JP5023952B2 - アクチュエータ、光スキャナおよび画像形成装置 - Google Patents
アクチュエータ、光スキャナおよび画像形成装置 Download PDFInfo
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- JP5023952B2 JP5023952B2 JP2007265780A JP2007265780A JP5023952B2 JP 5023952 B2 JP5023952 B2 JP 5023952B2 JP 2007265780 A JP2007265780 A JP 2007265780A JP 2007265780 A JP2007265780 A JP 2007265780A JP 5023952 B2 JP5023952 B2 JP 5023952B2
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- voltage
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- drive plate
- permanent magnet
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- 230000003287 optical effect Effects 0.000 title claims description 25
- 125000006850 spacer group Chemical group 0.000 claims description 57
- 239000000758 substrate Substances 0.000 claims description 37
- 230000002093 peripheral effect Effects 0.000 claims description 25
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 17
- 238000001579 optical reflectometry Methods 0.000 claims description 8
- 238000000034 method Methods 0.000 description 16
- 238000004519 manufacturing process Methods 0.000 description 11
- 238000005530 etching Methods 0.000 description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 7
- 239000000853 adhesive Substances 0.000 description 7
- 238000010586 diagram Methods 0.000 description 7
- 238000005304 joining Methods 0.000 description 7
- 229910052710 silicon Inorganic materials 0.000 description 7
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- 230000001070 adhesive effect Effects 0.000 description 6
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- 229910052751 metal Inorganic materials 0.000 description 4
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- 230000015572 biosynthetic process Effects 0.000 description 2
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- 239000011521 glass Substances 0.000 description 2
- 230000005484 gravity Effects 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 2
- 238000010030 laminating Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000001020 plasma etching Methods 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 206010037660 Pyrexia Diseases 0.000 description 1
- 229910000828 alnico Inorganic materials 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000003486 chemical etching Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000007772 electroless plating Methods 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 238000007733 ion plating Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 229910001172 neodymium magnet Inorganic materials 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 229910000938 samarium–cobalt magnet Inorganic materials 0.000 description 1
- 238000007751 thermal spraying Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
- 229910000859 α-Fe Inorganic materials 0.000 description 1
Images
Landscapes
- Micromachines (AREA)
- Facsimile Scanning Arrangements (AREA)
- Laser Beam Printer (AREA)
- Mechanical Optical Scanning Systems (AREA)
- Exposure Or Original Feeding In Electrophotography (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007265780A JP5023952B2 (ja) | 2007-10-11 | 2007-10-11 | アクチュエータ、光スキャナおよび画像形成装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007265780A JP5023952B2 (ja) | 2007-10-11 | 2007-10-11 | アクチュエータ、光スキャナおよび画像形成装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2009093081A JP2009093081A (ja) | 2009-04-30 |
| JP2009093081A5 JP2009093081A5 (enrdf_load_stackoverflow) | 2010-11-18 |
| JP5023952B2 true JP5023952B2 (ja) | 2012-09-12 |
Family
ID=40665103
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007265780A Active JP5023952B2 (ja) | 2007-10-11 | 2007-10-11 | アクチュエータ、光スキャナおよび画像形成装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5023952B2 (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2020038965A1 (en) | 2018-08-20 | 2020-02-27 | Optotune Ag | Optical device for enhancing resolution of an image or for reducing speckle noise |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0682711A (ja) * | 1992-08-31 | 1994-03-25 | Matsushita Electric Works Ltd | 走査ミラーの駆動装置 |
| JP3065611B1 (ja) * | 1999-05-28 | 2000-07-17 | 三菱電機株式会社 | マイクロミラ―装置およびその製造方法 |
| JP3974068B2 (ja) * | 2003-03-27 | 2007-09-12 | 日本信号株式会社 | プレーナー型電磁アクチュエータ |
| JP2006145962A (ja) * | 2004-11-22 | 2006-06-08 | Canon Inc | 二次元光偏向器及び該二次元光偏向器を用いた光学機器 |
| JP2006154315A (ja) * | 2004-11-29 | 2006-06-15 | Canon Inc | 静電櫛歯型揺動体装置、及びその作製方法 |
-
2007
- 2007-10-11 JP JP2007265780A patent/JP5023952B2/ja active Active
Also Published As
| Publication number | Publication date |
|---|---|
| JP2009093081A (ja) | 2009-04-30 |
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