chamfered portion 18 follows the direction between the + X-axis direction and the −Y′-axis direction on the + Y′-axis main surface, and the + X-axis direction and + Y ′ on the −Y′-axis-side main surface. It will be oriented to follow the direction between the axial directions.
In addition, as a cut angle (direction of a straight line) of the C chamfered portion 18, θ in FIG. 1 is desirably 25 degrees or more and less than 90 degrees.

  In the C chamfered portion 18 formed in the angle range as described above, a reverse tapered surface does not appear in the stepped portion when wet etching is performed due to the crystal orientation of the crystal base plate 12. That is, the step portion between the vibrating portion 14 and the peripheral edge portion 16 is a forward tapered surface. For this reason, as will be described in detail later, the film thickness of the extraction electrode 22 disposed across the step portion is not extremely reduced, and there is no possibility of disconnection.

  The electrodes formed on the surface of the quartz base plate 12 include an excitation electrode 20, a connection electrode 24, and an extraction electrode 22. The excitation electrode 20 is an electrode provided on the surface of the vibration part 14, and an excitation action is generated by applying a voltage to the electrode. The excitation electrode 20 according to the present embodiment is formed in a rectangular shape, and on the + Y′-axis-side main surface, at the corner located on the −Z′-axis side on the + X-axis side or a portion located in the vicinity thereof, −Y ′ On the shaft-side main surface, an extraction electrode 22, which will be described in detail later, is connected to a corner portion located on the + Z-axis side on the + X-axis side or a portion located in the vicinity thereof.

  The connection electrode 24 is an electrode serving as a joint when the quartz crystal resonator element 10 is mounted on a substrate or the like (for example, a package base whose details will be described later), and the voltage to the excitation electrode 20 via the connection electrode 24, and The signal excited by the excitation electrode 20 is exchanged. In the case of this embodiment, it arrange | positions along the edge part (edge) of the peripheral part 16 located in the + X-axis side.

  The extraction electrode 22 is an electrode for electrically connecting the excitation electrode 20 and the connection electrode 24. As described above, the extraction electrode 22 is disposed across the stepped portion between the vibrating portion 14 and the peripheral edge portion 16. The Further, in the present embodiment, since the extraction electrode 22 is routed through the C chamfered portion 18, there is no portion that is reversely tapered in the routing route, and there is no portion where the thickness of the extraction electrode 22 becomes extremely thin. Further, since the extraction electrode 22 is routed through the C chamfered portion 18, the inside of the extension line of the linear edge constituting the outer edge of the vibration portion 14 (in the width in the short direction of the vibration portion 14). It can arrange | position so that it may fit in. By adopting such a configuration, the width of the quartz crystal vibrating piece 10 is simply compared to the case where the extraction electrode 22 is simply routed from the −Z′-axis side end or the + Z′-axis side end of the vibration unit 14 to the peripheral edge 16. The dimension (dimension in the Z′-axis direction in FIG. 1) can be kept small. Therefore, it is suitable for downsizing of the crystal vibrating piece 10.

  Further, when the quartz crystal resonator element 10 according to the embodiment is formed, the lengths (dimensions) of the vibrating portion 14 and the excitation electrode 20 in the X-axis direction are respectively determined as follows. That is, the longitudinal direction (X-axis direction) end of the vibration unit 14 is dimensioned so that it is located at the antinode of unnecessary vibration (for example, bending vibration), and the end of the excitation electrode 20 in the X-axis direction is also The dimensions are determined so that they are located at the antinodes of unnecessary vibration.

の関係を満たすようにする。なお、数式１において、λは、λ＝２．６／Ｆ（Ｆは水晶振動片に生ずる厚み滑り振動の共振周波数）の関係を満たすようにする。また、図２においてＬ３は、水晶素板１２のＸ軸方向の寸法である。 Specifically, as shown in FIG. 2, the dimension from one end of the vibrating portion 14 to the other end is L1, and the dimension from one end of the excitation electrode 20 to the other end is L2. If

To satisfy the relationship. In Equation 1, λ satisfies the relationship of λ = 2.6 / F (F is a resonance frequency of thickness-shear vibration generated in the quartz crystal vibrating piece). In FIG. 2, L3 is the dimension of the quartz base plate 12 in the X-axis direction.

の関係を満たすようにし、振動部１４、励振電極２０共に、一方の端部と他方の端部との間でも、上記関係を満たす必要が生ずることより、数式４、数式５、及び数式６の関係を同時に満たすようにすると良い。

And since the edge part of the vibration part 14 and the edge part of the excitation electrode 20 are set in the antinode part of bending vibration, the relationship between L1 and L2 is

Since both the vibration part 14 and the excitation electrode 20 need to satisfy the above relation between the one end part and the other end part, Expressions 4, 5, and 6 are satisfied. Try to satisfy the relationship at the same time.

When satisfying the above relationship, each of L1, L2, L4, and L5 has a dimension that is an odd multiple of a half wavelength of bending vibration that is unnecessary vibration.
By satisfying such a dimensional relationship, bending vibration can be suppressed. Therefore, as in the present embodiment, even in the quartz crystal vibrating piece 10 having the C chamfered portion 18 formed, by leaving a large proportion of the linear edge satisfying the above dimensional relationship at the end of the vibrating portion 14, Bending vibration can be effectively suppressed.

  As described above, a crystal resonator element 10 having high quality, high reliability, and high yield can be obtained by satisfying the dimensional relationship for suppressing flexural vibration when performing shape formation and forming the C chamfered portion 18. Can do.

Next, a second embodiment according to the quartz crystal resonator element of the invention will be described with reference to FIG.
Most of the configuration of the quartz crystal vibrating piece 110 according to the present embodiment is the same as that of the quartz crystal vibrating piece 10 according to the first embodiment described above. Accordingly, the same reference numerals in FIG. 1 plus 100 are attached to the parts having the same configuration and function, and the detailed description thereof is omitted.

  The quartz crystal resonator element 110 according to the present embodiment has a curved portion 119 between the + X-axis side end (edge) and the −Z′-axis side end (edge) of the vibrating portion 114 on the + Y′-axis main surface. The characteristic feature is that a curved portion 119 is provided between the + X-axis side end (edge) and the + Z′-axis side end (edge) of the vibration portion 114 on the −Y′-axis main surface. To do. When the crystal vibrating piece 110 having such characteristics is viewed in plan, on the + Y′-axis side main surface, a tangent (not shown) in contact with the curved portion 119 follows the direction between the + X-axis direction and the −Z′-axis direction. On the −Y′-axis main surface, a tangent line (not shown) in contact with the curved portion 119 follows between the + X-axis direction and the + Z′-axis direction.

  The curved portion 119 having a convex curve in plan view is different from the C chamfered portion 18 that is a cut portion having a straight line in plan view, and has a tangent line that touches a certain point on the circumference and a straight line parallel to the Z ′ axis. The formed angle θ1 changes sequentially by changing the position of the point on the circumference. For this reason, the step between the vibrating portion 114 and the peripheral edge portion 116 on the + Y′-axis main surface extends from the + X-axis side to the −Z′-axis side (on the −Y′-axis main surface, + Z ′ from the + X-axis side). From the taper surface including the reverse taper to the taper surface including only the forward taper (to the shaft side).

Therefore, when the width of the extraction electrode 122 arranged in the step portion is equal to or larger than a predetermined width, for example, about 1/3 or more of the circumferential length of the curved portion 119, the forward only taper portion is included. It is possible to avoid a situation in which disconnection occurs at the stepped portion.
About another structure, an effect | action, and an effect, it is the same as that of the quartz crystal vibrating piece 10 which concerns on 1st Embodiment mentioned above.

Next, a third embodiment according to the quartz crystal resonator element of the present invention will be described with reference to FIGS.
The quartz crystal resonator element according to the present embodiment has almost the same configuration as that of the first and second embodiments described above. Therefore, parts having the same configuration and function are denoted by reference numerals obtained by adding 200 and 300 to the reference numerals in FIG. 1, and detailed description thereof will be omitted.

  In the quartz crystal vibrating pieces 210 and 310 according to the present embodiment, the quartz crystal vibrating pieces 10 and 110 according to the first and second embodiments described above are respectively on one side of the vibrating portions 14 and 114 (+ X on the + Y′-axis main surface). C-chamfered portion 18 and curved portion 119 at the intersection of the shaft-side end and the −Z′-axis end, and at the −Y′-axis main surface at the + X-axis side end and the + Z′-axis end. 4 and 5, the C chamfered portion 218 and the curved portion 319 are provided symmetrically with respect to the longitudinal center line (center line along the X axis) as shown in FIGS. Features a point.

By adopting such a configuration, charge cancellation occurs in the vibration parts 214 and 314. Therefore, unnecessary vibrations (for example, when the main vibration is set to the primary mode, even higher order modes such as the secondary mode are used. (Vibration) can be eliminated.
About another structure, an effect | action, and an effect, it is the same as that of the quartz crystal vibrating pieces 10 and 110 which concern on the 1st, 2nd embodiment mentioned above.

A modification of the quartz crystal resonator element according to the first to fourth embodiments will be described with reference to FIG. 6 taking the quartz oscillator piece according to the first embodiment as an example.
As shown in FIG. 6, the quartz crystal vibrating piece 10 according to this modification is characterized in that the width of the extraction electrode 22 arranged in the step portion is the same as the width of the C chamfered portion 18.

  According to such a configuration, in addition to the effects of the above embodiments, the risk of disconnection can be reduced, and if the width of the C chamfered portion 18 is made larger than the width of the conventional extraction electrode, the extraction electrode 22 The resistance value can be reduced.

Next, an embodiment according to the crystal resonator of the present invention will be described with reference to FIG.
A crystal resonator 30 according to the present embodiment includes a crystal resonator element 10 and a package 32. The quartz crystal vibrating piece 10 may be a quartz crystal vibrating piece (for example, the quartz crystal vibrating piece 10) according to each of the embodiments described above. Further, the configuration of the package 32 is not particularly limited, but may be the following configuration, for example. In other words, the package 32 may be configured by the package base 36 and the lid 34. Here, the package base 36 is a box having a cavity for housing the crystal vibrating piece 10 and is preferably made of an insulating material such as ceramics. On the inner bottom surface of the package base 36, an internal mounting terminal 38 for mounting the connection electrode 24 in the crystal vibrating piece 10 is formed. An external mounting terminal 40 is provided on the outer bottom surface of the package base 36 and is electrically connected to the internal mounting terminal 38.

  The lid 34 is a lid for sealing the upper opening of the package base 36. Examples of the lid 34 include a glass lid made of an insulating material such as soda glass in addition to a metal lid made of an alloy such as Kovar.

  In the crystal resonator 30 having such a configuration, the conductive adhesive 42 is used when the crystal resonator element 10 is mounted on the package base 36. The conductive adhesive 42 is obtained by mixing a metal filler having conductivity such as silver into a curable resin binder.

  When the crystal vibrating piece 10 is mounted on the package base 36, it is cantilevered so that the + X axis side becomes a fixed end and the −X axis side becomes a free end. When manufacturing the crystal resonator element 10, if the outer shape of the crystal base plate 12 is formed by wet etching, etching biting that occurs on the free end side can be suppressed. The crystal vibrating piece 10 is mounted by applying a conductive adhesive 42 to the internal mounting terminals 38 in the package base 36 and mounting the crystal vibrating piece 10 via the conductive adhesive 42.

After the crystal resonator element 10 is mounted on the package base 36, the lid 34 is bonded to the upper opening of the package base 36 to seal the package 32. The package 32 is preferably sealed in a vacuum atmosphere or in an inert gas atmosphere.
With the crystal resonator 30 having such a configuration, it is possible to achieve high reliability and high quality.

Next, an embodiment according to the crystal oscillator of the present invention will be described with reference to the drawings. First, the crystal oscillator according to the first embodiment will be described with reference to FIG.
The crystal oscillator 50 according to the present embodiment uses the crystal resonator 30 shown in FIG. 7 as it is, and includes an IC 52 including a lead frame 56 and an oscillation circuit in addition to the crystal resonator 30.

  Specifically, the IC 52 is mounted on the upper surface of the lead frame 56, and the inverted crystal unit 30 is mounted on the lower surface of the lead frame 56. The lead frame 56 and the IC 52, and the IC 52 and the crystal unit 30 are respectively connected by the metal wires 64. It is to connect.

  Further, in the crystal oscillator 50 having the above-described configuration, the entire portion except the tip of the lead frame 56 serving as an external mounting terminal is molded with the resin 58 in order to protect the active surface of the IC 52, the metal wire 64, and the connection portion. Consists of.

  According to the crystal oscillator 50 having such a configuration, since the crystal resonator element 10 has high reliability and yield, it can be a crystal oscillator with high reliability and high yield.

Next, a crystal oscillator according to a second embodiment will be described with reference to FIG.
As shown in FIG. 9, the crystal oscillator 50a according to the present embodiment takes a form in which the IC 52 and the crystal vibrating piece 10 are accommodated in one package 32a. In the case of the embodiment shown in FIG. 9, in order to reduce the size of the crystal oscillator 50a, the IC 52 and the crystal vibrating piece 10 are arranged so as to overlap in the vertical direction. Specifically, the cavity of the package base 36a is formed in a step shape, and the IC 52 is mounted on the bottom plate portion located at the lowest step. An internal terminal 60 for electrically connecting the IC 52 and the package base 36a is provided on the stage on which the IC 52 is mounted, and a terminal 54 provided on the active surface of the IC 52 and an internal terminal provided on the package base 36a. 60 is connected by a metal wire 64. Then, an internal mounting terminal 38 for mounting the crystal vibrating piece 10 is provided on a stage above the stage where the internal terminal 60 is provided, and the crystal vibrating piece 10 is mounted via the conductive adhesive 42. After the crystal vibrating piece 10 is mounted, the upper opening of the package base 36a is sealed with the lid 34a. Even with the crystal oscillator 50a having such a configuration, the same effects as those of the crystal oscillator according to the first embodiment can be obtained.

  As another embodiment of the crystal oscillator, the one shown in FIG. 10 can be cited. The embodiment shown in FIG. 10 employs a so-called H-shaped cross section as the package base 36b. The crystal vibrating piece 10 is mounted on one of the upper and lower cavities and sealed with the lid 34b. At the same time, the IC 52 is mounted on the other side. Even with such a crystal oscillator, the same effects as those of the crystal oscillators according to the first and second embodiments can be obtained, which can be said to be a part of the present invention.

  In each of the above-described embodiments, the quartz crystal resonator element is exemplified as a bimesa (vibration portion is protruded on both the + Y′-axis side and the −Y′-axis side), but the crystal oscillator piece of the present invention is a planomesa type. May be. When the crystal vibrating piece is of the planomesa type, the cut portion may be formed only on the main surface (+ Y′-axis-side main surface or −Y′-axis-side main surface) on which the vibration portion is projected. Further, in all of the quartz crystal vibrating pieces shown in the embodiment, the longitudinal direction is the X axis, the short direction is the Z ′ axis, and the thickness direction is the Y ′ axis. However, the quartz crystal resonator element according to the present invention includes one in which the longitudinal direction is the Z′-axis, the lateral direction is the X-axis, and the thickness direction is the Y′-axis. Naturally, the present invention can also be applied to a quartz crystal vibrating piece using a quartz base plate having a square shape in plan view.

It is a figure which shows the structure of the crystal vibrating piece which concerns on 1st Embodiment. It is a figure which shows one of the shape characteristics of the quartz crystal vibrating piece which concerns on invention. It is a figure which shows the structure of the crystal vibrating piece which concerns on 2nd Embodiment. It is a figure which shows the structure of the crystal vibrating piece which concerns on the 1st example of 3rd Embodiment. It is a figure which shows the structure of the quartz crystal vibrating piece which concerns on the 2nd example of 3rd Embodiment. It is a figure which shows the application form of the crystal vibrating piece which concerns on invention. It is a figure which shows the structure of the crystal oscillator based on invention. It is a figure which shows the structure of the crystal oscillator which concerns on 1st Embodiment. It is a figure which shows the structure of the crystal oscillator which concerns on 2nd Embodiment. It is a figure which shows other embodiment in the crystal oscillator based on invention. It is a figure which shows the structure of the conventional quartz crystal vibrating piece.

Explanation of symbols

  10 ......... Crystal vibrating piece, 12 ......... Crystal base plate, 14 ......... Vibrating part, 16 .... Peripheral part, 18 ......... C beveled part, 20 ...... Excitation electrode, 22 ...... Drawer Electrode, 24... Connection electrode, 30... Quartz crystal, 32... Package, 34... Lid, 36 ... Package base, 38 Internal terminal, 40 External Terminals 42... Conductive adhesive 50... Crystal oscillator 52 52 ICs 54 Terminals 56 Lead frame 58 Resin

Claims (8)

Quartz vibration composed of an AT-cut quartz base plate having a thick vibration portion and a thin peripheral portion disposed around the vibration portion, and electrodes disposed on the front and back surfaces of the quartz base plate A piece,
In the quartz base plate, the vibrating portion is protruded on either or both of the + Y′-axis side and the −Y′-axis side,
When the vibration part is protruded on the + Y′-axis side, in the plan view shape of the vibration part, on the corner located on the + X-axis side and the −Z′-axis side with respect to the center of the vibration part. , A curved line portion tangent to a line segment intersecting the + X axis and the −Z ′ axis, or a straight line section that is a line segment intersecting the + X axis and the −Z ′ axis,
When the vibration part is protruded on the −Y′-axis side, in the plan view shape of the vibration part, on the corner located on the + X-axis side and the + Z′-axis side with respect to the center of the vibration part. , A curved line with a tangent line that intersects the + X axis and + Z ′ axis, or a straight line that is a line segment that intersects the + X axis and the + Z ′ axis,
Each planar shape of the vibrating section includes a edge straight on the outer edge, except for the corner portion,
The electrode includes an excitation electrode disposed in the vibrating portion, a connection electrode disposed in the peripheral portion, and an extraction electrode that electrically connects the excitation electrode and the connection electrode. A quartz crystal resonator element, which is disposed so as to pass through the curved portion or the straight portion provided at the corner portion . The quartz crystal resonator element according to claim 1,
With respect to the center of the vibration part, the edge located at each end of the vibration part on the −X axis side and the + X axis side is provided so as to coincide with the position of the antinode of the bending vibration generated in the vibration part. A crystal vibrating piece characterized by that. The quartz crystal resonator element according to claim 1 or 2,
The quartz crystal resonator element according to claim 1, wherein the linear portion is formed so as to coincide with a direction in a range of 25 ° ≦ θ <90 ° counterclockwise with respect to a straight line parallel to the Z ′ axis. The quartz crystal resonator element according to any one of claims 1 to 3,
A quartz crystal vibrating piece, wherein the extraction electrode is arranged on an inner side of an extension line of a linear edge in the vibrating portion. The quartz crystal resonator element according to any one of claims 1 to 4,
A quartz crystal vibrating piece characterized in that a width of the extraction electrode is made to coincide with a width of the linear portion or the curved portion. In the crystal base plate, -X axis side is defined as a free end, + X axis side is defined as a fixed end,
A crystal resonator comprising the crystal resonator element according to claim 1 housed in a package.   A crystal oscillator comprising an oscillation circuit mounted on the crystal resonator according to claim 6.   6. A crystal oscillator comprising the crystal resonator element according to claim 1 and an oscillation circuit mounted in a single package.

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