JP2008199438A5 - - Google Patents
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- Publication number
- JP2008199438A5 JP2008199438A5 JP2007034391A JP2007034391A JP2008199438A5 JP 2008199438 A5 JP2008199438 A5 JP 2008199438A5 JP 2007034391 A JP2007034391 A JP 2007034391A JP 2007034391 A JP2007034391 A JP 2007034391A JP 2008199438 A5 JP2008199438 A5 JP 2008199438A5
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- vibrating arm
- piezoelectric vibrator
- arm
- piezoelectric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910003271 Ni-Fe Inorganic materials 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
- 229910045601 alloy Inorganic materials 0.000 claims 1
- 239000000956 alloy Substances 0.000 claims 1
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 claims 1
- 229910052814 silicon oxide Inorganic materials 0.000 claims 1
- 229910001928 zirconium oxide Inorganic materials 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007034391A JP5034540B2 (ja) | 2007-02-15 | 2007-02-15 | 圧電振動子、発振器 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007034391A JP5034540B2 (ja) | 2007-02-15 | 2007-02-15 | 圧電振動子、発振器 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2008199438A JP2008199438A (ja) | 2008-08-28 |
| JP2008199438A5 true JP2008199438A5 (enrdf_load_stackoverflow) | 2010-03-18 |
| JP5034540B2 JP5034540B2 (ja) | 2012-09-26 |
Family
ID=39757973
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007034391A Expired - Fee Related JP5034540B2 (ja) | 2007-02-15 | 2007-02-15 | 圧電振動子、発振器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5034540B2 (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008245243A (ja) * | 2007-02-26 | 2008-10-09 | Epson Toyocom Corp | 輪郭振動子、輪郭振動子の調整方法 |
| JP7005988B2 (ja) * | 2017-04-27 | 2022-01-24 | セイコーエプソン株式会社 | Ｍｅｍｓ素子、電子機器および移動体 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5549020A (en) * | 1978-10-04 | 1980-04-08 | Seiko Instr & Electronics Ltd | Piezoelectric vibrator |
| JPS5699929U (enrdf_load_stackoverflow) * | 1979-12-28 | 1981-08-06 | ||
| JP4434537B2 (ja) * | 2001-08-27 | 2010-03-17 | パナソニック株式会社 | 圧電機能部品 |
| JP3972790B2 (ja) * | 2001-11-27 | 2007-09-05 | 松下電器産業株式会社 | 薄膜微小機械式共振子および薄膜微小機械式共振子ジャイロ |
| JP2005249646A (ja) * | 2004-03-05 | 2005-09-15 | Matsushita Electric Ind Co Ltd | 角速度センサ用音叉型振動子、この振動子を用いた角速度センサ及びこの角速度センサを用いた自動車 |
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2007
- 2007-02-15 JP JP2007034391A patent/JP5034540B2/ja not_active Expired - Fee Related