JP4987380B2 - 難燃性物質分解バーナ - Google Patents
難燃性物質分解バーナ Download PDFInfo
- Publication number
- JP4987380B2 JP4987380B2 JP2006213648A JP2006213648A JP4987380B2 JP 4987380 B2 JP4987380 B2 JP 4987380B2 JP 2006213648 A JP2006213648 A JP 2006213648A JP 2006213648 A JP2006213648 A JP 2006213648A JP 4987380 B2 JP4987380 B2 JP 4987380B2
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- Japan
- Prior art keywords
- combustion
- exhaust gas
- process exhaust
- burner
- combustion cylinder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000000354 decomposition reaction Methods 0.000 title claims description 66
- 239000003063 flame retardant Substances 0.000 title claims description 65
- RNFJDJUURJAICM-UHFFFAOYSA-N 2,2,4,4,6,6-hexaphenoxy-1,3,5-triaza-2$l^{5},4$l^{5},6$l^{5}-triphosphacyclohexa-1,3,5-triene Chemical compound N=1P(OC=2C=CC=CC=2)(OC=2C=CC=CC=2)=NP(OC=2C=CC=CC=2)(OC=2C=CC=CC=2)=NP=1(OC=1C=CC=CC=1)OC1=CC=CC=C1 RNFJDJUURJAICM-UHFFFAOYSA-N 0.000 title claims description 63
- 238000002485 combustion reaction Methods 0.000 claims description 163
- 238000000034 method Methods 0.000 claims description 125
- 239000000126 substance Substances 0.000 claims description 36
- 239000000463 material Substances 0.000 claims description 32
- 238000004519 manufacturing process Methods 0.000 claims description 24
- 230000002093 peripheral effect Effects 0.000 claims description 12
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 claims description 11
- 229910000077 silane Inorganic materials 0.000 claims description 11
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 claims description 9
- 239000002184 metal Substances 0.000 claims description 9
- 239000004065 semiconductor Substances 0.000 claims description 9
- 238000011144 upstream manufacturing Methods 0.000 claims description 8
- 239000004973 liquid crystal related substance Substances 0.000 claims description 7
- 238000012545 processing Methods 0.000 claims description 7
- KYKAJFCTULSVSH-UHFFFAOYSA-N chloro(fluoro)methane Chemical compound F[C]Cl KYKAJFCTULSVSH-UHFFFAOYSA-N 0.000 claims description 5
- 239000002699 waste material Substances 0.000 claims description 5
- 239000007789 gas Substances 0.000 claims 9
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 claims 1
- 239000003546 flue gas Substances 0.000 claims 1
- 239000000843 powder Substances 0.000 description 25
- 229910004298 SiO 2 Inorganic materials 0.000 description 15
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 8
- 239000000377 silicon dioxide Substances 0.000 description 4
- 238000001784 detoxification Methods 0.000 description 3
- 229910001026 inconel Inorganic materials 0.000 description 3
- 238000012423 maintenance Methods 0.000 description 3
- 239000011819 refractory material Substances 0.000 description 3
- 238000007790 scraping Methods 0.000 description 3
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 238000005336 cracking Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 230000001788 irregular Effects 0.000 description 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 2
- 229910010271 silicon carbide Inorganic materials 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 230000003685 thermal hair damage Effects 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 239000011449 brick Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 230000000593 degrading effect Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 description 1
- 239000000446 fuel Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000005979 thermal decomposition reaction Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
- F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
- F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
- F23G7/061—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating
- F23G7/065—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating using gaseous or liquid fuel
Landscapes
- Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Incineration Of Waste (AREA)
- Treating Waste Gases (AREA)
Description
Claims (6)
- 一端が閉じている燃焼筒体と、燃焼筒体内に火炎を形成するための複数個の燃焼バーナと、燃焼筒体内に難燃性物質を含むプロセス排ガスを導入する複数個のプロセス排ガス導入ポートと、を少なくとも備え、各燃焼バーナと各プロセス排ガス導入ポートは共に燃焼筒体の周側壁に取り付けられている難燃性物質分解バーナであって、
前記複数個の燃焼バーナはそれぞれの噴出火炎が燃焼筒体の中心軸線上のほぼ同じ点で収束できるように軸線を下流側に傾斜させて燃焼筒体の周側壁に取り付けられており、前記複数個のプロセス排ガス導入ポートはその軸線の延長線が前記噴出火炎の収束域よりも上流側において燃焼筒体の中心軸線上のほぼ同じ点で交わるように軸線を下流側に傾斜させて燃焼筒体の周側壁に取り付けられていることを特徴とする難燃性物質分解バーナ。 - プロセス排ガス導入ポートは、その断面積が燃焼筒体内への出口部に向けて次第に拡大する部分を有することを特徴とする請求項1に記載の難燃性物質分解バーナ。
- 各燃焼バーナおよび各プロセス排ガス導入ポートの軸線の傾斜角度は、燃焼筒体の中心軸線に対して15度〜60度の範囲であることを特徴とする請求項1または2に記載の難燃性物質分解バーナ。
- 燃焼筒体の内壁面に沿って回動するスクレーパをさらに備えることを特徴とする請求項1ないし3のいずれかに記載の難燃性物質分解バーナ。
- 燃焼筒体は内壁に沿うようにして耐熱性金属からなる内筒を備えており、スクレーパは前記内筒の内壁面に沿って回動することを特徴とする請求項4に記載の難燃性物質分解バーナ。
- 処理すべきプロセス排ガスが、半導体製造工程、液晶製造工程、太陽電池製造工程あるいは廃棄トランス内の気体処理工程から排出されるSiH4、Si2H6、TEOS、SiF4のように燃焼分解により粉体を生成するシラン系物質を含むプロセス排ガス、およびCF4、SF6、C2F6、C3F8、C4F8、CHF3、NF3のようなフロン系難燃性物質を含むプロセス排ガスであることを特徴とする請求項1ないし5のいずれかに記載の難燃性物質分解バーナ。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006213648A JP4987380B2 (ja) | 2006-08-04 | 2006-08-04 | 難燃性物質分解バーナ |
PCT/JP2007/062663 WO2008015855A1 (fr) | 2006-08-04 | 2007-06-25 | brûleur de décomposition de matériau retardateur de flamme |
TW96125392A TWI334473B (en) | 2006-08-04 | 2007-07-12 | Decomposing burner for inflammability material |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006213648A JP4987380B2 (ja) | 2006-08-04 | 2006-08-04 | 難燃性物質分解バーナ |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2008039280A JP2008039280A (ja) | 2008-02-21 |
JP4987380B2 true JP4987380B2 (ja) | 2012-07-25 |
Family
ID=38997038
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006213648A Active JP4987380B2 (ja) | 2006-08-04 | 2006-08-04 | 難燃性物質分解バーナ |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP4987380B2 (ja) |
TW (1) | TWI334473B (ja) |
WO (1) | WO2008015855A1 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2015010800A (ja) * | 2013-07-01 | 2015-01-19 | 小池酸素工業株式会社 | 排ガスの処理装置 |
CN111720839A (zh) * | 2020-06-12 | 2020-09-29 | 山东同智创新能源科技股份有限公司 | 一种应用于废气液焚烧处理的环保型多级燃烧装置 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1143197B1 (en) * | 1998-12-01 | 2017-03-29 | Ebara Corporation | Exhaust gas treating device |
JP4009501B2 (ja) * | 2002-06-25 | 2007-11-14 | 岩谷産業株式会社 | 燃焼式縦型除害装置 |
JP4528141B2 (ja) * | 2005-01-14 | 2010-08-18 | 東京瓦斯株式会社 | 難燃性物質分解バーナ |
-
2006
- 2006-08-04 JP JP2006213648A patent/JP4987380B2/ja active Active
-
2007
- 2007-06-25 WO PCT/JP2007/062663 patent/WO2008015855A1/ja active Application Filing
- 2007-07-12 TW TW96125392A patent/TWI334473B/zh active
Also Published As
Publication number | Publication date |
---|---|
TW200819683A (en) | 2008-05-01 |
JP2008039280A (ja) | 2008-02-21 |
WO2008015855A1 (fr) | 2008-02-07 |
TWI334473B (en) | 2010-12-11 |
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