JP4971882B2 - Shape measuring apparatus and shape measuring method - Google Patents

Description

  The present invention relates to a shape measuring apparatus and method for measuring a surface shape within a desired measurement range of an object to be measured by scanning with a sensor. In particular, the scanning is a procedure in which the measurement range is main-scanned by the sensor to the end position of the main scan, the position of the sensor is changed to the start position of the next main scan by the sub-scan, and the main scan is started from the next start position. Although the present invention is performed, the present invention relates to a technique for shortening the scanning trajectory in the sub-scanning as much as possible and reducing the time for measuring the measurement range as a total. As an object to be measured, for example, a printed board inspection apparatus that measures and inspects the formation state of solder when cream solder is printed on a printed board for surface mounting electronic components or the like by a solder printing apparatus or the like. Applicable.

  2. Description of the Related Art Conventionally, for example, a printed solder inspection apparatus has a sensor that irradiates the surface of a substrate (hereinafter, the printed board is simply referred to as “substrate”) with a laser beam or the like and receives reflected light from the surface of the substrate. Measured values obtained as a result of measurement by the sensor (triangulation), for example, displacement (including height) of printed solder on the substrate or luminance (amount of light reflected from the substrate, received light amount (light The strength is determined on the basis of the measured value of (including strength) in comparison with reference data serving as a criterion for determination (Patent Documents 1 and 2).

  In such an inspection apparatus (method), in general, the substrate is transported from a certain direction and stopped at a predetermined inspection position, where the sensor or / and the substrate are placed on the X stage and the Y stage (X axis direction, Y axis). Measurement is performed by scanning (relatively scanning) using a moving table and moving means in each direction, and in the scanning direction, scanning is performed in a direction perpendicular to the main scanning and the main scanning. Measurement is performed during main scanning, and sub-scanning is performed to shift the sensor from the current main scanning position to the position where the next main scanning is to be performed. The range of shifting is determined by the sensor during main scanning. This corresponds to a detection width in the sub-scanning direction in which the displacement can be detected. This is shown in FIG. FIG. 9 is a diagram schematically illustrating the trajectories of main scanning and sub scanning from above the substrate.

  Scanning refers to changing the measurement position by the sensor in the measurement range of the surface of the object to be measured by moving the relative position of the sensor and the substrate that is the object to be measured. Actual measurement is performed during scanning. In scanning, that is, relative position movement, either one of the sensor and the object to be measured or both movements are possible. In Patent Documents 1 and 2, main scanning is performed by moving the object to be measured, and sub-scanning is performed by moving the sensor side.

  In FIG. 9, main scanning is performed in a vertical direction in FIG. 9 at a constant speed within the measurement range of the substrate (gray portion in FIG. 9) (the vertical lines and arrows in FIG. 9 indicate the locus and direction). When the scanning is out of the measurement range, the main scanning speed is lowered to 0 (because it cannot be stopped suddenly due to inertia, scanning is extended until it stops: these are called “extended scanning”), and then FIG. Are sub-scanned in the horizontal direction to the next main scanning position (the horizontal arrow in FIG. 9 indicates the direction. The speed is increased during the sub-scanning period and returned to 0 again). Next, it runs in the direction opposite to the previous main scanning direction outside the measurement range (this is called “running scanning”), enters the measurement range, performs main scanning at a constant speed within the measurement range, and This is repeated to scan the entire measurement range.

Japanese Patent No. 3592594 Japanese Patent No. 3537382

  In general, the shape measuring device is often used in a production line or the like. Therefore, as a shape measuring apparatus, it is a problem that is always required to operate efficiently by increasing the measurement speed or reducing the time for measurement.

  In the above-described prior art, the scanning time outside the measurement range in FIG. 9 is, in other words, the scanning time for changing the main scanning position is a time during which measurement is not performed and is a time to be reduced. In other words, the time related to the extended scan, the sub scan, and the run-up scan outside the measurement range described above is a waste time. In order to reduce this time, it is conceivable to increase the speed at which the main scan extends beyond the measurement range, the speed of the approaching speed that enters the measurement range, or the speed of the sub-scan.

  Increasing the speed means that the speed is rapidly accelerated and decelerated in a narrow sub-scanning period, which itself becomes difficult, and problems such as generation of vibrations arise.

  An object of the present invention is to improve the above-mentioned drawbacks of the prior art, and includes a main scan scan (extended scan and a run-up scan described above) and a main scan outside the measurement range for changing the main scan position. The present invention provides a technique for shortening the time required for changing the scanning position outside the measurement range by performing sub-scanning in the orthogonal direction almost simultaneously.

In order to achieve the above-mentioned object, the invention according to claim 1 is directed to irradiating the surface (9) on which the object to be measured is mounted and the measurement range of the surface of the object to be measured while performing main scanning with light. measuring range and sensor (2) for receiving the reflected light, a main scanning mechanism for the main scanning in parallel and a sensor said platform portion relative the first direction (11), and a sensor wherein the base part from And a sub-scanning mechanism (3) for sub-scanning in a second direction relatively perpendicular to the first direction and changing a next main scanning position , and a surface in the measurement range based on the output of the sensor In the shape measuring apparatus for inspecting the shape of the main scanning mechanism, the main scanning mechanism is driven to cause the measurement range to perform main scanning from the start position to the end position N times in parallel with the first direction at intervals of a distance L , with changing the start position in the main scanning over an interval of the distance L to N-1 times Scanning position detecting means for detecting that each of the start position and end position in each main scan has been reached or passed, and the start position of the next main scan from the end position of the previous main scan in the measurement range; When changing the main scanning position, the sub-scanning mechanism performs sub-scanning by the distance L in the second direction within a predetermined time Th after detecting the previous end position, and the main scanning The mechanism is extended from the end position in the same direction as the first direction in which the main scan has been performed at a constant speed until the previous end position, and the speed is sequentially decreased to perform the first extended sub-scan. After the value becomes 0, the speed is sequentially increased in the opposite direction parallel to the first direction, and the next start position is reached when or after the predetermined time Th has elapsed since the previous end position was detected. First Extended by the sub-scan, after detecting the next start position with a, a scan control unit (25a) to make the next main scanning in the constant speed to the opposite direction.

  According to a second aspect of the present invention, in the first aspect of the present invention, the scan control unit may perform the first direction next time from the end position of the main scan parallel to the first direction in the measurement range. When the main scanning position is changed to the main scanning start position parallel to the first scanning position, the extended sub scanning by the main scanning mechanism and the sub scanning by the sub scanning mechanism are combined outside the measurement range up to the end position and the start position. The main scanning mechanism and the sub-scanning mechanism are configured so that a scanning trajectory includes a substantially triangular shape or a semi-circular shape having one or both sides of the line of the distance L connecting the end position and the starting position with a straight line. Each speed and direction were controlled.

According to a third aspect of the present invention, there is provided a table (9) on which the object to be measured is mounted, and a sensor that receives the reflected light from the surface by irradiating light to the measurement range of the surface of the object to be measured while performing main scanning. 2), the main scanning mechanism (11) for causing the base and the sensor to perform the main scanning N times in parallel in the first direction, and the base and the sensor are relatively out of the measurement range. And a sub-scanning mechanism (3) that performs sub-scanning N-1 times in a second direction orthogonal to the first direction and changes the main scanning position, and based on the output of the sensor, the surface in the measurement range And a scanning position detecting means for detecting that each main scanning has reached or passed the main scanning start position and end position, respectively, and is k-th in the measurement range. (K is an integer from 1 to N-1) In changing the k-th main scanning position to the k + 1-th main scanning start position, the sub-scanning mechanism receives each position information indicating the end position from the scanning position detection means during the main scanning. In the predetermined time Th, the k-th sub-scan is performed by the distance L in the second direction, and the main scanning mechanism is the same as the first direction in which the main scanning has been performed up to the end position. Extending from the end position in the direction and sequentially reducing the speed to perform the first extended sub-scan. After the speed becomes zero, the speed is sequentially increased in the opposite direction parallel to the first direction for the predetermined time. The second extended sub-scan is performed so that the constant speed is reached at the start position when or after the passage of Th, and the scan position detecting means detects that the main scan position has been changed to the start position, and k + 1 run for the main scan With control unit (25a).

According to a fourth aspect of the present invention, there is provided a table (9) on which the object to be measured is mounted, and a sensor that receives the reflected light from the surface by irradiating light to the measurement range of the surface of the object to be measured while performing main scanning. 2), a main scanning mechanism (11) for main-scanning the pedestal part and the sensor relatively N times parallel to the first direction, and the pedestal part and the sensor are relatively relative to each other outside the measurement range. wherein the second and the sub scanning direction scanning mechanism for changing the main scanning position of the next to be perpendicular to the first direction (3), a shape measuring method in shape measurement device equipped with, the main scanning mechanism Is the first main scanning stage in which main scanning is performed at the first speed vs from the start position of the k-th main scanning to the end position of the main scanning in the measurement range, and the end of the k-th main scanning by the scanning position detecting means. a step of detecting that it has been possible or elapsed reaches the position, the sub-scanning mechanism Only the k-th distance L in the second direction from the end position of a sub-scan step to scan within a predetermined time Th from the detection of the end position, in parallel with the sub-scanning step, the main scanning mechanism Decreases the speed sequentially from the first speed vs. out of the measurement range from the end position of the kth time, and performs the first extended sub-scan in the first direction, and after the speed becomes zero, the first direction The speed is sequentially increased in the opposite direction to the second extension sub-time until the k + 1th start position at the first speed after or after the predetermined time Th has elapsed since the kth end position is detected. An extended sub-scanning stage of scanning, a stage of detecting that the start position of the (k + 1) th main scan has been reached or passed by a scanning position detecting means , and a start position of the ( k + 1) th main scan by the main scanning mechanism The first speed in the reverse direction from A second main scanning stage for performing k + 1 main scanning in the measurement range, and the operations from the first main scanning stage to the second main scanning stage are performed from k = 1 to k = N−1. It was set as the structure repeated until.

  Outside the measurement range from the main scan end position within the measurement range to the start position of the next main scan, in an extended sub-scan parallel to the main scan direction by the main scan mechanism and in a direction orthogonal to the main scan direction by the sub-scan mechanism Therefore, the time required for the position change between the main scans is shortened, and the measurement time of the entire measuring apparatus can be shortened.

  An embodiment of the present invention will be described with reference to FIGS. FIG. 1 is a functional block diagram showing the configuration of the present embodiment. FIG. 2 is a modification of FIG. 1 and shows an example in which the scanning position detector is in the scanning mechanism. FIG. 3 is a modification of FIG. 1 and shows an example in which the scanning position detector is in the measurement control means. FIG. 4 is a diagram showing a trajectory of scanning according to the embodiment of FIG. FIG. 5 is a diagram for explaining scanning by the main scanning mechanism and the sub-scanning mechanism. FIG. 6 is a diagram for explaining modes of speed and trajectory in extended sub-scanning and sub-scanning. FIG. 7 is a diagram illustrating an example of the sub-scanning mechanism of the scanning mechanism. FIG. 8 is a diagram illustrating an example of the main scanning mechanism of the scanning mechanism. 7 and 8 show techniques that have been used conventionally.

[Scanning mechanism]
The scanning mechanism sequentially moves or changes the relative position (or distance and direction) between the object to be measured and the sensor so that the sensor can measure over the entire measurement range of the object to be measured. Since scanning is a relative movement between the object to be measured and the sensor, it is sufficient that either one can be moved. Here, as an example, the technique shown in FIGS. 7 and 8 is used. Since the scanning is accompanied by “movement” for changing the measurement position as a specific operation, it may be described as “movement”, but hereinafter, the term “scanning” will be used for explanation.

  First, the scanning mechanism will be described with reference to FIGS. In FIG. 7, the scanning mechanism unit 1 mainly includes a sensor 2, a sub-scanning mechanism 3, and a transport device 4 that sequentially transports an uninspected substrate W. The main scanning mechanism 11 is included in the transport device in this example.

  The substrate W is a so-called object to be measured, and is a printed circuit board to be inspected with cream solder printed on the surface. A part or all of the surface of the substrate w can be a measurement range. In the following description, the entire substrate W will be described as the measurement range.

  In this example, the sensor 2 is a sensor that measures the displacement of the surface of the substrate w in the measurement range by performing triangulation. For this purpose, a laser light source for irradiating the substrate w with laser light and a displacement detector for detecting reflected light reflected from the substrate w are provided.

  The sub-scanning mechanism 3 moves the support 3a that supports the sensor 2 in the X direction via the rail 3c by driving the X-axis motor 3b. That is, the sub-scan is performed in the X direction.

  As shown in FIGS. 7 and 8, the transport device 4 is wound around a pair of cylindrical pulleys 6, 6 so that two transport belts 5, 5 are along the transport direction of the substrate w. One pulley 6 is provided with a conveyance motor 7 and rotates the conveyance belts 5 and 5 to convey the uninspected substrate w in the X positive direction. A stopper 8 that is movable up and down in the height direction (Z direction) is provided at a predetermined position between the two transport belts 5 and 5 to stop the uninspected printed circuit board W being transported. Also, a clamper 9 that can move up and down in the Z direction is provided in the vicinity of the stopper 8 between the two conveyor belts 5 and 5, and the clamper 9 is attached to the conveyor belts 5 and 5 when inspected by the sensor 2. Instead, the substrate w is placed, and the substrate w is sandwiched between the butting plates 10 and 10 that are movable in the Y direction orthogonal to the transport direction.

  The transport device 4 is provided with a main scanning mechanism 11. The main scanning mechanism 11 supports the transport device 4 with a support 11a, and moves the transport device 4 itself in the Y direction perpendicular to the transport direction via the rail 11c by driving the Y-axis motor 11b. That is, main scanning is performed.

[Scan Function / Configuration]
FIG. 1 is a diagram showing a functional configuration of an embodiment of the present invention. The main part of the code | symbol corresponding to the code | symbol in FIG.7 and FIG.8 in FIG. 1 shows the same function. However, the main scanning mechanism 11 and the sub-scanning mechanism 3 in the scanning mechanism unit 1 of FIG. 1 are representatively represented by the central main parts related to the main scanning and sub-scanning of FIGS. For explanation, the sub-scanning mechanism 3 and the sensor 2 are separated in FIG. 1, but in FIGS. 7 and 8, the sub-scanning mechanism is a mechanism for mounting and moving the sensor 2. In FIG. 1, the clamper 9 and the main scanning mechanism 11 are described separately. However, in FIGS. 7 and 8, the main scanning mechanism 11 moves the conveying means on which the clamper 9 is mounted to perform the main scanning. ing.

  In FIG. 1, the measurement control means 25 has a scanning control unit 25a, controls the scanning mechanism unit 1 to perform scanning, and measures the displacement at the position of main scanning based on the output from the sensor 2 at that time. The quantity is sent as a measurement value to the measurement value storage means 26 for storage. In addition, the sensor 2 can detect the displacement of the height direction in the measurement location of a measurement range using an optical sensor (after-mentioned). In addition, the amount of light from the measurement location can also be detected (may be provided separately).

  The scanning control unit 25a performs scanning by receiving from the design information storage unit 30 substrate information such as a measurement range, a layout indicating the position of the substrate w to be inspected, a main scanning direction, and the number of main scans.

  The scanning control unit 25a in the present invention controls the scanning mechanism unit 1 so as to draw a trajectory as shown in FIG. 4, and there are the following techniques (1) to (2).

  (1) A method of performing sequential control by managing with a timer from the start to the end of scanning and managing with a schedule from the start time. In FIG. 4, the speed and time of the main scanning mechanism 11 within the measurement range, the speed and time of the main scanning mechanism 11 outside the measurement range, and the speed and time of the sub-scanning mechanism 3 outside the measurement range are It is stored as a time schedule and is controlled sequentially according to the time schedule.

(2) In the scanning trajectory of FIG. 4, in each of N main scans, the in-timing to enter the main scan start position within the measurement range from the outside of the measurement range, and the main scan end position at the end of the measurement range One or both of the out timings that go out of the measurement range from the sensor are detected, and the respective speeds and times of the main scanning mechanism 11 and the sub-scanning mechanism 3 are sequentially controlled based on those timings. . Since control is performed using the detected timing as a base point, accurate control can be performed, and this is effective when scanning over a long distance, that is, when the number N of main scans is large.
In this case, there are the following two methods for detecting the above timing.

  (2-1) A case where the scanning mechanism unit 1 includes the scanning position detection unit 1a as shown in FIG. More specifically, an encoder and a counter for detecting the actual moving distance are provided in each of or one of the main scanning mechanism 11 and the sub-scanning mechanism 3. For example, if each of the main scanning mechanism 11 and the sub-scanning mechanism 3 has a motor and is driven, the output is counted by an encoder that detects the number of rotations, thereby moving the distance (moved position, arrival time). )

  For example, when the main scanning mechanism 11 rotates na at a constant speed vs from the kth main scanning start position in FIG. 4, it is the kth main scanning end position, and the main scanning mechanism 11 rotates the constant speed vs from the end position. The number of revolutions is adjusted to speed control by setting the speed to 0 at several nb times (at time Th / 2), then reversing the direction of rotation and increasing the constant speed vs at nb times (at time Th / 2). Control is performed by setting a rotation schedule for the next main scanning start position at 2 nb. The number of rotations, which is the control result, is detected by an encoder and accumulated by a counter. For example, by obtaining na times and 2nb times, the end position of the previous main scan (or the arrival time of the scan position there), the next The start position (or arrival time) of main scanning can be known. In the above (1), this is managed by converting the rotation speed (movement distance) into time. However, the control result is not detected by an encoder or the like.

  (2-2) When the sensor 2 scans within the measurement range, it receives the reflected light at a constant amount. However, when the sensor 2 is out of the measurement range and there is no reflected light, or within the measurement range. When the reflected light having a difference is received, the amount of light to be received varies, so that the variation can be detected to detect the in timing when entering the measurement range or the out timing when moving outside. Therefore, as shown in FIG. 3, the measurement control unit 25 can acquire luminance data from the output of the sensor 2 and detect in-timing and out-timing. In this case, with the out timing and the in timing as the base points, the scanning speed and distance between them are sequentially controlled. Since the scanning is performed by detecting each timing, it is accurate, and when the number of main scans is large, the timing is accurate without being integrated, which is effective.

[Scanning control method]
The scanning control unit 25 includes the scanning position detection unit 1a according to (2-1), and performs scanning control of the main scanning mechanism 11 and the sub-scanning mechanism 3 as in the following (A) to (C). This will be described with reference to FIGS. Here, it is assumed that the time required for the extended sub-scanning by the main scanning mechanism 11 is Th, and the sub-scanning by the sub-scanning mechanism 3 can be executed faster than this.

  In FIG. 4, the sub-scanning mechanism 3 extends from the k-th main scanning position to the start position of the k + 1-th main scanning position in a direction orthogonal to the main scanning direction by a distance L (hereinafter referred to as “sub-scanning direction”). In FIG. 4, it moves N-1 times (N is the total number of main scans) from the left end of the substrate w to the right.

  That is, the scanning control unit 25 raises the sub-scanning speed v2 from 0 in response to the detection result that the scanning position detection unit 1a is at the k-th end position with respect to the sub-scanning mechanism 3, and only the time Th. In short, the sub-scan is stopped by the distance L from the k-th end position. A typical example of the change in the sub-scanning speed v2 is shown in FIG. This is because the scanning control unit 25 makes a peak at approximately the middle of the distance L (Th / 2 in time), and then sequentially controls so that the sub-scanning speed v2 becomes 0 as the distance L is approached. ing. Since the driving ability including the time Th or Th / 2, the distance L, and the motor used in the sub-scanning mechanism 3 is known, the sub-interval between the time Th from the time when the end position has elapsed is based on these information. Information for controlling the change in the scanning speed is obtained and stored in advance in the scanning control unit 25 as sequential control information.

  (B) When the main scanning mechanism 11 performs the k-th main scanning at the constant speed in the measurement range in FIG. 4, the next main scanning of the (k + 1) th time scans in parallel and at the same speed in the reverse direction. This is because it is positioned early to the next main scanning position. When the direction is changed, the speed needs to be set to zero once. Outside the measurement range, the main scanning mechanism 11 needs a period for running from the speed 0 to a constant speed before the main scanning. And the main scanning mechanism 11 needs the extended scanning which runs at a reduced speed to zero after the main scanning outside the measuring range. Hereinafter, both the scanning and the extension scanning in the run-up period are collectively referred to as “extended sub-scanning” by the main scanning mechanism 11 in the measurement range.

  In other words, the scanning control unit 25 lowers the main scanning speed v1 from a constant speed to 0 in response to the main scanning control mechanism 11 detecting that the scanning position detection unit 1a is at the k-th end position. Scanning is performed (first extended sub-scanning: extended scanning), and then the main scanning speed v1 is further increased from 0 in the reverse direction so as to be a constant speed (second extended sub-scanning: run-up scanning). Hereinafter, the first extended sub-scan and the second extended sub-scan are collectively referred to as extended sub-scan. The time required for this extended sub-scanning, that is, the time from the elapse of the k-th end position to the constant speed in the reverse direction, is after the sub-scanning mechanism 3 has moved in the sub-scanning direction by the distance L, that is, the k-th time. It takes from the elapse of the end position to elapse of time Th. In other words, the scanning control unit 25 controls the sub-scanning mechanism 3 and the main scanning mechanism 11 until the scanning position detecting unit 1a detects that the scanning position is at the (k + 1) th main scanning start position, and performs sub-scanning. The extended sub-scan by the main scanning mechanism 11 is completed at the same time as or after the completion of the sub-scan for the distance L by the mechanism 1. Then, after the scanning position detecting means 1a detects that the scanning position is at the (k + 1) -th main scanning start position, the k + 1-th main scanning is performed.

  FIG. 5B shows a typical example of the change in the speed v2 during the extended sub-scanning by the main scanning mechanism 11. In FIG. 5B, control is performed so that the main scanning speed v1 becomes 0 at an approximately middle point of time Th.

  The information that the scanning control unit 25 controls the main scanning mechanism 11 is obtained in advance because the performance of the motor as a drive source used in the main scanning mechanism 11, the time Th, the constant speed during the main scanning, and the like are known in advance. It is stored as control information.

  (C) FIG. 6 shows a sub-scanning speed v2 outside the measurement range by the sub-scanning mechanism 3 (FIG. 6A) and an extended sub-scanning speed v1 outside the measurement range by the main scanning mechanism 11 (FIG. 6B). ) And scanning paths (trajectory: (FIG. 6C)) are diagrams showing changes in each of them (in each figure, two types of dotted lines, one-dot chain line, solid line, two-dot chain line, etc. are shown) A mode is shown.). The trajectory of the change in the speed and the trajectory of the path between the end position of the main scan and the next start position have a shape including a substantially triangular shape and a substantially semicircular shape. Therefore, the path is shorter and the time is faster than the extended sub-scanning and sub-scanning outside the measurement range as shown in FIG.

  In some embodiments, for example, in FIGS. 6 (A), (B), and (C), some of the control and control completion timings are mixed, and the speed change is partially flattened. It may be a simple control. In other words, the change in the sub-scanning speed for sub-scanning the distance L in FIG. 6A and the change in the extended sub-scanning speed in FIG. 6B may be independent changes, but they change with each other. Since there is a common time, fast processing is possible (a premise of the present invention). At this time, it is determined which of the extended sub-scanning operation by the main scanning mechanism 11 or the sub-scanning operation by the sub-scanning mechanism 3 requires a large amount of time. (In this case, since it is the best time, there is no time zone that does not change like the one-dot chain line in FIG. 6B or the dotted line). The sub-scanning control sequence may be determined so that the sub-scanning of the distance L is completed within the extended sub-scanning time, and control may be performed based on the sequence information. In the operations (a) and (b), the time required for the extended sub-scanning by the main scanning mechanism 11 is Th, and the sub-scanning by the sub-scanning mechanism 3 can be executed faster than this.

Next, a scanning control procedure by the scanning control unit 25 will be described. The contents may partially overlap with the above. Here, it is assumed that the time required for extended sub-scanning by the main scanning mechanism 11 is Th.
Step 1: Based on the layout information indicating the measurement range and position of the substrate w, the scanning control unit 25 scans the initial approaching distance from the known initial position at a gradually increasing speed until the first main scanning start position. The main scanning mechanism 11 is scanned at a constant speed.

  Step 2: The scanning control unit 25 performs the first main scanning from when the scanning position detection unit 1a detects that the scanning position is at the first main scanning start position until the end position in the measurement range is detected. The main scanning mechanism 11 is executed.

  Step 3: The scanning control unit 25 detects the sub-scanning mechanism 3 by a distance L corresponding to a linear distance from the detection position of the first main scanning to the second main scanning start position by the scanning position detection unit 1a. On the other hand, in the sub scanning direction, the sub scanning is performed within the time Th from the time when the end position is detected.

  Step 4: The scanning control unit 25 starts the second main scanning after the scanning position detection unit 1a detects the end position of the first main scanning in parallel with Step 3 with respect to the main scanning mechanism 11. To the position, out of the measurement range, the speed is decreased from the first main scanning speed vs. until the speed becomes zero, and extended sub-scanning (first extended sub-scanning) is performed in the main scanning direction. The speed is sequentially increased in the direction opposite to the first main scanning direction, and extended sub-scanning (second extended sub-scanning) is performed so that the main scanning speed vs is reached when the time Th elapses or after the elapse of time Th. After the start position of the second main scan is detected, the second main scan is executed.

  Step 5: The scanning control unit 25 alternately performs the main scanning in Step 2 and the sub-scanning and extended sub-scanning in Step 3 and Step 4 for the main scanning mechanism 11 and the sub-scanning mechanism 3, and the former is N. The latter is controlled N-1 times repeatedly, and the scanning for the target measurement range is executed.

[Inspection equipment]
Next, a general printed circuit board inspection apparatus will be described with reference to FIG.

  In FIG. 1, the measurement control means 25 receives the layout indicating the measurement range on the surface of the substrate w from the design information storage means 30 as described above, and causes the sensor 2 to scan the measurement range relative to the height direction. Get measurements including displacement. The sensor 2 is an example of a laser displacement meter by triangulation, and receives a laser light source capable of irradiating a laser while being scanned relative to the substrate w by the moving mechanism unit 5 and reflected light from the substrate w. The measurement range, for example, the displacement of the solder spot printed with solder, that is, the height of the printed solder spot (Z-axis direction) is measured in correspondence with the position of the printed solder spot, and is converted into digital data. The data is converted and stored in the measured value storage means 26.

  The data generation unit 27 receives the measurement values from the storage unit 26 and prints the measurement values based on a number of predetermined image parameter values indicating sensitivity for identifying delicate patterns such as filters, solder bridges, and solder pattern edges. Processing is performed to data for determination representing the amount of solder printed at the solder location. Further, the data generation means 27 includes means for performing calculation for generating the height, area, and / or volume of the printed solder location as the determination data. This determination data is data that is an element representing the amount of solder in the printed solder location, and the type includes the height, area, volume, and defect of each solder location (there is no state in which there is no solder amount to be present). Detection) etc. Note that not all of the above images are required to determine the quality of the substrate w, but at least one of height, area, volume, and defect is indispensable.

  Note that the data generation means 27 is for evaluating the solder state in terms of area or volume, and may be omitted if the evaluation is simply based on the height. However, in this case, reference data to be described later is reference data regarding the height, and the determination unit 28 determines whether the solder state is high or not.

  The determination unit 28 compares the determination data generated from the measurement value with reference data of the same solder location stored in advance in the design information storage unit 30 for each solder location, and performs pass / fail determination.

  The display control unit 29b causes the display unit 29c to display the determination result by the determination unit 28 in association with the layout stored in the design information storage unit 30 via the determined solder location. For example, it is possible to visually specify a portion where a measurement range in the layout is determined to be defective (NG).

  The design information storage means 30 stores, as reference data, design values of the same type as the determination data, that is, design values for the solder portion height, area, volume, and defect. Further, the design information storage means 30 stores the layout (the layout of the substrate w, the dimensions, the solder position, etc.) for each type of the substrate w to be inspected, and displays the type list of the substrate w at the start of the inspection. It is displayed on the means 29c and can be selected by the operating means 29a.

  The user interface 29 includes a display control unit 29b, a display unit 29c, and an operation unit 29a. The main operation is as described above.

  In the above configuration, the measurement control unit 4, the scanning control unit 25a, the data generation unit 27, the determination unit 28, and the display control unit 29b are a memory (ROM) that stores a CPU and a program for causing the CPU to operate the functions described above. ), And a memory (RAM) for storing data in the functional operation process. The design information storage means 30 and the measured value storage means 26 are constituted by a memory and are managed by the CPU.

It is a figure for demonstrating the functional block of embodiment of this invention. It is a modification of FIG. 1, and is an example in the case where the scanning position detector is in the scanning mechanism. It is a modification of FIG. 1, and is an example in the case where the scanning position detector is in the measurement control means. It is a figure for demonstrating scanning and its locus | trajectory. It is a figure for demonstrating the example of the change of the speed of main scanning and subscanning. It is a figure for demonstrating the aspect of the speed and locus | trajectory of extended subscanning and subscanning. It is a figure which shows the example of the subscanning mechanism of a scanning mechanism. It is a figure which shows the example of the main scanning mechanism of a scanning mechanism. It is a figure for demonstrating the scan in a prior art.

Explanation of symbols

1 scanning mechanism, 2 sensor, 3 sub-scanning mechanism, 3a support,
3b X-axis motor, 3c rail, 4 transport device, 5 transport belt,
6 pulley, 7 transport motor, 8 stopper, 9 clamper, 10 abutting plate,
11 main scanning mechanism, 11a support, 11b Y-axis motor, 11c rail,
25 measurement control means, 25a operation control unit, 26 measurement value storage means,
27 data generation means, 28 determination means, 29 user interface,
29a operation means, 29b display control means, 29c display means,
30 Design information storage means, w Substrate (printed board)

Claims (4)

A base (9) for mounting the object to be measured, a sensor (2) for receiving light reflected from the surface by irradiating light to the measurement range of the surface of the object to be measured while performing main scanning, the base and sensor Sa and relatively main scanning mechanism for the main scanning in parallel in the first direction (11), in a second direction perpendicular to the relative said first direction and said platform portion and the sensor outside the measurement range A shape measuring apparatus comprising a sub-scanning mechanism (3) for sub-scanning and changing the next main scanning position , and inspecting the shape of the surface in the measurement range based on the output of the sensor;
Said main and said measurement range the scanning mechanism is driven at intervals of a distance L N times, to the main scanning to the end position from the parallel to the starting position in the first direction, the distance L interval N-1 times Scanning position detecting means for changing the start position of the main scan over the period of time and detecting that the start position and the end position of each main scan have been reached or passed, respectively. In changing the main scanning position from the main scanning end position to the next main scanning start position, the second scanning mechanism detects the second end within a predetermined time Th after detecting the previous end position. In addition to sub-scanning in the direction by a distance L, the main scanning mechanism is sequentially extended from the end position in the same direction as the first direction in which main scanning has been performed at a constant speed up to the previous end position. The first extended sub-scan is performed, and after the speed becomes zero, the speed is sequentially increased in the reverse direction parallel to the first direction, and the predetermined time Th is detected after the previous end position is detected. A scanning control unit that causes the second extended sub-scan to reach the next start position at or after the elapse of time and causes the next main scan in the reverse direction at the constant speed after detecting the next start position. (25a). A shape measuring apparatus comprising:   The scanning control unit changes the main scanning position from the previous main scanning end position parallel to the first direction in the measurement range to the next main scanning start position parallel to the first direction. The distance between the end position and the start position is a straight line between the end position and the start position. The distance between the end position and the start position is a trajectory of scanning by combining the extended subscan by the main scan mechanism and the subscan by the subscan mechanism. 2. The speed and direction of each of the main scanning mechanism and the sub-scanning mechanism are controlled so as to include a substantially triangular shape or a substantially semicircular shape having one side of all or part of the L line. Shape measuring device. A base part (9) for mounting the object to be measured, a sensor (2) for receiving light reflected from the surface by irradiating light to the measurement range of the surface of the object to be measured while performing main scanning, the base part and the sensor A main scanning mechanism (11) that performs the main scanning N times relatively in parallel with the first direction, and the platform and the sensor are relatively perpendicular to the first direction outside the measurement range. A shape measuring device that includes a sub-scanning mechanism (3) that performs sub-scanning N-1 times in the direction of 2 and changes the main scanning position, and measures the shape of the surface in the measurement range based on the output of the sensor ,
It has scanning position detecting means for detecting that each main scanning has reached or passed each of the start position and the end position of the main scanning, and kth (k is from 1 to N−1) in the measurement range. In the case of changing the k-th main scanning position from the main scanning end position to the (k + 1) -th main scanning start position, the end position from the scanning position detecting means during the main scanning is indicated. Upon receiving each position information, the sub-scanning mechanism is caused to perform the k-th sub-scanning by the distance L in the second direction within a predetermined time Th, and the main scanning mechanism is subjected to the end position. Extending from the end position in the same direction as the first direction in which the main scanning has been performed until the speed is sequentially decreased to perform the first extended sub-scan, and after the speed becomes zero, the reverse is parallel to the first direction. Before increasing the speed sequentially in the direction The second extended sub-scan is performed so that the constant speed is reached at the start position when or after the predetermined time Th has elapsed, and the scan position detecting means detects that the main scan position has been changed to the start position. A shape measuring apparatus comprising a scanning control unit (25a) for performing the k + 1th main scanning. A base (9) for mounting the object to be measured, a sensor (2) for receiving light reflected from the surface by irradiating light to the measurement range of the surface of the object to be measured while performing main scanning, the base and the base A main scanning mechanism (11) for causing the sensor to perform main scanning N times in parallel with the first direction, and the stage and the sensor are relatively perpendicular to the first direction outside the measurement range. A sub-scanning mechanism (3) that sub-scans in the direction of 2 and changes the next main scanning position, and a shape measuring method in a shape measuring apparatus comprising:
A first main scanning stage in which the main scanning mechanism performs main scanning at a first speed vs from the start position of the k-th main scan in the measurement range to the end position of the main scan;
Detecting by the scanning position detecting means that the end position of the k-th main scanning has been reached or passed;
The sub-scanning mechanism scans the distance L in the second direction from the k-th end position within a predetermined time Th after detecting the end position ;
In parallel with the sub-scanning step, the main scanning mechanism performs a first extended sub-scan in the first direction by sequentially reducing the speed from the first speed vs to the outside of the measurement range from the k-th end position, After the speed becomes zero, the speed is sequentially increased in a direction opposite to the first direction, and the first speed is detected when the predetermined time Th has elapsed or after the kth end position has been detected. An extended sub-scanning stage for performing a second extended sub-scan to the k + 1 start position at
Detecting by the scanning position detecting means that the start position of the (k + 1) -th main scanning has been reached or passed;
A second main scanning stage in which the main scanning mechanism performs k + 1 main scanning in the measurement range in the reverse direction from the start position of the k + 1 main scanning in the reverse direction;
A shape measuring method, wherein the operations from the first main scanning stage to the second main scanning stage are repeated from k = 1 to k = N−1.