JP4979960B2 - 光学用希土類金属元素含有シリカガラスの製造方法 - Google Patents
光学用希土類金属元素含有シリカガラスの製造方法 Download PDFInfo
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims description 144
- 229910052761 rare earth metal Inorganic materials 0.000 title claims description 85
- 150000002910 rare earth metals Chemical class 0.000 title claims description 70
- 238000004519 manufacturing process Methods 0.000 title claims description 22
- 239000000843 powder Substances 0.000 claims description 82
- 239000002245 particle Substances 0.000 claims description 62
- 239000011812 mixed powder Substances 0.000 claims description 58
- 238000000034 method Methods 0.000 claims description 54
- 239000010457 zeolite Substances 0.000 claims description 43
- 238000010438 heat treatment Methods 0.000 claims description 42
- 230000003287 optical effect Effects 0.000 claims description 38
- 238000009826 distribution Methods 0.000 claims description 35
- 239000000377 silicon dioxide Substances 0.000 claims description 24
- 238000003756 stirring Methods 0.000 claims description 14
- 238000004017 vitrification Methods 0.000 claims description 9
- 238000002844 melting Methods 0.000 claims description 7
- 230000008018 melting Effects 0.000 claims description 7
- 239000011521 glass Substances 0.000 description 62
- 230000010355 oscillation Effects 0.000 description 51
- 229910021536 Zeolite Inorganic materials 0.000 description 42
- 230000003321 amplification Effects 0.000 description 42
- HNPSIPDUKPIQMN-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Al]O[Al]=O HNPSIPDUKPIQMN-UHFFFAOYSA-N 0.000 description 42
- 238000003199 nucleic acid amplification method Methods 0.000 description 42
- 229910052782 aluminium Inorganic materials 0.000 description 33
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 28
- 238000012360 testing method Methods 0.000 description 27
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 20
- 239000000835 fiber Substances 0.000 description 20
- 239000000203 mixture Substances 0.000 description 16
- 229910052779 Neodymium Inorganic materials 0.000 description 14
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 14
- 239000000463 material Substances 0.000 description 9
- 239000002994 raw material Substances 0.000 description 9
- 229910052751 metal Inorganic materials 0.000 description 8
- 238000000465 moulding Methods 0.000 description 8
- QEFYFXOXNSNQGX-UHFFFAOYSA-N neodymium atom Chemical compound [Nd] QEFYFXOXNSNQGX-UHFFFAOYSA-N 0.000 description 8
- 239000000126 substance Substances 0.000 description 8
- 238000010521 absorption reaction Methods 0.000 description 7
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 7
- 238000010791 quenching Methods 0.000 description 7
- 230000000171 quenching effect Effects 0.000 description 7
- 229910052799 carbon Inorganic materials 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 5
- 206010040925 Skin striae Diseases 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 230000005284 excitation Effects 0.000 description 5
- 239000000087 laser glass Substances 0.000 description 5
- 229910044991 metal oxide Inorganic materials 0.000 description 5
- 150000004706 metal oxides Chemical class 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 4
- 230000006837 decompression Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- VQCBHWLJZDBHOS-UHFFFAOYSA-N erbium(iii) oxide Chemical compound O=[Er]O[Er]=O VQCBHWLJZDBHOS-UHFFFAOYSA-N 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- PLDDOISOJJCEMH-UHFFFAOYSA-N neodymium(3+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Nd+3].[Nd+3] PLDDOISOJJCEMH-UHFFFAOYSA-N 0.000 description 4
- 238000010298 pulverizing process Methods 0.000 description 4
- 229910052691 Erbium Inorganic materials 0.000 description 3
- 229910004298 SiO 2 Inorganic materials 0.000 description 3
- 229910052769 Ytterbium Inorganic materials 0.000 description 3
- 239000000654 additive Substances 0.000 description 3
- 230000000996 additive effect Effects 0.000 description 3
- 238000005342 ion exchange Methods 0.000 description 3
- 230000000704 physical effect Effects 0.000 description 3
- 230000003252 repetitive effect Effects 0.000 description 3
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 2
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 239000013543 active substance Substances 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000004031 devitrification Methods 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 230000035939 shock Effects 0.000 description 2
- 238000003980 solgel method Methods 0.000 description 2
- 238000000859 sublimation Methods 0.000 description 2
- 230000008022 sublimation Effects 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- 229910052724 xenon Inorganic materials 0.000 description 2
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 2
- 238000004857 zone melting Methods 0.000 description 2
- QDZOEBFLNHCSSF-PFFBOGFISA-N (2S)-2-[[(2R)-2-[[(2S)-1-[(2S)-6-amino-2-[[(2S)-1-[(2R)-2-amino-5-carbamimidamidopentanoyl]pyrrolidine-2-carbonyl]amino]hexanoyl]pyrrolidine-2-carbonyl]amino]-3-(1H-indol-3-yl)propanoyl]amino]-N-[(2R)-1-[[(2S)-1-[[(2R)-1-[[(2S)-1-[[(2S)-1-amino-4-methyl-1-oxopentan-2-yl]amino]-4-methyl-1-oxopentan-2-yl]amino]-3-(1H-indol-3-yl)-1-oxopropan-2-yl]amino]-1-oxo-3-phenylpropan-2-yl]amino]-3-(1H-indol-3-yl)-1-oxopropan-2-yl]pentanediamide Chemical compound C([C@@H](C(=O)N[C@H](CC=1C2=CC=CC=C2NC=1)C(=O)N[C@@H](CC(C)C)C(=O)N[C@@H](CC(C)C)C(N)=O)NC(=O)[C@@H](CC=1C2=CC=CC=C2NC=1)NC(=O)[C@H](CCC(N)=O)NC(=O)[C@@H](CC=1C2=CC=CC=C2NC=1)NC(=O)[C@H]1N(CCC1)C(=O)[C@H](CCCCN)NC(=O)[C@H]1N(CCC1)C(=O)[C@H](N)CCCNC(N)=N)C1=CC=CC=C1 QDZOEBFLNHCSSF-PFFBOGFISA-N 0.000 description 1
- BNGXYYYYKUGPPF-UHFFFAOYSA-M (3-methylphenyl)methyl-triphenylphosphanium;chloride Chemical compound [Cl-].CC1=CC=CC(C[P+](C=2C=CC=CC=2)(C=2C=CC=CC=2)C=2C=CC=CC=2)=C1 BNGXYYYYKUGPPF-UHFFFAOYSA-M 0.000 description 1
- 238000005033 Fourier transform infrared spectroscopy Methods 0.000 description 1
- 102100024304 Protachykinin-1 Human genes 0.000 description 1
- 229910020175 SiOH Inorganic materials 0.000 description 1
- 101800003906 Substance P Proteins 0.000 description 1
- DIZPMCHEQGEION-UHFFFAOYSA-H aluminium sulfate (anhydrous) Chemical compound [Al+3].[Al+3].[O-]S([O-])(=O)=O.[O-]S([O-])(=O)=O.[O-]S([O-])(=O)=O DIZPMCHEQGEION-UHFFFAOYSA-H 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 238000000149 argon plasma sintering Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 150000001721 carbon Chemical class 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- UYAHIZSMUZPPFV-UHFFFAOYSA-N erbium Chemical compound [Er] UYAHIZSMUZPPFV-UHFFFAOYSA-N 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 150000002500 ions Chemical group 0.000 description 1
- 239000008204 material by function Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- CFYGEIAZMVFFDE-UHFFFAOYSA-N neodymium(3+);trinitrate Chemical compound [Nd+3].[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O CFYGEIAZMVFFDE-UHFFFAOYSA-N 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 239000005304 optical glass Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- UZLYXNNZYFBAQO-UHFFFAOYSA-N oxygen(2-);ytterbium(3+) Chemical compound [O-2].[O-2].[O-2].[Yb+3].[Yb+3] UZLYXNNZYFBAQO-UHFFFAOYSA-N 0.000 description 1
- 239000005365 phosphate glass Substances 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 229910001404 rare earth metal oxide Inorganic materials 0.000 description 1
- -1 rare earth metal salts Chemical class 0.000 description 1
- 238000010992 reflux Methods 0.000 description 1
- 238000010008 shearing Methods 0.000 description 1
- 239000005368 silicate glass Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 238000000967 suction filtration Methods 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 238000004876 x-ray fluorescence Methods 0.000 description 1
- NAWDYIZEMPQZHO-UHFFFAOYSA-N ytterbium Chemical compound [Yb] NAWDYIZEMPQZHO-UHFFFAOYSA-N 0.000 description 1
- 229910003454 ytterbium oxide Inorganic materials 0.000 description 1
- 229940075624 ytterbium oxide Drugs 0.000 description 1
Images
Classifications
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/0128—Manufacture of preforms for drawing fibres or filaments starting from pulverulent glass
- C03B37/01282—Manufacture of preforms for drawing fibres or filaments starting from pulverulent glass by pressing or sintering, e.g. hot-pressing
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B19/00—Other methods of shaping glass
- C03B19/06—Other methods of shaping glass by sintering, e.g. by cold isostatic pressing of powders and subsequent sintering, by hot pressing of powders, by sintering slurries or dispersions not undergoing a liquid phase reaction
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B19/00—Other methods of shaping glass
- C03B19/06—Other methods of shaping glass by sintering, e.g. by cold isostatic pressing of powders and subsequent sintering, by hot pressing of powders, by sintering slurries or dispersions not undergoing a liquid phase reaction
- C03B19/066—Other methods of shaping glass by sintering, e.g. by cold isostatic pressing of powders and subsequent sintering, by hot pressing of powders, by sintering slurries or dispersions not undergoing a liquid phase reaction for the production of quartz or fused silica articles
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B20/00—Processes specially adapted for the production of quartz or fused silica articles, not otherwise provided for
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2201/00—Type of glass produced
- C03B2201/06—Doped silica-based glasses
- C03B2201/07—Impurity concentration specified
- C03B2201/075—Hydroxyl ion (OH)
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2201/00—Type of glass produced
- C03B2201/06—Doped silica-based glasses
- C03B2201/30—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi
- C03B2201/34—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi doped with rare earth metals, i.e. with Sc, Y or lanthanides, e.g. for laser-amplifiers
- C03B2201/36—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi doped with rare earth metals, i.e. with Sc, Y or lanthanides, e.g. for laser-amplifiers doped with rare earth metals and aluminium, e.g. Er-Al co-doped
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Dispersion Chemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Glass Melting And Manufacturing (AREA)
- Glass Compositions (AREA)
- Lasers (AREA)
Description
Ndイオン交換ゼオライトを以下の工程で作成した。ケイ素とアルミニウムのモル比がSi:Al=4:3であるX型ゼオライト2000gを濃度150g/Lの硝酸ネオジウム水溶液10Lに浸し、100℃において還流をしながら5日間加熱した。その後、吸引ろ過によりゼオライトを濾別し、このゼオライトに純水を注いで攪拌してから濾別する洗浄工程を3回繰り返した後、乾燥機を用いて300℃にて乾燥することにより、Ndイオン交換ゼオライトを得た。このゼオライトの組成を蛍光X線分析装置で測定したところ、Nd濃度は15wt%、Al濃度は18wt%であった。
化学組成: 蛍光X線分析法により測定。
OH基濃度: フーリエ変換赤外分光装置(Nicolet社製 AVATOR360)にて2.7μmのO−H伸縮振動バンドの強度から算出。
光損失係数測定: レーザーの入射光強度I0[mW]、出射光強度IT[mW]、試料厚さd[cm]を用いて以下の式により算出。尚、Ndドープガラスでは波長1064nm、Ybドープガラスでは波長1080nm、Erドープガラスでは波長1540nmのレーザーを用いた。
体積粒度分布: (株)セイシン企業製レーザー回折散乱式粒度分布測定装置LMS-24を用いて測定。
Ndイオン交換ゼオライトを実施例1と同様の方法で作成した。このゼオライトの組成を蛍光X線分析装置で確認したところ、Nd濃度は15wt%、Al濃度は18wt%であった。
Ndイオン交換ゼオライトを実施例1と同様の方法で作成した。このゼオライトの組成を蛍光X線分析装置で確認したところ、Nd濃度は15wt%、Al濃度は18wt%であった。
この混合粉体を実施例1と同様の方法で粉体成型体作成、焼成、真空溶融、均質化を行った。
Ndイオン交換ゼオライトを実施例1と同様の方法で作成した。このゼオライトの組成を蛍光X線分析装置で確認したところ、Nd濃度は15wt%、Al濃度は18wt%であった。
酸化ネオジウム粉150g、酸化アルミニウム粉300g、シリカ粉6550gをおよび直径10mmのアルミナ製ボール2000gをアルミナ製のボールミルにいれ、120rpmにて48時間ボールミルを回転させて、シリカ粉と酸化ネオジウム、酸化アルミニウムの混合粉体を得た。この混合粉体の体積粒度分布を調べたところ、粒径20μm以上の粒子は0.05%であり、50%径は7.5μmであった。
均質化後のガラスのNd濃度、Al濃度を蛍光X線にて調べたところ、Nd1.84wt%、Al2.27wt%であった。この結果から、[アルミニウムモル数]/[ネオジウムモル数]を求めると、6.6であった。
酸化イッテルビウム粉150g、酸化アルミニウム粉300g、シリカ粉6550gをおよび直径10mmのアルミナ製ボール2000gをアルミナ製のボールミルにいれ、120rpmにて48時間ボールミルを回転させて、シリカ粉と酸化イッテルビウム、酸化アルミニウムの混合粉体を得た。この混合粉体の体積粒度分布を調べたところ、粒径20μm以上の粒子は0.05%であり、50%径は7.5μmであった。
均質化後のガラスのYb濃度、Al濃度を蛍光X線にて調べたところ、Yb1.88wt%、Al2.27wt%であった。この結果から、[アルミニウムモル数]/[イッテルビウムモル数]を求めると、7.7であった。
酸化エルビウム粉150g、酸化アルミニウム粉300g、シリカ粉6550gをおよび直径10mmのアルミナ製ボール2000gをアルミナ製のボールミルにいれ、120rpmにて48時間ボールミルを回転させて、シリカ粉と酸化エルビウム、酸化アルミニウムの混合粉体を得た。この混合粉体の体積粒度分布を調べたところ、粒径20μm以上の粒子は0.05%であり、50%径は7.5μmであった。
Ndイオン交換ゼオライトを実施例1と同様の方法で作成した。このゼオライトの組成を蛍光X線分析装置で確認したところ、Nd濃度は15wt%、Al濃度は18wt%であった。
Ndイオン交換ゼオライトを実施例1と同様の方法で作成した。このゼオライトの組成を蛍光X線分析装置で確認したところ、Nd濃度は15wt%、Al濃度は18wt%であった。
Ndイオン交換ゼオライトを実施例1と同様の方法で作成した。このゼオライトの組成を蛍光X線分析装置で確認したところ、Nd濃度は15wt%、Al濃度は18wt%であった。
Ndイオン交換ゼオライトを実施例1と同様の方法で作成した。このゼオライトの組成を蛍光X線分析装置で確認したところ、Nd濃度は15wt%、Al濃度は18wt%であった。
Claims (2)
- シリカ粉と希土類金属元素及びAlを含む粉体からなる混合粉体を加熱溶融して希土類金属元素含有シリカガラスを作製する方法において、体積粒度分布の50%径が10μm以下かつ粒子径20μm以上の粒子が1%未満である混合粉体を作成し、この混合粉体を型に入れて加圧成型し、この加圧成型体を1000℃以上1500℃以下の温度で5時間以上加熱保持し、次に減圧下で1700℃以上1900℃以下の温度に加熱保持してガラス化し、さらに軟化点以上の温度に加熱しながら攪拌することを特徴とする光学用希土類金属元素含有シリカガラスの製造方法。
- 希土類金属元素及びAlを含む粉体が、該希土類金属元素を固定したAl含有ゼオライトであることを特徴とする請求項1記載の光学用希土類金属元素含有シリカガラスの製造方法。
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Cited By (1)
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CN107935371A (zh) * | 2017-12-11 | 2018-04-20 | 中国电子科技集团公司第四十六研究所 | 一种制备掺稀土光纤芯棒预制棒的方法 |
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US8578736B2 (en) | 2008-09-23 | 2013-11-12 | Corning Incorporated | Soot radial pressing for optical fiber overcladding |
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