JP5034540B2 - 圧電振動子、発振器 - Google Patents
圧電振動子、発振器 Download PDFInfo
- Publication number
- JP5034540B2 JP5034540B2 JP2007034391A JP2007034391A JP5034540B2 JP 5034540 B2 JP5034540 B2 JP 5034540B2 JP 2007034391 A JP2007034391 A JP 2007034391A JP 2007034391 A JP2007034391 A JP 2007034391A JP 5034540 B2 JP5034540 B2 JP 5034540B2
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric thin
- electrode
- thin film
- vibrating arm
- piezoelectric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 29
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 5
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 claims description 3
- 229910001928 zirconium oxide Inorganic materials 0.000 claims description 3
- 229910003271 Ni-Fe Inorganic materials 0.000 claims description 2
- 229910045601 alloy Inorganic materials 0.000 claims description 2
- 239000000956 alloy Substances 0.000 claims description 2
- 239000010409 thin film Substances 0.000 description 229
- 239000010408 film Substances 0.000 description 107
- 239000013078 crystal Substances 0.000 description 93
- 230000008859 change Effects 0.000 description 27
- 239000000463 material Substances 0.000 description 25
- 239000010453 quartz Substances 0.000 description 24
- 238000000034 method Methods 0.000 description 23
- 230000005684 electric field Effects 0.000 description 12
- 238000010438 heat treatment Methods 0.000 description 11
- 230000005284 excitation Effects 0.000 description 10
- 239000003990 capacitor Substances 0.000 description 9
- 229910052751 metal Inorganic materials 0.000 description 8
- 239000002184 metal Substances 0.000 description 8
- 239000000758 substrate Substances 0.000 description 7
- 230000015572 biosynthetic process Effects 0.000 description 6
- 238000010586 diagram Methods 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 6
- 230000008878 coupling Effects 0.000 description 5
- 238000010168 coupling process Methods 0.000 description 5
- 238000005859 coupling reaction Methods 0.000 description 5
- 238000005452 bending Methods 0.000 description 4
- 230000008602 contraction Effects 0.000 description 4
- 230000000295 complement effect Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- ORQBXQOJMQIAOY-UHFFFAOYSA-N nobelium Chemical compound [No] ORQBXQOJMQIAOY-UHFFFAOYSA-N 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- 230000010355 oscillation Effects 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 230000010287 polarization Effects 0.000 description 2
- UOACKFBJUYNSLK-XRKIENNPSA-N Estradiol Cypionate Chemical compound O([C@H]1CC[C@H]2[C@H]3[C@@H](C4=CC=C(O)C=C4CC3)CC[C@@]21C)C(=O)CCC1CCCC1 UOACKFBJUYNSLK-XRKIENNPSA-N 0.000 description 1
- 229910000640 Fe alloy Inorganic materials 0.000 description 1
- 235000014676 Phragmites communis Nutrition 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- CNQCVBJFEGMYDW-UHFFFAOYSA-N lawrencium atom Chemical compound [Lr] CNQCVBJFEGMYDW-UHFFFAOYSA-N 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000001552 radio frequency sputter deposition Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000001502 supplementing effect Effects 0.000 description 1
- -1 teryl oxide Chemical compound 0.000 description 1
Images
Landscapes
- Oscillators With Electromechanical Resonators (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007034391A JP5034540B2 (ja) | 2007-02-15 | 2007-02-15 | 圧電振動子、発振器 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007034391A JP5034540B2 (ja) | 2007-02-15 | 2007-02-15 | 圧電振動子、発振器 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2008199438A JP2008199438A (ja) | 2008-08-28 |
| JP2008199438A5 JP2008199438A5 (enrdf_load_stackoverflow) | 2010-03-18 |
| JP5034540B2 true JP5034540B2 (ja) | 2012-09-26 |
Family
ID=39757973
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007034391A Expired - Fee Related JP5034540B2 (ja) | 2007-02-15 | 2007-02-15 | 圧電振動子、発振器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5034540B2 (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008245243A (ja) * | 2007-02-26 | 2008-10-09 | Epson Toyocom Corp | 輪郭振動子、輪郭振動子の調整方法 |
| JP7005988B2 (ja) * | 2017-04-27 | 2022-01-24 | セイコーエプソン株式会社 | Ｍｅｍｓ素子、電子機器および移動体 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5549020A (en) * | 1978-10-04 | 1980-04-08 | Seiko Instr & Electronics Ltd | Piezoelectric vibrator |
| JPS5699929U (enrdf_load_stackoverflow) * | 1979-12-28 | 1981-08-06 | ||
| JP4434537B2 (ja) * | 2001-08-27 | 2010-03-17 | パナソニック株式会社 | 圧電機能部品 |
| JP3972790B2 (ja) * | 2001-11-27 | 2007-09-05 | 松下電器産業株式会社 | 薄膜微小機械式共振子および薄膜微小機械式共振子ジャイロ |
| JP2005249646A (ja) * | 2004-03-05 | 2005-09-15 | Matsushita Electric Ind Co Ltd | 角速度センサ用音叉型振動子、この振動子を用いた角速度センサ及びこの角速度センサを用いた自動車 |
-
2007
- 2007-02-15 JP JP2007034391A patent/JP5034540B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2008199438A (ja) | 2008-08-28 |
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