JP5168464B2 - Vibrating piece, vibrator, and oscillator - Google Patents

Description

Vibrator invention, in which the resonator element, which equipped with vibrators, and relates to an oscillator, in particular a convex thick portion on the quartz crystal substrate, vibrating piece of the so-called mesa structure, and equipped with the resonator element And an oscillator .

  A resonator using a crystal vibrating piece is known as a resonator having good frequency temperature characteristics capable of carrying out stable oscillation in a wide temperature band. In particular, a crystal resonator element using a quartz base plate cut at a cut angle called AT cut exhibits frequency-temperature characteristics as a cubic curve and is excellent in mass productivity. Adopted as a source.

Conventionally, a quartz crystal vibrating piece using such an AT-cut quartz base plate has a bending vibration, an unnecessary vibration, a width sliding vibration (contour sliding vibration), etc. superimposed on a thickness sliding vibration, which is a main vibration, There was a problem of deteriorating vibration characteristics.
Various means for solving such a problem have been proposed. For example, unnecessary vibration is suppressed by the outer shape of the crystal base plate (see Patent Documents 1 and 2), or unnecessary by the surface shape of the crystal base plate. The thing which suppresses a vibration (refer patent document 3) etc. can be mentioned.

Further, in the quartz crystal resonator element using the AT-cut quartz base plate, a capacity expressed by the ratio (C0 / C1) of the equivalent series capacity C1 and the equivalent parallel capacity C0 is a problem that can be cited together with the suppression of the unnecessary vibration described above. There is a reduction in the ratio γ, ie, an improvement in frequency sensitivity. As means for solving such a problem, a solution is mainly achieved by the shape of the excitation electrode, and for example, the techniques disclosed in Patent Documents 1, 3, and 4 can be cited.
JP 9-246903 A JP 2006-340023 A JP 2007-189431 A JP 2006-246542 A

  Most of the quartz crystal vibrating pieces disclosed in the above-mentioned patent documents are one of typical unnecessary vibrations, or only to improve the sensitivity, and suppression of unnecessary vibration and improvement of sensitivity with a simple configuration. There are few configurations that can suppress a plurality of types of unnecessary vibrations comprehensively.

Accordingly, an object of the present invention is to provide a resonator element that can suppress unnecessary vibration and improve sensitivity, or can comprehensively suppress a plurality of types of unnecessary vibration with a simple configuration. Another object of the present invention is to provide a vibrator or an oscillator on which the vibrating piece is mounted.

  SUMMARY An advantage of some aspects of the invention is to solve at least a part of the problems described above, and the invention can be implemented as the following forms or application examples.

で示すことのできる寸法としたことを特徴とする水晶振動片。
このような構成とすることで、振動部により不要振動である屈曲振動の抑圧を図ることができる。また、励振電極の縁辺を円弧状とした場合には感度の向上を図ることができ、周縁部の縁辺を円弧状とした場合には輪郭滑り振動の抑圧を図ることができる。よって、不要振動の抑圧と感度の改善、または複数種類の不要振動を総合的に抑圧することを実現することができる。
さらに、メサ型の水晶振動片では、周波数感度の向上を図るためには、励振電極の形状を振動エネルギーが集中する範囲（振動分布）に沿ったものとすることが望ましく、振動分布は、振動部の形状が理想的な形状に近いほどその範囲が明確となるという発想より、励振電極を楕円形状とする場合には振動部のも楕円形状としていた。また、振動エネルギーを閉じ込めるという面から、振動部を矩形とした場合に、水晶振動片の外形寸法を定める周縁部の形状に円弧部を持たせるという発想自体が存在しなかった。よって、上記構成では、これら従来の発想を覆すことで、簡易な構成で不要振動の抑圧と感度の改善、または複数種類の不要振動を総合的に抑圧することのできる水晶振動片を提供することが可能となる。 The resonator element according to the first embodiment is excited along the thickness-shear vibration as a main vibration and is arranged along the outer periphery of the vibration part in a plan view and the outer edge of the vibration part in a plan view, and is thinner than the vibration part. And a quartz base plate including a peripheral part having an elliptical outer shape in plan view, and an excitation electrode provided on a main surface of the vibration part, and the main vibration of the main electrode is out of the edges of the excitation electrode. The vibration part that is at least a part of the edge that intersects the central axis of the excitation electrode along the vibration direction, and that the edge including the intersecting part has an arc shape in plan view, and intersects the vibration direction of the main vibration (N + 1/2) λ−0.1λ ≦ L2 ≦ (n + 1/2) λ + 0.1λ where L2 is the distance between the two ends of the crystal and λ is the wavelength of the bending vibration generated in the quartz base plate. Where n is a positive integer.
The resonator element according to a second aspect is characterized in that, in the first aspect, an outer shape of the excitation electrode is elliptical in a plan view.
A vibrating element of a third form is characterized in that, in the first or second form, the quartz base plate is an AT-cut quartz.
A vibrator according to a fourth aspect includes the resonator element according to any one of the first to third aspects and a package on which the resonator element is mounted.
According to a fifth aspect of the invention, in the fourth aspect, the package is hermetically sealed in either a vacuum or an inert gas atmosphere.
An oscillator according to a sixth aspect includes the vibrator according to the fourth or fifth aspect and an oscillation circuit mounted on the vibrator.
According to a seventh aspect of the invention, there is provided an oscillator according to any one of the first to third aspects, an oscillation circuit, and a package on which the oscillation piece and the oscillation circuit are mounted. Features.
[Application Example 1] A bimesa type crystal vibrating piece having a thick vibrating portion and a thin peripheral portion, wherein the vibrating portion has a rectangular outer shape, and at least one of the excitation electrode and the peripheral portion Is an edge that intersects at least the central axis along the longitudinal direction, the edge including the intersecting portion is formed in an arc shape, and the wavelength of the bending vibration excited together with the thickness shear vibration is λ The longitudinal dimension L2 of the vibrating part is

A quartz crystal vibrating piece characterized by having dimensions that can be indicated by.
With such a configuration, it is possible to suppress bending vibration, which is unnecessary vibration, by the vibration unit. Further, when the edge of the excitation electrode has an arc shape, the sensitivity can be improved, and when the edge of the peripheral portion has an arc shape, contour slip vibration can be suppressed. Therefore, it is possible to realize suppression of unnecessary vibration and improvement of sensitivity, or comprehensive suppression of a plurality of types of unnecessary vibration.
Further, in the mesa-type quartz vibrating piece, in order to improve the frequency sensitivity, it is desirable that the shape of the excitation electrode be in a range (vibration distribution) where the vibration energy is concentrated. From the idea that the range becomes clearer as the shape of the portion becomes closer to the ideal shape, when the excitation electrode has an elliptical shape, the vibration portion also has an elliptical shape. In addition, from the viewpoint of confining vibration energy, there has been no idea of providing a circular arc portion in the shape of the peripheral edge that defines the external dimensions of the crystal vibrating piece when the vibrating portion is rectangular. Therefore, in the above configuration, by overturning these conventional ideas, it is possible to provide a crystal resonator element that can suppress unnecessary vibration and improve sensitivity or can comprehensively suppress multiple types of unnecessary vibration with a simple configuration. Is possible.

Application Example 2 The quartz crystal resonator element according to Application Example 1, wherein the edge of the excitation electrode is formed in an arc shape.
With the quartz crystal resonator element having such characteristics, the sensitivity can be improved because the shape of the excitation electrode approaches that of the vibration distribution as compared to the rectangular excitation electrode. Therefore, both suppression of unnecessary vibration and improvement of sensitivity can be realized.

Application Example 3 A quartz crystal resonator element according to Application Example 1, wherein the excitation electrode has an elliptical outer shape.
If the quartz crystal resonator element has such characteristics, the shape of the excitation electrode follows the shape of the vibration distribution, so that the sensitivity can be improved. Therefore, both suppression of unnecessary vibration and improvement of sensitivity can be realized.

Application Example 4 The quartz crystal resonator element according to any one of Application Examples 1 to 3, wherein the edge of the peripheral edge portion is formed in an arc shape.
In the case of the quartz crystal resonator element having such a feature, it is possible to suppress contour slip vibration, which is unnecessary vibration, since the peripheral edge in the longitudinal direction has an arc shape. In addition, when the edge of the excitation electrode is formed in an arc shape, or when the excitation electrode is formed in an elliptical shape, the sensitivity can be improved. Therefore, in this case, it is possible to realize both suppression of unnecessary vibrations and improvement of sensitivity.

Application Example 5 The quartz crystal resonator element according to any one of Application Examples 1 to 3, wherein the outer peripheral shape of the peripheral edge portion is an elliptical shape.
In the case of the quartz crystal resonator element having such a feature, it is possible to suppress contour slip vibration, which is unnecessary vibration, because the outer peripheral shape of the periphery is formed in an elliptical shape. In addition, when the edge of the excitation electrode is formed in an arc shape, or when the excitation electrode is formed in an elliptical shape, the sensitivity can be improved. Therefore, in this case, it is possible to realize both suppression of unnecessary vibrations and improvement of sensitivity.

[Application Example 6] A crystal resonator comprising the crystal resonator element according to any one of Application Examples 1 to 5 mounted in a package.
A crystal resonator having such characteristics can be a crystal resonator capable of producing the effects of the crystal resonator element described in any of the above application examples. For example, in the case where a crystal resonator element with improved frequency sensitivity is mounted, it is possible to widen the frequency adjustment range with respect to temperature changes. In addition, when a crystal resonator capable of comprehensively suppressing a plurality of unnecessary vibrations such as bending vibration and contour sliding vibration is mounted, there is less unnecessary vibration superimposed on the main vibration, and spurious can be reduced.

Application Example 7 A crystal oscillator comprising an oscillation circuit mounted on the crystal resonator according to Application Example 6.
If the crystal oscillator has such characteristics, the effects of the crystal resonator shown in the application example can be obtained. For example, in a crystal resonator on which a crystal resonator element with improved frequency sensitivity is mounted, the adjustment range of the oscillation frequency with respect to temperature change increases. Therefore, in the case of a crystal oscillator having a temperature compensation circuit, the design margin increases.

Application Example 8 A crystal oscillator comprising the crystal resonator element according to any one of Application Examples 1 to 5 and an oscillation circuit mounted in a single package.
If the crystal oscillator has such characteristics, the same effect as the crystal oscillator described in Application Example 7 can be obtained.

Hereinafter, embodiments of the resonator element, the vibrator, and the oscillator according to the invention will be described in detail with reference to the drawings. First, a first embodiment related to the resonator element of the invention will be described with reference to FIG. FIG. 1 is a diagram showing a planar configuration of the crystal vibrating piece.

The crystal resonator element 10 according to this embodiment includes a crystal element plate 12 and electrodes formed on the front and back surfaces of the crystal element plate 12.
In the present embodiment, the quartz base plate 12 is cut out at a cut angle called AT cut. The AT cut is a main surface (X surface) obtained by rotating a plane (Y surface) including the X axis and the Z axis, which are crystal axes of quartz, about 35 degrees 15 minutes from the Z axis counterclockwise around the X axis. This is a quartz base plate 12 cut out so as to have a main surface including a shaft and a Z′-axis. In the crystal base plate 12 having such a configuration, the longitudinal direction of the crystal base plate 12 can be defined as the X axis, the short side direction as the Z ′ axis, and the thickness direction as the Y ′ axis.

  Further, the quartz base plate 12 according to the embodiment has a so-called mesa structure composed of a vibrating portion 14 having a thick thickness and a thin peripheral edge portion 16 disposed around the vibrating portion 14. In addition, the specific shape of each of the vibration part 14 and the peripheral part 16 is formed so as to form a rectangular shape.

  The electrodes formed on the front and back surfaces of the quartz base plate 12 include an excitation electrode 20, a connection electrode 24, and an extraction electrode 22. The excitation electrode 20 is disposed in the vibration portion 14 and plays a role of exciting vibration by causing distortion in the crystal base plate 12 when a voltage is applied thereto. The excitation electrode 20 according to the present embodiment is arranged such that its shape is an ellipse and the center of the ellipse is matched with the center of the vibration part 14. The vibration distribution of the thickness shear vibration, that is, the range in which the vibration energy is concentrated is substantially elliptical, and is located at the center of the vibration portion 14. For this reason, by making the outer shape of the excitation electrode 20 along the vibration distribution, the area that does not contribute to the actual vibration is eliminated (reduced). Therefore, the capacity ratio γ represented by the equivalent parallel capacitance C0 / equivalent series capacitance C1 can be reduced. Here, the frequency sensitivity is defined as an increase in frequency change with respect to an increase in load capacity change, and depends on the capacity ratio γ. Since the frequency sensitivity is proportional to the equivalent series capacitance C1 and inversely proportional to the capacitance ratio γ, the frequency sensitivity can be improved by reducing the capacitance ratio γ. When the frequency sensitivity is improved, the width of the frequency change with respect to the load capacity can be increased. The equivalent parallel capacitance C0 depends on the increase / decrease in the area of the excitation electrode 20, and the equivalent series capacitance C1 depends on the area of the excitation electrode 20 that actually contributes to vibration. In addition, in the mesa-type crystal vibrating piece that is often oscillated using a Colpitts oscillation circuit, the inductive region of the mesa-type crystal vibrating piece is used. However, the frequency range in which the mesa crystal resonator element is inductive is extremely narrow with respect to the resonance frequency, and is almost determined by the capacitance ratio γ. For this reason, a mesa type resonator element having a large capacitance ratio γ is difficult to oscillate because the inductance changes abruptly within an extremely narrow frequency range. On the other hand, the mesa-type resonator element having a small capacitance ratio γ has a characteristic that the frequency range is widened, so that the inductance changes gently and oscillation is easy.

  The connection electrode 24 is an electrode that serves as a bonding portion when the crystal vibrating piece 10 is mounted on a substrate or the like (for example, a package base 36 to be described in detail later), and the voltage to the excitation electrode 20 via the connection electrode 24, The signal excited by the excitation electrode 20 is exchanged. In the case of this embodiment, it is the peripheral part 16 and is arrange | positioned along the edge part (edge) orthogonal to the X-axis.

  The extraction electrode 22 is an electrode for electrically connecting the excitation electrode 20 and the connection electrode 24, and is disposed across a step from the thick vibrating portion 14 to the thin peripheral portion 16.

In the crystal vibrating piece 10 having the above components, bending vibration is generated as unnecessary vibration. The wavelength λ of the bending vibration is determined by the plate thickness t of the vibrating portion 14 in the crystal vibrating piece 10, and the frequency f can be expressed by f = 1.67t. In addition, when the amount of frequency decrease due to the influence of the electrode is taken into consideration, the relationship between the wavelength λ and the frequency f can be expressed by Equation 1.

Further, in the case of the crystal vibrating piece 10 having the above-described configuration, when the value of the long side dimension L1 of the crystal vibrating piece 10 is sufficiently larger than the plate thickness t of the crystal vibrating piece 10 (for example, Expression 2 is satisfied). When the following relationship is satisfied, the bending vibration suppression effect can be obtained. Specifically, it is the relationship between the long side dimension of the vibration part 14, that is, the dimension L2 in the direction along the X axis, and the wavelength λ of the bending vibration, and the relationship of Formula 3 is established between the two. Thus, it is possible to position the end portion (edge) of the vibration portion 14 in the X-axis direction at the antinode portion of the bending vibration excited together with the thickness shear vibration. And the effect which suppresses bending vibration can be acquired by positioning the edge of the vibration part 14 in the antinode part of bending vibration.

と示すことができる。 Here, Formula 3 shows the respective dimensions in the + X-axis direction and the −X-axis direction with reference to the center of the vibration part in the X-axis direction, and Formula 3 is converted for the overall dimension of L2. With that

Can be shown.

  In the quartz crystal resonator element 10 according to the present embodiment, the vibrating portion 14 is rectangular, and the ends in the + X axis direction and the −X axis direction are configured as straight lines perpendicular to the propagation direction of the bending vibration. For this reason, the vibration part 14 whole can have the suppression effect of bending vibration. As for the tolerance ± 0.1λ added in Expression 4, the bending vibration energy can be suppressed to less than 5% of the energy of the thickness-shear vibration, which is the main vibration, within the tolerance range. It is added as an effect.

  In the embodiment, desirably, the dimension Δt of the step portion between the vibrating portion 14 and the peripheral portion 16 is set to 30% or less of the plate thickness t of the vibrating portion 14. This is because if the value of Δt exceeds 30% of the value of the plate thickness t, the effective length of the long side dimension in the quartz base plate 12 is shortened, and the CI value is increased.

  According to the quartz crystal resonator element 10 having the above-described configuration, the frequency sensitivity can be improved by making the shape of the excitation electrode 20 elliptical, and the shape and dimensions of the vibrating portion 14 are determined as described above. Thus, unnecessary vibration (bending vibration) can be suppressed. Therefore, when a crystal resonator is used, the adjustment range of the oscillation frequency can be widened.

  Next, with reference to FIG. 3, an application mode of the quartz crystal resonator element according to this embodiment will be described. The difference between the quartz crystal vibrating piece according to this embodiment and the quartz crystal vibrating piece according to the above embodiment is the shape of the excitation electrode. Therefore, portions having the same configuration and function are denoted by the same reference numerals in the drawings, and detailed description thereof is omitted.

  The excitation electrode 20 in the quartz crystal resonator element 10 according to the present embodiment has a convex arc portion R1 on at least one side intersecting the X axis or a central axis (not shown) along the longitudinal direction of the quartz crystal resonator element 10. It is characterized by having. In the above embodiment, the excitation electrode 20 has an elliptical shape, thereby suppressing the increase in the equivalent parallel capacitance C0 and improving the frequency sensitivity. However, in terms of improving the frequency sensitivity, the shape of the excitation electrode 20 is changed. There is no need for a complete ellipse, and the capacity ratio γ represented by C0 / C1 may be reduced.

  And the vibration distribution in the vibration part 14 is elliptical, and the shape of the excitation electrode 20 that actually contributes to vibration is also elliptical. For this reason, in order to reduce the capacitance ratio γ, the corners of the excitation electrode 20 that is normally formed in a rectangular shape are cut in accordance with the outer shape of the vibration part 14, and the shape of the excitation electrode 20 is changed to a vibration distribution shape. By approximating, the capacity ratio γ can be reduced, and the frequency sensitivity can be improved as compared with the conventional case.

  Therefore, from the viewpoint of improving the frequency sensitivity, the corner portion left at the end of the excitation electrode 20 on the + X axis side in FIG. 3 is cut into an arc shape as shown in FIG. 4 to form an arc portion R2. Also good.

Next, a second embodiment related to the resonator element of the invention will be described with reference to FIG.
Most of the components in the quartz crystal resonator element according to the present embodiment are the same as those of the quartz crystal resonator element according to the first embodiment described above. Accordingly, parts having the same function are denoted by reference numerals obtained by adding 100 to the reference numerals given in FIG. 1, and detailed description thereof will be omitted.

なお、上記関係を成立させる上で、励振電極１２０における長辺方向中心部と、振動部１１４における長辺方向中心部とを一致させる必要がある。振動部１１４の寸法と励振電極１２０の寸法との間に、上記のような関係を成立させることで、振動部１１４におけるＸ軸方向端部と励振電極１２０におけるＸ軸方向端部との双方に、半波長ズレた屈曲振動の腹が位置することとなり、屈曲振動の抑圧効果を高めることができる。また、数式５で付加した公差±０．０５λについては、公差範囲内であれば、屈曲振動のエネルギーを主振動である厚み滑り振動のエネルギーの５％未満に抑圧することができるため、同様な効果をそうするものとして付加したものである。 The difference between the quartz crystal vibrating piece 110 according to the present embodiment and the quartz crystal vibrating piece 10 according to the first embodiment is in the difference in the outer shape of the peripheral edge 116 of the quartz base plate 112 and the outer shape of the excitation electrode 120. .
Specifically, in the quartz crystal vibrating piece 110 according to the present embodiment, the peripheral edge 116 has an elliptical shape. By making the outer shape of the peripheral portion 116 elliptical, it is possible to obtain an effect of suppressing contour slip vibration that is one of unnecessary vibrations when thickness shear vibration is the main vibration. Further, in the quartz crystal vibrating piece 110 according to the present embodiment, the shape of the excitation electrode 120 is rectangular. In this case, the long side dimension L3 of the excitation electrode 120 shown in FIG. 6 is determined so that Formula 5 is established in the relationship between the long side dimension L2 of the vibration unit 114 and the wavelength λ of bending vibration which is one of unnecessary vibrations. It is desirable.

In order to establish the above relationship, it is necessary to match the long side direction central portion of the excitation electrode 120 with the long side direction central portion of the vibrating portion 114. By establishing the relationship as described above between the dimension of the vibration part 114 and the dimension of the excitation electrode 120, both the X-axis direction end part of the vibration part 114 and the X-axis direction end part of the excitation electrode 120 are provided. Thus, the anti-bending vibration suppression effect can be enhanced. For the tolerance ± 0.05λ added in Formula 5, the bending vibration energy can be suppressed to less than 5% of the energy of the thickness-shear vibration, which is the main vibration, within the tolerance range. The effect is added to do so.

  Here, the configuration other than the peripheral edge 116 and the excitation electrode 120 constituting the quartz crystal vibrating piece 110 is the same as that of the quartz crystal vibrating piece 10 according to the first embodiment. That is, the outer shape of the vibrating portion 114 and the excitation electrode 120 may be rectangular, and the dimensions may be determined so that both ends in the X-axis direction are antinodes of bending vibration. The connection electrode 124 is disposed near the end in the + X-axis direction, and the extraction electrode 122 only needs to be able to electrically connect the excitation electrode 120 and the connection electrode 124, respectively.

  In the crystal vibrating piece 110 having such a configuration, it is possible to suppress contour slip vibration, which is one of unnecessary vibrations, by making the outer shape of the peripheral edge portion 116 elliptical. In addition, by forming the outer shape of the vibration unit 114 and the excitation electrode 120 in a rectangular shape, it is possible to suppress bending vibration that is one of unnecessary vibrations. Therefore, according to the crystal vibrating piece 110 according to the present embodiment, it is possible to comprehensively suppress a plurality of types of unnecessary vibrations.

  Next, with reference to FIG. 7, an application mode of the quartz crystal resonator element according to this embodiment will be described. The difference between the quartz crystal vibrating piece according to the present embodiment and the quartz crystal vibrating piece according to the above embodiment is the outer shape of the peripheral edge. Therefore, portions having the same configuration and function are denoted by the same reference numerals in the drawings, and detailed description thereof is omitted.

The peripheral part 116 in the quartz crystal vibrating piece 110 according to the present embodiment is characterized in that a convex arc part R3 is provided on at least one side intersecting the X axis. In the above-described embodiment, the peripheral edge 116 is formed into an ellipse, thereby suppressing contour slip vibration that is unnecessary vibration. However, in order to suppress contour slip vibration, there is no need to make the shape of the peripheral edge 116 a perfect ellipse.
Although there are many effects, contour slip vibration can be suppressed if at least one of the edges intersecting the X axis is off the straight line.

Next, with reference to FIG. 8, it will be described embodiments of the resonator element of the present invention. Most of the components in the quartz crystal resonator element according to the present embodiment the first related embodiment described above, is similar to the quartz crystal resonator element according to a second related embodiment. Accordingly, parts having the same function are denoted by reference numerals obtained by adding 200 to the reference numerals given in FIG. 1, and detailed description thereof will be omitted.

The crystal resonator element 210 according to the present embodiment has both the characteristic configuration of the crystal resonator element 10 according to the first related embodiment and the characteristic configuration of the crystal resonator element 110 according to the second related embodiment. Characterized by dots.
Specifically, the outer shape of the vibrating portion 214 is rectangular, and the outer shapes of the excitation electrode 220 and the peripheral edge portion 216 are each elliptical. Here, the formation conditions of the vibration part 214 are the same as those of the quartz crystal resonator element 10 according to the first related embodiment described above. Moreover, the relationship between the vibration part 214 and the excitation electrode 220 is the same as that of the quartz crystal vibrating piece 10 according to the first related embodiment. On the other hand, the formation conditions of the peripheral edge 216 are the same as those of the quartz crystal vibrating piece 110 according to the second related embodiment.

  In the crystal vibrating piece 210 having such characteristics, the frequency sensitivity can be improved by the shape of the excitation electrode 220. In addition, bending vibration, which is one of unnecessary vibrations, can be suppressed by the shape and size of the vibration part 214. Furthermore, the shape of the peripheral edge 216 can suppress contour slip vibration, which is one of unnecessary vibrations. Therefore, spurious can be reduced while improving frequency sensitivity.

Next, with reference to FIG. 9, the 1st application form relevant to the quartz crystal vibrating piece which concerns on this embodiment is demonstrated. The difference between the quartz crystal vibrating piece according to this embodiment and the quartz crystal vibrating piece according to the above embodiment is the shape of the excitation electrode. Therefore, portions having the same configuration and function are denoted by the same reference numerals in the drawings, and detailed description thereof is omitted.

  The excitation electrode 220 in the quartz crystal resonator element 210 according to this embodiment is characterized in that a convex arcuate portion R1 is provided on at least one side intersecting the X axis. In the above embodiment, the excitation electrode has an elliptical shape so as to improve the frequency sensitivity. However, in order to improve the frequency sensitivity, the excitation electrode 220 does not have to have a complete elliptical shape. .

  Since the concentration of vibration energy in the vibration part 214 occurs in an elliptical shape, the corner of the excitation electrode 220 is cut and approximated to the shape, thereby preventing an increase in capacity and improving frequency sensitivity. Can do.

Next, with reference to FIG. 10, the 2nd application form relevant to the quartz crystal vibrating piece which concerns on this embodiment is demonstrated. The difference between the quartz crystal vibrating piece according to the present embodiment and the quartz crystal vibrating piece according to the above embodiment is the outer shape of the peripheral edge. Therefore, portions having the same configuration and function are denoted by the same reference numerals in the drawings, and detailed description thereof is omitted.

The peripheral portion 216 in the crystal vibrating piece 210 according to the present embodiment is characterized in that a convex arc portion R3 is provided on at least one side intersecting the X axis. In the above-described embodiment, the peripheral edge 216 is formed into an ellipse so as to suppress contour slip vibration that is unnecessary vibration. However, in order to suppress contour slip vibration, there is no need to make the shape of the peripheral edge 216 a perfect ellipse.
This is because although the effect is large or small, the contour slip vibration can be suppressed if at least one of the edges intersecting the X axis deviates from the straight line.

Next, with reference to FIG. 11, an application mode of the crystal resonator element according to the present embodiment will be described. The quartz crystal resonator element according to the present embodiment is a combination of parts that are different from each other in the first and second related applications. Even a quartz crystal resonator element having such a configuration can achieve the same effect as that of the above-described embodiment, and thus can be regarded as a part of this embodiment.

Next, an embodiment according to the vibrator of the present invention will be described with reference to FIG.
The crystal resonator 30 according to the present embodiment includes a crystal resonator element and a package. The quartz crystal vibrating piece may be the quartz crystal vibrating piece (for example, the quartz crystal vibrating piece 10) according to each of the embodiments described above. Further, the configuration of the package 32 is not particularly limited, but may be the following configuration, for example. In other words, the package 32 may be configured by the package base 36 and the lid 34. Here, the package base 36 is a box having a cavity for housing the crystal vibrating piece 10 and is preferably made of an insulating material such as ceramics. On the inner bottom surface of the package base 36, an internal mounting terminal 38 for mounting the connection electrode 24 in the crystal vibrating piece 10 is formed. An external mounting terminal 40 is provided on the outer bottom surface of the package base 36 and is electrically connected to the internal mounting terminal 38.

  The lid 34 is a lid for sealing the upper opening of the package base 36. Examples of the lid 34 include a glass lid made of an insulating material such as soda glass in addition to a metal lid made of an alloy such as Kovar.

  In the crystal resonator 30 having such a configuration, the conductive adhesive 42 is used when the crystal resonator element 10 is mounted on the package base 36. The conductive adhesive 42 is obtained by mixing a metal filler having conductivity such as silver into a curable resin binder.

  When the crystal vibrating piece 10 is mounted on the package base 36, it is cantilevered so that the + X axis side becomes a fixed end and the −X axis side becomes a free end. That is, the conductive adhesive 42 is applied to the internal mounting terminals 38 in the package base 36, and the crystal vibrating piece 10 is mounted via the conductive adhesive 42.

  After the crystal resonator element 10 is mounted on the package base 36, the lid 34 is bonded to the upper opening of the package base 36 to seal the package 32. The package 32 is preferably sealed in a vacuum atmosphere or in an inert gas atmosphere.

  If it is the crystal resonator 30 of such a structure, it can be set as the crystal resonator which can show | play the effect of the crystal resonator element described in any one of the said embodiment. For example, as in the first and third embodiments, when the crystal vibrating pieces 10 and 210 with improved frequency sensitivity are mounted, it is possible to widen the frequency adjustment range with respect to temperature change. Further, as in the second and third embodiments, when the quartz crystal vibrating pieces 110 and 210 capable of comprehensively suppressing a plurality of types of unnecessary vibrations such as bending vibration and contour slip vibration are mounted, they are superimposed on the main vibration. Therefore, it is possible to reduce the unnecessary vibration, and to make a crystal resonator having a small spurious value as a relative attenuation.

Next, an embodiment according to the oscillator of the present invention will be described with reference to the drawings. First, the crystal oscillator according to the first embodiment will be described with reference to FIG.
The crystal oscillator 50 according to the present embodiment uses the crystal resonator 30 shown in FIG. 12 as it is, and has an IC 52 including a lead frame 56 and an oscillation circuit in addition to the crystal resonator 30.
Specifically, the IC 52 is mounted on the upper surface of the lead frame 56 and the inverted crystal unit 30 is mounted on the lower surface of the lead frame 56. The lead frame 56 and the IC 52, and the IC 52 and the crystal unit 30 are respectively connected to the metal wires. 64 is connected.

  Further, the crystal oscillator 50 having the above-described configuration is entirely excluding the tip of the lead frame 56 serving as an external mounting terminal in order to protect the terminal 54 and the metal wire 64 provided on the active surface of the IC 52 and the connection portion. It is configured by molding with resin 58.

  With the crystal oscillator 50 having such characteristics, the above-described effects of the crystal unit 30 can be obtained. For example, in the crystal resonator 30 equipped with the crystal resonator element 10 with improved frequency sensitivity, the adjustment range of the oscillation frequency with respect to temperature change increases. Therefore, in the case of a crystal oscillator having a temperature compensation circuit, the design margin is improved.

Next, an oscillator according to the second embodiment will be described with reference to FIG.
As shown in FIG. 14, the crystal oscillator 50a according to the present embodiment takes a form in which the IC 52 and the crystal resonator element 10 are accommodated in one package 32a. In the case of the embodiment shown in FIG. 14, the IC 52 and the crystal vibrating piece 10 are arranged so as to overlap in the vertical direction in order to reduce the size of the crystal oscillator 50 a. Specifically, the cavity of the package base 36a is formed in a step shape, and the IC 52 is mounted on the bottom plate portion located at the lowest step. An internal terminal 60 for electrically connecting the IC 52 and the package base 36a is provided on the stage on which the IC 52 is mounted, and a terminal 54 provided on the active surface of the IC 52 and an internal terminal provided on the package base 36a. 60 is connected by a metal wire 64. Then, an internal mounting terminal 38 for mounting the crystal vibrating piece 10 is provided on a stage above the stage where the internal terminal 60 is provided, and the crystal vibrating piece 10 is mounted via the conductive adhesive 42. After the crystal vibrating piece 10 is mounted, the upper opening of the package base 36a is sealed with the lid 34a. The internal terminals 60 and the internal mounting terminals 38 are electrically connected to external mounting terminals 62 provided on the external bottom surface of the package 32a. Even with the crystal oscillator 50a having such a configuration, the same effects as those of the crystal oscillator 50 according to the first embodiment can be obtained.

As another embodiment of the oscillator , one shown in FIG. 15 can be cited. The embodiment shown in FIG. 15 employs a package base 36b having a so-called H-shaped cross section as the package 32b. The crystal vibrating piece 10 is mounted on one of the cavities provided on the upper and lower sides and sealed by the lid 34b. In addition, the IC 52 is mounted on the other side. Even with the crystal oscillator 50b having such a configuration, the same effects as those of the crystal oscillators 50 and 50a according to the first and second embodiments can be obtained.

It is a figure which shows the planar structure of the vibration piece which concerns on 1st Embodiment relevant to this invention . It is a figure which shows the cross-sectional structure of the vibration piece which concerns on 1st Embodiment relevant to this invention . It is a figure which shows the planar structure of the applied form in the resonator element which concerns on 1st Embodiment relevant to this invention . It is a figure which shows the modification of the vibration piece which concerns on the application form of 1st related embodiment . It is a figure which shows the planar structure of the vibration piece which concerns on 2nd Embodiment relevant to this invention . It is a figure which shows the cross-sectional structure of the vibration piece which concerns on 2nd Embodiment relevant to this invention . It is a figure which shows the planar structure of the applied form in the vibration piece which concerns on 2nd Embodiment relevant to this invention . It is a figure which shows the plane structure of the vibration piece which concerns on embodiment . It is a diagram showing a planar configuration of the first modified embodiment relating to vibrating element according to the embodiment. It is a diagram showing a planar structure of a second modified embodiment relating to vibrating element according to the embodiment. It is a diagram showing a planar structure of a modified embodiment of the vibration element according to the embodiment. It is a figure which shows the structural example of the vibrator | oscillator which concerns on invention. It is a figure which shows 1st Embodiment in an oscillator. It is a figure which shows 2nd Embodiment in an oscillator. It is a figure which shows 3rd Embodiment in an oscillator.

Explanation of symbols

  10... Quartz vibrating piece, 12... Quartz base plate, 14... Vibrating part, 16... Peripheral part, 20 ... Excitation electrode, 22 Extraction electrode, 24 , 30 ......... Quartz crystal, 32 ......... Package, 34 ......... Lid, 36 ......... Package base, 38 ......... Internal mounting terminal, 40 ......... External mounting terminal, 42 ......... Conductivity Adhesive, 50 ......... crystal oscillator, 52 ......... IC, 54 ......... terminal, 56 ......... lead frame, 58 ...... resin, 60 ......... internal terminal, 62 ......... external mounting terminal, 64: Metal wire.

Claims (7)

The vibration part of the excitation and outline in plan view a thickness shear vibration as primary vibration is rectangular, and rather a thin thickness than the vibrating portion is disposed along the outer edge of the vibrating portion in a plan view, the outer shape in plan view elliptical A quartz base plate including a peripheral portion,
An excitation electrode provided on the main surface of the vibrating part;
Including
Among the edges of the excitation electrode, it is at least a part of the edge that intersects the central axis of the excitation electrode along the vibration direction of the main vibration, and the edge including the intersecting part is arcuate in plan view,
When the distance between the two ends of the vibration part intersecting the vibration direction of the main vibration is L2, and the wavelength of the bending vibration generated in the quartz base plate is λ,
(N + 1/2) λ−0.1λ ≦ L2 ≦ (n + 1/2) λ + 0.1λ, where n is a positive integer,
A vibrating piece characterized by satisfying In claim 1,
The resonator element according to claim 1, wherein an outer shape of the excitation electrode is elliptical in a plan view. In claim 1 or 2 ,
The resonator element, wherein the quartz base plate is an AT-cut quartz. The resonator element according to any one of claims 1 to 3 ,
And a package on which the resonator element is mounted. In claim 4 ,
The vibrator is hermetically sealed in either a vacuum or an inert gas atmosphere. The vibrator according to claim 4 or 5 ,
And an oscillation circuit mounted on the vibrator. The resonator element according to any one of claims 1 to 3 ,
An oscillation circuit;
A package in which the resonator element and the oscillation circuit are mounted;
An oscillator characterized by comprising:

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